• Search Research Projects
  • Search Researchers
  • How to Use
  1. Back to previous page

Design and development of MEMS-based thermal triple-axis accelerometer by computer simulation of unsteady thermofluid motion

Research Project

Project/Area Number 25390047
Research Category

Grant-in-Aid for Scientific Research (C)

Allocation TypeMulti-year Fund
Section一般
Research Field Nano/Microsystems
Research InstitutionRitsumeikan University

Principal Investigator

Ogami Yoshifumi  立命館大学, 理工学部, 教授 (30203722)

Co-Investigator(Kenkyū-buntansha) DINH XuanThien  立命館大学, 理工学研究科, 研究員 (40469200)
FUKUDOME Kouji  立命館大学, 理工学部, 助教 (70710698)
Project Period (FY) 2013-04-01 – 2016-03-31
Project Status Completed (Fiscal Year 2015)
Budget Amount *help
¥5,070,000 (Direct Cost: ¥3,900,000、Indirect Cost: ¥1,170,000)
Fiscal Year 2015: ¥2,080,000 (Direct Cost: ¥1,600,000、Indirect Cost: ¥480,000)
Fiscal Year 2014: ¥1,950,000 (Direct Cost: ¥1,500,000、Indirect Cost: ¥450,000)
Fiscal Year 2013: ¥1,040,000 (Direct Cost: ¥800,000、Indirect Cost: ¥240,000)
Keywordsナノマイクロセンサー / 加速度センサー / MEMS / 数値流体力学 / 熱流体
Outline of Final Research Achievements

A microelectromechanical system-based thermal triple-axis accelerometer, which can detect triaxial accelerations by utilizing the buoyancy of thermofluid, was developed via computer simulations.
First, the optimal positions of thermometers were determined. Second, the measurement performances of a ring heater, arc heater, and point heater were examined. Third, using macroscale analysis, similarity of the flow about accelerometers of different sizes was realized by employing the same value of the Grashof number. An accelerometer 20 times larger was built and tested. The output was proportional to the acceleration, thereby confirming the operating principle of the device. Fourth, the output response from the thermal triple-axis accelerometer in unsteady state was studied. The amplitude and the phase lag of the output were analyzed by varying the acceleration input from 0 Hz to 5000 Hz. The upper limit of the frequency for practical measurement was determined.

Report

(4 results)
  • 2015 Annual Research Report   Final Research Report ( PDF )
  • 2014 Research-status Report
  • 2013 Research-status Report
  • Research Products

    (9 results)

All 2016 2015 Other

All Presentation (9 results) (of which Int'l Joint Research: 2 results)

  • [Presentation] Analysis of MEMS-Based Thermal Triple-Axis Accelerometer2016

    • Author(s)
      N. Murakita, Y. Ogami and K. Fukudome
    • Organizer
      First Pacific Rim Thermal Engineering Conference, PRTEC
    • Place of Presentation
      Hawaii's Big Island, USA
    • Year and Date
      2016-03-16
    • Related Report
      2015 Annual Research Report
    • Int'l Joint Research
  • [Presentation] MEMS による熱検知型3 軸加速度センサーの応答に関する解析2016

    • Author(s)
      村北直哉, 竹田隼悟,福留功二,大上芳文
    • Organizer
      日本機械学会関西支部第91期定時総会講演会
    • Place of Presentation
      大阪電気通信大学 寝屋川キャンパス(大阪府寝屋川市)
    • Year and Date
      2016-03-11
    • Related Report
      2015 Annual Research Report
  • [Presentation] 熱検知型3 軸加速度センサーの設計と数値流体解析2016

    • Author(s)
      竹田隼悟,村北直哉, 福留功二,大上芳文
    • Organizer
      関西学生会平成27年度学生員卒業研究発表講演会
    • Place of Presentation
      大阪電気通信大学 寝屋川キャンパス(大阪府寝屋川市)
    • Year and Date
      2016-03-10
    • Related Report
      2015 Annual Research Report
  • [Presentation] Development of MEMS-Based Thermal Triple-Axis Accelerometer2015

    • Author(s)
      N. Murakita, Y. Ogami and K. Fukudome
    • Organizer
      12th International Conference on Flow Dynamics
    • Place of Presentation
      Sendai International Center(宮城県仙台市)
    • Year and Date
      2015-10-28
    • Related Report
      2015 Annual Research Report
    • Int'l Joint Research
  • [Presentation] MEMS による熱検知型3 軸加速度センサーの設計と解析2015

    • Author(s)
      村北直哉,福留功二,大上 芳文
    • Organizer
      日本機械学会関西学生会学生員卒業研究発表講演会
    • Place of Presentation
      京都大学 桂キャンパス(京都府)
    • Year and Date
      2015-03-14
    • Related Report
      2014 Research-status Report
  • [Presentation] Sensitivity and Response of a Triple-Axis Thermal MEMS-Based Acceleration Sensor

    • Author(s)
      Thien X. Dinh, Y. Ogami
    • Organizer
      Int. Conf. Material for Transducers and Sensors
    • Place of Presentation
      Prague, Czech Republic
    • Related Report
      2013 Research-status Report
  • [Presentation] Development of a Triple-Axis Acceleration Sensor

    • Author(s)
      Thien X. Dinh, Y. Ogami
    • Organizer
      10th Int. Conf. Flows Dynamics
    • Place of Presentation
      仙台国際センター(宮城県)
    • Related Report
      2013 Research-status Report
  • [Presentation] Design and Analysis of a Triple-Axis Thermal Accelerometer

    • Author(s)
      Thien X. Dinh, Y. Ogami
    • Organizer
      7th Int. Conf. Sensing Technology
    • Place of Presentation
      Wellington, New Zealand
    • Related Report
      2013 Research-status Report
  • [Presentation] MEMS による熱検知型加速度センサーの設計

    • Author(s)
      深井淳也,Dinh Xuan Thien,大上芳文
    • Organizer
      日本機械学会関西学生会平成25 年度学生員卒業研究発表講演会
    • Place of Presentation
      大阪府立大学(大阪府)
    • Related Report
      2013 Research-status Report

URL: 

Published: 2014-07-25   Modified: 2019-07-29  

Information User Guide FAQ News Terms of Use Attribution of KAKENHI

Powered by NII kakenhi