| Budget Amount *help |
¥4,420,000 (Direct Cost: ¥3,400,000、Indirect Cost: ¥1,020,000)
Fiscal Year 2015: ¥1,170,000 (Direct Cost: ¥900,000、Indirect Cost: ¥270,000)
Fiscal Year 2014: ¥1,560,000 (Direct Cost: ¥1,200,000、Indirect Cost: ¥360,000)
Fiscal Year 2013: ¥1,690,000 (Direct Cost: ¥1,300,000、Indirect Cost: ¥390,000)
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| Outline of Final Research Achievements |
The feasibility of ion-beam-induced swelling phenomenon on crystal materials as a new method to fabricate 3-dimensional structure in the nano-micro meter order has been investigated.
A swelling height of Si and SiC crystal was observed as a function of processing parameters, energy and fluence of irradiated Ar and Kr ion, and a fabrication of swelling structures has been achieved up to the height of 100 nm within a precision of 4 nm. The deformation of structures on Si crystal along a lateral direction has been successfully demonstrated. Relatively lower fluence of irradiated ion beam has prevented fabricated structure from serious deterioration of its mechanical properties, compared with conventional ion-beam technologies. This result indicates that swelling structures would be suitable for mechanical use.
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