Textured surface structures formed using newtechniques on transparent conducting Al-doped zinc oxide films prepared by magnetron sputtering

• Project/Area Number: 25390084
• Research Category: Grant-in-Aid for Scientific Research (C)
• Allocation Type: Multi-year Fund
• Section: 一般
• Research Field: Thin film/Surface and interfacial physical properties
• Research Institution: Kanazawa Institute of Technology
• Principal Investigator: Minami Tadatsugu 金沢工業大学, 工学部, 教授 (70113032)
• Co-Investigator(Renkei-kenkyūsha): MIYATA Toshihiro 金沢工業大学, 工学部, 教授 (30257448)
• Project Period (FY): 2013-04-01 – 2016-03-31
• Project Status: Completed (Fiscal Year 2015)
• Budget Amount: ¥5,200,000 (Direct Cost: ¥4,000,000、Indirect Cost: ¥1,200,000); Fiscal Year 2015: ¥1,300,000 (Direct Cost: ¥1,000,000、Indirect Cost: ¥300,000); Fiscal Year 2014: ¥1,820,000 (Direct Cost: ¥1,400,000、Indirect Cost: ¥420,000); Fiscal Year 2013: ¥2,080,000 (Direct Cost: ¥1,600,000、Indirect Cost: ¥480,000)
• Keywords: 金属酸化物薄膜 / 透明導電膜 / 酸化亜鉛 / 表面テクスチャ―構造 / 薄膜太陽電池 / ZnO / 表面テクスチャ― / 透明電極 / 表面テクスチャー / マグネトロンロンスパッタ

Outline of Final Research Achievements

Surface-textured Al-doped ZnO (AZO) films formed using two new techniques based on magnetron sputtering deposition were developed by optimizing the light scattering properties to be suitable for transparent electrode applications in thin-film silicon solar cells. Significant light scattering properties as well as a lowsheet resistance could be achieved in the double surface-textured AZO films. In addition, a significant improvement of external quantum efficiency in the range from the near ultraviolet to visible light was achieved in superstrate-type n-i-p μc-Si:H solar cells fabricated using a double surface-textured AZO film prepared under optimized conditions as the transparent electrode.

Research Products

• [Journal Article] Textured surface structures formed using newtechniques on transparent onducting Al-doped zinc oxide films prepared by magnetron sputtering (2016)
  • Author(s): Tadatsugu Minami, Toshihiro Miyata, Ryousuke Uozaki, Hitoshi Sai, Takashi Koida
  • Journal Title: Thin Solid Films Volume: 00 Pages: 0000-0000
  • Peer Reviewed / Acknowledgement Compliant
• [Journal Article] Influence of the kind and content of doped impurities on impurity-doped ZnO transparent electrode applications in thin-film solar cells (2013)
  • Author(s): Jun-ichi Nomoto, Yuki Nishi, Toshihiro Miyata, Tadatsugu Minami
  • Journal Title: Thin Solid Films Volume: 534 Pages: 426-431
  • Peer Reviewed
• [Presentation] Textured surface structures formed using newtechniques on transparent onducting Al-doped zinc oxide films prepared by magnetron sputtering (2015)
  • Author(s): Tadatsugu Minami, Toshihiro Miyata, Ryousuke Uozaki, Hitoshi Sai, Takashi Koida
  • Organizer: STAC-9 & TOEO-9
  • Place of Presentation: つくば国際会議場
  • Year and Date: 2015-10-19
  • Int'l Joint Research
• [Presentation] AZO透明導電膜における表面テクスチャ構造の制御と最適化 (2015)
  • Author(s): 山中 俊憲, 宇於崎 涼介、宮田 俊弘, 南 内嗣
  • Organizer: 第62回応用物理学会春季学術講演会
  • Place of Presentation: 東海大学（神奈川県・平塚市）
  • Year and Date: 2015-03-10 – 2015-03-14
• [Presentation] Light scattering characteristics of surface-textured impurity-doped ZnO films prepared by magnetron sputtering (2014)
  • Author(s): T. Minami, and T.Miyata
  • Organizer: CECAM Workshp Nanostructured Zinc Oxide and related Materials
  • Place of Presentation: Bremen, Germany
  • Year and Date: 2014-06-15 – 2014-06-18
  • Invited
• [Book] 透明導電膜の新展開 III ―ITOとその代替材料開発の現状― (2015)
  • Author(s): 南 内嗣
  • Total Pages: 304
  • Publisher: シーエムシー出版