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Fundamental studies on carrier recombination process at the surface and interface to improve nitride-based optoelectronic device performance

Research Project

Project/Area Number 25390071
Research Category

Grant-in-Aid for Scientific Research (C)

Allocation TypeMulti-year Fund
Section一般
Research Field Crystal engineering
Research InstitutionKogakuin University (2015)
Tokyo National College of Technology (2013-2014)

Principal Investigator

Onuma Takeyoshi  工学院大学, 公私立大学の部局等, 准教授 (10375420)

Project Period (FY) 2013-04-01 – 2016-03-31
Project Status Completed (Fiscal Year 2015)
Budget Amount *help
¥5,200,000 (Direct Cost: ¥4,000,000、Indirect Cost: ¥1,200,000)
Fiscal Year 2015: ¥650,000 (Direct Cost: ¥500,000、Indirect Cost: ¥150,000)
Fiscal Year 2014: ¥1,820,000 (Direct Cost: ¥1,400,000、Indirect Cost: ¥420,000)
Fiscal Year 2013: ¥2,730,000 (Direct Cost: ¥2,100,000、Indirect Cost: ¥630,000)
Keywords窒化物半導体 / 酸化ガリウム / 酸化インジウムガリウム / ヘテロ構造 / 表面酸化膜 / 界面 / 時間分解フォトルミネセンス / 表面プラズモン / 窒化ガリウムインジウム / 半導体光物性 / 偏光依存性 / 窒化ガリウム / ショットキー / カソードルミネセンス / 半導体物性 / 結晶工学
Outline of Final Research Achievements

Carrier recombination process at the surface or interface is a crucial issue when the nitride-based optoelectronic devices are put into practical use, e.g., controlling the condition of the AlGaN surface states in the AlGaN/GaN heterostructure field-effect transistors. AlOx/AlN/GaN structures were prepared by the RF-MBE. Simultaneous changes in the emission energies and lifetimes were observed for the 2DEG related emission by changing in a crystallinity of the AlOx layer. The results demonstrate a possibility to control the surface states by changing in the surface oxide structure. Fundamental optical properties of Ga2O3 substrates were investigated for further improvements in the Ga2O3-based devices. Electrical and optical properties of ZnO films dispersed with Ag nanocrystals and their application in the GaInN-based blue LEDs were studied through the observations of surface plasmon resonant emission and analytical simulations.

Report

(4 results)
  • 2015 Annual Research Report   Final Research Report ( PDF )
  • 2014 Research-status Report
  • 2013 Research-status Report
  • Research Products

    (51 results)

All 2016 2015 2014 2013 Other

All Journal Article (7 results) (of which Peer Reviewed: 7 results,  Acknowledgement Compliant: 4 results,  Open Access: 1 results) Presentation (44 results) (of which Int'l Joint Research: 10 results,  Invited: 7 results)

  • [Journal Article] Temperature-dependent exciton resonance energies and their correlation with IR-active optical phonon modes in beta-Ga2O3 single crystals2016

    • Author(s)
      T.Onuma, S.Saito, K.Sasaki, K.Goto, T.Masui, T.Yamaguchi, T.Honda, A.Kuramata, and M.Higashiwaki
    • Journal Title

      Applied Physics Letters

      Volume: 108 Issue: 10 Pages: 1019041-5

    • DOI

      10.1063/1.4943175

    • Related Report
      2015 Annual Research Report
    • Peer Reviewed / Acknowledgement Compliant
  • [Journal Article] Valence band ordering in beta-Ga2O3 studied by polarized transmittance and reflectance spectroscopy2015

    • Author(s)
      T.Onuma, S.Saito, K.Sasaki, T.Masui, T.Yamaguchi, T.Honda, and M.Higashiwaki
    • Journal Title

      Japanese Journal of Applied Physics

      Volume: 54 Issue: 11 Pages: 1126011-5

    • DOI

      10.7567/jjap.54.112601

    • Related Report
      2015 Annual Research Report
    • Peer Reviewed / Acknowledgement Compliant
  • [Journal Article] Impacts of AlOx formation on emission properties of AlN/GaN heterostructures2015

    • Author(s)
      Takeyoshi Onuma, Yohei Sugiura, Tomohiro Yamaguchi, Tohru Honda, and Masataka Higashiwaki
    • Journal Title

      Applied Physics Express

      Volume: 8 Issue: 5 Pages: 0524011-3

    • DOI

      10.7567/apex.8.052401

    • Related Report
      2014 Research-status Report
    • Peer Reviewed / Acknowledgement Compliant
  • [Journal Article] Optical properties of Ga0.82In0.18N p-n homojunction blue-green light-emitting-diode grown by radio-frequency plasma-assisted molecular beam epitaxy2015

    • Author(s)
      尾沼猛儀、山口智広、本田徹他7名
    • Journal Title

      Transactions of the Materials Research Society of Japan

      Volume: 印刷中

    • NAID

      130005089534

    • Related Report
      2014 Research-status Report
    • Peer Reviewed / Acknowledgement Compliant
  • [Journal Article] Polarized Raman spectra in β-Ga2O3 single crystals2014

    • Author(s)
      T. Onuma, S. Fujioka, T. Yamaguchi, Y. Itoh, M. Higashiwaki, K. Sasaki, T. Masui, and T. Honda
    • Journal Title

      Journal of Crystal Growth

      Volume: in press Pages: 330-333

    • DOI

      10.1016/j.jcrysgro.2013.12.061

    • Related Report
      2013 Research-status Report
    • Peer Reviewed
  • [Journal Article] Cathodoluminescence spectra of Ga-In-O Polycrystalline films fabricated by molecular precursor method2014

    • Author(s)
      尾沼猛儀、山口智広、本田徹他10名
    • Journal Title

      Japanese Journal of Applied Physics

      Volume: 53 Issue: 5S1 Pages: 05FF02-05FF02

    • DOI

      10.7567/jjap.53.05ff02

    • NAID

      210000143831

    • Related Report
      2013 Research-status Report
    • Peer Reviewed / Open Access
  • [Journal Article] Correlation between blue luminescence intensity and resistivity in β-Ga2O3 single crystals2013

    • Author(s)
      T. Onuma, S. Fujioka, T. Yamaguchi, M. Higashiwaki, K. Sasaki, T. Masui, and T. Honda
    • Journal Title

      Applied Physcs Letters

      Volume: 103 Issue: 4 Pages: 0419101-3

    • DOI

      10.1063/1.4816759

    • Related Report
      2013 Research-status Report
    • Peer Reviewed
  • [Presentation] Optical characterization of Gallium Oxide2016

    • Author(s)
      T.Onuma
    • Organizer
      German-Japanese Gallium Oxide Technology Meeting 2016 (GJGOTM2016)
    • Place of Presentation
      Berlin, Germany
    • Year and Date
      2016-09-07
    • Related Report
      2015 Annual Research Report
    • Int'l Joint Research / Invited
  • [Presentation] Surface plasmon resonant emission from Ag dispersed ZnO films fabricated by molecular precursor method2016

    • Author(s)
      D.Taka, T.Onuma, T.Shibukawa, H.Nagai, T.Yamaguchi, J-.S.Jang, M.Sato, and T.Honda
    • Organizer
      The 43rd International Symposium on Compound Semiconductors (ISCS 2016)
    • Place of Presentation
      富山国際会議場(富山県・富山市)
    • Year and Date
      2016-06-27
    • Related Report
      2015 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Anisotropic optical constants in beta-Ga2O3 single crystal2016

    • Author(s)
      T.Onuma, S.Saito, K.Sasaki, T.Masui, T.Yamaguchi, T.Honda, A.Kuramata, and M.Higashiwaki
    • Organizer
      58th Electronic Materials Conference (EMC-58)
    • Place of Presentation
      Newark, Delaware, USA
    • Year and Date
      2016-06-23
    • Related Report
      2015 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Optical properties of ZnO films dispersed with Ag nanocrystals fabricated by molecular precursor method2016

    • Author(s)
      D.Taka, T.Onuma, T.Shibukawa, H.Nagai, T.Yamaguchi, J-.S.Jang, M.Sato, and T.Honda
    • Organizer
      International Conference on Light-Emitting Devices and Thier Industrial Applications ’16 (LEDIA ’16)
    • Place of Presentation
      パシフィコ横浜(神奈川県・横浜市)
    • Year and Date
      2016-05-19
    • Related Report
      2015 Annual Research Report
    • Int'l Joint Research
  • [Presentation] beta-Ga2O3結晶における励起子-LOフォノン相互作用2016

    • Author(s)
      尾沼猛儀, 齋藤伸吾, 佐々木公平, 後藤健, 増井建和, 山口智広, 本田徹, 倉又朗人, 東脇正高
    • Organizer
      2016年春季応用物理学会
    • Place of Presentation
      東京工業大学大岡山キャンパス(東京都・目黒区)
    • Year and Date
      2016-03-21
    • Related Report
      2015 Annual Research Report
  • [Presentation] 分子プレカーサー法で製作した銀分散ZnO薄膜の光学的特性2016

    • Author(s)
      高大地, 尾沼猛儀, 澁川貴史, 永井裕己, 山口智広, Ja-Soon Jang, 佐藤光史, 本田徹
    • Organizer
      2016年春季応用物理学会
    • Place of Presentation
      東京工業大学大岡山キャンパス(東京都・目黒区)
    • Year and Date
      2016-03-19
    • Related Report
      2015 Annual Research Report
  • [Presentation] Valence band structure of monoclinic gallium oxide studied by polarized optical measurements2015

    • Author(s)
      T.Onuma, S.Saito, K.Sasaki, K.Goto, T.Masui, T.Yamaguchi, T.Honda, and M.Higashiwaki
    • Organizer
      The Collaborative Conference on Crystal Growth 2015 (3CG 2015)
    • Place of Presentation
      Hong Kong
    • Year and Date
      2015-12-15
    • Related Report
      2015 Annual Research Report
    • Int'l Joint Research / Invited
  • [Presentation] Optical Anisotropy in (010) Plane of beta-Ga2O3 Single Crystals2015

    • Author(s)
      T.Onuma, S.Saito, K.Sasaki, K.Goto, T.Masui, T.Yamaguchi, T.Honda, and M.Higashiwaki
    • Organizer
      1st International Workshop on Gallium Oxide and Related Materials
    • Place of Presentation
      京都大学・ローム記念館(京都府・京都市)
    • Year and Date
      2015-11-06
    • Related Report
      2015 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Fundamental Study on Local Surface Plasmons in Ag-nanocrystallites ZnO films toward Future Applications in Nitride-based LEDs2015

    • Author(s)
      D.Taka, T.Onuma, T.Shibukawa, H.Nagai, T.Yamaguchi, M.Sato, and T.Honda
    • Organizer
      The 14th International Symposium on Advanced Technology (ISAT-14)
    • Place of Presentation
      工学院大学(東京都・八王子市)
    • Year and Date
      2015-11-02
    • Related Report
      2015 Annual Research Report
    • Int'l Joint Research
  • [Presentation] beta-Ga2O3結晶の(010)面における光学的異方性2015

    • Author(s)
      尾沼猛儀, 齋藤伸吾, 佐々木公平, 増井建和, 山口智広, 本田徹, 東脇正高
    • Organizer
      2015年秋季応用物理学会
    • Place of Presentation
      名古屋国際会議場(愛知県・名古屋市)
    • Year and Date
      2015-09-15
    • Related Report
      2015 Annual Research Report
  • [Presentation] Study on spontaneous emission in nitride-based LEDs with Ag-nanocrystallites ZnO films fabricated by molecular precursor method2015

    • Author(s)
      T.Onuma, T.Shibukawa, D.Taka, K.Serizawa, E.Adachi, H.Nagai, T.Yamaguchi, J.-S.Jang, M.Sato, and T.Honda
    • Organizer
      22nd International Society of Pure & Applied Coordination Chemistry Symposium (SPACC 22)
    • Place of Presentation
      University of Namibia, Namibia
    • Year and Date
      2015-08-14
    • Related Report
      2015 Annual Research Report
    • Int'l Joint Research / Invited
  • [Presentation] Determination of Direct and Indirect Bandgap-Energies of beta-Ga2O3 by Polarized Transmittance and Reflectance Spectroscopy2015

    • Author(s)
      T.Onuma, S.Saito, K.Sasaki, T.Masui, T.Yamaguchi, T.Honda, and M.Higashiwaki
    • Organizer
      57th Electronic Materials Conference (EMC-57)
    • Place of Presentation
      Columbus, Ohio, USA
    • Year and Date
      2015-06-24
    • Related Report
      2015 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Optical Anisotropy in beta-Ga2O3 Crystals Grown by Melt-Growth Methods2015

    • Author(s)
      T.Onuma, S.Saito, K.Sasaki, T.Masui, T.Yamaguchi, T.Honda, and M.Higashiwaki
    • Organizer
      International Conference on Light-Emitting Devices and Thier Industrial Applications ’15 (LEDIA ’15)
    • Place of Presentation
      パシフィコ横浜(神奈川県・横浜市)
    • Year and Date
      2015-04-24
    • Related Report
      2015 Annual Research Report
    • Int'l Joint Research
  • [Presentation] beta-Ga2O3結晶の透過と反射スペクトルの偏光依存性2015

    • Author(s)
      尾沼猛儀、本田徹、東脇正高他2名
    • Organizer
      2015年春季応用物理学会
    • Place of Presentation
      東海大学湘南キャンパス(神奈川県・平塚市)
    • Year and Date
      2015-03-12
    • Related Report
      2014 Research-status Report
  • [Presentation] Properties of near-UV transparent Ga-In-O electrode in GaN-based MOS-LED2014

    • Author(s)
      藤岡秀平、尾沼猛儀、本田徹他4名
    • Organizer
      ISSLED2014
    • Place of Presentation
      Kaohsiung, Taiwan
    • Year and Date
      2014-12-15
    • Related Report
      2014 Research-status Report
  • [Presentation] Optical characterization of gallium-indium-oxide wide bandgap semiconductors for future device applications2014

    • Author(s)
      尾沼猛儀、佐藤光史、本田徹他3名
    • Organizer
      The Joint symposia of the 1st IFAEE and the 21st International SPACC Symposium
    • Place of Presentation
      工学院大学(東京都・新宿区)
    • Year and Date
      2014-11-01
    • Related Report
      2014 Research-status Report
    • Invited
  • [Presentation] Ga2O3基板の光学的特性評価2014

    • Author(s)
      尾沼猛儀、本田徹、東脇正高他4名
    • Organizer
      ワイドギャップ半導体光・電子デバイス第162委員会
    • Place of Presentation
      京都大学東京オフィス(東京都・港区)
    • Year and Date
      2014-09-26
    • Related Report
      2014 Research-status Report
    • Invited
  • [Presentation] AlOx/AlN/GaNヘテロ構造の発光特性2014

    • Author(s)
      尾沼猛儀、本田徹、東脇正高他2名
    • Organizer
      2014年秋季応用物理学会
    • Place of Presentation
      北海道大学(北海道・札幌市)
    • Year and Date
      2014-09-20
    • Related Report
      2014 Research-status Report
  • [Presentation] Optical properties of GaInN p-n homojunction blue-green light-emitting-diodes2014

    • Author(s)
      尾沼猛儀、山口智広、本田徹他7名
    • Organizer
      IUMRS-ICA 2014
    • Place of Presentation
      福岡大学(福岡県・福岡市)
    • Year and Date
      2014-08-25
    • Related Report
      2014 Research-status Report
    • Invited
  • [Presentation] Impact of UV transparent Ga-In-O electrode in vertical-type GaN-based metal oxide semiconductor light-emitting diodes2014

    • Author(s)
      藤岡秀平、尾沼猛儀、本田徹他5名
    • Organizer
      33th Electronic Materials Symposium
    • Place of Presentation
      ラフォーレ修善寺(静岡県・伊豆市)
    • Year and Date
      2014-07-11
    • Related Report
      2014 Research-status Report
  • [Presentation] RF-MBE Growth of pn-GaInN Structure and Fabrication of Blue-Green Homojunction-Type Light Emitting Diode2014

    • Author(s)
      鳴谷健人、尾沼猛儀、山口智広他7名
    • Organizer
      Conference on LED and Its Industrial Application ’14
    • Place of Presentation
      パシフィコ横浜(神奈川県・横浜市)
    • Year and Date
      2014-04-24
    • Related Report
      2014 Research-status Report
  • [Presentation] Fabrication of Vertical-Type GaN-Based Metal Oxide Semiconductor Light-Emitting Diodes2014

    • Author(s)
      藤岡秀平、尾沼猛儀、本田徹他5名
    • Organizer
      Conference on LED and Its Industrial Application ’14
    • Place of Presentation
      パシフィコ横浜(神奈川県・横浜市)
    • Year and Date
      2014-04-24
    • Related Report
      2014 Research-status Report
  • [Presentation] Optical Properties of Ga-In-O Polycrystalline Films Fabricated by Molecular Precursor Method2014

    • Author(s)
      尾沼猛儀、山口智広、本田徹他9名
    • Organizer
      Conference on LED and Its Industrial Application ’14
    • Place of Presentation
      パシフィコ横浜(神奈川県・横浜市)
    • Year and Date
      2014-04-23
    • Related Report
      2014 Research-status Report
  • [Presentation] Cathodoluminescence Spectra of beta-gallium Oxide Thin Film Fabricated by Molecular Precursor Method

    • Author(s)
      高野宗一郎、尾沼猛儀、本田徹、佐藤光史他4名
    • Organizer
      Conference on LED and Its Industrial Application ’13
    • Place of Presentation
      パシフィコ横浜
    • Related Report
      2013 Research-status Report
  • [Presentation] Surface Modification of GaN Crystals and Its Effects on Optical Properties

    • Author(s)
      藤岡秀平、尾沼猛儀、本田徹他2名
    • Organizer
      Conference on LED and Its Industrial Application ’13
    • Place of Presentation
      パシフィコ横浜
    • Related Report
      2013 Research-status Report
  • [Presentation] Temperature Dependent Cathodoluminescence Spectra of beta-Ga2O3 Crystals

    • Author(s)
      尾沼猛儀、東脇正高、本田徹他4名
    • Organizer
      Conference on LED and Its Industrial Application ’13
    • Place of Presentation
      パシフィコ横浜
    • Related Report
      2013 Research-status Report
  • [Presentation] Polarized Raman Spectra in beta-Ga2O3 Crystals

    • Author(s)
      尾沼猛儀、東脇正高、本田徹他4名
    • Organizer
      The 17th International Conference on Crystal Growth and Epitaxy
    • Place of Presentation
      Warsaw, Poland
    • Related Report
      2013 Research-status Report
  • [Presentation] RF-MBE growth of GaN films on nitridated alfa-Ga2O3 buffer layer

    • Author(s)
      山口智広、尾沼猛儀、本田徹他3名
    • Organizer
      The 17th International Conference on Crystal Growth and Epitaxy
    • Place of Presentation
      Warsaw, Poland
    • Related Report
      2013 Research-status Report
  • [Presentation] Temperature dependent cathodoluminescence spectra of Ga-In-O films fabricated by molecular precursor method

    • Author(s)
      尾沼猛儀、本田徹、佐藤光史他7名
    • Organizer
      The 2013 JSAP-MRS Joint Symposia
    • Place of Presentation
      同志社大学
    • Related Report
      2013 Research-status Report
  • [Presentation] Effects of (Al,Ga)Ox/GaN interface states on GaN-based Schottky-type light-emitting diodes

    • Author(s)
      藤岡秀平、尾沼猛儀、本田徹他2名
    • Organizer
      The 2nd International Conference on Advanced Electromaterials
    • Place of Presentation
      Jeju, Korea
    • Related Report
      2013 Research-status Report
  • [Presentation] Ga2O3 and In2O3 growth by mist CVD

    • Author(s)
      田沼圭亮、山口智広、尾沼猛儀他2名
    • Organizer
      The 12th International Symposium on Advanced Technology
    • Place of Presentation
      Tainan, Taiwan
    • Related Report
      2013 Research-status Report
  • [Presentation] Mist CVD growth of beta-Ga2O3 on sapphire substrates and RF-MBE growth of GaN on beta-Ga2O3/sapphire templetes

    • Author(s)
      畠山匠、山口智広、尾沼猛儀他4名
    • Organizer
      The 12th International Symposium on Advanced Technology
    • Place of Presentation
      Tainan, Taiwan
    • Related Report
      2013 Research-status Report
  • [Presentation] Impact of ultra-thin InN layers in GaN matrix for light-emitting diodes with super weak waveguides

    • Author(s)
      多次見大樹、尾沼猛儀、本田徹他3名
    • Organizer
      32th Electronic Materials Symposium
    • Place of Presentation
      ラフォーレ琵琶湖
    • Related Report
      2013 Research-status Report
  • [Presentation] Effects of surface modification on emission property of GaN Schottky diodes

    • Author(s)
      藤岡秀平、尾沼猛儀、本田徹他2名
    • Organizer
      32th Electronic Materials Symposium
    • Place of Presentation
      ラフォーレ琵琶湖
    • Related Report
      2013 Research-status Report
  • [Presentation] 光・電子線を用いたワイドギャップ窒化物・酸化物半導体の評価

    • Author(s)
      尾沼猛儀
    • Organizer
      第5回半導体材料・デバイスフォーラム
    • Place of Presentation
      ネストホテル熊本
    • Related Report
      2013 Research-status Report
    • Invited
  • [Presentation] ミストCVD 法を用いたGa2O3及びIn2O3成長

    • Author(s)
      田沼圭亮、山口智広、尾沼猛儀他2名
    • Organizer
      第43回結晶成長国内会議
    • Place of Presentation
      長野市生涯学習センター
    • Related Report
      2013 Research-status Report
  • [Presentation] Ga2O3上GaN成長とGaN上Ga2O3成長

    • Author(s)
      山口智広、尾沼猛儀、本田徹他2名
    • Organizer
      第43回結晶成長国内会議
    • Place of Presentation
      長野市生涯学習センター
    • Related Report
      2013 Research-status Report
  • [Presentation] beta-Ga2O3結晶における青色発光強度と抵抗率の相関

    • Author(s)
      尾沼猛儀、東脇正高、本田徹他4名
    • Organizer
      2013年秋季応用物理学会
    • Place of Presentation
      同志社大学
    • Related Report
      2013 Research-status Report
  • [Presentation] ミストCVD法を用いたGaN基板上へのGa2O3成長

    • Author(s)
      多次見大樹、尾沼猛儀、山口智広、他5名
    • Organizer
      2013年秋季応用物理学会
    • Place of Presentation
      同志社大学
    • Related Report
      2013 Research-status Report
  • [Presentation] GaN系ショットキー型発光ダイオードにおける(Al,Ga)Ox/GaN界面準位の影響

    • Author(s)
      藤岡秀平、尾沼猛儀、本田徹他2名
    • Organizer
      2013年秋季応用物理学会
    • Place of Presentation
      同志社大学
    • Related Report
      2013 Research-status Report
  • [Presentation] 分子プリカーサー法で製作したGa-In-O多結晶薄膜の発光特性

    • Author(s)
      尾沼猛儀、山口智広、本田徹他9名
    • Organizer
      2014年春季応用物理学会
    • Place of Presentation
      青山学院大学
    • Related Report
      2013 Research-status Report
  • [Presentation] ミストCVD法を用いたGa2O3結晶成長における成長速度の温度依存性

    • Author(s)
      田沼圭亮、尾沼猛儀、山口智広他3名
    • Organizer
      2014年春季応用物理学会
    • Place of Presentation
      青山学院大学
    • Related Report
      2013 Research-status Report
  • [Presentation] 自立GaN基板上m面Al1-xInxNエピタキシャル薄膜の発光特性(I)

    • Author(s)
      秩父重英、尾沼猛儀他7名
    • Organizer
      2014年春季応用物理学会
    • Place of Presentation
      青山学院大学
    • Related Report
      2013 Research-status Report
  • [Presentation] GaInNのRF-MBE成長とpn ホモ接合型青緑色LEDの製作

    • Author(s)
      鳴谷建人、山口智広、尾沼猛儀他7名
    • Organizer
      2014年春季応用物理学会
    • Place of Presentation
      青山学院大学
    • Related Report
      2013 Research-status Report

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Published: 2014-07-25   Modified: 2019-07-29  

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