Development of a nano mechanical sensor for gas molecule detection at low density by hybrid structure fabrication technique

• Project/Area Number: 25289011
• Research Category: Grant-in-Aid for Scientific Research (B)
• Allocation Type: Partial Multi-year Fund
• Section: 一般
• Research Field: Production engineering/Processing studies
• Research Institution: The University of Tokyo
• Principal Investigator: WARISAWA Shin'ichi 東京大学, 新領域創成科学研究科, 教授 (20262321)
• Co-Investigator(Kenkyū-buntansha): YAMADA Ichiro 東京大学, 新領域創成科学研究科, 特任研究員 (70345081) ; KOMETANI Reo 東京大学, 新領域創成科学研究科, 特任研究員 (90466780)
• Project Period (FY): 2013-04-01 – 2016-03-31
• Project Status: Completed (Fiscal Year 2015)
• Budget Amount: ¥18,720,000 (Direct Cost: ¥14,400,000、Indirect Cost: ¥4,320,000); Fiscal Year 2015: ¥4,420,000 (Direct Cost: ¥3,400,000、Indirect Cost: ¥1,020,000); Fiscal Year 2014: ¥4,420,000 (Direct Cost: ¥3,400,000、Indirect Cost: ¥1,020,000); Fiscal Year 2013: ¥9,880,000 (Direct Cost: ¥7,600,000、Indirect Cost: ¥2,280,000)
• Keywords: メカニカル振動子 / ハイブリッド構造 / ガスセンシング / ガス弁別機能 / 酸化スズ / グラフェン / ブロック共重合体ナノ構造 / ノイズ信号処理 / 連結ナノ機械振動子 / 極低濃度ガスセンシング / 非線形振動特性 / アセトン / 呼気ガス分析

Outline of Final Research Achievements

The research aimed for the realization of ultra-high sensitive nano mechanical sensor able to detect gas molecules at ppm-ppb level in the atmosphere. A coupled nano mechanical resonator with frequency tuning capability by electrostatic force was designed and prototyped and showed the capability of 9.7 ag mass sensing detection. A doubly clamped nano mechanical resonator hybridized with tin oxide thin film and Pt film a catalyst was designed and prototyped and showed the detection sensitivity of 10 ppm as actual measurement and sub ppm order as estimated. A gas sensing device by a commercially available CVD single layer grapheme was designed and prototyped and showed the capability of discrimination of nitrogen and acetone gases by similarity analysis and frequency analysis of noise signal of the resistance change.

Research Products

• [Presentation] 走査電子顕微鏡を利用した微小機械振動子の動特性プロファイリング (2014)
  • Author(s): 米谷 玲皇，中野 和洋，石原 直，割澤 伸一
  • Organizer: 2014年度春季講演会 応用物理学会
  • Place of Presentation: 青山学院大学，神奈川
• [Presentation] Source gas distribution measurement in focused-ion-beam chemical vapor deposition using graphene sensing device (2014)
  • Author(s): Shin'ichi Warisawa, Si Chen, Takahito Ono, Ichiro Yamada, Sunao Ishihara and Reo Kometani
  • Organizer: The 58th International Conference on Electron, Ion, and Photon Beam Technology and Nanofabrication (EIPBN2014)
  • Place of Presentation: Washington DC, USA
• [Presentation] High Q factor graphene mechanical resonator fabrication using the clamp-bending method (2014)
  • Author(s): Reo Kometani, Yuta Oshidari, Sunao Ishihara and Shin'ichi Warisawa
  • Organizer: The 58th International Conference on Electron, Ion, and Photon Beam Technology and Nanofabrication (EIPBN2014)
  • Place of Presentation: Washington DC, USA
• [Presentation] Coupled nanomechanical resonator with frequency tuning capability (2014)
  • Author(s): Shin’ichi Warisawa, Hiroyuki Tsuno, Reo Kometani and Sunao Ishihara
  • Organizer: The 15th International Conference on Precision Engineering
  • Place of Presentation: Kanazawa, Ishikawa, Japan
• [Presentation] Characterizations of the carbon nanomechanical resonator fabricated from SU-8 by FIB/EB dual beam lithography (2013)
  • Author(s): Yuto Miyata, Shin’ichi Warisawa, Sunao Ishihara, Reo Kometani
  • Organizer: 39th International Conference on Micro and Nano Engineering (MNE2013)
  • Place of Presentation: London, UK
• [Presentation] Light-coupled nanomechanical resonator fabrication and its characterization (2013)
  • Author(s): Kazuki Moriya, Shin’ichi Warisawa, Sunao Ishihara, Reo Kometani
  • Organizer: 39th International Conference on Micro and Nano Engineering(MNE2013)
  • Place of Presentation: London, UK
• [Presentation] ynamic characteristics evaluation of nanomechanical resonators by the application of stroboscopic scanning electron microscope (2013)
  • Author(s): Kazuhiro Nakano, Shinichi Warisawa, Sunao Ishihara, Reo Kometani
  • Organizer: 26th International Microprocesses and Nanotechnology Conference (MNC2013)
  • Place of Presentation: Sapporo, Hokkaido, Japan
• [Presentation] 走査電子顕微鏡を利用したナノメカニカル振動子の動特性評価 (2013)
  • Author(s): 中野 和洋，割澤 伸一，石原 直，米谷 玲皇
  • Organizer: 2013年度精密工学会秋季大会学術講演会
  • Place of Presentation: 関西大学，大阪
• [Presentation] FIB/EB 複合リソグラフィーにより作製したカーボンナノ振動子の特性評価 (2013)
  • Author(s): 宮田 雄斗，割澤 伸一，石原 直，米谷 玲皇
  • Organizer: 2013年度精密工学会秋季大会学術講演会
  • Place of Presentation: 関西大学，大阪
• [Presentation] 光結合微小機械振動子の作製とその特性評価に関する研究 (2013)
  • Author(s): 守屋 和樹，割澤 伸一，石原 直，米谷 玲皇
  • Organizer: 2013年度精密工学会秋季大会学術講演会
  • Place of Presentation: 関西大学，大阪
• [Presentation] グラフェンを用いた呼気分析用マイクロガスセンサの作製と評価 (2013)
  • Author(s): 安見 卓志, 松木 孝憲, 陳 思, 山田一郎, 割澤 伸一
  • Organizer: 日本機械学会2013年度年次大会,
  • Place of Presentation: 岡山大学，岡山