| Budget Amount *help |
¥5,200,000 (Direct Cost: ¥4,000,000、Indirect Cost: ¥1,200,000)
Fiscal Year 2015: ¥1,040,000 (Direct Cost: ¥800,000、Indirect Cost: ¥240,000)
Fiscal Year 2014: ¥2,340,000 (Direct Cost: ¥1,800,000、Indirect Cost: ¥540,000)
Fiscal Year 2013: ¥1,820,000 (Direct Cost: ¥1,400,000、Indirect Cost: ¥420,000)
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| Outline of Final Research Achievements |
This work had been conducted paying attention to the oxygen atom radical that play important role in the plasma surface modification. Hydrophilic treatment of Polyimide surface was taken up as an example of surface modification. The oxygen atom radical densities of various plasma apparatus were measured by a platinum catalytic probe, and the relationship between the hydrophilic treatment and the oxygen atom radical density was discussed. The measurement method of the platinum catalytic probe was also discussed.
In the course of research carried out, the effect of the plasma was found to be important in the ozone dissociation on the metal surface.
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