Computational analysis of reactive particle flow in inductively coupled processing plasmas under confronting divergent magnetic fields
| Project/Area Number |
25400528
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| Research Category |
Grant-in-Aid for Scientific Research (C)
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| Allocation Type | Multi-year Fund |
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| Section | 一般 |
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| Research Field |
Plasma science
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| Research Institution | Hokkaido University |
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Principal Investigator |
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| Project Period (FY) |
2013-04-01 – 2016-03-31
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| Project Status |
Completed (Fiscal Year 2015)
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| Budget Amount *help |
¥3,900,000 (Direct Cost: ¥3,000,000、Indirect Cost: ¥900,000)
Fiscal Year 2015: ¥1,040,000 (Direct Cost: ¥800,000、Indirect Cost: ¥240,000)
Fiscal Year 2014: ¥1,430,000 (Direct Cost: ¥1,100,000、Indirect Cost: ¥330,000)
Fiscal Year 2013: ¥1,430,000 (Direct Cost: ¥1,100,000、Indirect Cost: ¥330,000)
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| Keywords | 磁化プラズマ / 誘導結合型プラズマ / フィルタ効果 / シミュレーション / 電子空間分布 / 電子エネルギー利得 / 磁界制御 / 電子サイクロトロン共鳴 |
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| Outline of Final Research Achievements |
Confronting divergent magnetic fields (CDMFs) divide an inductively coupled processing plasma into two parts of high and low plasma densities by suppressing electron diffusion. This effect was analyzed by computer simulations of electron motion.
The electron confinement by the separatrix of the CDMFs was confirmed to occur with electron capture by magnetic flux lines. In addition, it was found that a significant electron energy gain by the electron cyclotron resonance occurred even in a region far from the radio-frequency (rf) antenna used to drive the plasma.
The electron confinement worked well under strong magnetic fields, and the electron passage across the separatrix was energy-dependent. That across the outer separatrix tended to occur for high-energy electrons. On the other hand, that via the weak magnetic field (a magnetic aperture) inside the rf-resonant region was allowed even for low-energy electrons. An application of the separatrix as a magnetic shutter was proposed.
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Report
(4 results)
Research Products
(22 results)
