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Fabrication of oxide-semiconductor pn diodes by UV oxidation of metallic thin films: Aiming for printed electronics

Research Project

Project/Area Number 25420283
Research Category

Grant-in-Aid for Scientific Research (C)

Allocation TypeMulti-year Fund
Section一般
Research Field Electronic materials/Electric materials
Research InstitutionThe University of Electro-Communications

Principal Investigator

Nozaki Shinji  電気通信大学, 情報理工学(系)研究科, 教授 (20237837)

Project Period (FY) 2013-04-01 – 2016-03-31
Project Status Completed (Fiscal Year 2015)
Budget Amount *help
¥5,070,000 (Direct Cost: ¥3,900,000、Indirect Cost: ¥1,170,000)
Fiscal Year 2015: ¥910,000 (Direct Cost: ¥700,000、Indirect Cost: ¥210,000)
Fiscal Year 2014: ¥2,340,000 (Direct Cost: ¥1,800,000、Indirect Cost: ¥540,000)
Fiscal Year 2013: ¥1,820,000 (Direct Cost: ¥1,400,000、Indirect Cost: ¥420,000)
Keywords紫外光 / 光酸化 / 酸化物半導体 / ニッケル / 亜鉛 / FET / フレキシブルエレクトロニクス / プリンテッドエレクトロニクス
Outline of Final Research Achievements

The objective of this project is to fabricate a planer pn diode by UV oxidation of metallic thin films. Because most oxide semiconductors exhibit either n or p-type conductivity, an attempt was made to make a pn diode consisting of n-ZnO and p-NiO. The electron concentration and mobility of ZnO were obtained by the Hall measurement, 1E16 cm-3 and 2 cm2V-1s-1, respectively. In contrast to ZnO, the NiO film exhibits a high resistivity and the Hall measurement cannot determine its conductivity. Nevertheless, A diode-like I-V characteristic was obtained in the device made by UV oxidation of a thin metallic Ni/Zn double layer.

Report

(4 results)
  • 2015 Annual Research Report   Final Research Report ( PDF )
  • 2014 Research-status Report
  • 2013 Research-status Report
  • Research Products

    (14 results)

All 2015 2014 2013 Other

All Journal Article (8 results) (of which Int'l Joint Research: 2 results,  Peer Reviewed: 8 results,  Open Access: 4 results,  Acknowledgement Compliant: 3 results) Presentation (4 results) Remarks (2 results)

  • [Journal Article] ZnO Nanorod-Based Non-Enzymatic Optical Glucose Biosensor2015

    • Author(s)
      Sachindra Nath Sarangi, Shinji Nozaki, and Surendra Nath Sahu
    • Journal Title

      Journal of Biomedical Nanotechnology

      Volume: 11 Issue: 6 Pages: 988-996

    • DOI

      10.1166/jbn.2015.2048

    • Related Report
      2015 Annual Research Report
    • Peer Reviewed / Open Access / Int'l Joint Research
  • [Journal Article] Visible-blind ultraviolet photodiode fabricated by UV oxidation of metallic zinc on p-Si2015

    • Author(s)
      Dongyuan Zhang, Kazuo Uchida, and Shinji Nozaki
    • Journal Title

      J. Appl. Phys.

      Volume: 118 Issue: 9

    • DOI

      10.1063/1.4929961

    • Related Report
      2015 Annual Research Report
    • Peer Reviewed / Open Access / Acknowledgement Compliant
  • [Journal Article] Low temperature formation of high-quality gate oxide by ultraviolet irradiation on spin-on-glass2015

    • Author(s)
      R. Usuda, K. Uchida, and S. Nozaki
    • Journal Title

      Appl. Phys. Lett.

      Volume: 107 Issue: 18

    • DOI

      10.1063/1.4935208

    • Related Report
      2015 Annual Research Report
    • Peer Reviewed / Open Access / Acknowledgement Compliant
  • [Journal Article] Spectroscopic ellipsometry study of the free-carrier and band-edge absorption in ZnO thin films: Effect of non-stoichiometry2015

    • Author(s)
      Chaman Singh, Shinji Nozaki, and Shyama Rath
    • Journal Title

      J. Appl. Phys.

      Volume: 118 Issue: 19

    • DOI

      10.1063/1.4935629

    • Related Report
      2015 Annual Research Report
    • Peer Reviewed / Open Access / Int'l Joint Research
  • [Journal Article] Structural, electrical and optical properties of CoxNi1-xO films grown by metalorganic chemical vapor deposition2015

    • Author(s)
      Teuku Muhammad Roffi, Kazuo Uchida and Shinji Nozaki
    • Journal Title

      J. Crystal Growth

      Volume: 414 Pages: 123-129

    • DOI

      10.1016/j.jcrysgro.2014.10.027

    • Related Report
      2014 Research-status Report
    • Peer Reviewed
  • [Journal Article] High-quality gate oxide formed at 150 oC for flexible electronics2014

    • Author(s)
      Yasuhiro Iijima, Ryo Usuda, Kazuo Uchida, and Shinji Nozaki
    • Journal Title

      Japanese Journal of Applied Physics

      Volume: 53 Issue: 8S1 Pages: 08LC05-08LC05

    • DOI

      10.7567/jjap.53.08lc05

    • Related Report
      2014 Research-status Report
    • Peer Reviewed / Acknowledgement Compliant
  • [Journal Article] NiO/Si heterostructures formed by UV oxidation of nickel deposited on Si substrates2014

    • Author(s)
      Dongyuan Zhang, Shinji Nozaki and Kazuo Uchida
    • Journal Title

      J. Vac. Sci. Technol. B

      Volume: 32 Issue: 3 Pages: 01312021-6

    • DOI

      10.1116/1.4868634

    • Related Report
      2013 Research-status Report
    • Peer Reviewed
  • [Journal Article] Fabrication of a p-NiO/n-Si heterojunction diode by UV oxidation of Ni deposited on n-Si2013

    • Author(s)
      Dongyuan Zhang, Kazuo Uchida and Shinji Nozak
    • Journal Title

      Mat. Res. Soc. Symp. Proc.

      Volume: 1494 Pages: 305-309

    • DOI

      10.1557/opl.2013.520

    • Related Report
      2013 Research-status Report
    • Peer Reviewed
  • [Presentation] Visible-blind UV sensor made by UV oxidation of metallic zinc on p-Si2014

    • Author(s)
      Dongyuan Zhang, Kazuo Uchida and Shinji Nozaki
    • Organizer
      8th International Workshop on Zinc Oxide and Related Materials
    • Place of Presentation
      Niagara Falls, Ontario, Canada
    • Year and Date
      2014-09-07 – 2014-09-11
    • Related Report
      2014 Research-status Report
  • [Presentation] Structural, electrical and optical properties of CoxNi1-xO films grown by metalorganic chemical vapor deposition2014

    • Author(s)
      Teuku Muhammad Roffi, Kazuo Uchida and Shinji Nozaki
    • Organizer
      17th International Conference on Metal Organic Vapor Phase Epitaxy
    • Place of Presentation
      Lausanne, Switzerland
    • Year and Date
      2014-07-13 – 2014-07-18
    • Related Report
      2014 Research-status Report
  • [Presentation] UV酸化によるp-NiO/n-Siヘテロ接合ダイオードの作製

    • Author(s)
      張 東元、内田和男、野崎眞次
    • Organizer
      第74回応用物理学会学術講演会
    • Place of Presentation
      同志社大学
    • Related Report
      2013 Research-status Report
  • [Presentation] 亜鉛、ニッケル酸化物トランジスタの低温作製と地球にやさしいフレキしグルエレクトロニクスの実現

    • Author(s)
      張 東元
    • Organizer
      STARC Symposium
    • Place of Presentation
      新横浜国際ホテル
    • Related Report
      2013 Research-status Report
  • [Remarks] http://www.w3-4f5f.ee.uec.ac.jp

    • Related Report
      2015 Annual Research Report
  • [Remarks] http://www.w3-4f5f.ee.uec.ac.jp

    • Related Report
      2014 Research-status Report

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Published: 2014-07-25   Modified: 2019-07-29  

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