| Budget Amount *help |
¥4,940,000 (Direct Cost: ¥3,800,000、Indirect Cost: ¥1,140,000)
Fiscal Year 2015: ¥260,000 (Direct Cost: ¥200,000、Indirect Cost: ¥60,000)
Fiscal Year 2014: ¥260,000 (Direct Cost: ¥200,000、Indirect Cost: ¥60,000)
Fiscal Year 2013: ¥4,420,000 (Direct Cost: ¥3,400,000、Indirect Cost: ¥1,020,000)
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| Outline of Final Research Achievements |
Performance of a MEMS actuator using a thermal expansion drive of a conductive polymer (CP) have been investigated. The actuator consists of a thin polymer diaphragm (polyimide, φ5 mm, t10 μm) and a CP (PEDOT/PSS) layer coated on the diaphragm surface. The diaphragm was deflected by applying electricity to the CP layer. When the CP layer was t10-30 μm (30-200 Ω), diaphragm displacement of several tens μm was generated. A method of enhancing the electrical conductivity of PEDOT:PSS by combining solvent treatment (5 wt% ethylene glycol) and adding a small amount of silver nanoparticles in a solution was investigated to enhance electrical conductivity. The electric conductivity applied with this method was 200-260 Ω-1・cm-1 for thicknesses of 1-2 μm (conductive area: 12×10 mm) and the generated temperature increase was 20-50℃ at applied voltages of 3-5 V. It was confirmed that the added Ag nanoparticles contributed to making the conductive areas more uniformly.
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