Textured surface structures formed using newtechniques on transparent conducting Al-doped zinc oxide films prepared by magnetron sputtering
| Project/Area Number |
25390084
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| Research Category |
Grant-in-Aid for Scientific Research (C)
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| Allocation Type | Multi-year Fund |
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| Section | 一般 |
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| Research Field |
Thin film/Surface and interfacial physical properties
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| Research Institution | Kanazawa Institute of Technology |
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Principal Investigator |
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| Co-Investigator(Renkei-kenkyūsha) |
MIYATA Toshihiro 金沢工業大学, 工学部, 教授 (30257448)
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| Project Period (FY) |
2013-04-01 – 2016-03-31
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| Project Status |
Completed (Fiscal Year 2015)
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| Budget Amount *help |
¥5,200,000 (Direct Cost: ¥4,000,000、Indirect Cost: ¥1,200,000)
Fiscal Year 2015: ¥1,300,000 (Direct Cost: ¥1,000,000、Indirect Cost: ¥300,000)
Fiscal Year 2014: ¥1,820,000 (Direct Cost: ¥1,400,000、Indirect Cost: ¥420,000)
Fiscal Year 2013: ¥2,080,000 (Direct Cost: ¥1,600,000、Indirect Cost: ¥480,000)
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| Keywords | 金属酸化物薄膜 / 透明導電膜 / 酸化亜鉛 / 表面テクスチャ―構造 / 薄膜太陽電池 / ZnO / 表面テクスチャ― / 透明電極 / 表面テクスチャー / マグネトロンロンスパッタ |
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| Outline of Final Research Achievements |
Surface-textured Al-doped ZnO (AZO) films formed using two new techniques based on magnetron sputtering deposition were developed by optimizing the light scattering properties to be suitable for transparent electrode applications in thin-film silicon solar cells. Significant light scattering properties as well as a lowsheet resistance could be achieved in the double surface-textured AZO films. In addition, a significant improvement of external quantum efficiency in the range from the near ultraviolet to visible light was achieved in superstrate-type n-i-p μc-Si:H solar cells fabricated using a double surface-textured AZO film prepared under optimized conditions as the transparent electrode.
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Report
(4 results)
Research Products
(6 results)
