| Budget Amount *help |
¥18,330,000 (Direct Cost: ¥14,100,000、Indirect Cost: ¥4,230,000)
Fiscal Year 2015: ¥4,940,000 (Direct Cost: ¥3,800,000、Indirect Cost: ¥1,140,000)
Fiscal Year 2014: ¥5,980,000 (Direct Cost: ¥4,600,000、Indirect Cost: ¥1,380,000)
Fiscal Year 2013: ¥7,410,000 (Direct Cost: ¥5,700,000、Indirect Cost: ¥1,710,000)
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| Outline of Final Research Achievements |
BCN films were deposited by using a Filtered Cathodic Vacuum Arc (FCVA) apparatus developed, and its chemical compositions, structure and mechanical properties were evaluated. BCN films were deposited using carbon and boron mixture target filled with boron powder in a circular groove in nitrogen atmosphere. Nitrogen contents of BCN films increased from 0 at.% to 12 at.%, and boron contents of BCN films decreased from 0.8 at.% to 0.05 at.% with increasing the flow rate of N2. Hardness of BCN films decreased with increasing the content of nitrogen, and was as high as 67.1 GPa at N2 flow rate was zero. Friction coefficient of the BCN films is u=0.5 to 0.6. Finally, heat-resisting property of the BCN films were evaluated. The BCN films (N<4 at.%) were totally disappeared at 550 ℃; however, BCN films (N>7 at.%) were remained at 550 ℃. These results led us to the conclusion that BCN film with N content of 2-7 at.% has high-hardness, high wear resistance and high heat resistance.
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