Budget Amount *help |
¥4,810,000 (Direct Cost: ¥3,700,000、Indirect Cost: ¥1,110,000)
Fiscal Year 2015: ¥910,000 (Direct Cost: ¥700,000、Indirect Cost: ¥210,000)
Fiscal Year 2014: ¥780,000 (Direct Cost: ¥600,000、Indirect Cost: ¥180,000)
Fiscal Year 2013: ¥3,120,000 (Direct Cost: ¥2,400,000、Indirect Cost: ¥720,000)
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Outline of Final Research Achievements |
Stable, low breakdown voltage discharges and nano-structured cathode arrays have been developed by using Transfer Mold emitter fabrication method and amorphous carbon thin film having a high hardness and a high chemical stability to realize highly efficient and reliable ultraviolet light-emitting plasma sources. Nano-structured Transfer Mold cathode array plasma sources having emitter sizes of as small as 41 nm, exhibited the extremely low breakdown voltages and the small discharge current fluctuations of as low as 160 V and 1.8%, being compared with 0.5-2.1kV and 2-6% of conventional dielectric barrier discharges.
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