Development of Femtosecond-Laser-Induced Nanostrucuring on Glass Surface

• Project/Area Number: 25289010
• Research Category: Grant-in-Aid for Scientific Research (B)
• Allocation Type: Partial Multi-year Fund
• Section: 一般
• Research Field: Production engineering/Processing studies
• Research Institution: Tohoku University
• Principal Investigator: Kuriyagawa Tsunemoto 東北大学, 医工学研究科, 教授 (90170092)
• Co-Investigator(Kenkyū-buntansha): MIZUTANI Masayoshi 東北大学, 大学院工学研究科, 准教授 (50398640) ; SHIMADA Keita 東北大学, 大学院工学研究科, 助教 (30633383) ; KONNO Toyohiko 東北大学, 金属材料研究所, 教授 (90260447)
• Project Period (FY): 2013-04-01 – 2016-03-31
• Project Status: Completed (Fiscal Year 2015)
• Budget Amount: ¥18,850,000 (Direct Cost: ¥14,500,000、Indirect Cost: ¥4,350,000); Fiscal Year 2015: ¥4,030,000 (Direct Cost: ¥3,100,000、Indirect Cost: ¥930,000); Fiscal Year 2014: ¥3,770,000 (Direct Cost: ¥2,900,000、Indirect Cost: ¥870,000); Fiscal Year 2013: ¥11,050,000 (Direct Cost: ¥8,500,000、Indirect Cost: ¥2,550,000)
• Keywords: 成膜 / レーザ / 機能性インターフェース / 微細構造 / ガラス / ポリシラザン / プラズモン

Outline of Final Research Achievements

Nanostructure processing method with high productivity is desired for many practical uses. As one of high productive process, femtosecond laser process is expected now. By irradiating femtosecond laser to the polished target surface, it is possible to form a nanostructure on laser irradiation entire area. But this method cannot be easily applied to glass substrate because this method needs to generate surface plasmon polariton by laser irradiation. Our research group invented a new method for forming a nano-sized texturing on a glass by using light absorbable metal nanoparticles and glass precursor. We made nano-sized surface structure on the glass sample, and showed the anti-reflection effect.

Research Products

• [Journal Article] ガラス表面への微細構造創成法のメカニズム解明 (2016)
  • Author(s): 柴田章広，小玉脩平，嶋田慶太，水谷正義，厨川常元
  • Journal Title: 精密工学会誌 Volume: 82 Pages: 1-5
  • Peer Reviewed / Open Access
• [Journal Article] フェムト秒レーザによるガラス材料表面へのナノ構造加工 (2015)
  • Author(s): 柴田章広，金子直人，鈴木眞哉，小玉脩平，清水純，嶋田慶太，水谷正義，厨川常元
  • Journal Title: 精密工学会誌, Volume: 81-9 Pages: 862-866
  • Peer Reviewed / Open Access
• [Presentation] Shuhei KODAMA, Akihiro SHIBATA, Shinya SUZUKI, Keita SHIMADA, Masayoshi MIZUTANI, Tsunemoto KURIYAGAWA (2015)
  • Author(s): Shuhei KODAMA, Akihiro SHIBATA, Shinya SUZUKI, Keita SHIMADA, Masayoshi MIZUTANI, Tsunemoto KURIYAGAWA
  • Organizer: 日本機械学会
  • Place of Presentation: Kyoto Research Park, Kyoto
  • Year and Date: 2015-10-19
  • Int'l Joint Research
• [Presentation] 短パルスレーザによる表面微細周期構造創成 (2014)
  • Author(s): 小玉脩平，柴田章広，嶋田慶太，水谷正義，厨川常元
  • Organizer: 2014年度精密工学会東北支部学術講演会
  • Place of Presentation: 弘前大学(青森県弘前市)
  • Year and Date: 2014-11-29
• [Presentation] Femtosecond-laser-induced Nanofabrication on Glass (2014)
  • Author(s): Akihiro Shibata、 Naoto Kaneko、 Shinya Suzuki、 Ken Oguri、 Keita Shimada、 Masayoshi Mizutani、 Tsunemoto Kuriyagawa
  • Organizer: 15th International Conference on Precision Engineering
  • Place of Presentation: Kanazawa, Japan
  • Year and Date: 2014-07-23 – 2014-07-25
• [Presentation] 超短パルスレーザによる表面微細周期構造の創成 (2014)
  • Author(s): 小栗健，柴田章広，小玉脩平，嶋田慶太，水谷正義，厨川常元
  • Organizer: 精密工学会
  • Place of Presentation: 東京大学