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Gecko-inspired Electrostatic Chuck by Assembling Electrostatic-Induced Fibers for Developing an Innovative Manipulation Technology

Research Project

Project/Area Number 25289056
Research Category

Grant-in-Aid for Scientific Research (B)

Allocation TypePartial Multi-year Fund
Section一般
Research Field Intelligent mechanics/Mechanical systems
Research InstitutionTokyo Institute of Technology

Principal Investigator

SAITO SHIGEKI  東京工業大学, 環境・社会理工学院, 准教授 (30313349)

Co-Investigator(Kenkyū-buntansha) 鞠谷 雄士  東京工業大学, 理工学研究科, 教授 (70153046)
高橋 邦夫  東京工業大学, 理工学研究科, 教授 (70226827)
Project Period (FY) 2013-04-01 – 2017-03-31
Project Status Completed (Fiscal Year 2016)
Budget Amount *help
¥18,590,000 (Direct Cost: ¥14,300,000、Indirect Cost: ¥4,290,000)
Fiscal Year 2015: ¥5,330,000 (Direct Cost: ¥4,100,000、Indirect Cost: ¥1,230,000)
Fiscal Year 2014: ¥5,330,000 (Direct Cost: ¥4,100,000、Indirect Cost: ¥1,230,000)
Fiscal Year 2013: ¥7,930,000 (Direct Cost: ¥6,100,000、Indirect Cost: ¥1,830,000)
Keywordsマイクロ・ナノメカトロニクス / 生産技術 / 生体模倣 / マイクロロボティクス / 静電チャック / 静電力 / 双極型 / リソグラフィー / 3Dプリンター / 高分子繊維 / 導電性芯 / 3次元プリンター
Outline of Final Research Achievements

The purpose of this research is to develop a "gecko-inspired electrostatic chuck" that can attach, hold, and detach objects by electrostatic force, which is technologically synthesized by micro-structures inspired by geckos' fingertips. The main focus is on the development of device and the establishment of control methodology that can enables reliable and precise manipulation of target objects that are hard to be manipulated in the conventional way. The pillars like gecko's micro-level structure, which is called "seta", are fabricated in good alignment as layered modules where the electrostatic force are generated on the tips of pillars. The layered modules are stacked precisely in order to secure large effective area for electrostatic force. The goal is to establish the new technology that can enable strong adhesion and easy detachment simultaneously due to the effective electrostatic force using the bio-inspired structure that can follow the profile of the object surface.

Report

(5 results)
  • 2016 Annual Research Report   Final Research Report ( PDF )
  • 2015 Annual Research Report
  • 2014 Annual Research Report
  • 2013 Annual Research Report
  • Research Products

    (10 results)

All 2017 2016 2015 2014 2013

All Journal Article (2 results) (of which Peer Reviewed: 2 results,  Acknowledgement Compliant: 1 results) Presentation (8 results)

  • [Journal Article] Compliant bipolar electrostatic gripper with micropillar electrodes array for manipulation at macroscale2016

    • Author(s)
      Radon Dhelika, Pasomphone Hemthavy, Kunio Takahashi and Shigeki Saito
    • Journal Title

      Smart Materials and Structures

      Volume: 25 Issue: 5 Pages: 055037-055037

    • DOI

      10.1088/0964-1726/25/5/055037

    • Related Report
      2015 Annual Research Report
    • Peer Reviewed / Acknowledgement Compliant
  • [Journal Article] Electrostatic chuck consisting of polymeric electrostatic inductive fibers for handling of objects with rough surfaces2013

    • Author(s)
      Radon Dhelika, Kenji Sawai, Kunio Takahashi, Wataru Takarada, Takeshi Kikutani, and Shigeki Saito
    • Journal Title

      Smart Materials and Structures

      Volume: 22(9) Issue: 9 Pages: 095010-095010

    • DOI

      10.1088/0964-1726/22/9/095010

    • Related Report
      2013 Annual Research Report
    • Peer Reviewed
  • [Presentation] 微細毛構造を持つ双極型静電チャックの吸着部平滑化による把持性能向上2017

    • Author(s)
      河野 健人, ヘムタビー パソムポーン,高橋 邦夫, 齊藤 滋規
    • Organizer
      2017年度精密工学会春季大会学術講演会
    • Place of Presentation
      慶應義塾大学(矢上キャンパス)
    • Year and Date
      2017-03-13
    • Related Report
      2016 Annual Research Report
  • [Presentation] リソグラフィ技術を用いた梁集合体を有する双極型静電チャックモジュールの開発2017

    • Author(s)
      崔 勝萬,河野 健人,ヘムタビー パゾムポーン,高橋 邦夫,齋藤 滋規
    • Organizer
      2017年度精密工学会春季大会学術講演会
    • Place of Presentation
      慶應義塾大学(矢上キャンパス)
    • Year and Date
      2017-03-13
    • Related Report
      2016 Annual Research Report
  • [Presentation] フォトリソグラフィ技術を用いた微細毛構造による双極型静電チャックの開発2016

    • Author(s)
      田尻 陽亮,ヘムタビー パゾムポーン,高橋 邦夫,齋藤 滋規
    • Organizer
      2016 年度精密工学会春季大会
    • Place of Presentation
      東京理科大学(千葉県野田市)
    • Year and Date
      2016-03-15
    • Related Report
      2015 Annual Research Report
  • [Presentation] 3D プリンターを用いた微細毛構造を持つ双極型静電チャックモジュールの開発2016

    • Author(s)
      河野 健人, Hemthavy Pasomphone, 高橋 邦夫, 齊藤 滋規
    • Organizer
      2016 年度精密工学会春季大会
    • Place of Presentation
      東京理科大学(千葉県野田市)
    • Year and Date
      2016-03-15
    • Related Report
      2015 Annual Research Report
  • [Presentation] フォトリソグラフィを用いた曲面対応静電チャックの開発2015

    • Author(s)
      猿渡達彦,Dhelika Radon,Hemthavy Pasomphone,高橋邦夫, 田口良広,齋藤滋規
    • Organizer
      2015年度精密工学会春季大会
    • Place of Presentation
      東洋大学(東京都文京区白山)
    • Year and Date
      2015-03-17 – 2015-03-19
    • Related Report
      2014 Annual Research Report
  • [Presentation] Compliant electrostatic chuck with micropillar electrodes for handling of rough surfaces2015

    • Author(s)
      Dhelika Radon,Hemthavy Pasomphone,高橋邦夫,齋藤滋規
    • Organizer
      2015年度精密工学会春季大会
    • Place of Presentation
      東洋大学(東京都文京区白山)
    • Year and Date
      2015-03-17 – 2015-03-19
    • Related Report
      2014 Annual Research Report
  • [Presentation] 双極型静電誘導ファイバーの配列に際して電極形状が静電力に与える効果2014

    • Author(s)
      川村一輝,ヘムタビーパソムポーン,宝田亘,鞠谷雄士,高橋邦夫,齋藤滋規
    • Organizer
      精密工学会2014春季大会
    • Place of Presentation
      東京大学
    • Related Report
      2013 Annual Research Report
  • [Presentation] Applicable Range in Object Size for Grasp-less Manipulation using Capillary and Gravitational Forces2013

    • Author(s)
      Kazuteru Kawamura, Kunio Takahashi, Pasomphone Hemthavy, and Shigeki Saito
    • Organizer
      ASME 2013 International Mechanical Engineering Congress and Exposition
    • Place of Presentation
      Manchester Grand Hyatt San Diego
    • Related Report
      2013 Annual Research Report

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Published: 2013-05-21   Modified: 2019-07-29  

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