| Project/Area Number |
25420057
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| Research Category |
Grant-in-Aid for Scientific Research (C)
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| Allocation Type | Multi-year Fund |
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| Section | 一般 |
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| Research Field |
Production engineering/Processing studies
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| Research Institution | Kyushu Institute of Technology |
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Principal Investigator |
Shimizu Hiroki 九州工業大学, 大学院工学研究院, 准教授 (50323043)
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| Co-Investigator(Kenkyū-buntansha) |
TAMARU YUUMA 九州工業大学, 大学院工学研究院, 助教 (30284590)
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| Co-Investigator(Renkei-kenkyūsha) |
SAKAMOTO KENJI 九州工業大学, マイクロ化総合技術センター, 准教授 (10379290)
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| Research Collaborator |
TAKEUCHI SHUUZOU 北九州学術推進機構(FAIS), 半導体技術センター, 主任研究員
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| Project Period (FY) |
2013-04-01 – 2016-03-31
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| Project Status |
Completed (Fiscal Year 2015)
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| Budget Amount *help |
¥5,200,000 (Direct Cost: ¥4,000,000、Indirect Cost: ¥1,200,000)
Fiscal Year 2015: ¥1,560,000 (Direct Cost: ¥1,200,000、Indirect Cost: ¥360,000)
Fiscal Year 2014: ¥1,560,000 (Direct Cost: ¥1,200,000、Indirect Cost: ¥360,000)
Fiscal Year 2013: ¥2,080,000 (Direct Cost: ¥1,600,000、Indirect Cost: ¥480,000)
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| Keywords | 形状測定 / 平面度 / 真直度 / MEMS / 多点法 / 走査形状測定 / 運動誤差計測 / 平面度測定 / 真直度測定 |
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| Outline of Final Research Achievements |
Multi sensor devices which measure displacement of three of five points simultaneously were designed for realizing on-machine measurement of machined planar surface with high accuracy. A total process was developed to fabricate this large scale micro electro mechanical systems (MEMS) device. By using this process, prototypes of proposed devices were manufactured. In addition, a data processing code for reconstructing a planar shape by connecting straightness data acquired by a multi sensor device was programmed. Furthermore, property of accumulated error in a planar form measurement was calculated by Monte Carlo method.
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