Selfalignment local anodization technique for fabrication of simultaneous multicomponent measurement one-chip gas sensors

• Project/Area Number: 25289080
• Research Category: Grant-in-Aid for Scientific Research (B)
• Allocation Type: Partial Multi-year Fund
• Section: 一般
• Research Field: Electronic materials/Electric materials
• Research Institution: Tokyo University of Technology (2014-2015); Tohoku University (2013)
• Principal Investigator: KIMURA Yasuo 東京工科大学, 工学部, 教授 (40312673)
• Co-Investigator(Kenkyū-buntansha): Ma Tang 東北大学, 電気通信研究所, 助教 (10734543) ; NIWANO Michio 東北大学, 電気通信研究所, 教授 (20134075) ; HIRANO Ayumi 東北大学, 医工学研究科, 准教授 (80339241)
• Project Period (FY): 2013-04-01 – 2016-03-31
• Project Status: Completed (Fiscal Year 2015)
• Budget Amount: ¥17,940,000 (Direct Cost: ¥13,800,000、Indirect Cost: ¥4,140,000); Fiscal Year 2015: ¥3,380,000 (Direct Cost: ¥2,600,000、Indirect Cost: ¥780,000); Fiscal Year 2014: ¥3,380,000 (Direct Cost: ¥2,600,000、Indirect Cost: ¥780,000); Fiscal Year 2013: ¥11,180,000 (Direct Cost: ¥8,600,000、Indirect Cost: ¥2,580,000)
• Keywords: ガスセンサ / 陽極酸化 / 酸化チタン / ナノチューブ

Outline of Final Research Achievements

TiO2 nanotube micro gas sensors were fabricated using the local anodization technique that is a hybrid process between photolithography and anodization technique. Catalytic metal nanoparticles such as Pt and Pd were electrochemically deposited on TiO2 nanotube surface homogeneously. Pt nanoparticles improved the sensitivity about 300 times. On the other hand, the response characteristics to hydrogen and carbon monoxide strongly depended on deposited catalytic metal nanoparticles. This result indicates that micro gas sensors with different response characteristics can be integrated on a chip and multicomponent gases can be simultaneously monitored by analyzing response characteristics.

Research Products

• [Journal Article] 局所陽極酸化ナノファブリケーション技術 (2015)
  • Author(s): 木村 康男、平野 愛弓、 庭野 道夫
  • Journal Title: 電子情報通信学会技術報告書 Volume: 115 Pages: 71-74
• [Journal Article] Characterization of citrates on gold and silver nanoparticles (2015)
  • Author(s): Priastuti Wulandari, Takeshi Nagahiro, Nobuko Fukada, Yasuo Kimura, Michio Niwano
  • Journal Title: Journal of Colloid and Interface Science Volume: 438 Pages: 244-248
  • Peer Reviewed
• [Journal Article] Fabrication of polymer/TiO2-nanotube-based hybrid structures using a solvent-vapor-assisted coating method (2014)
  • Author(s): Teng Ma, Ryota Kojima, Daisuke Tadaki, Jinyu Zhang, Yasuo Kimura and Michio Niwano
  • Journal Title: Materials Research Express 1 Volume: 1 Issue: 4 Pages: 045048-045048
  • DOI: 10.1088/2053-1591/1/4/045048
  • Peer Reviewed
• [Journal Article] 金属微粒子担持 酸化チタンナノチューブマイクロガスセンサ (2014)
  • Author(s): 木村 康男、戸邊 翼、木村 昭太、小島 領太、平野 愛弓、庭野 道夫
  • Journal Title: 電子情報通信学会技術研究報告 Volume: 114 Pages: 79-82
• [Presentation] 局所陽極酸化ナノファブリケーション技術 (2015)
  • Author(s): 木村 康男、平野 愛弓、 庭野 道夫
  • Organizer: 電子情報通信学会電子デバイス研究会
  • Place of Presentation: 東北大学電気通信研究所（仙台市青葉区）
  • Year and Date: 2015-04-16
• [Presentation] ナノデバイス構築のための 局所陽極酸化セルフアラインメント技術 (2014)
  • Author(s): 木村 康男、平野 愛弓、庭野 道夫
  • Organizer: 第75回応用物理学会秋季学術講演会
  • Place of Presentation: 北海道大学(北海道札幌市)
  • Year and Date: 2014-09-17 – 2014-09-20
  • Invited
• [Presentation] 金属微粒子担持 酸化チタンナノチューブマイクロガスセンサ (2014)
  • Author(s): 木村 康男、戸邊 翼、木村 昭太、小島 領太、平野 愛弓、庭野 道夫
  • Organizer: 電子情報通信学会CPM研究会
  • Place of Presentation: 山形大学(山形県米沢市)
  • Year and Date: 2014-09-04 – 2014-09-05
• [Presentation] Anodization process for fabrication of nanostructured devices (2014)
  • Author(s): Yasuo Kimura
  • Organizer: International Workshop on "Energy Devices and Nanotechnology"
  • Place of Presentation: The 100th Anniversary Hall, Yamagata University, Yonezawa, Japan
  • Invited
• [Presentation] 陽極酸化TiO2ナノチューブマイクロガスセンサの作製 (2014)
  • Author(s): 木村康男、戸邊 翼、小島領太、庭野道夫
  • Organizer: 第56回化学センサ研究発表会
  • Place of Presentation: 関西大学千里山キャンパス
• [Presentation] Deposition of Homogeneous Gold Nanoparticles on rough TiO2 Surface through the Electrochemical Method (2013)
  • Author(s): Yasuo Kimura, El Fassy Fihry Mehdi, Taka-aki Miya, Tsubasa Tobe, Ryota Kojima, and Michio Niwano
  • Organizer: 12th International Conference on Atomically Controlled Surfaces, Interfaces and Nanostructures (ACSIN-12)
  • Place of Presentation: Tsukuba International Congress Center
• [Presentation] Effect of hydrogen treatment on characteristics of micro hydrogen gas sensors using titanium oxide nanotube (2013)
  • Author(s): Tsubasa Tobe, Ryota Kojima,Yasuo Kimura, and Michio Niwano
  • Organizer: 12th International Conference on Atomically Controlled Surfaces, Interfaces and Nanostructures (ACSIN-12)
  • Place of Presentation: Tsukuba International Congress Center
• [Presentation] Influence of the electrolyte composition on formation process of anodic titanium oxide nanotube films (2013)
  • Author(s): Ryota Kojima, Yasuo Kimura, and Michio Niwano
  • Organizer: 12th International Conference on Atomically Controlled Surfaces, Interfaces and Nanostructures (ACSIN-12)
  • Place of Presentation: Tsukuba International Congress Center
• [Presentation] Electrochemical deposition of gold nanoparticles on rough TiO2 surfaces (2013)
  • Author(s): Yasuo Kimura, El Fassy Fihry Mehdi, Taka-aki Miya, Tsubasa Tobe, Ryota Kojima, and Michio Niwano
  • Organizer: 224th ECS Meeting
  • Place of Presentation: San Francisco, CA, USA
• [Presentation] Effect of Hydrogen Treatment On Characteristics of Titanium Oxide Nanotube Micro Hydrogen Gas Sensors (2013)
  • Author(s): Tsubasa Tobe, Ryota Kojima,Yasuo Kimura, and Michio Niwano
  • Organizer: 224th ECS Meeting
  • Place of Presentation: San Francisco, CA, USA
• [Presentation] Influence of the electrolyte composition on formation process and morphology of anodic titanium oxide nanotubes (2013)
  • Author(s): Ryota Kojima, Yasuo Kimura, and Michio Niwano
  • Organizer: 224th ECS Meeting
  • Place of Presentation: San Francisco, CA, USA
• [Presentation] Fabrication of a micro gas sensor using an anodic titanium oxide nanotube film (2013)
  • Author(s): Yasuo Kimura
  • Organizer: Frontier2013
  • Place of Presentation: Sendai, Japan
• [Presentation] Fabrication of Titanium Oxide Nanotube Micro Gas Sensors through Local Anodization of Titanium Microwires (2013)
  • Author(s): Yasuo Kimura, Shota Kimura, Ryota Kojima, and Michio Niwano
  • Organizer: The 14th International Conference on the Formation of Semiconductor Interfaces
  • Place of Presentation: Gyeongju, Korea
• [Presentation] Homogeneous Deposition of Gold Nanoparticles on Rough Titanium Oxide Surfaces by Electrochemical Process (2013)
  • Author(s): Yasuo Kimura, El Fassy Fihry Mehdi, Taka-aki Miya, Tsubasa Tobe, Ryota Kojima, and Michio Niwano
  • Organizer: 2013 International Conference on Solid State Devices and Materials (SSDM 2013)
  • Place of Presentation: Hilton Fukuoka Sea Hawk, Fukuka, Japan
• [Presentation] 陽極酸化TiO2ナノチューブ膜を用いた前面照射型色素増感太陽電池の特性に与えるTiCl4処理の効果 (2013)
  • Author(s): 小島領太、木村康男、庭野道夫
  • Organizer: 電子情報通信学会電子デバイス研究会
  • Place of Presentation: 東北大学
• [Presentation] 電気化学的手法を用いた金属微粒子の堆積 (2013)
  • Author(s): 木村康男、エルファシメディ、宮孝明、庭野道夫
  • Organizer: 電子情報通信学会電子デバイス研究会
  • Place of Presentation: 東北大学
• [Presentation] 陽極酸化による酸化チタンナノチューブ薄膜の形成とその光触媒分解反応の赤外分光観察 (2013)
  • Author(s): 木村康男、宮 孝明、小島 領太、庭野 道夫
  • Organizer: 第32 回光がかかわる触媒化学シンポジウム
  • Place of Presentation: 東京工業大学蔵前会館くらまえホール
• [Presentation] ワイドニング処理による単層TiO2ナノチューブ膜の形成及び色素増感太陽電池の作製 (2013)
  • Author(s): 小島領太、戸邊翼，木村康男，庭野道夫
  • Organizer: 第74回応用物理学会秋季学術講演会
  • Place of Presentation: 同志社大学
• [Presentation] 水素処理による酸化チタンナノチューブ微小水素ガスセンサの特性への影響 (2013)
  • Author(s): 戸邊翼、小島領太、木村康男、庭野道夫
  • Organizer: 第33回表面科学会学術講演会
  • Place of Presentation: つくば国際会議場
• [Presentation] 陽極酸化によるTiO2ナノチューブ膜の 形成とその微小ガスセンサへの応用 (2013)
  • Author(s): 木村康男
  • Organizer: 第10回Micro-Pattern Gas Detector研究会
  • Place of Presentation: 京都大学
• [Remarks] ナノ材料集積化技術による高性能ニオイセンサをスマートフォンに搭載して、病気の早期発見を実現したい！
  • URL: http://www.teu.ac.jp/topics/2015.html?id=25