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Investigation on Switching Mechanism of Resistive RAM using in-situ TEM-STM

Research Project

Project/Area Number 25420279
Research Category

Grant-in-Aid for Scientific Research (C)

Allocation TypeMulti-year Fund
Section一般
Research Field Electronic materials/Electric materials
Research InstitutionHokkaido University

Principal Investigator

Arita Masashi  北海道大学, 情報科学研究科, 准教授 (20222755)

Co-Investigator(Kenkyū-buntansha) TAKAHASHI Yasuo  北海道大学, 大学院情報科学研究科, 教授 (90374610)
SUEOKA Kazuhisa  北海道大学, 大学院情報科学研究科, 教授 (60250479)
SHIBAYAMA Tamaki  北海道大学, 工学(系)研究科(研究院), 教授 (10241564)
Research Collaborator KUDO Masaki  
OHNO Yuuki  
TAKAHASHI Akihito  
HIRATA Shuichiro  
MURAKAMI Yosuke  
OCHI Hayato  
YONESAKA Ryota  
MUTO Satoshi  
NAKANE Akitoshi  
HIROI Takahiro  
KATSUMURA Reon  
MORI Yuji  
Project Period (FY) 2013-04-01 – 2016-03-31
Project Status Completed (Fiscal Year 2015)
Budget Amount *help
¥5,200,000 (Direct Cost: ¥4,000,000、Indirect Cost: ¥1,200,000)
Fiscal Year 2015: ¥1,300,000 (Direct Cost: ¥1,000,000、Indirect Cost: ¥300,000)
Fiscal Year 2014: ¥1,560,000 (Direct Cost: ¥1,200,000、Indirect Cost: ¥360,000)
Fiscal Year 2013: ¥2,340,000 (Direct Cost: ¥1,800,000、Indirect Cost: ¥540,000)
Keywords抵抗変化メモリ / 電子顕微鏡 / 電子・電気材料 / 電子デバイス・機器 / ナノ材料
Outline of Final Research Achievements

Resistive memory (ReRAM) has been intensively investigated as a non-volatile memory satisfying beyond CMOS technology. Elucidation of its switching mechanism is the most important issue for practical use of ReRAM. While an operation mechanism based on electrochemistry has been proposed, details are obscure. In this work, the in-situ TEM was applied to solve this problem, where real-time observations of the microstructure were performed on metallic-filamant-type ReRAM. It was clarified that the metallic filament shows no remarkable change at the switching moment between high (HRS) to low (LRS) resistance states (Set and Reset). Switching occurs locally in nanometer scale. Remarkable change of the filament occurs with additional current flow. Large change of the filament induceas instability of the switching position and dissolution of metallic ions into the switching layer, and it generates device degradation. The power balance at Set and Reset is important for stable ReRAM operation.

Report

(4 results)
  • 2015 Annual Research Report   Final Research Report ( PDF )
  • 2014 Research-status Report
  • 2013 Research-status Report
  • Research Products

    (102 results)

All 2016 2015 2014 2013 Other

All Journal Article (22 results) (of which Int'l Joint Research: 2 results,  Peer Reviewed: 19 results,  Acknowledgement Compliant: 11 results,  Open Access: 3 results) Presentation (79 results) (of which Int'l Joint Research: 10 results,  Invited: 9 results) Book (1 results)

  • [Journal Article] Switching of Cu/MoOx/TiN CBRAM occurred at MoOx-TiN interface2016

    • Author(s)
      Masashi Arita, Yuuki Ohno, and Yasuo Takahashi
    • Journal Title

      Physica Status Solidi A

      Volume: 213 Issue: 2 Pages: 306-310

    • DOI

      10.1002/pssa.201532414

    • Related Report
      2015 Annual Research Report
    • Peer Reviewed / Acknowledgement Compliant
  • [Journal Article] Switching operation and degradation of resistive random access memory composed of tungsten oxide and copper investigated using in-situ TEM2015

    • Author(s)
      Masashi Arita, Akihito Takahashi, Yuuki Ohno, Akitoshi Nakane, Atsushi Tsurumaki-Fukuchi, and Yasuo Takahashi
    • Journal Title

      Scientific Reports

      Volume: 5 Issue: 1 Pages: 17103-17103

    • DOI

      10.1038/srep17103

    • Related Report
      2015 Annual Research Report
    • Peer Reviewed / Open Access / Acknowledgement Compliant
  • [Journal Article] Visualization of conductive filament of ReRAM during resistive switching by in-situ TEM2015

    • Author(s)
      Yasuo Takahashi, Masaki Kudo, and Masashi Arita
    • Journal Title

      ECS Transactions

      Volume: 69 Issue: 10 Pages: 299-309

    • DOI

      10.1149/06910.0299ecst

    • Related Report
      2015 Annual Research Report
    • Peer Reviewed / Open Access / Acknowledgement Compliant
  • [Journal Article] The effect of pressure and W-doping on the properties of ZnO thin films for NO2 gas sensing2015

    • Author(s)
      T. Tesfamichael, C. Cetin, C. Piloto, M. Arita, J. Bell
    • Journal Title

      Appl. Surf. Sci.

      Volume: 357A Pages: 728-734

    • DOI

      10.1016/j.apsusc.2015.08.248

    • Related Report
      2015 Annual Research Report
    • Peer Reviewed / Int'l Joint Research
  • [Journal Article] Filament erasure in Cu/MoOx ReRAM investigated by in-situ TEM2015

    • Author(s)
      M. Arita, Y. Ohno, A. Tsurumaki-Fukuchi, Y. Takahashi
    • Journal Title

      Proc. 28th Internat. Microproc. Nanotech. Conf.

      Volume: 2015

    • Related Report
      2015 Annual Research Report
    • Peer Reviewed / Acknowledgement Compliant
  • [Journal Article] Microstructural change in Cu/WOx/TiN during resistive switching2015

    • Author(s)
      M. Arita, A. Takahashi, Y. Ohno, A. Nakane, A. Tsurumaki-Fukuchi, Y. Takahashi
    • Journal Title

      Extended Abst. SSDM

      Volume: 2015 Pages: 1162-1163

    • Related Report
      2015 Annual Research Report
    • Peer Reviewed / Acknowledgement Compliant
  • [Journal Article] Fabrication of Fe-doped WO3 films for NO2 sensing at lower2015

    • Author(s)
      T. Tesfamichael, C. Pilot, M. Arita, J. Bell
    • Journal Title

      Sensors and Actuator B

      Volume: 221 Pages: 393-400

    • DOI

      10.1016/j.snb.2015.06.090

    • Related Report
      2015 Annual Research Report
    • Peer Reviewed / Int'l Joint Research
  • [Journal Article] TEMその場実験法による抵抗変化メモリ中の導電フィラメント解析2015

    • Author(s)
      有田正志,髙橋庸夫
    • Journal Title

      半導体・集積回路技術第79回シンポジウム講演論文集

      Volume: なし Pages: 21-24

    • NAID

      40020971153

    • Related Report
      2015 Annual Research Report
    • Acknowledgement Compliant
  • [Journal Article] Visualization of Conductive Filament during Write and Erase Cycles on Nanometer-scale ReRAM Achieved by in-situ TEM2015

    • Author(s)
      M. Kudo, M. Arita, Y. Takahashi, K. Ohba, M. Shimuta, I. Fujiwara
    • Journal Title

      Proc. 2015 IEEE 7th International Memory Workshop

      Volume: 2015 Pages: 85-88

    • DOI

      10.1109/imw.2015.7150312

    • Related Report
      2015 Annual Research Report
    • Peer Reviewed / Acknowledgement Compliant
  • [Journal Article] Real-time Resistive Switching of Cu/MoOx ReRAM Observed in2014

    • Author(s)
      M. Kudo, Y. Ohno, T. Hiroi, T. Fujimoto, K. Hamada, M. Arita, Y. Takahashi
    • Journal Title

      Proceeding of the 2014 IEEE Silicon Nanoelectronics Workshop

      Volume: - Pages: 63-64

    • Related Report
      2014 Research-status Report
    • Peer Reviewed / Acknowledgement Compliant
  • [Journal Article] In-situ TEM Observation of ReRAM Switching2014

    • Author(s)
      Yasuo Takahashi, Masashi Arita
    • Journal Title

      Proceeding of the International Meeting for Future of Electron Devices, Kansai

      Volume: -

    • Related Report
      2014 Research-status Report
    • Acknowledgement Compliant
  • [Journal Article] Growth and Shrinkage of Conductive Filament in Cu/MoOx ReRAMs2014

    • Author(s)
      Masashi Arita, Yuuki Ohno, Masaki Kudo, Yasuo Takahashi
    • Journal Title

      Extended Abstracts of the 2014 International Conference on Solid State Devices and Materials

      Volume: - Pages: 416-417

    • Related Report
      2014 Research-status Report
    • Peer Reviewed / Acknowledgement Compliant
  • [Journal Article] Filament formation and erasure in molybdenum oxide during resistive switching cycles2014

    • Author(s)
      Masaki Kudo, Masashi Arita, Yuuki Ohno, and Yasuo Takahashi
    • Journal Title

      Applied Physics Letters

      Volume: 105 Issue: 17

    • DOI

      10.1063/1.4898773

    • NAID

      120005525227

    • Related Report
      2014 Research-status Report
    • Peer Reviewed / Open Access / Acknowledgement Compliant
  • [Journal Article] Effect of nonstoichiometry on the half-metallic character of Co2MnSi investigated through saturation magnetization and tunneling magnetoresistance ratio2014

    • Author(s)
      G.-f. Li, Y. Honda, H.-x. Liu, K.-i. Matsuda, M. Arita, T. Uemura, M. Yamamoto, Y. Miura, M. Shirai, T. Saito, F. Shi and P. M. Voyles
    • Journal Title

      Phys. Rev. B

      Volume: 89 Issue: 1 Pages: 14428-14428

    • DOI

      10.1103/physrevb.89.014428

    • Related Report
      2013 Research-status Report
    • Peer Reviewed
  • [Journal Article] Cu/MoOx抵抗変化メモリのスイッチ動作における導電フィラメントの直接観察2014

    • Author(s)
      大野裕輝,廣井孝弘,工藤昌輝,浜田弘一,有田正志,高橋庸夫
    • Journal Title

      信学技報

      Volume: ED2013-148 Pages: 89-94

    • Related Report
      2013 Research-status Report
  • [Journal Article] Development of TEM Holder Generating In-Plane Magnetic Field Used for <i>In-Situ</i> TEM Observation2014

    • Author(s)
      M. Arita, R. Tokuda, K. Hamada, Y. Takahashi
    • Journal Title

      MATERIALS TRANSACTIONS

      Volume: 55 Issue: 3 Pages: 403-409

    • DOI

      10.2320/matertrans.MD201310

    • NAID

      130004455276

    • ISSN
      1345-9678, 1347-5320
    • Related Report
      2013 Research-status Report
    • Peer Reviewed
  • [Journal Article] Preparation of resistance RAM samples for in-situ TEM experiments2013

    • Author(s)
      Masaki Kudo, Masashi Arita, Yuuki Ohno, Takashi Fujii, Kouichi Hamada, and Yasuo Takahashi
    • Journal Title

      Thin Solid Films

      Volume: 533 Pages: 48-53

    • DOI

      10.1016/j.tsf.2012.10.102

    • Related Report
      2013 Research-status Report
    • Peer Reviewed
  • [Journal Article] In-situ TEM observation on Cu/MoOx resistive switching RAM2013

    • Author(s)
      M. Kudo, Y. Ohno, K. Hamada, M. Arita, Y. Takahashi
    • Journal Title

      Proc. World Congr. ANBRE-13 (CD-ROM)

      Volume: CD-ROM Pages: 492-497

    • Related Report
      2013 Research-status Report
    • Peer Reviewed
  • [Journal Article] In-situ TEM observation of gold nanogaps by electromigration2013

    • Author(s)
      Y. Murakami, H. Ochi, M. Arita, K. Hamada, Y. Takahashi, S. Takeda
    • Journal Title

      Proc. World Congr. ANBRE-13 (CD-ROM)

      Volume: CD-ROM Pages: 622-627

    • Related Report
      2013 Research-status Report
    • Peer Reviewed
  • [Journal Article] Double quantum dot Si single-electron transistor with multiple gate electrodes fabricated by PADOX2013

    • Author(s)
      T. Uchida, M. Arita, A. Fujiwara, Y. Takahashi
    • Journal Title

      Proc. World Congr. ANBRE-13 (CD-ROM)

      Volume: CD-ROM Pages: 498-503

    • Related Report
      2013 Research-status Report
    • Peer Reviewed
  • [Journal Article] In-situ TEM observation of Cu/MoOx ReRAM switching2013

    • Author(s)
      Masaki Kudo, Yuuki Ohno, Kouichi Hamada, Masashi Arita, and Yasuo Takahashi
    • Journal Title

      ECS Transactions

      Volume: 58 (5) Issue: 5 Pages: 19-25

    • DOI

      10.1149/05805.0019ecst

    • Related Report
      2013 Research-status Report
    • Peer Reviewed
  • [Journal Article] High-speed operation of Si single-electron transistor2013

    • Author(s)
      Y. Takahashi, H . Takenaka, T. Uchida, M. Arita, A. Fujiwara, and H. Inokaw
    • Journal Title

      ECS Transactions

      Volume: 58 Issue: 9 Pages: 73-80

    • DOI

      10.1149/05809.0073ecst

    • Related Report
      2013 Research-status Report
    • Peer Reviewed
  • [Presentation] Cu/WOx平面型抵抗変化メモリのTEMその場観察2016

    • Author(s)
      武藤 恵、米坂 瞭太、福地 厚、有田 正志、高橋 庸夫
    • Organizer
      第63回応用物理学会春季学術講演会
    • Place of Presentation
      東京工業大学・東京
    • Year and Date
      2016-03-21
    • Related Report
      2015 Annual Research Report
  • [Presentation] 二層絶縁層を有するMoOx/Al2O3抵抗変化型メモリ動作のTEMその場観察2016

    • Author(s)
      平田 周一郎、高橋 謙仁、福地 厚、有田 正志、高橋 庸夫
    • Organizer
      第63回応用物理学会春季学術講演会
    • Place of Presentation
      東京工業大学・東京
    • Year and Date
      2016-03-21
    • Related Report
      2015 Annual Research Report
  • [Presentation] 抵抗変化型メモリのアナログ的抵抗可変特性2016

    • Author(s)
      曹 民圭、勝村 玲音、福地 厚、有田 正志、高橋 庸夫、安藤 秀幸、森江 隆
    • Organizer
      第63回応用物理学会春季学術講演会
    • Place of Presentation
      東京工業大学・東京
    • Year and Date
      2016-03-21
    • Related Report
      2015 Annual Research Report
  • [Presentation] Ta2O5を用いた抵抗変化型メモリの多値・アナログメモリ動作2016

    • Author(s)
      勝村 玲音、Gr&ouml;nroos Mika、福地 厚、有田 正志、高橋 庸夫、安藤 秀幸、森江 隆
    • Organizer
      第63回応用物理学会春季学術講演会
    • Place of Presentation
      東京工業大学・東京
    • Year and Date
      2016-03-21
    • Related Report
      2015 Annual Research Report
  • [Presentation] 酸素欠陥型抵抗変化メモリにおける欠陥導入層の材料選択2016

    • Author(s)
      中川 良祐、福地 厚、有田 正志、高橋 庸夫
    • Organizer
      第63回応用物理学会春季学術講演会
    • Place of Presentation
      東京工業大学・東京
    • Year and Date
      2016-03-21
    • Related Report
      2015 Annual Research Report
  • [Presentation] (受賞講演)TEMその場観察を用いたCBRAM 繰り返し抵抗変化時のフィラメント観察2016

    • Author(s)
      工藤 昌輝、有田 正志、大野 裕輝、高橋 庸夫
    • Organizer
      第63回応用物理学会春季学術講演会
    • Place of Presentation
      東京工業大学・東京
    • Year and Date
      2016-03-21
    • Related Report
      2015 Annual Research Report
    • Invited
  • [Presentation] Filament erasure in Cu/MoOx ReRAM investigated by in-situ TEM2015

    • Author(s)
      M. Arita, Y. Ohno, A. Tsurumaki-Fukuchi, Y. Takahashi
    • Organizer
      28th Internat. Microprocesses and Nanotechno. Conf
    • Place of Presentation
      Toyama International Conference Center, Toyama
    • Year and Date
      2015-11-12
    • Related Report
      2015 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Analog memory operation of resistance change memory with MOSFET for brain-like LSIs2015

    • Author(s)
      H. Ando, K. Tomizaki, T. Tohara, T. Morie, T. Hiroi, A. Nakane, R. Katsumura, A. Fukuchi, M. Arita, Y. Takahashi, S. Samukawa
    • Organizer
      Twelfth Internat. Conf. on Flow Dynamics (ICFD 2015)
    • Place of Presentation
      Sendai Internat. Cent., Sendai
    • Year and Date
      2015-10-28
    • Related Report
      2015 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Switching operation in resistive RAM composed of solid electrolytes studied by in-situ TEM2015

    • Author(s)
      M. Arita, Y. Takahashi
    • Organizer
      3rd Internat. Multidisciplinary Microsc. and Microanal. Cong. (InterM 2015)
    • Place of Presentation
      Sentido Lykia Resort and Spa-Liberty Hotel Lykia Oludeniz, Turkey
    • Year and Date
      2015-10-20
    • Related Report
      2015 Annual Research Report
    • Int'l Joint Research / Invited
  • [Presentation] Visualization of conductive filament of ReRAM during resistive switching by in-situ TEM2015

    • Author(s)
      Y. Takahashi, M. Kudo, M. Arita
    • Organizer
      224th ECS Meeting
    • Place of Presentation
      Phoenix Conv. Center, Arizona, USA
    • Year and Date
      2015-10-14
    • Related Report
      2015 Annual Research Report
    • Int'l Joint Research / Invited
  • [Presentation] Microstructural change in Cu/WOx/TiN during resistive switching2015

    • Author(s)
      M. Arita, A. Takahashi, Y. Ohno, A. Nakane, A. Tsurumaki-Fukuchi, Y. Takahashi
    • Organizer
      SSDM
    • Place of Presentation
      Sapporo Convention Center, Sapporo
    • Year and Date
      2015-09-29
    • Related Report
      2015 Annual Research Report
    • Int'l Joint Research
  • [Presentation] ReRAMの書込み・消去サイクルにおける導電性フィラメントのTEM内その場観察2015

    • Author(s)
      高橋 庸夫,工藤 昌輝,有田 正志,大場 和博,紫牟田 雅之,藤原 一郎
    • Organizer
      第76回応用物理学会秋季学術講演会
    • Place of Presentation
      名古屋国際会議場,名古屋
    • Year and Date
      2015-09-15
    • Related Report
      2015 Annual Research Report
    • Invited
  • [Presentation] MOSFET上に集積化したCu-MoOx-Al抵抗変化型メモリのRESET時多値メモリ動作2015

    • Author(s)
      富崎 和正,安藤 秀幸,森江 隆,廣井 孝弘,中根 明俊,福地 厚,有田 正志,高橋 庸夫
    • Organizer
      第76回応用物理学会秋季学術講演会
    • Place of Presentation
      名古屋国際会議場,名古屋
    • Year and Date
      2015-09-15
    • Related Report
      2015 Annual Research Report
  • [Presentation] Cu/WOx抵抗変化型メモリの繰返し動作と構造変化のTEMその場観察2015

    • Author(s)
      高橋 謙仁,大野 裕輝,工藤 昌輝,福地 厚,有田 正志,高橋 庸夫
    • Organizer
      第76回応用物理学会秋季学術講演会
    • Place of Presentation
      名古屋国際会議場,名古屋
    • Year and Date
      2015-09-15
    • Related Report
      2015 Annual Research Report
  • [Presentation] Cuナノギャップを用いた平面型抵抗変化メモリのTEMその場観察2015

    • Author(s)
      米坂 瞭太,村上 暢介,福地 厚,有田 正志,高橋 庸夫
    • Organizer
      第76回応用物理学会秋季学術講演会
    • Place of Presentation
      名古屋国際会議場,名古屋
    • Year and Date
      2015-09-15
    • Related Report
      2015 Annual Research Report
  • [Presentation] アモルファスSrTiO3の欠陥構造と抵抗変化動作に対する電極金属の影響2015

    • Author(s)
      福地 厚,中川 良祐,勝村 玲音,有田 正志,高橋 庸夫
    • Organizer
      第76回応用物理学会秋季学術講演会
    • Place of Presentation
      名古屋国際会議場,名古屋
    • Year and Date
      2015-09-15
    • Related Report
      2015 Annual Research Report
  • [Presentation] 単層Fe-MgF2 グラニュラー膜の微細構造と磁気特性2015

    • Author(s)
      本庄周作,横野示寛,有田正志,福地厚,海住英生,西井準治,高橋庸
    • Organizer
      第39回日本磁気学会学術講演会
    • Place of Presentation
      名古屋大学,名古屋
    • Year and Date
      2015-09-10
    • Related Report
      2015 Annual Research Report
  • [Presentation] Tunable coupling capacitance of double quantum dot by an electric field2015

    • Author(s)
      T. Uchida, H. Sato, A. Tsurumaki-Fukuchi, M. Arita, A. Fujiwara, Y. Takahashi
    • Organizer
      Silicon Quantum Electronics Workshop 2015
    • Place of Presentation
      Kagawa Internat. Conf. Hall, Takamatsu
    • Year and Date
      2015-08-03
    • Related Report
      2015 Annual Research Report
    • Int'l Joint Research
  • [Presentation] TEMその場実験法による抵抗変化メモリ中の導電フィラメント解析2015

    • Author(s)
      有田正志,髙橋庸夫
    • Organizer
      半導体・集積回路技術第79回シンポジウム
    • Place of Presentation
      早稲田大学,東京
    • Year and Date
      2015-07-09
    • Related Report
      2015 Annual Research Report
    • Invited
  • [Presentation] Series-triple quantum dots fabricated under each control gate by the use of thermal oxidation2015

    • Author(s)
      Uchida, H. Sato, A. Tsurumaki-Fukuchi, M. Arita, A. Fujiwara, Y. Takahashi
    • Organizer
      2015 Silicon Nanoelectronics Workshop
    • Place of Presentation
      Rihga Royal Hotel Kyoto, Kyoto
    • Year and Date
      2015-06-14
    • Related Report
      2015 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Visualization of Conductive Filament during Write and Erase Cycles on Nanometer-scale ReRAM Achieved by in-situ TEM2015

    • Author(s)
      M. Kudo, M. Arita, Y. Takahashi, K. Ohba, M. Shimuta, I. Fujiwara
    • Organizer
      2015 IEEE 7th International Memory Workshop
    • Place of Presentation
      Hyatt Regency Hotel, Monterey, CA, USA
    • Year and Date
      2015-05-19
    • Related Report
      2015 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Switching operation of WOx ReRAMs with Cu top electrodes investigated by in-situ TEM2015

    • Author(s)
      A. Takahashi, M. Arita, Y. Ohno, M. Kudo, A. Nakane, A. Tsurumaki-Fukuchi, Y. Takahashi
    • Organizer
      EMRS 2015 Spring Meeting
    • Place of Presentation
      Lille Grand Palais, Lille, France
    • Year and Date
      2015-05-14
    • Related Report
      2015 Annual Research Report
    • Int'l Joint Research
  • [Presentation] In-situ transmission electron microscopy of Cu/MoOx CBRAM2015

    • Author(s)
      M. Arita, Y. Ohno, M. Kudo, Y. Murakami, A. Tsurumaki-Fukuchi, Y. Takahashi
    • Organizer
      EMRS 2015 Spring Meeting
    • Place of Presentation
      Lille Grand Palais, Lille, France
    • Year and Date
      2015-05-14
    • Related Report
      2015 Annual Research Report
    • Int'l Joint Research
  • [Presentation] 平面型抵抗変化メモリにおける導電性フィラメントと抵抗変化のTEMその場観察2015

    • Author(s)
      村上暢介,米坂瞭太,浜田弘一,有田正志,高橋庸夫
    • Organizer
      日本顕微鏡学会 第71回学術講演会
    • Place of Presentation
      国立京都国際会館,京都
    • Year and Date
      2015-05-14
    • Related Report
      2015 Annual Research Report
  • [Presentation] TEMその場観察法によるCu/MoOx/Al2O3抵抗変化型メモリの特性評価2015

    • Author(s)
      平田周一郎、高橋謙仁、工藤昌輝、廣井孝弘、中根明俊、福地厚、有田正志、高橋庸夫
    • Organizer
      第62回応用物理学会春季学術講演会
    • Place of Presentation
      東海大学湘南(神奈川県・平塚市)
    • Year and Date
      2015-03-13
    • Related Report
      2014 Research-status Report
  • [Presentation] Cu系CBRAMにおける熱処理の影響2015

    • Author(s)
      中根明俊、勝村玲音、廣井孝弘、福地厚、有田正志、高橋庸夫
    • Organizer
      第62回応用物理学会春季学術講演会
    • Place of Presentation
      東海大学湘南(神奈川県・平塚市)
    • Year and Date
      2015-03-13
    • Related Report
      2014 Research-status Report
  • [Presentation] MOSFET挿入による抵抗変化型メモリの抵抗制御2015

    • Author(s)
      廣井孝弘、中根明俊、勝村玲音、福地厚、有田正志、高橋庸夫、浦邊大史、安藤秀幸、森江 隆
    • Organizer
      第62回応用物理学会春季学術講演会
    • Place of Presentation
      東海大学湘南(神奈川県・平塚市)
    • Year and Date
      2015-03-13
    • Related Report
      2014 Research-status Report
  • [Presentation] MOSFET上に集積化したCu-MoOx-Al抵抗変化型メモリのアナログメモリ動作2015

    • Author(s)
      浦邊 大史、富崎和正、安藤秀幸、森江隆、廣井孝弘、中根明俊、福地厚、有田正志、高橋庸夫
    • Organizer
      第62回応用物理学会春季学術講演会
    • Place of Presentation
      東海大学湘南(神奈川県・平塚市)
    • Year and Date
      2015-03-13
    • Related Report
      2014 Research-status Report
  • [Presentation] MOSFETを接続した抵抗変化型メモリのスイッチ特性の向上2015

    • Author(s)
      廣井孝弘, 中根明俊, 福地厚, 有田正志, 高橋庸夫, 浦邊大史, 安藤秀幸, 森江隆
    • Organizer
      第50回応用物理学会北海道支部学術講演会
    • Place of Presentation
      旭川市勤労者福祉会館(北海道・旭川市)
    • Year and Date
      2015-01-10
    • Related Report
      2014 Research-status Report
  • [Presentation] エレクトロマイグレーションによるCuナノギャップ電極の作製と応用2014

    • Author(s)
      米坂瞭太,越智隼人,村上暢介,有田正志,高橋庸夫
    • Organizer
      第75回応用物理学会学術講演会
    • Place of Presentation
      北海道大学(北海道・札幌市)
    • Year and Date
      2014-09-19
    • Related Report
      2014 Research-status Report
  • [Presentation] Cu/MoOx/TiN ReRAMの初期スイッチ過程における導電フィラメント2014

    • Author(s)
      有田正志,大野裕輝,工藤昌輝,高橋庸夫
    • Organizer
      第75回応用物理学会学術講演会
    • Place of Presentation
      北海道大学(北海道・札幌市)
    • Year and Date
      2014-09-17
    • Related Report
      2014 Research-status Report
  • [Presentation] Growth and Shrinkage of Conductive Filament in Cu/MoOx ReRAMs2014

    • Author(s)
      Masashi Arita, Yuuki Ohno, Masaki Kudo, Yasuo Takahashi
    • Organizer
      The 2014 International Conference on Solid State Devices and Materials
    • Place of Presentation
      Tsukuba International Congress Center (Tsukuba, Japan)
    • Year and Date
      2014-09-09
    • Related Report
      2014 Research-status Report
  • [Presentation] Evolution of conductive filaments in Cu/MoOx CBRAM observed by means of in-situ TEM2014

    • Author(s)
      M. Arita, Y. Ohno, M. Kudo, Y. Takahasi
    • Organizer
      6th IEEE Internat. Nanoelectronics Conference 2014
    • Place of Presentation
      Hokkaido University (Sapporo, Japan)
    • Year and Date
      2014-07-30
    • Related Report
      2014 Research-status Report
    • Invited
  • [Presentation] Study on in-situ TEM observation of WOx ReRAMs with Cu top electrodes2014

    • Author(s)
      A. Takahashi, Y. Ohno, M. Kudo, A. Nakane, M. Arita, Y. Takahashi
    • Organizer
      6th IEEE Internat. Nanoelectronics Conference 2014
    • Place of Presentation
      Hokkaido University (Sapporo, Japan)
    • Year and Date
      2014-07-30
    • Related Report
      2014 Research-status Report
  • [Presentation] Switching chracteristics of Cu-MoOx ReRAM2014

    • Author(s)
      T. Hiroi, A. Nakane, T. Fujimoto, M. Arita, H. Ando, T. Morie, Y. Takahashi
    • Organizer
      6th IEEE Internat. Nanoelectronics Conference 2014
    • Place of Presentation
      Hokkaido University (Sapporo, Japan)
    • Year and Date
      2014-07-30
    • Related Report
      2014 Research-status Report
  • [Presentation] Real time transmission electronmicroscopy observation of Cu/MoOx ReRAMs2014

    • Author(s)
      M. Kudo, Y. Ohno, T. Hiroi, K. Hamada, M. Arita, Y. Takahashi
    • Organizer
      6th IEEE Internat. Nanoelectronics Conference 2014
    • Place of Presentation
      Hokkaido University (Sapporo, Japan)
    • Year and Date
      2014-07-30
    • Related Report
      2014 Research-status Report
  • [Presentation] Fabrication of Cu nanogaps by electromigration and its application2014

    • Author(s)
      T. Yonesaka, H. Ochi, Y. Murakami, M. Arita, Y. Takahashi
    • Organizer
      6th IEEE Internat. Nanoelectronics Conference 2014
    • Place of Presentation
      Hokkaido University (Sapporo, Japan)
    • Year and Date
      2014-07-30
    • Related Report
      2014 Research-status Report
  • [Presentation] In-situ observation of electromigration-induced atomic steps movement2014

    • Author(s)
      Y. Murakami, R. Yonesaka, K. Hamada, M. Arita, Y. Takahashi
    • Organizer
      6th IEEE Internat. Nanoelectronics Conference 2014
    • Place of Presentation
      Hokkaido Univ., Hokkaido University (Sapporo, Japan), Japan
    • Year and Date
      2014-07-30
    • Related Report
      2014 Research-status Report
  • [Presentation] Magnetoresistance and microstructure of Fe-MgF2 single layer granular films2014

    • Author(s)
      T. Yokono, E. Sato, Y. Murakami, M. Arita, Y. Takahashi
    • Organizer
      6th IEEE Internat. Nanoelectronics Conference 2014
    • Place of Presentation
      Hokkaido University (Sapporo, Japan)
    • Year and Date
      2014-07-30
    • Related Report
      2014 Research-status Report
  • [Presentation] In-situ TEM Observation of ReRAM Switching2014

    • Author(s)
      Y. Takahashi, M. Arita
    • Organizer
      2014 International Meeting for Future of Electron Devices, Kansai
    • Place of Presentation
      Ryukoku University Avanti Kyoto Hall (Kyoto, Japan)
    • Year and Date
      2014-06-20
    • Related Report
      2014 Research-status Report
    • Invited
  • [Presentation] Real-time Resistive Switching of Cu/MoOx ReRAM Observed in2014

    • Author(s)
      M. Kudo, Y. Ohno, T. Hiroi, T. Fujimoto, K.
    • Organizer
      The 2014 IEEE Silicon Nanoelectronics Workshop
    • Place of Presentation
      Hilton Hawaiian Village (Honolulu, HI USA)
    • Year and Date
      2014-06-09
    • Related Report
      2014 Research-status Report
  • [Presentation] Dynamical observation of Cu/MoOx resistive RAM2014

    • Author(s)
      M. Arita, Y. Ohno, M. Kudo, Y. Murakami, Y. Takahashi
    • Organizer
      EMRS 2014 Spring Meeting
    • Place of Presentation
      Lille Grand Palais (Lille, France)
    • Year and Date
      2014-05-28
    • Related Report
      2014 Research-status Report
  • [Presentation] Cu/MoOx抵抗変化メモリのTEMその場観察2014

    • Author(s)
      有田正志,大野裕輝,工藤昌輝,高橋庸夫
    • Organizer
      日本顕微鏡学会第70回学術講演会
    • Place of Presentation
      幕張メッセ(千葉県・千葉市)
    • Year and Date
      2014-05-11
    • Related Report
      2014 Research-status Report
  • [Presentation] 透過型電子顕微鏡による結晶粒界近傍のエレクトロマイグレーションその場観察

    • Author(s)
      村上 暢介、越智 隼人、浜田 弘一、有田正志、高橋 庸夫、竹田 精治
    • Organizer
      日本顕微鏡学会第69回学術講演会
    • Place of Presentation
      ホテル阪急エキスポパーク(吹田)
    • Related Report
      2013 Research-status Report
  • [Presentation] 抵抗変化メモリー用NiO薄膜のTEMその場観察

    • Author(s)
      有田正志,藤井孝史,浜田弘一,高橋庸夫
    • Organizer
      日本顕微鏡学会第69回学術講演会
    • Place of Presentation
      ホテル阪急エキスポパーク(吹田)
    • Related Report
      2013 Research-status Report
  • [Presentation] MoOx抵抗変化メモリにおけるスイッチ動作のTEMその場観察

    • Author(s)
      大野 裕輝,工藤 昌輝,浜田 弘一,有田 正志,高橋 庸夫
    • Organizer
      日本顕微鏡学会第69回学術講演会
    • Place of Presentation
      ホテル阪急エキスポパーク(吹田)
    • Related Report
      2013 Research-status Report
  • [Presentation] Double-dot Si single-electron transistor with tunable coupling capacitive by the number of electrons in the dot

    • Author(s)
      T. Uchida, H. Takenaka, I. Yoshioka, M. Arita, A. Fujiwara, Y. Takahashi
    • Organizer
      2013 Silicon Nanoelectronics Workshop
    • Place of Presentation
      Rhiga Royal Hotel Kyoto (Kyoto)
    • Related Report
      2013 Research-status Report
  • [Presentation] Excited states of double-gate Si single-electron transistors in the few electron regime

    • Author(s)
      I. Yoshioka, T. Uchida, M. Arita, A. Fujiwara, Y. Takahashi
    • Organizer
      2013 Silicon Nanoelectronics Workshop
    • Place of Presentation
      Rhiga Royal Hotel Kyoto (Kyoto)
    • Related Report
      2013 Research-status Report
  • [Presentation] Observation of Resistive Switching on Cu/MoOx ReRAMs using the in-situ TEM method

    • Author(s)
      M. Kudo, Y. Ohno, K. Takamizawa, K. Hamada, M. Arita, Y. Takahashi
    • Organizer
      The 12th Asia Pacific Physics Conference
    • Place of Presentation
      Makuhari Messe (Chiba)
    • Related Report
      2013 Research-status Report
  • [Presentation] The Action of the Grain Boundary to the Narrowing Rate of Gold Nanowires by Electromigration

    • Author(s)
      Y. Murakami, H. Ochi, M. Arita, K. Hamada, Y. Takahashi
    • Organizer
      The 12th Asia Pacific Physics Conference
    • Place of Presentation
      Makuhari Messe (Chiba)
    • Related Report
      2013 Research-status Report
  • [Presentation] n-situ TEM Observation on Cu/MoOx Resistive Switching RAM

    • Author(s)
      M. Kudo, Y. Ohno, K. Hamada, M. Arita, Y. Takahashi
    • Organizer
      ANBRE13
    • Place of Presentation
      COEX (Seoul, Korea)
    • Related Report
      2013 Research-status Report
  • [Presentation] Double quantum dot Si single-electron transistor with multiple gate electrodes fabricated by PADOX

    • Author(s)
      T. Uchida, M. Arita, A. Fujiwara, Y. Takahashi
    • Organizer
      ANBRE13
    • Place of Presentation
      COEX (Seoul, Korea)
    • Related Report
      2013 Research-status Report
  • [Presentation] In-situ TEM observation of gold nanogaps by electromigration

    • Author(s)
      Y. Murakami, H. Ochi, M. Arita, K. Hamada, Y. Takahashi, S. Takeda
    • Organizer
      ANBRE13
    • Place of Presentation
      COEX (Seoul, Korea)
    • Related Report
      2013 Research-status Report
  • [Presentation] 室温での反応性スパッタにより作製したWOx薄膜の抵抗スイッチ特性

    • Author(s)
      中根明俊,高見澤圭祐,廣井孝弘,有田正志,高橋庸夫,山田 徹
    • Organizer
      第74回応用物理学会秋季学術講演会
    • Place of Presentation
      同志社大(京田辺)
    • Related Report
      2013 Research-status Report
  • [Presentation] MoOx抵抗変化型メモリのスイッチ特性の改善

    • Author(s)
      廣井孝弘,中根明俊,Thana Sriviriyakul,髙見澤圭佑,有田正志,高橋庸夫
    • Organizer
      第74回応用物理学会秋季学術講演会
    • Place of Presentation
      同志社大(京田辺)
    • Related Report
      2013 Research-status Report
  • [Presentation] Cu/MoOx抵抗変化型メモリにおけるフィラメント観察とその分析

    • Author(s)
      工藤昌輝,大野裕輝,浜田弘一,有田正志,高橋庸夫
    • Organizer
      第74回応用物理学会秋季学術講演会
    • Place of Presentation
      同志社大(京田辺)
    • Related Report
      2013 Research-status Report
  • [Presentation] Fe-MgF2グラニュラー膜における磁気抵抗効果のFe層厚依存性

    • Author(s)
      横野示寛,佐藤栄太,浜田弘一,有田正志,高橋庸夫
    • Organizer
      第153回日本金属学会講演大会
    • Place of Presentation
      金沢大学(金沢)
    • Related Report
      2013 Research-status Report
  • [Presentation] 抵抗変化メモリCu/MoOxにおけるCuの移動

    • Author(s)
      大野裕輝,工藤昌輝,浜田弘一,有田正志,高橋庸夫
    • Organizer
      第153回日本金属学会講演大会
    • Place of Presentation
      金沢大学(金沢)
    • Related Report
      2013 Research-status Report
  • [Presentation] ダブルゲートSi単電子トランジスタにおけるExcited stateの特性変化

    • Author(s)
      吉岡 勇,内田貴史,佐藤 光,有田正志,藤原 聡,高橋庸夫
    • Organizer
      第74回応用物理学会秋季学術講演会
    • Place of Presentation
      同志社大(京田辺)
    • Related Report
      2013 Research-status Report
  • [Presentation] 二重量子ドットSi単電子トランジスタにおける少数電子系の結合容量の評価

    • Author(s)
      内田貴史,吉岡 勇,有田正志,藤原 聡,高橋庸夫
    • Organizer
      第74回応用物理学会秋季学術講演会
    • Place of Presentation
      同志社大(京田辺)
    • Related Report
      2013 Research-status Report
  • [Presentation] エレクトロマイグレーションによるAu細線破断過程のTEMその場観察

    • Author(s)
      村上暢介,越智隼人,浜田弘一,有田正志,髙橋庸夫
    • Organizer
      第74回応用物理学会秋季学術講演会
    • Place of Presentation
      同志社大(京田辺)
    • Related Report
      2013 Research-status Report
  • [Presentation] バイポーラフィードバック電圧制御法によるNiナノ構造の形状変化

    • Author(s)
      越智隼人,村上暢介,浜田弘一,有田正志,高橋庸夫
    • Organizer
      第74回応用物理学会秋季学術講演会
    • Place of Presentation
      同志社大(京田辺)
    • Related Report
      2013 Research-status Report
  • [Presentation] Observation of filament formation and rupture in Cu/MoOx ReRAMs

    • Author(s)
      M. Kudo, Y. Ohno, K. Hamada, M. Arita, Y. Takahashi
    • Organizer
      224th ECS Meeting
    • Place of Presentation
      The Hilton San Francisco Hotel (San Francisco, California, USA)
    • Related Report
      2013 Research-status Report
  • [Presentation] High-Speed Operation of Si Single-Electron Transistor

    • Author(s)
      Y. Takahashi, H. Takenaka, T. Uchida, M. Arita, A. Fujiwara, H. Inokawa
    • Organizer
      224th ECS Meeting
    • Place of Presentation
      The Hilton San Francisco Hotel (San Francisco, California, USA)
    • Related Report
      2013 Research-status Report
    • Invited
  • [Presentation] Double-dot Si single-electron transistor with tunable coupling capacitance

    • Author(s)
      T. Uchida, I. Yoshioka, M. Arita, A. Fujiwara, Y. Takahashi
    • Organizer
      10th Int. Conf. Flow Dynamics
    • Place of Presentation
      Sendai Int. Cent. (Sendai)
    • Related Report
      2013 Research-status Report
  • [Presentation] Si 単電子トランジスタ特性における2次元励起状態

    • Author(s)
      佐藤光,内田貴史,吉岡勇,有田正志,高橋庸夫
    • Organizer
      第49回応用物理学会北海道支部学術講演会
    • Place of Presentation
      北大(札幌)
    • Related Report
      2013 Research-status Report
  • [Presentation] Cu/MoOx 構造の熱処理によるCu の移動

    • Author(s)
      藤本天,廣井孝弘,中根明俊,大野裕輝,有田正志,高橋庸夫
    • Organizer
      日本金属学会北海道支部講演大会
    • Place of Presentation
      北海道立道民活動センター(札幌)
    • Related Report
      2013 Research-status Report
  • [Presentation] 極薄Fe‐MgF2 グラニュラー膜の作製と電気特性

    • Author(s)
      佐藤栄太,横野示寛,石川琢磨,有田正志,高橋庸夫
    • Organizer
      日本金属学会北海道支部講演大会
    • Place of Presentation
      北海道立道民活動センター(札幌)
    • Related Report
      2013 Research-status Report
  • [Presentation] Cu/MoOx抵抗変化メモリのスイッチ動作における導電フィラメントの直接観察

    • Author(s)
      大野裕輝,廣井孝弘,工藤昌輝,浜田弘一,有田正志,高橋庸夫
    • Organizer
      電子情報通信学会電子デバイス研究会
    • Place of Presentation
      北大(札幌)
    • Related Report
      2013 Research-status Report
  • [Presentation] Observation of ReRAM switching by means of TEM/STM

    • Author(s)
      M. Arita, Y. Takahashi
    • Organizer
      第61回応用物理学会春季学術講演会
    • Place of Presentation
      青山学院大(相模原)
    • Related Report
      2013 Research-status Report
    • Invited
  • [Presentation] 微細構造形成に向けたエレクトロマイグレーションによる細線破断過程の解析

    • Author(s)
      村上暢介,有田正志,高橋庸夫
    • Organizer
      第61回応用物理学会春季学術講演会
    • Place of Presentation
      青山学院大(相模原)
    • Related Report
      2013 Research-status Report
  • [Presentation] マルチゲート二重量子ドットSi単電子トランジスタのカップリング容量の制御

    • Author(s)
      内田貴史,吉岡勇,佐藤光,有田正志,藤原聡,高橋庸夫
    • Organizer
      第61回応用物理学会春季学術講演会
    • Place of Presentation
      青山学院大(相模原)
    • Related Report
      2013 Research-status Report
  • [Presentation] 3端子ナノドットアレイの高機能の創出

    • Author(s)
      吉岡勇,内田貴史,佐藤光,有田正志,藤原聡,高橋庸夫
    • Organizer
      第61回応用物理学会春季学術講演会
    • Place of Presentation
      青山学院大(相模原)
    • Related Report
      2013 Research-status Report
  • [Presentation] Cu-MoOx-Al2O3抵抗変化型メモリのスイッチ特性

    • Author(s)
      廣井孝弘,中根明俊,藤本天,有田正志,高橋庸夫,安藤秀幸,森江隆
    • Organizer
      第61回応用物理学会春季学術講演会
    • Place of Presentation
      青山学院大(相模原)
    • Related Report
      2013 Research-status Report
  • [Presentation] Al電極上に作製したWOx薄膜の抵抗スイッチ特性

    • Author(s)
      中根明俊,廣井孝弘,有田正志,高橋庸夫,安藤秀幸,森江隆
    • Organizer
      第61回応用物理学会春季学術講演会
    • Place of Presentation
      青山学院大(相模原)
    • Related Report
      2013 Research-status Report
  • [Presentation] TEMその場観察法によるCu/WOx抵抗変化型メモリの特性評価

    • Author(s)
      高橋謙仁,大野裕輝,中根明俊,工藤昌輝,浜田弘一,有田正志,高橋庸夫
    • Organizer
      第61回応用物理学会春季学術講演会
    • Place of Presentation
      青山学院大(相模原)
    • Related Report
      2013 Research-status Report
  • [Presentation] TEMその場観察を用いたCu/MoOx抵抗変化型メモリの繰り返し特性とフィラメント観察

    • Author(s)
      工藤昌輝,大野裕輝,廣井孝弘,藤本天,浜田弘一,有田正志,高橋庸夫
    • Organizer
      第61回応用物理学会春季学術講演会
    • Place of Presentation
      青山学院大(相模原)
    • Related Report
      2013 Research-status Report
  • [Presentation] Fe-MgF2単層グラニュラー膜の磁気抵抗効果と膜微細構造

    • Author(s)
      横野示寛,佐藤栄太,浜田弘一,有田正志,高橋庸夫
    • Organizer
      第154回日本金属学会講演大会
    • Place of Presentation
      東京工大(目黒)
    • Related Report
      2013 Research-status Report
  • [Presentation] 抵抗変化メモリMoOx/Cuにおける繰り返し動作のTEMその場観察

    • Author(s)
      大野裕輝,廣井孝弘,工藤昌輝,浜田弘一,有田正志,高橋庸夫
    • Organizer
      第154回日本金属学会講演大会
    • Place of Presentation
      東京工大(目黒)
    • Related Report
      2013 Research-status Report
  • [Book] (e-book) In situ transmission electron microscopy for electronics, in The Transmission Electron Microscope - Theory and Applications, Dr. Khan Maaz (Ed.), Chap. 2, DOI: 10.5772/606512015

    • Author(s)
      M. Arita, K. Hamada,Y. Takahashi, K. Sueoka,T. Shibayama
    • Publisher
      InTech
    • Related Report
      2015 Annual Research Report

URL: 

Published: 2014-07-25   Modified: 2019-07-29  

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