Production of meter-scale high density microwave plasma and elucisation of its physical mechanism
| Project/Area Number |
25286079
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| Research Category |
Grant-in-Aid for Scientific Research (B)
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| Allocation Type | Partial Multi-year Fund |
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| Section | 一般 |
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| Research Field |
Plasma electronics
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| Research Institution | Nagoya University |
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Principal Investigator |
Toyoda Hirotaka 名古屋大学, 工学(系)研究科(研究院), 教授 (70207653)
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| Project Period (FY) |
2013-04-01 – 2016-03-31
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| Project Status |
Completed (Fiscal Year 2015)
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| Budget Amount *help |
¥19,110,000 (Direct Cost: ¥14,700,000、Indirect Cost: ¥4,410,000)
Fiscal Year 2015: ¥1,430,000 (Direct Cost: ¥1,100,000、Indirect Cost: ¥330,000)
Fiscal Year 2014: ¥1,430,000 (Direct Cost: ¥1,100,000、Indirect Cost: ¥330,000)
Fiscal Year 2013: ¥16,250,000 (Direct Cost: ¥12,500,000、Indirect Cost: ¥3,750,000)
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| Keywords | 大気圧プラズマ / マイクロ波 / 長尺プラズマ / 高密度プラズマ / 表面処理 |
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| Outline of Final Research Achievements |
High density atmospheric pressure plasma with long scale is required for high-throughput surface treatment device of glass or polymer films. This study challenged to produce high density microwave plasma in a long scale slot using loop-structured cavity resonator without standing wave. Plasma production mechanism in the slot is clarified through this study and stable, uniform, long scale high density microwave plasma using molecular gas is successfully realized.
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Report
(4 results)
Research Products
(23 results)
