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A Novel Tactile Sensor Focusing on Time Correlation of Multi-Dimensional Tactile Information

Research Project

Project/Area Number 25289104
Research Category

Grant-in-Aid for Scientific Research (B)

Allocation TypePartial Multi-year Fund
Section一般
Research Field Electron device/Electronic equipment
Research InstitutionKagawa University

Principal Investigator

Takao Hidekuni  香川大学, 工学部, 教授 (40314091)

Project Period (FY) 2013-04-01 – 2016-03-31
Project Status Completed (Fiscal Year 2015)
Budget Amount *help
¥17,030,000 (Direct Cost: ¥13,100,000、Indirect Cost: ¥3,930,000)
Fiscal Year 2015: ¥4,680,000 (Direct Cost: ¥3,600,000、Indirect Cost: ¥1,080,000)
Fiscal Year 2014: ¥5,330,000 (Direct Cost: ¥4,100,000、Indirect Cost: ¥1,230,000)
Fiscal Year 2013: ¥7,020,000 (Direct Cost: ¥5,400,000、Indirect Cost: ¥1,620,000)
Keywords触覚センサ / MEMS / 集積化センサ / 半導体 / 人工皮膚 / センシングデバイス / 知能化センサ
Outline of Final Research Achievements

In this study, a novel integrated tactile sensing device with integrated electronics and movable microstructures have been developed for quantitative detection of delicate tactile sense. Semiconductor based tactile sensor devices are realized by advanced integration technology of silicon MEMS, and they can detect various tactile information at the same time and the same point. Using their time correlation and the features, quantitative detection of delicate tactile sense is effectively performed using paper samples. The applications of the sensing technology are such as condition monitoring of human skin or hair, texture measurement of luxury material, and advanced medical devices with tactile sense, etc.

Report

(4 results)
  • 2015 Annual Research Report   Final Research Report ( PDF )
  • 2014 Annual Research Report
  • 2013 Annual Research Report
  • Research Products

    (25 results)

All 2016 2015 2014 2013

All Journal Article (5 results) (of which Peer Reviewed: 5 results,  Open Access: 2 results,  Acknowledgement Compliant: 3 results) Presentation (18 results) (of which Int'l Joint Research: 5 results,  Invited: 3 results) Patent(Industrial Property Rights) (2 results) (of which Overseas: 1 results)

  • [Journal Article] A MEMS Hardness Sensor with Reduced Contact Force Dependence Using the Reference Plane Concept Aimed to Medical Applications2016

    • Author(s)
      Y. Maeda, K. Terao, F. Simokawa, H. Takao
    • Journal Title

      Japanese Journal of Applied Physics

      Volume: 55 Issue: 4S Pages: 04EF11-04EF11

    • DOI

      10.7567/jjap.55.04ef11

    • Related Report
      2015 Annual Research Report
    • Peer Reviewed / Open Access / Acknowledgement Compliant
  • [Journal Article] A Tactile Sensor with the Reference Plane for Detection Abilities of Frictional Force and Human Body Hardness Aimed to Medical Applications2015

    • Author(s)
      Y. Maeda, K. Terao, T. Suzuki, F. Shimokawa, and H. Takao
    • Journal Title

      Proc. of 28th IEEE International Conference on Micro Electro Mechanical Systems (IEEE MEMS2015)

      Volume: 1 Pages: 253-256

    • Related Report
      2014 Annual Research Report
    • Peer Reviewed / Acknowledgement Compliant
  • [Journal Article] A Novel Configuration of Tactile Sensor to Acquire the Correlation between Surface Roughness and Frictional Force2015

    • Author(s)
      R. Kozai, K. Terao, T. Suzuki, F. Shimokawa, and H. Takao
    • Journal Title

      Proc. of 28th IEEE International Conference on Micro Electro Mechanical Systems (IEEE MEMS2015)

      Volume: 1 Pages: 245-248

    • Related Report
      2014 Annual Research Report
    • Peer Reviewed / Acknowledgement Compliant
  • [Journal Article] Precise tumor size measurement under constant pressure by novel real-time micro-electro-mechanical-system hood for proper treatment (with videos)2014

    • Author(s)
      H. Mori, H. Takao, H. Kobara, N. Nishiyama, S. Fujihara, T. Matsunaga, M. Ayaki, T. Masaki
    • Journal Title

      Surgical Endoscopy

      Volume: 1 Issue: 1 Pages: 1-8

    • DOI

      10.1007/s00464-014-3642-3

    • Related Report
      2014 Annual Research Report
    • Peer Reviewed / Open Access
  • [Journal Article] A Post-CMOS Formation Process of High-Adhesiveness SU-8 Structures for Reliable Fabrication of Integrated MEMS sensors2013

    • Author(s)
      Yusaku Maeda; Kyohei Terao; Takaaki Suzuki; Fusao Shimokawa; Hidekuni Takao
    • Journal Title

      Japanese Jouranal of Applied Physics

      Volume: 52 Issue: 6S Pages: 06GL18-06GL18

    • DOI

      10.7567/jjap.52.06gl18

    • Related Report
      2013 Annual Research Report
    • Peer Reviewed
  • [Presentation] High Resolution Silicon MEMS Tactile Sensors for Measurement of Fingertip Sensation2016

    • Author(s)
      H. Takao
    • Organizer
      IEEE IMFEDK2016
    • Place of Presentation
      Kyoto, Japan
    • Year and Date
      2016-06-23
    • Related Report
      2015 Annual Research Report
    • Int'l Joint Research / Invited
  • [Presentation] Reduction of Contact Force Dependence on the MEMS Hardness Sensor Using Reference Plane to Detect Human Body Hardness2015

    • Author(s)
      Y. Maeda, K. Terao, T. Suzuki, F. Shimokawa, and H. Takao
    • Organizer
      The 28th IEEE Sensors Conference 2015
    • Place of Presentation
      Busan, Korea
    • Year and Date
      2015-11-01
    • Related Report
      2015 Annual Research Report
    • Int'l Joint Research
  • [Presentation] A Pressure/Temperature Sensor Embedded in an Endoscopy Hood for Intraluminal Monitoring During Flexible Endoscopic Operation2015

    • Author(s)
      Y. Maeda, K. Maeda, H. Kobara, H. Mori, H. Takao
    • Organizer
      The 28th IEEE Sensors Conference 2015
    • Place of Presentation
      Busan, Korea
    • Year and Date
      2015-11-01
    • Related Report
      2015 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Design and Characteristics of a MEMS Human Body Hardness Sensor Aimed to Diagnosis of Lesion Size2015

    • Author(s)
      Y. Maeda, K. Terao, F. Shimokawa and H. Takao
    • Organizer
      Solid-State Devices and Materials 2015
    • Place of Presentation
      Sapporo, Japan
    • Year and Date
      2015-09-26
    • Related Report
      2015 Annual Research Report
    • Int'l Joint Research
  • [Presentation] A New Extraction Method of Information for Quantification of the Sense of Touch Using a Novel Two-axis Tactile Sensor2015

    • Author(s)
      R. Kozai, K. Terao, T. Suzuki, F. Shimokawa, and H. Takao
    • Organizer
      The 18th International Conference on Solid-State Sensors, Actuators and Microsystems 2015
    • Place of Presentation
      Anchorage, USA
    • Year and Date
      2015-06-21
    • Related Report
      2015 Annual Research Report
    • Int'l Joint Research
  • [Presentation] 低侵襲内視鏡手術への適応に向けたMEMSセンサ埋め込み型内視鏡フードの研究2015

    • Author(s)
      前田祐作; 前田光平; 寺尾京平; 鈴木孝明; 下川房男; 高尾英邦
    • Organizer
      平成27年電気学会全国大会
    • Place of Presentation
      東京都市大学
    • Year and Date
      2015-03-24 – 2015-03-26
    • Related Report
      2014 Annual Research Report
  • [Presentation] MEMS硬さセンサにおける基準面構造による押し当て荷重依存性低減効果の検証2015

    • Author(s)
      前田祐作; 寺尾京平; 鈴木孝明; 下川房男; 高尾英邦
    • Organizer
      平成27年電気学会全国大会
    • Place of Presentation
      東京都市大学
    • Year and Date
      2015-03-24 – 2015-03-26
    • Related Report
      2014 Annual Research Report
  • [Presentation] 材料判別を実現する熱伝導率センサ集積型メッシュ状シリコン触覚イメージャ2014

    • Author(s)
      大杉亮太; 高木優佑; 前田祐作; 寺尾京平; 鈴木孝明; 下川房男; 高尾英邦
    • Organizer
      第31回「センサ・マイクロマシンと応用システム」シンポジウム
    • Place of Presentation
      くにびきメッセ,松江市
    • Year and Date
      2014-10-20 – 2014-10-22
    • Related Report
      2014 Annual Research Report
  • [Presentation] 凹凸と摩擦力の相関を取得可能なMEMS横型触覚センサ2014

    • Author(s)
      香西亮吾; 寺尾京平; 鈴木孝明; 下川房男; 高尾英邦
    • Organizer
      第31回「センサ・マイクロマシンと応用システム」シンポジウム
    • Place of Presentation
      くにびきメッセ,松江市
    • Year and Date
      2014-10-20 – 2014-10-22
    • Related Report
      2014 Annual Research Report
  • [Presentation] 基準面構造を有する高感度MEMS硬さセンサによる柔軟材料の評価2014

    • Author(s)
      前田祐作; 寺尾京平; 鈴木孝明; 下川房男; 高尾英邦
    • Organizer
      第31回「センサ・マイクロマシンと応用システム」シンポジウム
    • Place of Presentation
      くにびきメッセ,松江市
    • Year and Date
      2014-10-20 – 2014-10-22
    • Related Report
      2014 Annual Research Report
  • [Presentation] 材料判別を実現する熱伝導率センサ集積型メッシュ状シリコン触覚イメージャ2014

    • Author(s)
      大杉亮太; 高木優佑; 前田祐作; 寺尾京平; 鈴木孝明; 下川房男; 高尾英邦
    • Organizer
      2014年 第75回応用物理学会秋季学術講演会
    • Place of Presentation
      北海道大学
    • Year and Date
      2014-09-20
    • Related Report
      2014 Annual Research Report
  • [Presentation] Short Course B, Integrated MEMS Technology for Construction of Diverse Functional Devices2014

    • Author(s)
      H. Takao
    • Organizer
      International Conference on Solid State Device and Materials (SSDM2014)
    • Place of Presentation
      Tsukuba, Japan
    • Year and Date
      2014-09-08 – 2014-09-11
    • Related Report
      2014 Annual Research Report
    • Invited
  • [Presentation] Silicon Integrated Tactile Sensor Arrays Based On Cmos Compatible Mems Fabrication Technology2014

    • Author(s)
      H. Takao
    • Organizer
      Seventh ISSS International Conference on Smart Materials Structures and Systems ISSS 2014
    • Place of Presentation
      Bangalore, India
    • Year and Date
      2014-07-08 – 2014-07-10
    • Related Report
      2014 Annual Research Report
    • Invited
  • [Presentation] Assist-Free Assembry Technique of Standing Optical Devices on Soft Spring Actuator Stages2014

    • Author(s)
      岡 勇作; 篠崎 亮輔; 寺尾京平; 鈴木孝明; 下川房男; 大平文和; 高尾英邦
    • Organizer
      27th IEEE International Conference on Micro Electro Mechanical Systems (IEEE MEMS2014)
    • Place of Presentation
      サンフランシスコ
    • Related Report
      2013 Annual Research Report
  • [Presentation] 手触り感の定量的評価に向けたMEMS横型触覚センサ2014

    • Author(s)
      香西亮吾・寺尾京平・鈴木孝明・下川房男・高尾英邦
    • Organizer
      平成26年電気学会全国大会
    • Place of Presentation
      愛媛大学
    • Related Report
      2013 Annual Research Report
  • [Presentation] 生体組織などの柔軟材料における硬さ判別を目指したMEMS硬さセンサ2014

    • Author(s)
      前田祐作・寺尾京平・鈴木孝明・下川房男・高尾英邦
    • Organizer
      平成26年電気学会全国大会
    • Place of Presentation
      愛媛大学
    • Related Report
      2013 Annual Research Report
  • [Presentation] 可動MEMS デバイスへの光学素子自動アライメント技術2013

    • Author(s)
      岡 勇作,篠崎 亮輔,寺尾 京平,鈴木 孝明,下川 房男,高尾 英邦
    • Organizer
      第30 回 センサ・マイクロマシンと応用システム シンポジウム
    • Place of Presentation
      仙台国際センター
    • Related Report
      2013 Annual Research Report
  • [Presentation] SU-8 密着層により信頼性を向上した 接触子を有する集積化皮膚感覚センサの製作2013

    • Author(s)
      前田 祐作,寺尾 京平,鈴木 孝明,下川 房男,高尾 英邦
    • Organizer
      第5 回集積化MEMS シンポジウム
    • Place of Presentation
      仙台国際センター
    • Related Report
      2013 Annual Research Report
  • [Patent(Industrial Property Rights)] 触覚センサおよび手触り感の評価方法2015

    • Inventor(s)
      高尾英邦
    • Industrial Property Rights Holder
      高尾英邦
    • Industrial Property Rights Type
      特許
    • Filing Date
      2015-03-02
    • Related Report
      2014 Annual Research Report
    • Overseas
  • [Patent(Industrial Property Rights)] 触覚センサ2014

    • Inventor(s)
      高尾英邦
    • Industrial Property Rights Holder
      香川大学
    • Industrial Property Rights Type
      特許
    • Industrial Property Number
      2014-040189
    • Filing Date
      2014-03-03
    • Related Report
      2013 Annual Research Report

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Published: 2013-05-21   Modified: 2019-07-29  

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