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Crystal growth of molybdenum oxide films and its application in environmentally-resistant devices

Research Project

Project/Area Number 25390033
Research Category

Grant-in-Aid for Scientific Research (C)

Allocation TypeMulti-year Fund
Section一般
Research Field Nanomaterials engineering
Research InstitutionOsaka Institute of Technology

Principal Investigator

Koike Kazuto  大阪工業大学, 工学部, 教授 (40351457)

Co-Investigator(Kenkyū-buntansha) 原田 義之  大阪工業大学, 工学部, 准教授 (20288757)
矢野 満明  大阪工業大学, 工学部, 教授 (40200563)
Project Period (FY) 2013-04-01 – 2017-03-31
Project Status Completed (Fiscal Year 2016)
Budget Amount *help
¥5,200,000 (Direct Cost: ¥4,000,000、Indirect Cost: ¥1,200,000)
Fiscal Year 2016: ¥1,300,000 (Direct Cost: ¥1,000,000、Indirect Cost: ¥300,000)
Fiscal Year 2015: ¥1,300,000 (Direct Cost: ¥1,000,000、Indirect Cost: ¥300,000)
Fiscal Year 2014: ¥1,300,000 (Direct Cost: ¥1,000,000、Indirect Cost: ¥300,000)
Fiscal Year 2013: ¥1,300,000 (Direct Cost: ¥1,000,000、Indirect Cost: ¥300,000)
Keywords酸化モリブデン / 分子線エピタキシー / 結晶構造解析 / 熱処理効果 / 高エネルギー粒子線耐性 / 結晶構造制御 / エピタキシャル成長 / 放射線耐性 / 酸化タングステン / エレクトロクロミック / ヘテロ接合 / Transition metal oxide / Molecular beam epitaxy / Molybdenum trioxide / Tungsten trioxide / 三酸化モリブデン / ワイドギャップ半導体 / サファイア基板 / 構造制御
Outline of Final Research Achievements

Molybdenum trioxide (MoO3) has attracted much attention for such application fields as resistive random access memories, electrochromic displays and microbatteries. Therefore, growth and characterization of amorphous/polycrystalline MoO3 films have been studied extensively, however, there are few reports on single-crystalline MoO3 films. In this work, we studied molecular beam epitaxial (MBE) growth of MoO3 films on sapphire and LSAT substrates and reported that high-quality orthorhombic-phase MoO3 films were successfully grown on these substrates (Details are described in the next section). Our experimental results may be useful for the application of MoO3 films to novel functional devices in the next generation.

Report

(5 results)
  • 2016 Annual Research Report   Final Research Report ( PDF )
  • 2015 Research-status Report
  • 2014 Research-status Report
  • 2013 Research-status Report
  • Research Products

    (35 results)

All 2017 2016 2015 2014 Other

All Journal Article (5 results) (of which Peer Reviewed: 5 results,  Open Access: 3 results,  Acknowledgement Compliant: 4 results) Presentation (24 results) (of which Int'l Joint Research: 6 results,  Invited: 1 results) Remarks (6 results)

  • [Journal Article] Glucose sensing by an enzyme-modified ZnO-based FET2016

    • Author(s)
      K.Koike, M.Yano, Y.Mori, S.Sasa, Y.Hirofuji, M.Yano
    • Journal Title

      Procedia Engineering

      Volume: 168 Pages: 84-88

    • DOI

      10.1016/j.proeng.2016.11.153

    • Related Report
      2016 Annual Research Report
    • Peer Reviewed / Open Access / Acknowledgement Compliant
  • [Journal Article] Growth and crystallographic characterization of molecular beam epitaxial WO3 and MoO3/WO3 thin films on sapphire substrates2016

    • Author(s)
      M. Yano, K. Koike, M. Matsuo, T. Murayama, Y. Harada, K. Inaba
    • Journal Title

      Applied Surface Science

      Volume: 未定 Pages: 32-35

    • DOI

      10.1016/j.apsusc.2016.01.097

    • Related Report
      2016 Annual Research Report 2015 Research-status Report
    • Peer Reviewed / Acknowledgement Compliant
  • [Journal Article] Electrochromic properties of single-crystalline tungsten trioxide films grown by molecular beam epitaxy2016

    • Author(s)
      T. Murayama, W. Kuwagata, K. Koike, Y. Harada, S. Sasa, M. Yano, S. Kobayashi, K. Inaba
    • Journal Title

      IEEE Xplore

      Volume: 2016 Pages: 16181192-16181192

    • DOI

      10.1109/imfedk.2016.7521686

    • Related Report
      2016 Annual Research Report
    • Peer Reviewed / Acknowledgement Compliant
  • [Journal Article] Postgrowth Annealing Effects on Structural, Optical, and Electrical Properties of beta-MoO3 Films Grown by Molecular Beam Epitaxy2014

    • Author(s)
      Shinji Yagi, Masayuki Matsuo, Kazuto Koike, Yoshiyuki Harada, Shigehiko Sasa, Mitsuaki Yano
    • Journal Title

      IEEE Explore

      Volume: なし Pages: 1-2

    • DOI

      10.1109/imfedk.2014.6867068

    • Related Report
      2014 Research-status Report
    • Peer Reviewed / Open Access / Acknowledgement Compliant
  • [Journal Article] Characteristics of MoO3 films grown by molecular beam epitaxy2014

    • Author(s)
      K. Koike, R. Wada, S. Yagi, Y. Harada, S. Sasa, M. Yano
    • Journal Title

      Japanese Journal of Applied Physics

      Volume: 53 Issue: 5S1 Pages: 05FJ02-05FJ02

    • DOI

      10.7567/jjap.53.05fj02

    • NAID

      210000143849

    • Related Report
      2014 Research-status Report 2013 Research-status Report
    • Peer Reviewed / Open Access
  • [Presentation] グルコースの連続モニタリングに向けたZnO系溶液ゲートFETへの酵素固定化方法の改善2017

    • Author(s)
      森結菜,大西勇輔,池広大,広藤裕一,小池一歩,矢野満明
    • Organizer
      第64回応用物理学会春季学術講演会
    • Place of Presentation
      パシフィコ横浜(神奈川県,横浜市)
    • Year and Date
      2017-03-14
    • Related Report
      2016 Annual Research Report
  • [Presentation] プロトンをインターカレーションした単結晶WO3薄膜の状態保持特性2017

    • Author(s)
      桑形 航、美藤大輝、村上聡、岩田知也、小池一歩、原田義之、矢野満明、稲葉克彦、小林信太郎
    • Organizer
      第64回応用物理学会春季学術講演会
    • Place of Presentation
      パシフィコ横浜(神奈川県、横浜市)
    • Year and Date
      2017-03-14
    • Related Report
      2016 Annual Research Report
  • [Presentation] 集積型ヘルスケアチップ実現に向けたZnO系バイオFET2016

    • Author(s)
      森結菜,小池一歩,広藤裕一,矢野満明
    • Organizer
      平成28年度日本材料学会半導体エレクトロニクス部門委員会・ナノ材料部門委員会 合同研究会
    • Place of Presentation
      京都工芸繊維大学(京都府、京都市)
    • Year and Date
      2016-11-05
    • Related Report
      2016 Annual Research Report
  • [Presentation] MBE成長した単結晶WO3薄膜のエレクトロクロミック特性(2)2016

    • Author(s)
      村山喬之、桑形航行、原田義之、小池一歩、佐々誠彦、矢野満明、稲葉克彦、小林信太郎
    • Organizer
      第77回応用物理学会春季学術講演会
    • Place of Presentation
      朱鷺メッセ(新潟県、新潟市)
    • Year and Date
      2016-09-13
    • Related Report
      2016 Annual Research Report
  • [Presentation] Glucose sensing by an enzyme-modified ZnO-based FET2016

    • Author(s)
      M.Yano, K.Koike, Y.Mori, S.Sasa, Y.Hirofuji
    • Organizer
      Eurosensors 2016
    • Place of Presentation
      Budapest, Hungary
    • Year and Date
      2016-09-04
    • Related Report
      2016 Annual Research Report
    • Int'l Joint Research
  • [Presentation] 三酸化タングステン薄膜へのプロトンインターカレーション2016

    • Author(s)
      桑形航行、村山喬之、小池一歩、原田義之、佐々誠彦、矢野満明、小林信太郎、稲葉克彦
    • Organizer
      第2回半導体エレクトロニクス部門委員会第1回研究会
    • Place of Presentation
      大阪府立大学(大阪府、堺市)
    • Year and Date
      2016-07-30
    • Related Report
      2016 Annual Research Report
  • [Presentation] Electrochromic properties of single-crystalline tungsten trioxide films grown by molecular beam epitaxy2016

    • Author(s)
      M.Murayama, W.Kuwagata, K.Koike, Y.Harada, S.Sasa, M.Yano, S.Kobayashi, K.Inaba
    • Organizer
      2016 Int. Mtg. For Future of Electron Devices, Kansai
    • Place of Presentation
      Ryukoku University, Kyoto, Japan
    • Year and Date
      2016-06-23
    • Related Report
      2016 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Electrochromic Properties of Single-Crystalline Tungsten Trioxide films Grown by Molecular Beam Epitaxy2016

    • Author(s)
      T.Murayama, W.Kuwagata, K.Koike, Y.Harada, S.Sasa, M.Yano, S.Kobayashi, K.Inaba
    • Organizer
      2016 Int. Mtg. for Future of Electron Devices, Kansai
    • Place of Presentation
      Ryukoku University, Kyoto, Japan
    • Year and Date
      2016-06-23
    • Related Report
      2015 Research-status Report
    • Int'l Joint Research
  • [Presentation] MBE成長した単結晶WO3薄膜のエレクトロクロミック特性2016

    • Author(s)
      村山喬之,桑形航行,原田義之,小池一歩,佐々誠彦,矢野満明,小林信太郎,稲葉克彦
    • Organizer
      第63回応用物理学会春季学術講演会
    • Place of Presentation
      東京工業大学(神奈川県,横浜市)
    • Year and Date
      2016-03-19
    • Related Report
      2015 Research-status Report
  • [Presentation] 単結晶WO3薄膜を用いたエレクトロクロミック素子の作製と評価2016

    • Author(s)
      村山喬之,松尾昌幸,原田義之,小池一歩,佐々誠彦,矢野満明,小林信太郎,稲葉克彦
    • Organizer
      材料学会半導体エレクトロニクス部門研究会
    • Place of Presentation
      福井大学(福井県,福井市)
    • Year and Date
      2016-01-30
    • Related Report
      2015 Research-status Report
  • [Presentation] ワイドバンドギャップ半導体における放射線の影響2015

    • Author(s)
      矢野満明
    • Organizer
      電子情報通信学会
    • Place of Presentation
      大阪工業大学(大阪府,大阪市)
    • Year and Date
      2015-10-30
    • Related Report
      2015 Research-status Report
    • Invited
  • [Presentation] Growth and crystallographic characterization of molecular beam epitaxial WO3 and MoO3/WO3 thin films on sapphire substrates2015

    • Author(s)
      M.Yano, K.Koike, M.Matsuo, T.Murayama, Y.Harada, K.Inaba
    • Organizer
      European Materials Research Society
    • Place of Presentation
      Warsaw University of Technology, Poland
    • Year and Date
      2015-09-15
    • Related Report
      2015 Research-status Report
    • Int'l Joint Research
  • [Presentation] MBE成長したWO3薄膜のエレクトロクロミック特性2015

    • Author(s)
      松尾昌幸,村山喬之,原田義之,小池一歩,佐々誠彦,矢野満明,小林信太郎,稲葉克彦
    • Organizer
      第76回応用物理学会秋季学術講演会
    • Place of Presentation
      名古屋国際会議場(愛知県,名古屋市)
    • Year and Date
      2015-09-13
    • Related Report
      2015 Research-status Report
  • [Presentation] Molecular beam epitaxial growth and characterization of transition metal oxide WO3 films2015

    • Author(s)
      K.Koike
    • Organizer
      Workshop on Advanced Materials and Devices II
    • Place of Presentation
      大阪工業大学(大阪府,大阪市)
    • Year and Date
      2015-09-04
    • Related Report
      2015 Research-status Report
    • Int'l Joint Research
  • [Presentation] Polarity Dependent Radiation Hardness of GaN2015

    • Author(s)
      M.Matsuo, T.Murayama, K.Koike, S.Sasa, M.Yano, S.Gonda, A.Uendono, R.Ishigami, K.Kume, T.Ohtomo, E.Furukawa, Y.Yamazaki, K.Kojima, S.Chichibu
    • Organizer
      2015 Int. Mtg. for Future of Electron Devices, Kansai
    • Place of Presentation
      Ryukoku University, Kyoto, Japan
    • Year and Date
      2015-06-04
    • Related Report
      2015 Research-status Report
    • Int'l Joint Research
  • [Presentation] r面サファイア基板を用いたWO3薄膜のMBE成長2015

    • Author(s)
      松尾昌幸,村山喬之,原田義之,小池一歩,佐々誠彦,矢野満明,稲葉克彦,小林信太郎,
    • Organizer
      第62回応用物理学関係連合講演会
    • Place of Presentation
      東海大学 (神奈川県,平塚市)
    • Year and Date
      2015-03-11 – 2015-03-14
    • Related Report
      2014 Research-status Report
  • [Presentation] サファイア基板への酸化タングステン薄膜の分子線エピタキシャル成長2014

    • Author(s)
      八木信治,松尾昌幸,小池一歩,原田義之,佐々誠彦,矢野満明,稲葉克彦
    • Organizer
      第75回応用物理学会秋季学術講演会
    • Place of Presentation
      北海道大学 (北海道,札幌市)
    • Year and Date
      2014-09-17 – 2014-09-20
    • Related Report
      2014 Research-status Report
  • [Presentation] X線逆格子マップ測定によるc面サファイア基板上へのα-MoO3エピタキシャル 薄膜の結晶構造解析2014

    • Author(s)
      稲葉克彦,小林信太郎,八木信治,松尾昌幸,小池一歩,原田義之,佐々誠彦,矢野満明
    • Organizer
      第75回応用物理学会秋季学術講演会
    • Place of Presentation
      北海道大学 (北海道,札幌市)
    • Year and Date
      2014-09-17 – 2014-09-20
    • Related Report
      2014 Research-status Report
  • [Presentation] X-ray Reciprocal Space Mapping Analysis of alpha-MoO3 Epitaxial Thin Film on c-sapphire Substrate Grown by Molecular Beam Epitaxy2014

    • Author(s)
      K. Inaba, S. Kobayashi, S. Yagi, M. Matsuo, K. Koike, Y. Harada, S. Sasa, M. Yano
    • Organizer
      8th International Workshop on Zinc Oxide and Related Materials
    • Place of Presentation
      Sheraton on the Falls Hotel Niagara Falls, Ontario, Canada
    • Year and Date
      2014-09-07 – 2014-09-11
    • Related Report
      2014 Research-status Report
  • [Presentation] 三酸化モリブデン薄膜の分子線エピタキシャル成長と放射線耐性2014

    • Author(s)
      松尾昌幸, 八木信治,小池一歩,原田義之,佐々誠彦,矢野満明,石神龍哉,久米恭
    • Organizer
      日本材料学会半導体エレクトロニクス部門,平成26年度第1回研究会
    • Place of Presentation
      大阪大学 (大阪府,吹田市)
    • Year and Date
      2014-07-26
    • Related Report
      2014 Research-status Report
  • [Presentation] Postgrowth Annealing Effects on Structural, Optical, and Electrical Properties of beta-MoO3 Films Grown by Molecular Beam Epitaxy2014

    • Author(s)
      S. Yagi, M. Matsuo, K. Koike, Y. Harada, S. Sasa, M. Yano
    • Organizer
      2014 International Meeting for Future of Electron Devices, Kansai
    • Place of Presentation
      Ryukoku University, Japan
    • Year and Date
      2014-06-19 – 2014-06-20
    • Related Report
      2014 Research-status Report
  • [Presentation] Postgrowth annealing effects on structural, optical, and electrical properties of MoO3 films grown by molecular beam epitaxy2014

    • Author(s)
      S. Yagi, M. Matsuo, K. Koike, S. Sasa, M. Yano
    • Organizer
      The 2014 Inter. Meeting for Future of Electron Devices, Kansai
    • Place of Presentation
      Ryukoku Univ., Kyoto, Japan
    • Related Report
      2013 Research-status Report
  • [Presentation] Characteristics of MoO3 films grown by molecular beam epitaxy

    • Author(s)
      R. Wada, S. Yagi, K. Koike, Y. Harada, S. Sasa, M. Yano
    • Organizer
      2013 JSAP-MRS Joint Symposia
    • Place of Presentation
      Doshisya Univ., Kyoto, Japan
    • Related Report
      2013 Research-status Report
  • [Presentation] サファイア基板上にMBE成長したMoO3薄膜の結晶構造評価

    • Author(s)
      八木信治,松尾昌幸,小池一歩,原田義之,佐々誠彦,矢野満明,稲葉克彦
    • Organizer
      第61回応用物理学関係連合講演会
    • Place of Presentation
      青山学院大学、東京
    • Related Report
      2013 Research-status Report
  • [Remarks] 大阪工業大学工学部電子情報通信工学科 新規能デバイス研究室

    • URL

      http://www.oit.ac.jp/elc/~koike/

    • Related Report
      2016 Annual Research Report
  • [Remarks] 大阪工業大学ナノ材料マイクロデバイス研究センター

    • URL

      http://www.oit.ac.jp/japanese/nanotech/

    • Related Report
      2016 Annual Research Report 2015 Research-status Report
  • [Remarks] 大阪工業大学工学部電子情報通信工学科 新機能デバイス研究室

    • URL

      http://www.oit.ac.jp/elc/~koike/

    • Related Report
      2015 Research-status Report
  • [Remarks] 大阪工業大学工学部電子情報通信工学科 新機能デバイス研究室HP

    • URL

      https://www.oit.ac.jp/elc/~koike/

    • Related Report
      2014 Research-status Report
  • [Remarks] 大阪工業大学工学部電子情報通信工学科 新機能デバイス研究室HP

    • URL

      http://www.oit.ac.jp/elc/~koike/

    • Related Report
      2013 Research-status Report
  • [Remarks] 大阪工業大学ナノ材料マイクロデバイス研究センターHP

    • URL

      http://www.oit.ac.jp/japanese/nanotech/

    • Related Report
      2013 Research-status Report

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Published: 2014-07-25   Modified: 2019-07-29  

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