Incident-angle-insensitive and polarization independent wavelength filter consisting of a metal nano-slit array

• Project/Area Number: 25390099
• Research Category: Grant-in-Aid for Scientific Research (C)
• Allocation Type: Multi-year Fund
• Section: 一般
• Research Field: Optical engineering, Photon science
• Research Institution: Osaka Prefecture University
• Principal Investigator: Kikuta Hisao 大阪府立大学, 工学(系)研究科(研究院), 教授 (10214743)
• Project Period (FY): 2013-04-01 – 2016-03-31
• Project Status: Completed (Fiscal Year 2015)
• Budget Amount: ¥5,070,000 (Direct Cost: ¥3,900,000、Indirect Cost: ¥1,170,000); Fiscal Year 2015: ¥1,040,000 (Direct Cost: ¥800,000、Indirect Cost: ¥240,000); Fiscal Year 2014: ¥1,300,000 (Direct Cost: ¥1,000,000、Indirect Cost: ¥300,000); Fiscal Year 2013: ¥2,730,000 (Direct Cost: ¥2,100,000、Indirect Cost: ¥630,000)
• Keywords: 金属ナノスリット / 光学フィルタ / 光共鳴 / メタマテリアル / ナノインプリント

Outline of Final Research Achievements

Optical filter with a metal nano-slit array has been developed. Optical properties of the filter are insensitive to angle of incidence and polarization of light. The metal slit structure was designed from the basic parameters determined from the rigorous coupled-wave analysis. The filter was fabricated with techniques of acrylic-resin nano-imprint and electroless copper plating. The reflection spectrum of the fabricated filter has an absorption peak due to the optical resonance in the metal slits.
The periodic structure with a metal layer was developed for a highly-sensitive refractive-index sensor as an application of the metal nano-slits array. Moreover, a method of laser processing with polarized light was proposed for making metal slits.

Research Products

• [Journal Article] Fourfold rotationally symmetrically polarized laser beam for drilling a square hole (2016)
  • Author(s): Hiroshi Kikuchi, Akio Mizutani, and Hisao Kikuta
  • Journal Title: Japanese Journal of Applied Physics, Volume 55, Number 4 Volume: 55 Issue: 4 Pages: 042701-042701
  • DOI: 10.7567/jjap.55.042701
  • NAID: 210000146235
• [Journal Article] Highly sensitive refractive index sensor using a resonant gratingwaveguide on a metal substrate (2015)
  • Author(s): A. Mizutani, S. Urakawa, H. Kikuta
  • Journal Title: Applied Optics Volume: 54 Issue: 13 Pages: 4161-4166
  • DOI: 10.1364/ao.54.004161
• [Journal Article] Built-in lens mask lithography (challenge for high-definition lens-less lithography) (2014)
  • Author(s): N. Ueda, M. Sasago, H. Kikuta, H. Kawata, Y. Hirai
  • Journal Title: Journal of Vacuum Science & Technology B Volume: 32 Issue: 6
  • DOI: 10.1116/1.4900604
  • Peer Reviewed
• [Presentation] 二層の金属三角格子構造を用いた垂直共鳴屈折率センサ (2015)
  • Author(s): 山下大輔、水谷彰夫、菊田久雄
  • Organizer: Optics & Photonics Japan 2015,
  • Place of Presentation: 筑波大学東京キャンパス文京校舎（東京都文京区）
  • Year and Date: 2015-10-28
• [Presentation] Hole shape control by a non-axisymmetrically polarized beam (2015)
  • Author(s): H. Kikuchi, A. Mizutani, H. Kikuta
  • Organizer: The 7th International Congress on Laser Advanced Material Processing
  • Place of Presentation: Kitakyushu International Conference Center （福岡県北九州市）
  • Year and Date: 2015-05-26
• [Presentation] 偏光無依存な垂直共鳴型屈折率センサ (2015)
  • Author(s): 山下大輔，水谷彰夫，菊田久雄，平井義彦，川田博昭
  • Organizer: 第62回応用物理学会学術講演会
  • Place of Presentation: 東海大学湘南キャンパス
  • Year and Date: 2015-03-11 – 2015-03-14
• [Presentation] ビルトインレンズマスクリソグラフィによる3次元露光の検討 (2014)
  • Author(s): 上田直樹，笹子勝，菊田久雄，川田博昭，平井義彦
  • Organizer: 第75回応用物理学会学術講演会
  • Place of Presentation: 北海道大学
  • Year and Date: 2014-09-17 – 2014-09-20
• [Presentation] 金属微細周期構造の近接場と内部反射光の位相シフトを考慮した有効媒質モデルのためのパラメータ抽出法 (2014)
  • Author(s): 水谷 彰夫，菊田 久雄
  • Organizer: 第61回応用物理学会春季講演会
  • Place of Presentation: 青山学院大学相模原キャンパス、神奈川
• [Presentation] Double layered wire-grid structure for a refractive index sensor (2014)
  • Author(s): E. Arakane, A. Mizutani, and H. Kikuta
  • Organizer: 9th International Coference on Optics-photonics Design & Fabrication
  • Place of Presentation: Itabashi Culture Center, Tokyo