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3D Optical Microscopy for High-speed Measurement of Nano-micro-sized Components

Research Project

Project/Area Number 25420050
Research Category

Grant-in-Aid for Scientific Research (C)

Allocation TypeMulti-year Fund
Section一般
Research Field Production engineering/Processing studies
Research InstitutionShizuoka University

Principal Investigator

Usuki Shin  静岡大学, 電子工学研究所, 准教授 (60508191)

Co-Investigator(Renkei-kenkyūsha) MIURA KENJIRO T.  静岡大学, 工学部, 教授 (50254066)
Project Period (FY) 2013-04-01 – 2016-03-31
Project Status Completed (Fiscal Year 2015)
Budget Amount *help
¥5,200,000 (Direct Cost: ¥4,000,000、Indirect Cost: ¥1,200,000)
Fiscal Year 2015: ¥780,000 (Direct Cost: ¥600,000、Indirect Cost: ¥180,000)
Fiscal Year 2014: ¥1,300,000 (Direct Cost: ¥1,000,000、Indirect Cost: ¥300,000)
Fiscal Year 2013: ¥3,120,000 (Direct Cost: ¥2,400,000、Indirect Cost: ¥720,000)
Keywords光学顕微鏡 / 画像処理 / 三次元計測 / ライトフィールド / 低コヒーレンス干渉 / OCT / Focus Variation / 形状モデリング / コンピューテーショナルイメージング / 超解像 / ライトフィールド顕微鏡 / 変調照明
Outline of Final Research Achievements

A depth map (3D point cloud) was obtained by a focus variation method (Shape from Focus) which was applied to multiple images stacked by digital refocusing in the light field microscopy. Then, we developed a 3D shape modeling technique based on optical microscopy and Shape from Silhouette method combined with the depth map by light field microscopy. Furthermore, a reflection type OCT (Optical Coherence Tomography) with sample scanning scheme was developed for 3D measurement of deep structure such as a hole. In this scheme, the reference mirror is controlled based on processed images which are acquired to analyze the low-coherent interference signal for height measurement. The depth of field of this method was experimentally verified to be several tens of times as long as a typical optical microscopy.

Report

(4 results)
  • 2015 Annual Research Report   Final Research Report ( PDF )
  • 2014 Research-status Report
  • 2013 Research-status Report
  • Research Products

    (15 results)

All 2016 2015 2014 2013

All Journal Article (5 results) (of which Peer Reviewed: 5 results,  Acknowledgement Compliant: 2 results) Presentation (10 results) (of which Int'l Joint Research: 1 results,  Invited: 2 results)

  • [Journal Article] Digital Shape Reconstruction of a Micro-Sized Machining Tool Using Light-Field Microscopy2016

    • Author(s)
      S. Usuki, M. Uno, and K. T. Miura
    • Journal Title

      International Journal of Automation Technology

      Volume: 10 Pages: 172-178

    • NAID

      130007674024

    • Related Report
      2015 Annual Research Report
    • Peer Reviewed / Acknowledgement Compliant
  • [Journal Article] Optical Microscopy with Improved Resolution Using Two-beam Interference of Low-coherence Light2016

    • Author(s)
      S. Usuki, T. Takada and K. T. Miura
    • Journal Title

      Measurement

      Volume: 78 Pages: 373-380

    • Related Report
      2015 Annual Research Report
    • Peer Reviewed / Acknowledgement Compliant
  • [Journal Article] Velocity calculation of 2D geometric objects by use of surface interpolation in 3D2014

    • Author(s)
      Y. Mandachi, S. Usuki and K. T. Miura
    • Journal Title

      Journal of Advanced Mechanical Design, Systems, and Manufacturing

      Volume: 8 Pages: 1-8

    • NAID

      130004495247

    • Related Report
      2014 Research-status Report
    • Peer Reviewed
  • [Journal Article] 顕微鏡動画像における合焦位置推定をもちいたマイクロ形状計測2013

    • Author(s)
      萬立洋次郎, 臼杵 深, 三浦憲二郎
    • Journal Title

      砥粒加工学会誌

      Volume: 57 Pages: 735-738

    • NAID

      130004494600

    • Related Report
      2013 Research-status Report
    • Peer Reviewed
  • [Journal Article] Designing Log-aesthetic Splines with G2 Continuity2013

    • Author(s)
      K. T. Miura, D. Shibuya, R. U. Gobithaasan and S. Usuki
    • Journal Title

      Computer-Aided Design and Applications

      Volume: 10 Pages: 1021-1032

    • Related Report
      2013 Research-status Report
    • Peer Reviewed
  • [Presentation] 3D measurement using light field microscopy with improved resolution, Workshop on microscopy2015

    • Author(s)
      S.Usuki, Y. Ohashi, K. T. Miura
    • Organizer
      biology, medicine, and advanced CMOS imagers, Information Sensing Technologies
    • Place of Presentation
      Shizuoka University(静岡県浜松市)
    • Year and Date
      2015-11-20
    • Related Report
      2015 Annual Research Report
    • Int'l Joint Research / Invited
  • [Presentation] 位相フィードバック機能を有する低コヒーレンス干渉型変調照明顕微法2015

    • Author(s)
      寺尾健, 高田智裕, 臼杵深, 三浦憲二郎
    • Organizer
      2015年度精密工学会秋季大会学術講演会
    • Place of Presentation
      東北大学(宮城県仙台市)
    • Year and Date
      2015-09-04
    • Related Report
      2015 Annual Research Report
  • [Presentation] ライトフィールド顕微鏡によるイメージング2015

    • Author(s)
      臼杵深
    • Organizer
      光学系設計技術部会&デジタル・イメージング技術部会の合同講演会
    • Place of Presentation
      機械振興会館(東京都港区)
    • Year and Date
      2015-06-07
    • Related Report
      2015 Annual Research Report
    • Invited
  • [Presentation] Resolution-improved Optical Imaging by Low-coherence Interference Illumination2014

    • Author(s)
      Shin Usuki, Tomohiro Takada and Kenjiro T. Miura
    • Organizer
      The 16th Takayanagi Kenjiro Memorial Symposium
    • Place of Presentation
      Shizuoka University(Shizuoka)
    • Year and Date
      2014-11-11 – 2014-11-12
    • Related Report
      2014 Research-status Report
  • [Presentation] Optical Microscopy with Improved Resolution using Two-Beam Interference of Low-Coherence Light2014

    • Author(s)
      Tomohiro Takada, Shin Usuki and Kenjiro T. Miura
    • Organizer
      11th IMEKO Symposium LMPMI2014
    • Place of Presentation
      Epocal Tsukuba, Tsukuba City(Ibaraki)
    • Year and Date
      2014-09-02 – 2014-09-05
    • Related Report
      2014 Research-status Report
  • [Presentation] 低コヒーレンス光の二光束干渉を利用した光学顕微鏡の高分解能化2014

    • Author(s)
      臼杵深, 高田智裕, 三浦憲二郎
    • Organizer
      2014年度精密工学会春季大会学術講演会
    • Place of Presentation
      東京大学(東京都)
    • Related Report
      2013 Research-status Report
  • [Presentation] Improvement in Standing Wave Contrast of Structured Illumination Microscopy2013

    • Author(s)
      Tomohiro Takada, Shin Usuki and Kenjiro Miura
    • Organizer
      16th International Conference on Humans and Computers
    • Place of Presentation
      Shizuoka University(Shizuoka)
    • Related Report
      2013 Research-status Report
  • [Presentation] 3D measurement and reconstruction using microscopic depth images2013

    • Author(s)
      Masaru Uno, Shin Usuki, Kenjiro T. Miura
    • Organizer
      The 5th International Conference of Asian Society for Precision Engineering and Nanotechnology
    • Place of Presentation
      Howard Civil International Centre(Taipei)
    • Related Report
      2013 Research-status Report
  • [Presentation] 光学顕微鏡を用いた高速三次元計測のためのロバストなデフォーカス量推定2013

    • Author(s)
      萬立洋次郎, 臼杵深, 三浦憲二郎
    • Organizer
      2013年度精密工学会秋季大会学術講演会
    • Place of Presentation
      関西大学(大阪府)
    • Related Report
      2013 Research-status Report
  • [Presentation] 光学顕微鏡による高解像度距離画像の取得とマイクロ形状再構築への応用2013

    • Author(s)
      宇野大, 藤川正太郎, 臼杵深, 三浦憲二郎
    • Organizer
      Visual Computing/グラフィックスとCAD合同シンポジウム2013
    • Place of Presentation
      リンクステーションホール青森(青森県)
    • Related Report
      2013 Research-status Report

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Published: 2014-07-25   Modified: 2019-07-29  

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