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IDENTIFICATION OF GOVERNING PARAMETER AND RELIABILITY EVALUATION FOR CARBON-NANOTUBE DAMAGE UNDER HI-DENSITY ELECTRONIC CURRENT

Research Project

Project/Area Number 25420002
Research Category

Grant-in-Aid for Scientific Research (C)

Allocation TypeMulti-year Fund
Section一般
Research Field Materials/Mechanics of materials
Research InstitutionHirosaki University

Principal Investigator

SASAGAWA Kazuhiko  弘前大学, 理工学研究科, 教授 (50250676)

Co-Investigator(Kenkyū-buntansha) MURAOKA Mikio  秋田大学, 大学院理工学研究科, 教授 (50190872)
JU Yang  名古屋大学, 大学院工学研究科, 教授 (60312609)
FUJISAKI Kazuhiro  弘前大学, 大学院理工学研究科, 准教授 (90435678)
Project Period (FY) 2013-04-01 – 2016-03-31
Project Status Completed (Fiscal Year 2015)
Budget Amount *help
¥5,200,000 (Direct Cost: ¥4,000,000、Indirect Cost: ¥1,200,000)
Fiscal Year 2015: ¥1,040,000 (Direct Cost: ¥800,000、Indirect Cost: ¥240,000)
Fiscal Year 2014: ¥1,950,000 (Direct Cost: ¥1,500,000、Indirect Cost: ¥450,000)
Fiscal Year 2013: ¥2,210,000 (Direct Cost: ¥1,700,000、Indirect Cost: ¥510,000)
Keywordsカーボンナノチューブ / エレクトロマイグレーション / 電子パッケージ / 信頼性
Outline of Final Research Achievements

We successfully achieved the fabrication of not only the current loading specimen with several carbon nanotubes (CNTs) but also the CNT-networked specimen, which has large expectation for application to electronic devices in near future. The damages due to evaporation and electromigration of carbon atoms were observed in the CNT-networked specimen and it was found that the dominance of the damage mechanisms depended on operating condition.
We were able to predict the failure location depending on operating condition by means of numerical simulation using a parameter formula governing CNT damage. Furthermore, a simplified method of reliability evaluation for electromigration damage was developed considering usage environment, that is line shape and passivation thickness.

Report

(4 results)
  • 2015 Annual Research Report   Final Research Report ( PDF )
  • 2014 Research-status Report
  • 2013 Research-status Report
  • Research Products

    (24 results)

All 2015 2014 2013 Other

All Journal Article (4 results) (of which Peer Reviewed: 4 results,  Acknowledgement Compliant: 2 results,  Open Access: 2 results) Presentation (20 results) (of which Int'l Joint Research: 4 results,  Invited: 4 results)

  • [Journal Article] Numerical Analysis of Allowable Current Density for Electromigration of Interconnect Tree Structure with Reservoir2015

    • Author(s)
      K. Fujisaki, H. Narita, K. Sasagawa
    • Journal Title

      Proceedings of ASME InterPACK/ICNMM2015

      Volume: 2

    • DOI

      10.1115/ipack2015-48744

    • Related Report
      2015 Annual Research Report
    • Peer Reviewed / Acknowledgement Compliant
  • [Journal Article] Experimental Study of Damage Mechanism of Carbon Nanotube as Nano-component of Electronic Devices under High Current Density2014

    • Author(s)
      Kazuhiko Sasagawa, Kazuhiro Fujisaki, Jun Unuma, Ryota Azuma
    • Journal Title

      Journal of Electronic Packaging

      Volume: 136 Issue: 4

    • DOI

      10.1115/1.4026878

    • Related Report
      2014 Research-status Report
    • Peer Reviewed / Acknowledgement Compliant
  • [Journal Article] Mimicking Gecko Foot with Strong Adhesive Strength Based on Spinnable Vertically Aligned Carbon Nanotube Array2014

    • Author(s)
      Y.Cui, Y.Ju, B.Xu, P.Wang, N.Kojima, K.Ichioka and A.Hosoi
    • Journal Title

      RSC Advances

      Volume: 4 Issue: 18 Pages: 9056-9060

    • DOI

      10.1039/c3ra46113k

    • Related Report
      2013 Research-status Report
    • Peer Reviewed / Open Access
  • [Journal Article] Carbon Nanotube-Cu/parylene Nanowire Array Electrical Fasteners with High Adhesion Strength2014

    • Author(s)
      Y.Cui, Y.Ju, P.Wang, B.Xu, N.Kojima, K.Ichioka and A.Hosoi
    • Journal Title

      Applied Physics Express

      Volume: 7 Issue: 1 Pages: 015102-015102

    • DOI

      10.7567/apex.7.015102

    • NAID

      210000136937

    • Related Report
      2013 Research-status Report
    • Peer Reviewed / Open Access
  • [Presentation] Damage of CNT Network Structure under Accelerated Condition2015

    • Author(s)
      S. Sato, K. Fujisaki, K. Sasagawa, T. Katabira
    • Organizer
      International Conference on Advanced Technology in Experimental Mechanics 2015
    • Place of Presentation
      Loisir Hotel Toyohashi, Toyohashi, Japan
    • Year and Date
      2015-10-05
    • Related Report
      2015 Annual Research Report
    • Int'l Joint Research
  • [Presentation] 機能性ナノマテリアルの創製と展開2015

    • Author(s)
      巨 陽
    • Organizer
      日本機械学会2015年度年次大会
    • Place of Presentation
      北海道大学(札幌市)
    • Year and Date
      2015-09-13
    • Related Report
      2015 Annual Research Report
    • Invited
  • [Presentation] Quantitative Evaluation of nanometer-scale Electrical Properties by Microwave AFM2015

    • Author(s)
      Y. Ju
    • Organizer
      The 45th European Microwave Conference
    • Place of Presentation
      Palais des Congres de Paris Porte Maillot, Paris, France
    • Year and Date
      2015-09-06
    • Related Report
      2015 Annual Research Report
    • Int'l Joint Research / Invited
  • [Presentation] Evaluation of Allowable Current Density for Electromigration Damage in Via-connected Interconnect2015

    • Author(s)
      K. Fujisaki, K. Sasagawa, H. Narita
    • Organizer
      17th Electronic Materials and Packaging Conference
    • Place of Presentation
      Portland State University, Portland, USA
    • Year and Date
      2015-09-02
    • Related Report
      2015 Annual Research Report
    • Int'l Joint Research
  • [Presentation] コアシェルナノ構造を利用した原子拡散によるナノウィスカー生成に関する研究2015

    • Author(s)
      徳悠葵,村岡幹夫,巨 陽
    • Organizer
      日本機械学会 材料力学部門 若手シンポジウム2015
    • Place of Presentation
      神宮会館(伊勢市)
    • Year and Date
      2015-08-10
    • Related Report
      2015 Annual Research Report
  • [Presentation] Damage Observation of CNT Networked Structure under High Current Density2015

    • Author(s)
      K. Fujisaki, K. Sasagawa, D. Narita
    • Organizer
      ASME InterPACK/ICNMM2015
    • Place of Presentation
      The Fairmont San Francisco Hotel, San Francisco, USA
    • Year and Date
      2015-07-06
    • Related Report
      2015 Annual Research Report
    • Int'l Joint Research
  • [Presentation] カーボンナノチューブネットワーク配線の電流による疲労損傷特性2015

    • Author(s)
      笹川和彦, 藤崎和弘, 佐藤俊介, 帷子拓也
    • Organizer
      日本材料学会第64期通常総会・学術講演会
    • Place of Presentation
      山形大学(米沢市)
    • Year and Date
      2015-05-23
    • Related Report
      2015 Annual Research Report
  • [Presentation] CVD法により作製したカーボンナノチューブシートの性状及び配向評価2014

    • Author(s)
      中川智貴,細井厚志,巨陽
    • Organizer
      日本機械学会2014年度年次大会
    • Place of Presentation
      東京電機大学(東京)
    • Year and Date
      2014-09-07 – 2014-09-10
    • Related Report
      2014 Research-status Report
  • [Presentation] 電子デバイス配線CNTの強度信頼性評価法の構築2014

    • Author(s)
      笹川 和彦
    • Organizer
      STARCワークショップ2014
    • Place of Presentation
      新横浜国際ホテル(横浜市)
    • Year and Date
      2014-09-03
    • Related Report
      2014 Research-status Report
  • [Presentation] CNTネットワーク構造を有する配線の高密度電流下における損傷2014

    • Author(s)
      藤崎和弘,成田大輝,笹川和彦
    • Organizer
      日本機械学会M&M2014カンファレンス
    • Place of Presentation
      福島大学(福島市)
    • Year and Date
      2014-07-19 – 2014-07-21
    • Related Report
      2014 Research-status Report
  • [Presentation] 電子デバイス用カーボンナノチューブの高密度電流下における強度特性2013

    • Author(s)
      笹川和彦, 藤崎和弘, 鵜沼 潤, 東 亮汰
    • Organizer
      2013年度日本機械学会年次大会
    • Place of Presentation
      岡山大学(岡山市)
    • Related Report
      2013 Research-status Report
  • [Presentation] ストレスマイグレーションによるアルミナノワイヤの作製及び電気特性の評価に関する研究2013

    • Author(s)
      小島直樹,巨 陽
    • Organizer
      2013年度日本機械学会年次大会
    • Place of Presentation
      岡山大学(岡山市)
    • Related Report
      2013 Research-status Report
  • [Presentation] マイクロ波原子間力顕微鏡を用いた金属ナノワイヤの導電率の定量評価に関する研究2013

    • Author(s)
      中島 隆博,細井 厚志,巨 陽
    • Organizer
      2013年度日本機械学会年次大会
    • Place of Presentation
      岡山大学(岡山市)
    • Related Report
      2013 Research-status Report
  • [Presentation] 微細電子配線の安全性評価と生体の応力評価

    • Author(s)
      笹川和彦
    • Organizer
      日本非破壊検査協会 東北支部「支部会・講演会」
    • Place of Presentation
      青年文化センター(仙台市)
    • Related Report
      2013 Research-status Report
    • Invited
  • [Presentation] Numerical Study of Allowable Current Density for Electromigration Damage of Multilevel Interconnection in Integrated Circuit

    • Author(s)
      K. Sasagawa, K. Fujisaki, T. Yanagi
    • Organizer
      13th International Conference on Fracture
    • Place of Presentation
      China National Convention Center, Beijing, China
    • Related Report
      2013 Research-status Report
  • [Presentation] Experimental Study of Damage Mechanism of Carbon Nanotube as Nano-component of Electronic Devices under High Current Density

    • Author(s)
      K. Sasagawa, K. Fujisaki, J. Unuma, R. Azuma
    • Organizer
      ASME 2013 International Technical Conference and Exhibition on Packaging and Integration of Electronic and Photonic Microsystems
    • Place of Presentation
      Hyatt Regency San Francisco Airport, San Francisco, USA
    • Related Report
      2013 Research-status Report
  • [Presentation] 金属被覆ナノワイヤの通電による形態変化の観察

    • Author(s)
      徳 悠葵,村岡幹夫
    • Organizer
      日本機械学会M&P2013
    • Place of Presentation
      首都大学東京(八王子市)
    • Related Report
      2013 Research-status Report
  • [Presentation] インクジェット法による金属ナノ粒子配線の高密度電流下における損傷

    • Author(s)
      相内 暁,笹川和彦,藤崎和弘
    • Organizer
      日本機械学会 東北学生会 第44回学生員卒業研究発表講演会
    • Place of Presentation
      山形大学(米沢市)
    • Related Report
      2013 Research-status Report
  • [Presentation] CNTネットワーク構造を有する電子デバイス配線の高密度電流下での損傷

    • Author(s)
      成田大輝,笹川和彦,藤崎和弘
    • Organizer
      日本機械学会 東北学生会 第44回学生員卒業研究発表講演会
    • Place of Presentation
      山形大学(米沢市)
    • Related Report
      2013 Research-status Report
  • [Presentation] 金属ナノコイルの創製技術と周辺技術

    • Author(s)
      村岡幹夫
    • Organizer
      日本材料学会東北支部「材料フォーラム」講演会
    • Place of Presentation
      カレッジプラザ(秋田市)
    • Related Report
      2013 Research-status Report
    • Invited

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Published: 2014-07-25   Modified: 2019-07-29  

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