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High pressure and flat panel plasma sources for ultraviolet light-emitting from a large area to a small area

Research Project

Project/Area Number 25400533
Research Category

Grant-in-Aid for Scientific Research (C)

Allocation TypeMulti-year Fund
Section一般
Research Field Plasma science
Research InstitutionShizuoka University

Principal Investigator

MOON Jonghyun  静岡大学, 工学部, 助教 (30514947)

Co-Investigator(Renkei-kenkyūsha) NAKAMOTO Masayuki  静岡大学, 工学部, 教授 (10377723)
Project Period (FY) 2013-04-01 – 2016-03-31
Project Status Completed (Fiscal Year 2015)
Budget Amount *help
¥4,810,000 (Direct Cost: ¥3,700,000、Indirect Cost: ¥1,110,000)
Fiscal Year 2015: ¥910,000 (Direct Cost: ¥700,000、Indirect Cost: ¥210,000)
Fiscal Year 2014: ¥780,000 (Direct Cost: ¥600,000、Indirect Cost: ¥180,000)
Fiscal Year 2013: ¥3,120,000 (Direct Cost: ¥2,400,000、Indirect Cost: ¥720,000)
Keywords基礎・放電プラズマ / MEMS / 高気圧プラズマ / 微小突起アレイ陰極 / 紫外光
Outline of Final Research Achievements

Stable, low breakdown voltage discharges and nano-structured cathode arrays have been developed by using Transfer Mold emitter fabrication method and amorphous carbon thin film having a high hardness and a high chemical stability to realize highly efficient and reliable ultraviolet light-emitting plasma sources. Nano-structured Transfer Mold cathode array plasma sources having emitter sizes of as small as 41 nm, exhibited the extremely low breakdown voltages and the small discharge current fluctuations of as low as 160 V and 1.8%, being compared with 0.5-2.1kV and 2-6% of conventional dielectric barrier discharges.

Report

(4 results)
  • 2015 Annual Research Report   Final Research Report ( PDF )
  • 2014 Research-status Report
  • 2013 Research-status Report
  • Research Products

    (6 results)

All 2015 2014

All Journal Article (3 results) (of which Peer Reviewed: 3 results) Presentation (3 results)

  • [Journal Article] 転写モールド法極微小エミッタアレイの放電特性2015

    • Author(s)
      文 宗鉉,中本 正幸
    • Journal Title

      第75回応用物理学会秋季学術講演会 講演予稿集

      Volume: 76 Pages: 06-078

    • Related Report
      2015 Annual Research Report
    • Peer Reviewed
  • [Journal Article] 転写モールド法極微小エミッタアレイの放電特性2014

    • Author(s)
      文 宗鉉,中本 正幸
    • Journal Title

      第75回応用物理学会秋季学術講演会 講演予稿集

      Volume: 75 Pages: 07-104

    • Related Report
      2014 Research-status Report
    • Peer Reviewed
  • [Journal Article] 転写モールド法アモルファスカーボンエミッタアレイの放電特性2014

    • Author(s)
      文 宗鉉,中本 正幸
    • Journal Title

      第61回応用物理学会春季学術講演会 講演予稿集

      Volume: 74 Pages: 7-110

    • Related Report
      2013 Research-status Report
    • Peer Reviewed
  • [Presentation] 転写モールド法極微小エミッタアレイの放電電流安定性2015

    • Author(s)
      文 宗鉉、中本 正幸
    • Organizer
      第76回応用物理学会秋季学術講演会
    • Place of Presentation
      名古屋国際会議場、名古屋市
    • Year and Date
      2015-09-13
    • Related Report
      2015 Annual Research Report
  • [Presentation] 転写モールド法極微小エミッタアレイの放電特性2014

    • Author(s)
      文 宗鉉、中本 正幸
    • Organizer
      第75回応用物理学会秋季学術講演会
    • Place of Presentation
      北海道大学 札幌キャンパス (北海道,札幌市)
    • Year and Date
      2014-09-17 – 2014-09-20
    • Related Report
      2014 Research-status Report
  • [Presentation] 転写モールド法アモルファスカーボンエミッタアレイの放電特性2014

    • Author(s)
      文 宗鉉,中本 正幸
    • Organizer
      第61回応用物理学会春季学術講演会
    • Place of Presentation
      青山学院大学、相模原市
    • Related Report
      2013 Research-status Report

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Published: 2014-07-25   Modified: 2019-07-29  

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