Budget Amount *help |
¥4,940,000 (Direct Cost: ¥3,800,000、Indirect Cost: ¥1,140,000)
Fiscal Year 2015: ¥780,000 (Direct Cost: ¥600,000、Indirect Cost: ¥180,000)
Fiscal Year 2014: ¥1,690,000 (Direct Cost: ¥1,300,000、Indirect Cost: ¥390,000)
Fiscal Year 2013: ¥2,470,000 (Direct Cost: ¥1,900,000、Indirect Cost: ¥570,000)
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Outline of Final Research Achievements |
Establishment of fabrication technology for metal nano pattern on plastic film via roll to roll (RTR) nanoimprint lithography (NIL). Using techniques are replica mold on roll base and removal of excess silver ink. The base pattern transfer process was UV nanoimprint lithography and silver nano patterns were obtained on UV curable resin surface. As a result, high speed pattern transfer of silver line pattern, which had less than 100 nm feature size, is possible by RTR UV-NIL. Furthermore, roll press method can fabricate stacking metal nano pattern layers. We have fabricated ten layers silver pattern by roll press method and stacking metal nano pattern film had red color. This color is coincide with plasmonic resonance wavelength.
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