| Budget Amount *help |
¥5,200,000 (Direct Cost: ¥4,000,000、Indirect Cost: ¥1,200,000)
Fiscal Year 2015: ¥1,430,000 (Direct Cost: ¥1,100,000、Indirect Cost: ¥330,000)
Fiscal Year 2014: ¥1,820,000 (Direct Cost: ¥1,400,000、Indirect Cost: ¥420,000)
Fiscal Year 2013: ¥1,950,000 (Direct Cost: ¥1,500,000、Indirect Cost: ¥450,000)
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| Outline of Final Research Achievements |
For fast and precise three-dimensional shape measurement by tilt-ellipsometry, pseudo-dome type illumination using LEDs of more than 97% of degree of circular polarization was developed. We proposed calibration method by using fast four detectors polarimeter for adjustment of azimuthal angle of the liquid crystal variable retarder. Using circularly polarized light illumination, the same slope and azimuthal angles of the facet is obtained from the different polarization images measured at two wavelengths. High-sensitivity characteristic to the slope and azimuth of the tilt-ellipsometry could be successfully demonstrated.
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