Development of three-dimensional nano-processing technique using the swelling phenomenon of crystal materials with highly-charged ion beams
| Project/Area Number |
25420061
|
|---|
| Research Category |
Grant-in-Aid for Scientific Research (C)
|
| Allocation Type | Multi-year Fund |
|---|
| Section | 一般 |
|---|
| Research Field |
Production engineering/Processing studies
|
|---|
| Research Institution | Kochi University of Technology |
|---|
Principal Investigator |
Momota Sadao 高知工科大学, 環境理工学群, 准教授 (50299393)
|
|---|
| Project Period (FY) |
2013-04-01 – 2016-03-31
|
| Project Status |
Completed (Fiscal Year 2015)
|
| Budget Amount *help |
¥4,420,000 (Direct Cost: ¥3,400,000、Indirect Cost: ¥1,020,000)
Fiscal Year 2015: ¥1,170,000 (Direct Cost: ¥900,000、Indirect Cost: ¥270,000)
Fiscal Year 2014: ¥1,560,000 (Direct Cost: ¥1,200,000、Indirect Cost: ¥360,000)
Fiscal Year 2013: ¥1,690,000 (Direct Cost: ¥1,300,000、Indirect Cost: ¥390,000)
|
|---|
| Keywords | 微細加工技術 / 半導体結晶材料 / ナノ材料科学 / 粒子ビーム科学 / 3次元ナノ加工 / イオンビーム / 結晶材料 / ３次元ナノ加工 |
|---|
| Outline of Final Research Achievements |
The feasibility of ion-beam-induced swelling phenomenon on crystal materials as a new method to fabricate 3-dimensional structure in the nano-micro meter order has been investigated.
A swelling height of Si and SiC crystal was observed as a function of processing parameters, energy and fluence of irradiated Ar and Kr ion, and a fabrication of swelling structures has been achieved up to the height of 100 nm within a precision of 4 nm. The deformation of structures on Si crystal along a lateral direction has been successfully demonstrated. Relatively lower fluence of irradiated ion beam has prevented fabricated structure from serious deterioration of its mechanical properties, compared with conventional ion-beam technologies. This result indicates that swelling structures would be suitable for mechanical use.
|
Report
(4 results)
Research Products
(9 results)
