Deep UV emisson device by integrated pulsed laser deposition method

• Project/Area Number: 25289256
• Research Category: Grant-in-Aid for Scientific Research (B)
• Allocation Type: Partial Multi-year Fund
• Section: 一般
• Research Field: Material processing/Microstructural control engineering
• Research Institution: Tohoku University
• Principal Investigator: Nakamura Takahiro 東北大学, 多元物質科学研究所, 准教授 (50400429)
• Co-Investigator(Renkei-kenkyūsha): SATO SHUNICHI 東北大学, 多元物質科学研究所, 教授 (30162431)
• Project Period (FY): 2013-04-01 – 2017-03-31
• Project Status: Completed (Fiscal Year 2016)
• Budget Amount: ¥12,610,000 (Direct Cost: ¥9,700,000、Indirect Cost: ¥2,910,000); Fiscal Year 2015: ¥2,340,000 (Direct Cost: ¥1,800,000、Indirect Cost: ¥540,000); Fiscal Year 2014: ¥3,510,000 (Direct Cost: ¥2,700,000、Indirect Cost: ¥810,000); Fiscal Year 2013: ¥6,760,000 (Direct Cost: ¥5,200,000、Indirect Cost: ¥1,560,000)
• Keywords: パルスレーザー堆積法 / 冷凍ターゲット / ワイドバンドギャップ半導体 / 薄膜 / フェムト用パルスレーザー / 薄膜プロセス / フェムト秒レーザー

Outline of Final Research Achievements

This study aimed at fabricating a high-quality cubic-type boron nitride (c-BN) thin films for a deep-UV light-emitting diode by integrated pulsed laser deposition method. A diamond-like carbon (DLC) films with high sp3 content and with very flat surface morphology were prepared by PLD using a frozen cyclohesane target. A thin film composed of c-BN and B2O3 was formed by PLD of a frozed borazine target with high intensity laser pulses. B2O3 was formed by laser ablation of a B(OH)3 which was produced by chemical reaction of borazine with water molecules during laser irradiation.

Research Products

• [Journal Article] Chemical surface modification of graphene oxide by femtosecond laser pulse irradiation in aqueous suspensions (2016)
  • Author(s): Muttaqin, Takahiro Nakamura, Yuta Nishina, Shunichi Sato
  • Journal Title: Journal of Materials Research Volume: 52 Issue: 2 Pages: 749-759
  • DOI: 10.1007/s10853-016-0368-8
  • Peer Reviewed
• [Journal Article] 1.Photochemical reduction of graphene oxide (GO) by femtosecond laser irradiation (2016)
  • Author(s): Muttaqin, Takahiro Nakamura, Shunichi Sato
  • Journal Title: Proc. SPIE 9736, Laser-based Micro- and Nanoprocessing X Volume: 9736 Pages: 973617-973617
  • DOI: 10.1117/12.2211583
  • Peer Reviewed
• [Journal Article] Green and facile synthesis of Pd-Pt alloy nanoparticles with fully tunable compositions by laser irradiation of aqueous solution (2015)
  • Author(s): T. Nakamura, S. Sato
  • Journal Title: Journal of Nanoscience and Nanotechnology Volume: 15 Issue: 1 Pages: 426-432
  • DOI: 10.1166/jnn.2015.8846
  • Peer Reviewed
• [Journal Article] Composition-controlled ternary Rh-Pd-Pt solid-solution alloy nanoparticles by laser irradiation of mixed solution of metallic ions (2014)
  • Author(s): M. S. I. Sarker, T. Nakamura, S. Sato
  • Journal Title: Journal of Materials Research Volume: 29 Issue: 7 Pages: 856-864
  • DOI: 10.1557/jmr.2014.62
  • Peer Reviewed
• [Journal Article] レーザー励起反応場における金属・合金ナノ粒子の創成 (2014)
  • Author(s): 中村貴宏，佐藤俊一
  • Journal Title: 金属 Volume: 84 Pages: 879-885
  • Peer Reviewed
• [Journal Article] レーザー励起反応場でのナノ構造創成 (2014)
  • Author(s): 中村貴宏，佐藤俊一
  • Journal Title: まてりあ Volume: 53 Pages: 533-536
  • NAID: 130004709919
  • Peer Reviewed
• [Presentation] Synthesis of platinum based catalyst for methanol oxidation reaction using nano-GO as capping agent by femtosecond laser pulse irradiation (2016)
  • Author(s): Muttaqin, Takahiro Nakamura, Shunichi Sato
  • Organizer: 第77回応用物理学会秋季学術講演会
  • Place of Presentation: 朱鷺メッセ（新潟市）
  • Year and Date: 2016-09-13
• [Presentation] Inner structural analysis of silver submicron spherical particles fabricated by pulsed laser melting in liquid (2016)
  • Author(s): Takahiro Nakamura, Hideyuki Magara, Shota Sakaki, Naoto Koshizaki, Shunichi Sato
  • Organizer: 4th Conference on Advanced Nanoparticle Generation and Excitation by Lasers in Liquids (ANGEL)
  • Place of Presentation: Essen (Germany)
  • Year and Date: 2016-05-09
  • Int'l Joint Research
• [Presentation] Stabilitization of alloy nanoparticles on reduced graphene oxide for catalytic application: Utilization graphene oxide as a capping agent (2016)
  • Author(s): Muttaqin, Takahiro Nakamura, Shunichi Sato
  • Organizer: 第62回応用物理学会春季学術講演会
  • Place of Presentation: 東京工業大学大岡山キャンパス
  • Year and Date: 2016-03-11
• [Presentation] Photochemical reduction of graphene-oxide (GO) by femtosecond laser irradiation (2016)
  • Author(s): Muttaqin, Takahiro Nakamura, Shunichi Sato
  • Organizer: SPIE Photonics West
  • Place of Presentation: Moscone Center, Sanfrancisco, CA, USA
  • Year and Date: 2016-01-14
  • Int'l Joint Research
• [Presentation] Chemical modification surface of graphene oxide (GO) by ultrashort laser irradiation (2015)
  • Author(s): Muttaqin, Takahiro Nakamura, Shunichi Sato
  • Organizer: 第76回応用物理学会秋季学術講演会
  • Place of Presentation: 名古屋国際会議場
  • Year and Date: 2015-09-13
• [Presentation] 冷凍シクロヘキサンターゲットを用いたfs-PLD法により作製したDLC薄膜の構造評価 (2014)
  • Author(s): 我妻由貴，中村貴宏，佐藤俊一
  • Organizer: 第61回応用物理学会春季学術講演会
  • Place of Presentation: 青山学院大学（相模原）
• [Presentation] 冷凍シクロヘキサンターゲットを用いたPLD法によるDLC薄膜の作製 (2013)
  • Author(s): 我妻由貴，中村貴宏，佐藤俊一
  • Organizer: 第74回応用物理学会学術講演会
  • Place of Presentation: 同志社大学（厚木）
• [Presentation] 冷凍シクロヘキサンターゲットを用いたfs-PLD法によるDLC薄膜の作製 (2013)
  • Author(s): 我妻由貴，中村貴宏，佐藤俊一
  • Organizer: 第68回応用物理学会東北支部学術講演会
  • Place of Presentation: 山形大学（山形）