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Surface science of the highly doped silicon for the state of the art semiconductor devices in the next generation

Research Project

Project/Area Number 25410015
Research Category

Grant-in-Aid for Scientific Research (C)

Allocation TypeMulti-year Fund
Section一般
Research Field Physical chemistry
Research InstitutionOsaka University

Principal Investigator

Matsumoto Taketoshi  大阪大学, 産業科学研究所, 准教授 (20390643)

Project Period (FY) 2013-04-01 – 2016-03-31
Project Status Completed (Fiscal Year 2015)
Budget Amount *help
¥5,200,000 (Direct Cost: ¥4,000,000、Indirect Cost: ¥1,200,000)
Fiscal Year 2015: ¥1,300,000 (Direct Cost: ¥1,000,000、Indirect Cost: ¥300,000)
Fiscal Year 2014: ¥1,300,000 (Direct Cost: ¥1,000,000、Indirect Cost: ¥300,000)
Fiscal Year 2013: ¥2,600,000 (Direct Cost: ¥2,000,000、Indirect Cost: ¥600,000)
Keywordsシリコン / 硝酸酸化 / 表面パッシベーション / ハイドープ / キャリアライフタイム / 界面準位密度 / 固定電荷 / 太陽電池
Outline of Final Research Achievements

Nitric acid oxidation of the highly P or B doped surface removed the excess doped region, and decreased defect densities, leading to high efficiency Si solar cells at low cost. Improvement of the surface flatness after the doping process will increase the efficiency of Si solar cells. In the case of the application of these highly doped materials to the wiring of the eternal memory instead of the Al wiring, the longer lifetime of the memory is expected by forming the highly-doped region in the subsurface or protecting this region with an SiO2 layer.

Report

(4 results)
  • 2015 Annual Research Report   Final Research Report ( PDF )
  • 2014 Research-status Report
  • 2013 Research-status Report
  • Research Products

    (10 results)

All 2015 2014 2013 Other

All Journal Article (2 results) (of which Peer Reviewed: 2 results) Presentation (7 results) (of which Int'l Joint Research: 1 results,  Invited: 2 results) Remarks (1 results)

  • [Journal Article] Nitric acid oxidation of Si method for improvement of crystalline Si solar cell characteristics by surface passivation effect2015

    • Author(s)
      [2]T. Matsumoto, R. Hirose, F. Shibata, D. Ishibashi, S. Ogawara, H. Kobayashi
    • Journal Title

      Sol. Energ. Mat. Sol. C.

      Volume: 134 Pages: 298-304

    • DOI

      10.1016/j.solmat.2014.11.040

    • Related Report
      2014 Research-status Report
    • Peer Reviewed
  • [Journal Article] Improvement of minority carrier lifetime and Si solar cell characteristics by nitric acid oxidation method2014

    • Author(s)
      F. Shibata, D. Ishibashi, S. Ogawara, T. Matsumoto, C.-H. Kim, H. Kobayashi
    • Journal Title

      ECS J. Solid State Sci. Technol.

      Volume: 3 Issue: 7 Pages: Q137-Q141

    • DOI

      10.1149/2.024406jss

    • Related Report
      2014 Research-status Report
    • Peer Reviewed
  • [Presentation] Improvement of crystalline silicon solar cells by the nitric acid oxidation (NAOS) method2015

    • Author(s)
      T. Matsumoto, R. Hirose, H. Nakajima, D. Irishika, T. Nonaka, K. Imamura, H. Kobayashi
    • Organizer
      Progress in Applied Surface, Interface and Thin Film Science - Solar Renewable Energy News IV (SURFINT-SREN IV)
    • Place of Presentation
      Florence, Italy
    • Year and Date
      2015-11-23
    • Related Report
      2015 Annual Research Report
    • Int'l Joint Research / Invited
  • [Presentation] 硝酸酸化膜による結晶型シリコン太陽電池の高効率化2015

    • Author(s)
      松本健俊,中島寛記,入鹿大地,野中啓章,今村健太郎,小林光
    • Organizer
      第76回応用物理学会秋季学術講演会
    • Place of Presentation
      愛知
    • Year and Date
      2015-09-13
    • Related Report
      2015 Annual Research Report
  • [Presentation] 硝酸酸化SiO2膜と加熱処理によるSi表面のパッシベーション2015

    • Author(s)
      中島寛記,入鹿大地,野中啓章,今村健太郎,松本健俊,小林光
    • Organizer
      第62回応用物理学会春季学術講演会
    • Place of Presentation
      神奈川
    • Year and Date
      2015-03-11 – 2015-03-14
    • Related Report
      2014 Research-status Report
  • [Presentation] 硝酸酸化法によるSi表面の新規パッシベーション方法2014

    • Author(s)
      中島寛記,入鹿大地,野中啓章,今村健太郎,松本健俊,小林光
    • Organizer
      第75回応用物理学会秋季学術講演会
    • Place of Presentation
      北海道
    • Year and Date
      2014-09-17 – 2014-09-20
    • Related Report
      2014 Research-status Report
  • [Presentation] 硝酸酸化法によるシリコン表面のパッシベーションと単結晶シリコン太陽電池の高効率化2014

    • Author(s)
      廣瀬諒,松本健俊,小林光
    • Organizer
      第61回応用物理学会春季学術講演会
    • Place of Presentation
      東京
    • Related Report
      2013 Research-status Report
  • [Presentation] Nitric acid oxidation of Si (NAOS) method for application to thin film transistors (TFT), eternal memory “digital Rosetta Stone”, and Si solar cells2013

    • Author(s)
      T. Matsumoto, M. Maeda, T. Akai, S. Imai, H. Kobayashi
    • Organizer
      8th Solid State Surfaces and Interfaces
    • Place of Presentation
      Smolenice, Slovakia
    • Related Report
      2013 Research-status Report
    • Invited
  • [Presentation] 恒久保存メモリ「デジタルロゼッタストーン」の加速耐湿試験による保護膜の評価2013

    • Author(s)
      松本健俊,赤井智喜,今井繁規,小林光
    • Organizer
      第74回応用物理学会学術講演会
    • Place of Presentation
      京都
    • Related Report
      2013 Research-status Report
  • [Remarks] 大阪大学産業科学研究所小林研究室

    • URL

      http://www.sanken.osaka-u.ac.jp/labs/fcm/index.html

    • Related Report
      2015 Annual Research Report

URL: 

Published: 2014-07-25   Modified: 2019-07-29  

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