| Project/Area Number |
25390088
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| Research Category |
Grant-in-Aid for Scientific Research (C)
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| Allocation Type | Multi-year Fund |
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| Section | 一般 |
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| Research Field |
Optical engineering, Photon science
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| Research Institution | Tohoku University |
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Principal Investigator |
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| Project Period (FY) |
2013-04-01 – 2016-03-31
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| Project Status |
Completed (Fiscal Year 2015)
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| Budget Amount *help |
¥5,070,000 (Direct Cost: ¥3,900,000、Indirect Cost: ¥1,170,000)
Fiscal Year 2015: ¥1,560,000 (Direct Cost: ¥1,200,000、Indirect Cost: ¥360,000)
Fiscal Year 2014: ¥1,300,000 (Direct Cost: ¥1,000,000、Indirect Cost: ¥300,000)
Fiscal Year 2013: ¥2,210,000 (Direct Cost: ¥1,700,000、Indirect Cost: ¥510,000)
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| Keywords | 極紫外 / 軟X線 / 顕微鏡 / フーリエ結像論 / 多層膜ミラー / 結像論 / 軟X線顕微鏡 / フレネル数 |
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| Outline of Final Research Achievements |
When we apply soft X-rays, which have wavelengths in the range of 1 to 10 nm, to optical microscopy, high-spatial resolution of a few tens of nanometers can be expected in diffraction-limited imaging. To realize soft X-ray imaging with high-spatial resolution, high magnification of over x1000 should be required for an imaging objective of the microscope. As a result of increasing magnification, numerical aperture of this objective on an image plane, which is inversely proportional to magnification, should be reduced to be fairly small value.
In this study, firstly, we experimentally confirm imaging properties of the high-magnification objective with a greatly reduced numerical aperture on an image plane. Then we formalize the imaging properties of the objective by using these experimental results. We also discuss the effect of increasing the magnification on the imaging properties.
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