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Microjoining technology using sintering process of 3D nanoporous structure

Research Project

Project/Area Number 25289241
Research Category

Grant-in-Aid for Scientific Research (B)

Allocation TypePartial Multi-year Fund
Section一般
Research Field Composite materials/Surface and interface engineering
Research InstitutionOsaka University

Principal Investigator

Hiroshi Nishikawa  大阪大学, 接合科学研究所, 准教授 (90346180)

Co-Investigator(Kenkyū-buntansha) SAITO Mikiko  早稲田大学, ナノ・ライフ創新研究機構, 教授 (80386739)
MIZUNO Jun  早稲田大学, ナノ・ライフ創新研究機構, 教授 (60386737)
Project Period (FY) 2013-04-01 – 2016-03-31
Project Status Completed (Fiscal Year 2015)
Budget Amount *help
¥19,370,000 (Direct Cost: ¥14,900,000、Indirect Cost: ¥4,470,000)
Fiscal Year 2015: ¥1,560,000 (Direct Cost: ¥1,200,000、Indirect Cost: ¥360,000)
Fiscal Year 2014: ¥1,560,000 (Direct Cost: ¥1,200,000、Indirect Cost: ¥360,000)
Fiscal Year 2013: ¥16,250,000 (Direct Cost: ¥12,500,000、Indirect Cost: ¥3,750,000)
Keywords高温はんだ代替接合 / 鉛フリー接合 / 低温焼結型接合 / ナノポーラス材料 / エレクトロニクス実装 / 焼結型接合 / ナノポーラス構造 / 接合 / 電析 / 表面活性化技術 / 選択溶解 / Cu/Cu接合
Outline of Final Research Achievements

The SiC power devices provide the possibility to develop the next-generation power conversion circuit with high efficiency and high power density. To assemble these power devices, the high temperature packaging technology such as die attach process is needed. As a die attach material, we focus on nanoporous metals that are fabricated through the dealloying method and propose nanoporous bonding (NPB) without solvent and organic substance. As a results, the joints bonded at 350 ℃ showed a high shear strength of above 20 MPa. The shear strength of the joint after isothermal aging at 250 ℃ for 1000 h was more than 25 MPa. It was found that joining using Au NPB was successfully achieved, and that NPB shows potential as a Pb-free interconnection material for high-temperature electronic applications.

Report

(4 results)
  • 2015 Annual Research Report   Final Research Report ( PDF )
  • 2014 Annual Research Report
  • 2013 Annual Research Report
  • Research Products

    (39 results)

All 2016 2015 2014 2013 Other

All Journal Article (8 results) (of which Peer Reviewed: 8 results,  Acknowledgement Compliant: 1 results) Presentation (29 results) (of which Int'l Joint Research: 6 results,  Invited: 5 results) Patent(Industrial Property Rights) (2 results)

  • [Journal Article] Effects of Bonding Temperature on Microstructure, Fracture Behavior and Joint Strength of Ag Nanoporous Bonding for High Temperature Die Attach2015

    • Author(s)
      M.-S. Kim and H. Nishikawa
    • Journal Title

      Mater. Sci. Eng. A.

      Volume: 645 Pages: 264-272

    • DOI

      10.1016/j.msea.2015.08.015

    • Related Report
      2015 Annual Research Report
    • Peer Reviewed / Acknowledgement Compliant
  • [Journal Article] Fabrication and characterization of large-area flexible microfluidic organic light-emitting diode with liquid organic semiconductor2014

    • Author(s)
      M. Tsuwaki, T. Kasahara, S. Matsunami, T. Edura, R. Ishimatsu, J. Oshima, S. Shoji, C. Adachi, J. Mizuno
    • Journal Title

      Sensors and Actuators A

      Volume: 216 Pages: 231-236

    • Related Report
      2014 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Multi-color microfluidic electrochemiluminescence cells2014

    • Author(s)
      T. Kasahara, S. Matsunami, T. Edura, R. Ishimatsu, J. Oshima, M. Tsuwaki, T. Imato, S. Shoji, C. Adachi, J. Mizuno
    • Journal Title

      Sensors and Actuators A

      Volume: 214 Pages: 225-229

    • Related Report
      2014 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Hybrid Au-Adhesive Bonding Using Planar Adhesive Structure for 3-D LSI2014

    • Author(s)
      M. Nimura, J. Mizuno, S. Shoji, K. Sakuma, H. Ogino, T. Enomoto, A. Shigetou
    • Journal Title

      IEEE TRANSACTIONS ON COMPONENTS, PACKAGING AND MANUFACTURING TECHNOLOGY

      Volume: 4 Pages: 762-768

    • Related Report
      2014 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Multi-color microfluidic organic light-emitting diodes based on on-demand emitting layers of pyrene-based liquid organic semiconductors with fluorescent guest dopants2014

    • Author(s)
      T. Kasahara, S. Matsunami, T. Edura, R. Ishimatsu, J. Oshima, M. Tsuwaki, T. Imato, S. Shoji, C. Adachi, J. Mizuno,
    • Journal Title

      Sensors and Actuators B

      Volume: 207 Pages: 481-489

    • Related Report
      2014 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Low-Temperature Au–Au Bonding Using Nanoporous Au–Ag Sheets2013

    • Author(s)
      H. Mimatsu, J. Mizuno, T. Kasahara, M. Saito, H. Nishikawa, S. Shoji
    • Journal Title

      Japanese Journal of Applied Physics

      Volume: 52 Pages: 50204-50204

    • NAID

      210000142150

    • Related Report
      2013 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Vacuum Ultraviolet Irradiation Treatment for Reducing Gold Gold Bonding Temperature2013

    • Author(s)
      A. Okada, S. Shoji, M. Nimura, A. Shigetou, K. Sakuma, J. Mizuno
    • Journal Title

      Materials Transactions

      Volume: 54 Pages: 2139-2143

    • NAID

      130004824999

    • Related Report
      2013 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Auを用いた熱圧着マイクロ接合技術2013

    • Author(s)
      水野潤、佐久間克幸、仁村将次、若井史博、庄子習一
    • Journal Title

      精密工学会誌

      Volume: 79 Pages: 714-718

    • Related Report
      2013 Annual Research Report
    • Peer Reviewed
  • [Presentation] Microstructure of Cu-to-Cu Joint Using Nanoporous Bonding2016

    • Author(s)
      K. Matsunaga, M.-S. Kim, H. Nishikawa, M. Saito and J. Mizuno
    • Organizer
      The 6th Int. Symp. on Adv. Materials Development and Integration of Novel Structured Metallic and Inorganic Materials(AMDI-6)
    • Place of Presentation
      東京
    • Year and Date
      2016-06-09
    • Related Report
      2015 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Properties of Nanoporous Structures Obtained by Electrodeposition and Dealloying for Low-Temperature Bonding2016

    • Author(s)
      M. Saito, K. Matsunaga, J. Mizuno and H. Nishikawa
    • Organizer
      The 6th Int. Symp. on Adv. Materials Development and Integration of Novel Structured Metallic and Inorganic Materials(AMDI-6)
    • Place of Presentation
      東京
    • Year and Date
      2016-06-09
    • Related Report
      2015 Annual Research Report
  • [Presentation] Reliability of Die Attach Using Ag Nanoporous Sheet for High Temperature Electronics2016

    • Author(s)
      M.-S. Kim and H. Nishikawa
    • Organizer
      TMS2016
    • Place of Presentation
      Nashville, USA
    • Year and Date
      2016-02-14
    • Related Report
      2015 Annual Research Report
  • [Presentation] 銀ナノポーラス材料を用いた接合部の高温放置試験による微細組織変化2016

    • Author(s)
      M.-S. Kim and H. Nishikawa
    • Organizer
      第22回エレクトロニクスにおけるマイクロ接合・実装技術シンポジウム
    • Place of Presentation
      横浜
    • Year and Date
      2016-02-02
    • Related Report
      2015 Annual Research Report
  • [Presentation] 定電位電解したAuナノポーラスシートによるCu/Cu接合の検討2016

    • Author(s)
      松永 香織, M.-S. Kim, 西川 宏, 斎藤 美紀子, 水野 潤
    • Organizer
      第22回エレクトロニクスにおけるマイクロ接合・実装技術シンポジウム
    • Place of Presentation
      横浜
    • Year and Date
      2016-02-02
    • Related Report
      2015 Annual Research Report
  • [Presentation] Bonding Process Using Ag Nanoporous Metal for High-Temperature Application2015

    • Author(s)
      H. Nishikawa
    • Organizer
      Workshop on Joining and Welding Technology
    • Place of Presentation
      Singapore
    • Year and Date
      2015-12-10
    • Related Report
      2015 Annual Research Report
    • Int'l Joint Research / Invited
  • [Presentation] Effect of Isothermal Aging on Microstructure and Joint Strength of Ag Nanoporous Bonding for High Temperature Die Attach2015

    • Author(s)
      M.-S. Kim and H. Nishikawa
    • Organizer
      10th Int. Microsystems, Packaging, Assembly and Circuits Technology Conf.
    • Place of Presentation
      Taipe, Taiwan
    • Year and Date
      2015-10-21
    • Related Report
      2015 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Au ナノポーラスシートを用いた接合合体の高温信頼性2015

    • Author(s)
      松永 香織, M.-S. Kim, 西川 宏, 齋藤 美紀子, 水野 潤
    • Organizer
      第25回マイクロエレクトロニクスシンポジウム
    • Place of Presentation
      大阪
    • Year and Date
      2015-09-03
    • Related Report
      2015 Annual Research Report
  • [Presentation] Bonding Process Using Nanomaterials for Electronics Packaging2015

    • Author(s)
      H. Nishikawa
    • Organizer
      The second workshop on welding and Joining (WWJ2015)
    • Place of Presentation
      Hanoi, Vietnam
    • Year and Date
      2015-08-19
    • Related Report
      2015 Annual Research Report
    • Int'l Joint Research / Invited
  • [Presentation] Effect of Au Nanoporous Structure on Bonding Strength2015

    • Author(s)
      K. Matsunaga, M.-S. Kim, H. Nishikawa, M. Saito and J. Mizuno
    • Organizer
      Int. Conf. on Electronics Packaging and IMAPS ALL Asia Conf.
    • Place of Presentation
      京都
    • Year and Date
      2015-04-14
    • Related Report
      2015 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Improved Low Temperature Gold-Gold Bonding Using Nanoporous Powder Bump Using Vacuum Ultraviolet Irradiation Pre-treatment2015

    • Author(s)
      T. Kaneda, J. Mizuno, A. Okada, K. Matsunaga, S. Shoji, M. Saito and H. Nishikawa
    • Organizer
      Int. Conf. on Electronics Packaging and IMAPS ALL Asia Conf.
    • Place of Presentation
      京都
    • Year and Date
      2015-04-14
    • Related Report
      2015 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Interfacial Reaction and Joint Strength of Ag Nanoporous Bonding with Electroless Nickel/Immersion Gold Substrate2014

    • Author(s)
      M-S. Kim, H. Nishikawa
    • Organizer
      The International Symposium on Visualization in Joining & Welding Science through Advanced Measurements and Simulation (Visual-JW 2014)
    • Place of Presentation
      大阪
    • Year and Date
      2014-11-26 – 2014-11-28
    • Related Report
      2014 Annual Research Report
  • [Presentation] Pressure-assisted bonding using nanomaterials for electronics packaging2014

    • Author(s)
      H. Nishikawa, K. Matsunaga, M.-S. Kim, M. Saito, J. Mizuno
    • Organizer
      The 5th International Symposium on Advanced Materials Development and Integration of Novel Structured Metallic and Inorganic Materials (AMDI-5)
    • Place of Presentation
      東京
    • Year and Date
      2014-11-09
    • Related Report
      2014 Annual Research Report
    • Invited
  • [Presentation] Shear strength of Cu/Cu joints using Au nanoporous sheet for high-temperature application2014

    • Author(s)
      K. Matsunaga, M.-S. Kim, H. Nishikawa, M. Saito, J. Mizuno
    • Organizer
      The 5th International Symposium on Advanced Materials Development and Integration of Novel Structured Metallic and Inorganic Materials (AMDI-5)
    • Place of Presentation
      東京
    • Year and Date
      2014-11-09
    • Related Report
      2014 Annual Research Report
  • [Presentation] Nano-porous Structure Control under Electrodeposition and Dealloying Conditions2014

    • Author(s)
      M. Saito, K. Matsunaga, J. Mizuno, H. Nishikawa
    • Organizer
      The 5th International Symposium on Advanced Materials Development and Integration of Novel Structured Metallic and Inorganic Materials (AMDI-5)
    • Place of Presentation
      東京
    • Year and Date
      2014-11-09
    • Related Report
      2014 Annual Research Report
  • [Presentation] Nano-porous Structure Control under Electrodeposition and Dealloying Conditions for Low-temperature Bonding2014

    • Author(s)
      M. Saito, K. Matsunaga, J. Mizuno, H. Nishikawa
    • Organizer
      5th Electronics System-Integration Technology Conference (ESTC 2014)
    • Place of Presentation
      Helsinki, Finland
    • Year and Date
      2014-09-16 – 2014-09-18
    • Related Report
      2014 Annual Research Report
  • [Presentation] Thermal stability of electroless nickel / immersion gold surface finish for direct bond copper2014

    • Author(s)
      M-S. Kim, H. Nishikawa
    • Organizer
      5th Electronics System-Integration Technology Conference (ESTC 2014)
    • Place of Presentation
      Helsinki, Finland
    • Year and Date
      2014-09-16 – 2014-09-18
    • Related Report
      2014 Annual Research Report
  • [Presentation] Relationship between bonding conditions and strength for joints using a Au nanoporous sheet2014

    • Author(s)
      K. Matsunaga, M-S. Kim, H. Nishikawa, M. Saito and J. Mizuno
    • Organizer
      5th Electronics System-Integration Technology Conference (ESTC 2014)
    • Place of Presentation
      Helsinki, Finland
    • Year and Date
      2014-09-16 – 2014-09-18
    • Related Report
      2014 Annual Research Report
  • [Presentation] Au ナノポーラス接合の接合材表面構造と接合強度の関係2014

    • Author(s)
      松永 香織, Min-Su Kim, 西川 宏, 齋藤 美紀子, 水野 潤
    • Organizer
      第24回 マイクロエレクトロニクスシンポジウム(MES2014)
    • Place of Presentation
      大阪
    • Year and Date
      2014-09-04 – 2014-09-05
    • Related Report
      2014 Annual Research Report
  • [Presentation] Microstructural change of Ag nanoporous bonding joint and interdiffusion of Cu / Ag during thermal aging2014

    • Author(s)
      M-S. Kim, H. Nishikawa
    • Organizer
      4th International IEEE Workshop on Low Temperature Bonding for 3D Integration (LTB-3D 2014)
    • Place of Presentation
      東京
    • Year and Date
      2014-07-25 – 2014-07-26
    • Related Report
      2014 Annual Research Report
  • [Presentation] Low temperature and low pressure bump bonding realized by single-micrometer Ag-nanoparticle bumps2014

    • Author(s)
      W. Fu, T. Kasahara, A. Okada, J. Mizuno, S. Shoji, A. Shigetou
    • Organizer
      4th International IEEE Workshop on Low Temperature Bonding for 3D Integration (LTB-3D 2014)
    • Place of Presentation
      東京
    • Year and Date
      2014-07-25 – 2014-07-26
    • Related Report
      2014 Annual Research Report
  • [Presentation] Low-temperature bonding using selective formation of nanoporous powders for bump interconnects2014

    • Author(s)
      J. Mizuno
    • Organizer
      International Union of Materials Research Societies -International Conference on Electronic Materials 2014
    • Place of Presentation
      Taipei, Taiwan
    • Year and Date
      2014-06-10 – 2014-06-14
    • Related Report
      2014 Annual Research Report
    • Invited
  • [Presentation] Effect of Joining Conditions on the Joint Strength of Ag Nanoporous Bonding2014

    • Author(s)
      M-S. Kim, H. Nishikawa
    • Organizer
      2014 International Conference on Electronics Packaging (ICEP2014)
    • Place of Presentation
      富山
    • Year and Date
      2014-04-23 – 2014-04-25
    • Related Report
      2014 Annual Research Report
  • [Presentation] Fine-pitch Hybrid Bonding with Cu/Sn Microbumps and Adhesive for High Density 3D Integration2014

    • Author(s)
      M. Ohyama, J. Mizuno, S. Shoji, M. Nimura, T. Nonaka, Y. Shinba, A. Shigetou
    • Organizer
      2014 International Conference on Electronics Packaging (ICEP2014)
    • Place of Presentation
      富山
    • Year and Date
      2014-04-23 – 2014-04-25
    • Related Report
      2014 Annual Research Report
  • [Presentation] Au・Ag系ナノポーラス粉末を接着層として用いるAu-Auの低温接合に関する研究2014

    • Author(s)
      三松隼太、水野潤、庄子習一、齋藤美紀子、梅津理恵、西川宏
    • Organizer
      第20回エレクトロニクスにおけるマイクロ接合・実装技術シンポジウム
    • Place of Presentation
      横浜
    • Related Report
      2013 Annual Research Report
  • [Presentation] VUV/O3 Treatment for Reduction of Au-Au Bonding Temperature2013

    • Author(s)
      A. Okada, M. Nimura, A. Shigetou, K. Sakuma, J. Mizuno, and S. Shoji
    • Organizer
      International Conference on Electronics Packaging (ICEP) 2013
    • Place of Presentation
      Osaka, Japan
    • Related Report
      2013 Annual Research Report
  • [Presentation] LOW-TEMPERATURE GOLD-GOLD BONDING USING SELECTIVE FORMATION OF NANOPOROUS POWDERS FOR BUMP INTERCONNECTS

    • Author(s)
      . Mimatsu, J. Mizuno, T. Kasahara, M. Saito, S. Shoji, H. Nishikawa
    • Organizer
      The 27th IEEE International Conference on MEMS2014
    • Place of Presentation
      Sanfrancisco, USA
    • Related Report
      2013 Annual Research Report
  • [Presentation] Nano-Porous Au-Ag Joint Layer for Low-Temperature Au-Au Bonding

    • Author(s)
      J.Mizuno, H.Mimatsu, T.Kasahara, M.Saito, H.Nishikawa, S.Shoji
    • Organizer
      Advanced Materials Development and Integration of Novel Structured Metallic and Inorganic Materials (AMDI-4)
    • Place of Presentation
      Nagoya,Japan
    • Related Report
      2013 Annual Research Report
  • [Presentation] Study on Surface Treatment Process Using VUV/O3 Treatment for Reduction of Au-Au Bonding Temperature

    • Author(s)
      J. Mizuno, A. Okada, S. Shoji, M. Nimura, K. Sakuma, A. Shigeto
    • Organizer
      nternational Microsysytems, Packaging, Assembly and Circuits Technology conference IMPACT2013
    • Place of Presentation
      Taipei
    • Related Report
      2013 Annual Research Report
    • Invited
  • [Patent(Industrial Property Rights)] 金属材の接合方法2014

    • Inventor(s)
      西川宏,齋藤美紀子,水野潤
    • Industrial Property Rights Holder
      大阪大学、早稲田大学
    • Industrial Property Rights Type
      特許
    • Industrial Property Number
      2014-245757
    • Filing Date
      2014-12-04
    • Related Report
      2014 Annual Research Report
  • [Patent(Industrial Property Rights)] 銅材の接合方法2013

    • Inventor(s)
      西川 宏、齋藤美紀子、水野 潤
    • Industrial Property Rights Holder
      大阪大学、早稲田大学
    • Industrial Property Rights Type
      特許
    • Industrial Property Number
      2013-248205
    • Filing Date
      2013-11-29
    • Related Report
      2013 Annual Research Report

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Published: 2013-05-21   Modified: 2019-07-29  

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