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Establishment of nano metal pattern transfer technique using roll nanoimprint method

Research Project

Project/Area Number 25420067
Research Category

Grant-in-Aid for Scientific Research (C)

Allocation TypeMulti-year Fund
Section一般
Research Field Production engineering/Processing studies
Research InstitutionTokyo University of Science

Principal Investigator

Taniguchi Jun  東京理科大学, 基礎工学部, 教授 (40318225)

Project Period (FY) 2013-04-01 – 2016-03-31
Project Status Completed (Fiscal Year 2015)
Budget Amount *help
¥4,940,000 (Direct Cost: ¥3,800,000、Indirect Cost: ¥1,140,000)
Fiscal Year 2015: ¥780,000 (Direct Cost: ¥600,000、Indirect Cost: ¥180,000)
Fiscal Year 2014: ¥1,690,000 (Direct Cost: ¥1,300,000、Indirect Cost: ¥390,000)
Fiscal Year 2013: ¥2,470,000 (Direct Cost: ¥1,900,000、Indirect Cost: ¥570,000)
Keywordsナノインプリント / 銀インク / 光硬化性樹脂 / ロール技術 / 金型 / レプリカモールド / 離型性 / 積層構造 / ロールナノインプリント / 金属転写 / モスアイ構造 / ナノ配線 / 反射防止構造 / プラズモン
Outline of Final Research Achievements

Establishment of fabrication technology for metal nano pattern on plastic film via roll to roll (RTR) nanoimprint lithography (NIL). Using techniques are replica mold on roll base and removal of excess silver ink. The base pattern transfer process was UV nanoimprint lithography and silver nano patterns were obtained on UV curable resin surface. As a result, high speed pattern transfer of silver line pattern, which had less than 100 nm feature size, is possible by RTR UV-NIL. Furthermore, roll press method can fabricate stacking metal nano pattern layers. We have fabricated ten layers silver pattern by roll press method and stacking metal nano pattern film had red color. This color is coincide with plasmonic resonance wavelength.

Report

(4 results)
  • 2015 Annual Research Report   Final Research Report ( PDF )
  • 2014 Research-status Report
  • 2013 Research-status Report
  • Research Products

    (10 results)

All 2015 2014 2013

All Journal Article (6 results) (of which Peer Reviewed: 6 results,  Acknowledgement Compliant: 1 results) Presentation (4 results) (of which Int'l Joint Research: 2 results)

  • [Journal Article] Stacking of nanoscale metal dot array using liquid transfer imprint lithography with roll press2015

    • Author(s)
      Takahiro Tsuji, Jun Taniguchi
    • Journal Title

      Microelectronic Engineering

      Volume: 141 Pages: 117-121

    • DOI

      10.1016/j.mee.2015.02.008

    • Related Report
      2015 Annual Research Report
    • Peer Reviewed / Acknowledgement Compliant
  • [Journal Article] Removal of residual layer by liquid transfer imprint lithography using roll-to-roll UV-NIL2015

    • Author(s)
      Masatoshi Moro, Jun Taniguchi
    • Journal Title

      Microelectronic Engineering

      Volume: 141 Pages: 112-116

    • DOI

      10.1016/j.mee.2015.01.040

    • Related Report
      2015 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Nanoscale metal pattern-transfer technique using silver ink2014

    • Author(s)
      Ryuichi Wakamatsu, Jun Taniguchi
    • Journal Title

      Microelectronic Engineering

      Volume: 123 Pages: 94-99

    • DOI

      10.1016/j.mee.2014.05.021

    • Related Report
      2014 Research-status Report
    • Peer Reviewed
  • [Journal Article] Fabrication of antireflection structure film by roll-to-roll ultraviolet nanoimprint lithography2014

    • Author(s)
      Masatoshi Moro, Jun Taniguchi, and Shin Hiwasa
    • Journal Title

      Journal of Vacuum Science & Technology B

      Volume: 32 Issue: 6

    • DOI

      10.1116/1.4901877

    • Related Report
      2014 Research-status Report
    • Peer Reviewed
  • [Journal Article] Fabrication of self-supporting antireflection-structured film by UV-NIL2013

    • Author(s)
      Nurhafizah Binti Abu Talip[a]Yusof, Jun Taniguchi
    • Journal Title

      Microelectronic Engineering

      Volume: 110 Pages: 163-166

    • DOI

      10.1016/j.mee.2013.03.041

    • Related Report
      2013 Research-status Report
    • Peer Reviewed
  • [Journal Article] Fabrication of high-aspect-ratio pattern via high throughput roll-to-roll2013

    • Author(s)
      Hiroshi Yoshikawa, Jun Taniguchi, Go Tazaki, Toshiyuki Zento
    • Journal Title

      Microelectronic Engineering

      Volume: 112 Pages: 273-277

    • DOI

      10.1016/j.mee.2013.03.117

    • Related Report
      2013 Research-status Report
    • Peer Reviewed
  • [Presentation] Metallic antireflection structure made from silver ink using liquid transfer imprint technique2015

    • Author(s)
      Tomoya Uchida, Noriyuki Unno, Jun Taniguchi
    • Organizer
      28th International Microprocesses and Nanotechnology Conference
    • Place of Presentation
      Toyama International Conference Center, Toyama, Japan
    • Year and Date
      2015-11-13
    • Related Report
      2015 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Fabrication of isolated metal dot pattern in hole features using roll to roll machine and silver ink2015

    • Author(s)
      Kai Ojima, Noriyuki Unno, Jun Taniguchi
    • Organizer
      28th International Microprocesses and Nanotechnology Conference
    • Place of Presentation
      Toyama International Conference Center, Toyama, Japan
    • Year and Date
      2015-11-13
    • Related Report
      2015 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Stacking of nanoscale metal dot array using liquid transfer imprint lithography with roll press2014

    • Author(s)
      Takahiro Tsuji, Jun Taniguchi
    • Organizer
      40th Micro and Nano Engineering
    • Place of Presentation
      Lausanne, Switzerland
    • Year and Date
      2014-09-22 – 2014-09-26
    • Related Report
      2014 Research-status Report
  • [Presentation] Fabrication of Plasmonic Color Filters by Nanoprint lithography using Silver Ink2013

    • Author(s)
      Ryuuichi Wakamatsu, Jun Taniguchi
    • Organizer
      39th International Conference on Micro and Nano Engineering
    • Place of Presentation
      London, UK
    • Related Report
      2013 Research-status Report

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Published: 2014-07-25   Modified: 2019-07-29  

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