• Search Research Projects
  • Search Researchers
  • How to Use
  1. Back to previous page

Pioneering development of fundamental technologies for fabrication of wide bandgap III-group oxide/nitride heterostructures

Research Project

Project/Area Number 25289093
Research Category

Grant-in-Aid for Scientific Research (B)

Allocation TypePartial Multi-year Fund
Section一般
Research Field Electronic materials/Electric materials
Research InstitutionNational Institute of Information and Communications Technology

Principal Investigator

Higashiwaki Masataka  国立研究開発法人情報通信研究機構, 未来ICT研究所 グリーンICTデバイス先端開発センター, センター長 (70358927)

Co-Investigator(Kenkyū-buntansha) 尾沼 猛儀  工学院大学, 先進工学部, 准教授 (10375420)
本田 徹  工学院大学, 工学部, 教授 (20251671)
Co-Investigator(Renkei-kenkyūsha) YAMAGUCHI Tomohiro  工学院大学, 先進工学部, 准教授 (50454517)
Project Period (FY) 2013-04-01 – 2017-03-31
Project Status Completed (Fiscal Year 2016)
Budget Amount *help
¥17,550,000 (Direct Cost: ¥13,500,000、Indirect Cost: ¥4,050,000)
Fiscal Year 2015: ¥5,070,000 (Direct Cost: ¥3,900,000、Indirect Cost: ¥1,170,000)
Fiscal Year 2014: ¥5,070,000 (Direct Cost: ¥3,900,000、Indirect Cost: ¥1,170,000)
Fiscal Year 2013: ¥7,410,000 (Direct Cost: ¥5,700,000、Indirect Cost: ¥1,710,000)
Keywords分子線エピタキシー / 酸化物 / 窒化物 / 半導体物性 / 先端機能デバイス / MBE
Outline of Final Research Achievements

We challenged to realize two types of novel heterostructures composed of III-oxide and nitride semiconductors. Type-I had structures with channel and barrier layers made of a nitride (GaN) and an oxide (Al2O3) layers, respectively. On the other hand, Type-II structures had an oxide channel (Ga2O3) and a nitride barrier (AlN) layers. As a result of optimization regarding growth sequences and conditions by testing out various substrate treatment processes prior to epitaxial growth and growth conditions for buffer layers, we succeeded in establishing basic molecular beam epitaxy growth technology for both types of structures. Furthermore, from optical characterization, we obtained a lot of new knowledge about undetermined fundamental physical properties of Ga2O3 including its bandgap energy.

Report

(5 results)
  • 2016 Annual Research Report   Final Research Report ( PDF )
  • 2015 Annual Research Report
  • 2014 Annual Research Report
  • 2013 Annual Research Report
  • Research Products

    (42 results)

All 2017 2016 2015 2014 2013 Other

All Int'l Joint Research (5 results) Journal Article (9 results) (of which Int'l Joint Research: 2 results,  Peer Reviewed: 9 results,  Open Access: 1 results,  Acknowledgement Compliant: 5 results) Presentation (24 results) (of which Int'l Joint Research: 7 results,  Invited: 6 results) Book (1 results) Remarks (3 results)

  • [Int'l Joint Research] University of Nebraska, Lincoln(米国)

    • Related Report
      2016 Annual Research Report
  • [Int'l Joint Research] Linkoping University(スウェーデン)

    • Related Report
      2016 Annual Research Report
  • [Int'l Joint Research] University of Nebraska, Lincoln/University of California, Santa Barbara/Univeristy of Notre Dame(米国)

    • Related Report
      2015 Annual Research Report
  • [Int'l Joint Research] University of Cagliari/University of Parma(イタリア)

    • Related Report
      2015 Annual Research Report
  • [Int'l Joint Research] Linkoping University(スウェーデン)

    • Related Report
      2015 Annual Research Report
  • [Journal Article] Spectroscopic ellipsometry studies on β-Ga2O3 films and single crystal2016

    • Author(s)
      T. Onuma, S. Saito, K. Sasaki, T. Masui, T. Yamaguchi, T. Honda, A. Kuramata, and M. Higashiwaki
    • Journal Title

      Japanese Journal of Applied Physics

      Volume: 55 Issue: 12 Pages: 1202B2-1202B2

    • DOI

      10.7567/jjap.55.1202b2

    • NAID

      210000147262

    • Related Report
      2016 Annual Research Report
    • Peer Reviewed / Open Access / Acknowledgement Compliant
  • [Journal Article] Temperature-dependent exciton resonance energies and their correlation with IR-active optical phonon modes in beta-Ga2O3 single crystals2016

    • Author(s)
      T.Onuma, S.Saito, K.Sasaki, K.Goto, T.Masui, T.Yamaguchi, T.Honda, A.Kuramata, and M.Higashiwaki
    • Journal Title

      Applied Physics Letters

      Volume: 108 Issue: 10 Pages: 1019041-5

    • DOI

      10.1063/1.4943175

    • Related Report
      2015 Annual Research Report
    • Peer Reviewed / Acknowledgement Compliant
  • [Journal Article] Anisotropy, phonon modes, and free charge carrier parameters in monoclinic beta-gallium oxide single crystals2016

    • Author(s)
      M. Schubert, R. Korlacki, S. Knight, T. Hofmann, S. Schoche, V. Darakc hieva, E. Janzen, B. Monemar, D. Gogova, Q.T. Thieu, R. Togashi, H. Murakami, Y. Kumagai, K. Goto, A. Kuramata, S. Yamakoshi, and M. Higashiwaki
    • Journal Title

      Physical Review B

      Volume: 93 Issue: 12

    • DOI

      10.1103/physrevb.93.125209

    • Related Report
      2015 Annual Research Report
    • Peer Reviewed / Int'l Joint Research
  • [Journal Article] Theoretical and experimental investigation of optical absorption anisotropy in beta-Ga2O32016

    • Author(s)
      F. Ricci, F. Boschi, A. Barldi, A. Filippetti, M. Higashiwaki, A. Kuramata, V. Fiorentini, and R. Fornari
    • Journal Title

      Journal of Physics: Condensed Matter

      Volume: 28 Issue: 22 Pages: 224005-224005

    • DOI

      10.1088/0953-8984/28/22/224005

    • Related Report
      2015 Annual Research Report
    • Peer Reviewed / Int'l Joint Research
  • [Journal Article] Valence band ordering in beta-Ga2O3 studied by polarized transmittance and reflectance spectroscopy2015

    • Author(s)
      T.Onuma, S.Saito, K.Sasaki, T.Masui, T.Yamaguchi, T.Honda, and M.Higashiwaki
    • Journal Title

      Japanese Journal of Applied Physics

      Volume: 54 Issue: 11 Pages: 1126011-5

    • DOI

      10.7567/jjap.54.112601

    • Related Report
      2015 Annual Research Report
    • Peer Reviewed / Acknowledgement Compliant
  • [Journal Article] Impacts of AlOx formation on emission properties of AlN/GaN heterostructures2015

    • Author(s)
      Takeyoshi Onuma, Yohei Sugiura, Tomohiro Yamaguchi, Tohru Honda, and Masataka Higashiwaki
    • Journal Title

      Applied Physics Express

      Volume: 8 Issue: 5 Pages: 0524011-3

    • DOI

      10.7567/apex.8.052401

    • Related Report
      2014 Annual Research Report
    • Peer Reviewed / Acknowledgement Compliant
  • [Journal Article] Growth of crystallized AlOx on AlN/GaN heterostructures by in-situ RF-MBE2014

    • Author(s)
      Yohei Sugiura, Tohru Honda, Masataka Higashiwaki
    • Journal Title

      Journal of Crystal Growth

      Volume: 405 Pages: 64-67

    • DOI

      10.1016/j.jcrysgro.2014.07.055

    • Related Report
      2014 Annual Research Report
    • Peer Reviewed / Acknowledgement Compliant
  • [Journal Article] Polarized Raman spectra in β-Ga2O3 single crystals2014

    • Author(s)
      T. Onuma, S. Fujioka, T. Yamaguchi, Y. Itoh, M. Higashiwaki, K. Sasaki, T. Masui, and T. Honda
    • Journal Title

      Journal of Crystal Growth

      Volume: in press Pages: 330-333

    • DOI

      10.1016/j.jcrysgro.2013.12.061

    • Related Report
      2013 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Correlation between blue luminescence intensity and resistivity in β-Ga2O3 single crystals2013

    • Author(s)
      T. Onuma, S. Fujioka, T. Yamaguchi, M. Higashiwaki, K. Sasaki, T. Masui, and T. Honda
    • Journal Title

      Applied Physcs Letters

      Volume: 103 Issue: 4 Pages: 0419101-3

    • DOI

      10.1063/1.4816759

    • Related Report
      2013 Annual Research Report
    • Peer Reviewed
  • [Presentation] Optical properties of Ga2O3 films and crystals2017

    • Author(s)
      T. Onuma, S. Saito, K. Sasaki, K. Goto, T. Masui, T. Yamaguchi, T. Honda, A. Kuramata, M. Higashiwaki
    • Organizer
      Compound Semiconductor Week 2017 (CSW 2017)
    • Place of Presentation
      dbb forum berlin, Berlin, Germany
    • Year and Date
      2017-05-14
    • Related Report
      2016 Annual Research Report
    • Int'l Joint Research / Invited
  • [Presentation] 単斜晶酸化ガリウム結晶における光学遷移過程2017

    • Author(s)
      尾沼 猛儀、齋藤 伸吾、佐々木 公平、後藤 健、増井 建和、山口 智広、本田 徹、倉又 朗人、東脇 正高
    • Organizer
      第64回応用物理学会春季学術講演会 シンポジウム「金属酸化物の結晶物性に迫る」
    • Place of Presentation
      神奈川県横浜市 横浜国際平和会議場(パシフィコ横浜)
    • Year and Date
      2017-03-14
    • Related Report
      2016 Annual Research Report
    • Invited
  • [Presentation] Effect of nitridation on properties of AlN/β-Ga2O3 composite structures2017

    • Author(s)
      L. Ravikiran、中田 義昭、倉又 朗人、山腰 茂伸、東脇 正高
    • Organizer
      第64回応用物理学会春季学術講演会
    • Place of Presentation
      神奈川県横浜市 横浜国際平和会議場(パシフィコ横浜)
    • Year and Date
      2017-03-14
    • Related Report
      2016 Annual Research Report
  • [Presentation] β-Ga2O3結晶における光学的異方性の解析2017

    • Author(s)
      尾沼 猛儀、山口 智広、本田 徹、佐々木 公平、後藤 健、増井 建和、倉又 朗人、齋藤 伸吾、東脇 正高
    • Organizer
      日本学術振興会161委員会 第98回研究会「ワイドギャップ酸化物半導体β-Ga2O3結晶成長、結晶評価、デバイス応用」
    • Place of Presentation
      滋賀県長浜市 長浜ロイヤルホテル
    • Year and Date
      2017-01-12
    • Related Report
      2016 Annual Research Report
    • Invited
  • [Presentation] β-Ga2O3薄膜と単結晶の光学定数の比較2016

    • Author(s)
      尾沼 猛儀、齋藤 伸吾、佐々木 公平、増井 建和、山口 智広、本田 徹、倉又 朗人、東脇 正高
    • Organizer
      第77回応用物理学会秋季学術講演会
    • Place of Presentation
      新潟県新潟市 朱鷺メッセ
    • Year and Date
      2016-09-13
    • Related Report
      2016 Annual Research Report
  • [Presentation] Observation of exciton-LO-phonon interaction in β-Ga2O3 single crystals2016

    • Author(s)
      T. Onuma, S. Saito, K. Sasaki, K. Goto, T. Masui, T. Yamaguchi, T. Honda, A. Kuramata, M. Higashiwaki
    • Organizer
      German-Japanese Gallium Oxide Technology Meeting 2016
    • Place of Presentation
      Leibniz Institute for Crystal Growth, Berlin, Germany
    • Year and Date
      2016-09-07
    • Related Report
      2016 Annual Research Report
    • Int'l Joint Research / Invited
  • [Presentation] Anisotropic optical constants in β-Ga2O3 single crystal2016

    • Author(s)
      T. Onuma, S. Saito, K. Sasaki, T. Masui, T. Yamaguchi, T. Honda, A. Kuramata, M. Higashiwaki
    • Organizer
      58th Electronic Materials Conference (EMC 2016)
    • Place of Presentation
      University of Delaware, Newark, Delaware, USA
    • Year and Date
      2016-06-22
    • Related Report
      2016 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Beta-Ga2O3結晶における励起子-LOフォノン相互作用2016

    • Author(s)
      尾沼猛儀、齋藤伸吾、佐々木公平、後藤健、増井建和、山口智広、本田徹、倉又朗人、東脇正高
    • Organizer
      第63回応用物理学会春季学術講演会
    • Place of Presentation
      東京都目黒区東京工業大学大岡山キャンパス
    • Year and Date
      2016-03-19
    • Related Report
      2015 Annual Research Report
  • [Presentation] Valence band structure of monoclinic gallium oxide studied by polarized optical measurements2015

    • Author(s)
      T. Onuma, S. Saito, K. Sasaki, K. Goto, T. Masui, T. Yamaguchi, T. Honda, and M. Higashiwaki
    • Organizer
      The Collaborative Conference on Crystal Growth 2015 (3CG 2015)
    • Place of Presentation
      Eaton Hotel, Kowloon, Hong Kong
    • Year and Date
      2015-12-14
    • Related Report
      2015 Annual Research Report
    • Int'l Joint Research / Invited
  • [Presentation] Optical anisotropy in (010) plane of beta-Ga2O3 single crystals2015

    • Author(s)
      T. Onuma, S. Saito, K. Sasaki, K. Goto, T. Masui, T. Yamaguchi, T. Honda, and M. Higashiwaki
    • Organizer
      1st International Workshop on Gallium Oxide and Related Materials (IWGO-1)
    • Place of Presentation
      京都府京都市京都大学桂キャンパス
    • Year and Date
      2015-11-03
    • Related Report
      2015 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Beta-Ga2O3結晶の(010)面における光学的異方性2015

    • Author(s)
      尾沼猛儀、齋藤伸吾、佐々木公平、増井建和、山口智広、本田徹、東脇正高
    • Organizer
      第76回応用物理学会秋季学術講演会
    • Place of Presentation
      愛知県名古屋市名古屋国際会議場
    • Year and Date
      2015-09-13
    • Related Report
      2015 Annual Research Report
  • [Presentation] "Determination of Direct and Indirect Bandgap-energies of beta-Ga2O3 by polarized transmittance and reflectance spectroscopy2015

    • Author(s)
      T. Onuma, S. Saito, K. Sasaki, T. Masui, T. Yamaguchi, T. Honda, and M. Higashiwaki
    • Organizer
      57th Electronic Materials Conference (EMC-57)
    • Place of Presentation
      The Ohio State University, Columbus, Ohio, USA
    • Year and Date
      2015-06-24
    • Related Report
      2015 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Optical anisotropy in beta-Ga2O3 crystals grown by melt-growth methods2015

    • Author(s)
      T. Onuma, S. Saito, K. Sasaki, T. Masui, T. Yamaguchi, T. Honda, and M. Higashiwaki
    • Organizer
      International Conference on Light-Emitting Devices and Thier Industrial Applications ’15 (LEDIA ’15)
    • Place of Presentation
      神奈川県横浜市横浜国際平和会議場(パシフィコ横浜)
    • Year and Date
      2015-04-22
    • Related Report
      2015 Annual Research Report
    • Int'l Joint Research
  • [Presentation] (-201) Ga2O3基板上へのAlN薄膜のRF-MBE成長2015

    • Author(s)
      東脇 正高、中田 義昭、倉又 朗人、山腰 茂伸
    • Organizer
      第62回応用物理学会春季学術講演会
    • Place of Presentation
      神奈川県平塚市東海大学湘南キャンパス
    • Year and Date
      2015-03-11 – 2015-03-14
    • Related Report
      2014 Annual Research Report
  • [Presentation] β-Ga2O3結晶の透過と反射スペクトルの偏光依存性2015

    • Author(s)
      尾沼 猛儀、齋藤 伸吾、佐々木 公平、増井 建和、山口 智広、本田 徹、東脇 正高
    • Organizer
      第62回応用物理学会春季学術講演会
    • Place of Presentation
      神奈川県平塚市東海大学湘南キャンパス
    • Year and Date
      2015-03-11 – 2015-03-14
    • Related Report
      2014 Annual Research Report
  • [Presentation] Ga2O3基板の光学的特性評価2014

    • Author(s)
      尾沼 猛儀、山口 智広、伊藤 雄三、本田 徹、佐々木 公平、増井 建和、東脇 正高
    • Organizer
      日本学術振興会第162委員会第91回研究会「酸化物材料の最近の進展」
    • Place of Presentation
      東京都品川区京都大学東京オフィス
    • Year and Date
      2014-09-26
    • Related Report
      2014 Annual Research Report
    • Invited
  • [Presentation] AlOx/AlN/GaNヘテロ構造の発光特性2014

    • Author(s)
      尾沼 猛儀、杉浦 洋平、山口 智広、本田 徹、東脇 正高
    • Organizer
      第75回応用物理学会秋季学術講演会
    • Place of Presentation
      北海道札幌市北海道大学札幌キャンパス
    • Year and Date
      2014-09-17 – 2014-09-20
    • Related Report
      2014 Annual Research Report
  • [Presentation] In-situ RF-MBE growth of AlOx/AlN/GaN heterostructures2013

    • Author(s)
      Y. Sugiura, T. Yamaguchi, T. Honda, and M. Higashiwaki
    • Organizer
      International Symposium on Compound Semiconductors (ISCS 2013)
    • Place of Presentation
      兵庫県神戸市神戸国際会議場
    • Related Report
      2013 Annual Research Report
  • [Presentation] In-situ RF-MBEによるる窒化物構造上AlOx薄膜の結晶成長2013

    • Author(s)
      杉浦 洋平、本田 徹、東脇 正高
    • Organizer
      第5回窒化物半導体結晶成長講演会
    • Place of Presentation
      大阪府吹田市大阪大学吹田キャンパス
    • Related Report
      2013 Annual Research Report
  • [Presentation] RF-MBE growth of AlOx/AlN/GaN heterostructures2013

    • Author(s)
      杉浦 洋平、山口 智広、本田 徹、東脇 正高
    • Organizer
      32nd Electronic Materials Syposium
    • Place of Presentation
      滋賀県守山市ラフォーレ琵琶湖
    • Related Report
      2013 Annual Research Report
  • [Presentation] Polarized Raman spectra in β-Ga2O3 crystals2013

    • Author(s)
      T. Onuma, S. Fujioka, T. Yamaguchi, M. Higashiwaki, K. Sasaki, T. Masui, and T. Honda
    • Organizer
      17th International Conference on Crystal Growth and Epitaxy (ICCGE-17)
    • Place of Presentation
      University of Warsaw, Warsaw, Poland
    • Related Report
      2013 Annual Research Report
  • [Presentation] Crystallized AlOx/AlN/GaN heterostructures grown by plasma-assisted molecular beam epitaxy2013

    • Author(s)
      Y. Sugiura, T. Honda, and M. Higashiwaki
    • Organizer
      10th International Conference on Nitride Semiconductors (ICNS-10)
    • Place of Presentation
      Gaylord National Hotel and Convention Center, Washington, D.C., USA
    • Related Report
      2013 Annual Research Report
  • [Presentation] In-situ RF-MBEによるAlN/GaNヘテロ構造上へのAlOx薄膜成長2013

    • Author(s)
      杉浦 洋平、本田 徹、東脇 正高
    • Organizer
      第74回応用物理学会秋季学術講演会
    • Place of Presentation
      京都府京田辺市同志社大学京田辺キャンパス
    • Related Report
      2013 Annual Research Report
  • [Presentation] β-Ga2O3結晶における青色発光強度と抵抗率の相関2013

    • Author(s)
      尾沼 猛儀、藤岡 秀平、山口 智広、東脇 正高、佐々木 公平、増井 建和、本田 徹
    • Organizer
      第74回応用物理学会秋季学術講演会
    • Place of Presentation
      京都府京田辺市同志社大学京田辺キャンパス
    • Related Report
      2013 Annual Research Report
  • [Book] 次世代パワー半導体の高性能化とその産業展開2015

    • Author(s)
      東脇 正高
    • Total Pages
      251
    • Publisher
      シーエムシー出版
    • Related Report
      2015 Annual Research Report
  • [Remarks] 情報通信研究機構 未来ICT研究所 グリーンICTデバイス先端開発センター

    • URL

      http://www2.nict.go.jp/green/

    • Related Report
      2016 Annual Research Report
  • [Remarks] 情報通信研究機構 未来ICT研究所 グリーンICTデバイス先端開発センター

    • URL

      http://www2.nict.go.jp/green/index.html

    • Related Report
      2015 Annual Research Report
  • [Remarks] 情報通信研究機構 未来ICT研究所 グリーンICTデバイス先端開発センター

    • URL

      http://www2.nict.go.jp/advanced_ict/green/index.html

    • Related Report
      2014 Annual Research Report

URL: 

Published: 2013-05-21   Modified: 2022-02-16  

Information User Guide FAQ News Terms of Use Attribution of KAKENHI

Powered by NII kakenhi