Investigation of chemically reactive field in liquid induced by plasma exposure

• Project/Area Number: 25390107
• Research Category: Grant-in-Aid for Scientific Research (C)
• Allocation Type: Multi-year Fund
• Section: 一般
• Research Field: Plasma electronics
• Research Institution: Kanazawa University
• Principal Investigator: Ishijima Tatsuo 金沢大学, 学内共同利用施設等, 准教授 (00324450)
• Co-Investigator(Kenkyū-buntansha): UESUGI Yoshihiko 金沢大学, 理工研究域, 教授 (90213339) ; TANAKA Yasunori 金沢大学, 理工研究域, 教授 (90303263)
• Project Period (FY): 2013-04-01 – 2016-03-31
• Project Status: Completed (Fiscal Year 2015)
• Budget Amount: ¥5,070,000 (Direct Cost: ¥3,900,000、Indirect Cost: ¥1,170,000); Fiscal Year 2015: ¥1,300,000 (Direct Cost: ¥1,000,000、Indirect Cost: ¥300,000); Fiscal Year 2014: ¥1,300,000 (Direct Cost: ¥1,000,000、Indirect Cost: ¥300,000); Fiscal Year 2013: ¥2,470,000 (Direct Cost: ¥1,900,000、Indirect Cost: ¥570,000)
• Keywords: 反応性プラズマ / プラズマ－液体相互作用 / 液中・液界面反応 / OHラジカル / 化学プローブ / 発光分光計測 / ＯＨラジカル / 大気圧プラズマ

Outline of Final Research Achievements

Recently, there has been much attention in plasma-liquid interactions. Especially, Atmospheric pressure plasma jet(APPJ) has been widely investigated since it can generate reactive chemical species (radicals) in liquid medium easily. These radicals react with and give some effects to treated objects. Therefore, it is important to detect radicals in liquid and understand generation mechanism. To achieve this aim, we have investigated the correlation between APPJ characteristic in gas phase and chemical species in liquid. We adopted a schlieren method and optical emission spectroscopy. We also used a chemical probe method to measure chemical species induced in liquid. In conclusion, O2 gas admixture enhances OH generation rate in liquid, although OH optical emission intensity depletes, suggesting that excited OH radical in gas phase is not a key chemical species to produce OH in liquid and chemically reactive oxygen species originated from O2 gas enhances OH generation rate in liquid.

Research Products

• [Journal Article] Application of a Non-thermal Atmospheric Pressure Plasma Jet to the Decomposition of Salicylic Acid to Inorganic Carbon (2015)
  • Author(s): Kosuke Kuroda, Tatsuo Ishijima, Toshiki Kaga, Kai Shiomomura, Kazuaki Ninomiya, Kenji Takahashi
  • Journal Title: Chemistry Letters Volume: 44 Issue: 11 Pages: 1473-1475
  • DOI: 10.1246/cl.150656
  • NAID: 130005108076
  • ISSN: 0366-7022, 1348-0715
  • Peer Reviewed / Open Access / Int'l Joint Research
• [Journal Article] A simple technique to improve contractile effect of cold plasma jet on acute wound of mouse by dropping water. (2015)
  • Author(s): Nasruddin, Yukari Nakajima, Kanae Mukai, Emi Komatsu, Heni Setyowati Esti Rahayu, Muhammad Nur, Tatsuo Ishijima, Hiroshi Enomoto, Yoshihiko Uesugi, Junko Sugama, Toshio Nakatani
  • Journal Title: Plasma Processes and Polymers Volume: - Issue: 10 Pages: 1128-1138
  • DOI: 10.1002/ppap.201400236
  • Peer Reviewed / Open Access / Acknowledgement Compliant
• [Journal Article] Cold plasma on full-thickness cutaneous wound accelerates healing through promoting inflammation, re-epithelialization and wound contraction (2014)
  • Author(s): Nasruddin, Y. Nakajima, K. Mukai, H. Setyowati Esti Rahayu, Muhammad Nur, T. Ishijima, H. Enomoto, Y. Uesugi, J. Sugama, T. Nakatani
  • Journal Title: Clinical Plasma Medicine Volume: 2 Issue: 1 Pages: 1-5
  • DOI: 10.1016/j.cpme.2014.01.001
  • NAID: 120005411692
  • Peer Reviewed / Open Access
• [Journal Article] Evaluation of extra- and intracellular OH radical generation, cancer cell injury, and apoptosis induced by a non-thermal atmospheric-pressure plasma jet (2013)
  • Author(s): K. Ninomiya, T. Ishijima, M. Imamura, T. Yamahara, H. Enomoto, K. Takahashi, Y. Tanaka, Y. Uesugi, N. Shimizu
  • Journal Title: Journal of Physics D: Applied Physics Volume: 46 Issue: 42 Pages: 425401-425401
  • DOI: 10.1088/0022-3727/46/42/425401
  • Peer Reviewed
• [Journal Article] A High-Speed Photoresist Removal Process Using Multibubble Microwave Plasma under a Mixture of Multiphase Plasma Environment (2013)
  • Author(s): Tatuo Ishijima, Kohei Nosaka, Yasunori Tanaka, Yoshihiko Uesugi, Yousuke Goto and Hideo Horibe
  • Journal Title: Applied Physics Letters Volume: Vol.103, No.14 Issue: 14 Pages: 142101-142101
  • DOI: 10.1063/1.4823530
  • Peer Reviewed
• [Presentation] Development of Microwave Excited Bubble Plasma in Water at Low Microwave Power Injection (2016)
  • Author(s): T. Ishijma, T. Ito, T. Kitano, H. Suzuki, Y. Tanaka, Y. Uesugi
  • Organizer: Sixteenth International Symposium on Biomimetic Materials Processing (BMMP-16)
  • Place of Presentation: Nagoya University
  • Year and Date: 2016-01-24
  • Int'l Joint Research / Invited
• [Presentation] Production of Microwave Excited Bubble Plasma in Water at Low Microwave Power Injection (2015)
  • Author(s): T. Ishijima, T. Ito,T. Kitano, H . Suzuki, Y. Tanaka, Y. Uesugi, T. Nishiyama, and H. Horibe
  • Organizer: 25th Annual Meeting of MRS-Japan 2015
  • Place of Presentation: Yokohama Port Opening Plaza, Yokohama, Japan
  • Year and Date: 2015-12-08
  • Int'l Joint Research
• [Presentation] Development of High-speed and Environmentally Friendly Photoresist Removal Process using Pulsed Microwave Plasma in Water Vapor (2015)
  • Author(s): T. Ishijima, T. Kitano, T. Ito, H. Suzuki, Y. Tanaka, Y. Uesugi, T. Nishiyama, H. Horibe
  • Organizer: ICRP-9/GEC-68/SPP-33, KW1.00008
  • Place of Presentation: Hawaii Convention Center, Honolulu, Hawaii
  • Year and Date: 2015-10-14
  • Int'l Joint Research
• [Presentation] Development of High Speed Photoresist Ashing Process using Microwave Excited Bubble Plasma in Water (2015)
  • Author(s): T. Ishijima, T. Ito, T. Kitano, Y. Tanaka, Y. Uesugi, T. Nishiyama and H. Horibe
  • Organizer: The 32nd International Conference of Photopolymer Science and Technology, Materials & Processes for Advanced Micro-lithography, Nanotechnology and Phototechnology (ICPST-32)
  • Place of Presentation: International Conference Hall Makuhari Messe, Chiba
  • Year and Date: 2015-06-26
  • Int'l Joint Research / Invited
• [Presentation] Investigation of O2 Admixture Ratio Dependence on OH Radical Generation in Liquid using Low Frequency Atmospheric Pressure Plasma Jet with Atmosphere- controllable Chamber (2015)
  • Author(s): T. Ishijima, Y. Imazawa, Y. Otaki, T. Inomata, Y. Tanaka, and Y. Uesugi
  • Organizer: 3rd INTERNATIONAL WORKSHOP ON SOLUTION PLASMA AND MOLECULAR TECHNOLOGIES (SPM-3)
  • Place of Presentation: Chulalongkom University. Bangkok
  • Year and Date: 2015-05-07
  • Int'l Joint Research / Invited
• [Presentation] Environmentally Friendly High-Speed Photoresist Removal Process by Microwave Bubble Plasma in Water (2014)
  • Author(s): T. Ishijima
  • Organizer: International Conference on Microelectronics and Plasma Technology 2014
  • Place of Presentation: Gunsan Saemangeum Convention Center
  • Year and Date: 2014-07-08
• [Presentation] Investigation of Chemical Species Production Rates in Aqueous Solution Irradiated by Non-equilibrium Atmospheric Pressure Jet (2014)
  • Author(s): T. Ishijima, Y. Imazawa, T. Ito, M. Imamura, K. Ninomiya, K. Takahashi, Y. Tanaka, and Y. Uesugi
  • Organizer: 5th International Conference on Plasma Medicine
  • Place of Presentation: Nara Prefectural New Public Hall, Nara, Japan
  • Year and Date: 2014-05-19
• [Presentation] Development of environmentally-friendly photoresist removal process using microwave excited bubble plasma in Water (2014)
  • Author(s): T. Ishijima, H. Horibe, Y. Tanaka, Y. Uesugi
  • Organizer: 2nd International Workshop on Solution Plasma and Molecular Technologies
  • Place of Presentation: Korea Aerospace University, Korea
  • Year and Date: 2014-05-15 – 2015-05-15
  • Invited
• [Presentation] Investigation of Chemical Species Production Rates in Liquid Induced by Atmospheric Pressure DC Plasma Jet Irradiation (2014)
  • Author(s): T. Ishijima, T. Ito, R. Miyashita, Y. Tanaka, Y. Uesugi
  • Organizer: Fourteenth International Symposium on Biomimetic Materials Processing
  • Place of Presentation: Takayama, Japan
  • Invited
• [Presentation] Micropatterning of Oxide Films by Atmospheric Pressure Plasma Jet assisted Water Lift-off Process (2013)
  • Author(s): T. Niwa, T. Kawae, T. Ishijima, K. Nakanishi, Y. Imazawa, A. Morimoto
  • Organizer: The 2nd International Conference on Advanced Electromaterials
  • Place of Presentation: Jeju, Korea
• [Presentation] Development of Novel Photoresist Removal Process using Multi-Phase Plasma (2013)
  • Author(s): T. Ishijima, K. Nosaka, Y. Goto, H. Horibe, Y. Tanaka, Y. Uesugi
  • Organizer: International Conference on Surface Engineering (ICSE2013) The 50th Anniversary of the Korean Institute of Surface Engineering
  • Place of Presentation: Busan, Korea
  • Invited
• [Remarks] 金沢大学研究者情報
  • URL: http://ridb.kanazawa-u.ac.jp/public/detail.php?id=4031#tab2
• [Remarks] 金沢大学研究者情報
  • URL: http://ridb.kanazawa-u.ac.jp/public/detail.php?id=4031#tab2
• [Patent(Industrial Property Rights)] プラズマ生成装置 (2013)
  • Inventor(s): 榎本啓士、石島達夫、中谷壽男
  • Industrial Property Rights Holder: 榎本啓士、石島達夫、中谷壽男
  • Industrial Property Rights Type: 特許
  • Industrial Property Number: 2013-156805
  • Filing Date: 2013-07-29