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Layer-number selective process for graphene using maskless ultra-violet laser irradiation

Research Project

Project/Area Number 25420287
Research Category

Grant-in-Aid for Scientific Research (C)

Allocation TypeMulti-year Fund
Section一般
Research Field Electronic materials/Electric materials
Research InstitutionOsaka University

Principal Investigator

Wakaya Fujio  大阪大学, 基礎工学研究科, 准教授 (60240454)

Co-Investigator(Kenkyū-buntansha) ABO Satoshi  大阪大学, 大学院基礎工学研究科, 助教 (60379310)
Project Period (FY) 2013-04-01 – 2016-03-31
Project Status Completed (Fiscal Year 2015)
Budget Amount *help
¥5,070,000 (Direct Cost: ¥3,900,000、Indirect Cost: ¥1,170,000)
Fiscal Year 2015: ¥1,690,000 (Direct Cost: ¥1,300,000、Indirect Cost: ¥390,000)
Fiscal Year 2014: ¥1,690,000 (Direct Cost: ¥1,300,000、Indirect Cost: ¥390,000)
Fiscal Year 2013: ¥1,690,000 (Direct Cost: ¥1,300,000、Indirect Cost: ¥390,000)
Keywordsグラフェン / レーザー加工 / マスクレス加工 / マスクレス
Outline of Final Research Achievements

It is found that graphenes on SiO2/Si substrate disappear after KrF excimer laser irradiation with a wavelength of 258 nm at a certain power, which refers to the ‘threshold power’ in the following. The threshold power is found to depend on the layer number, or thickness, of graphene. This means that “layer-number-selective process” is possible. Actually, such a layer-number-selective process is demonstrated. Using SiO2/Si substrate all surface of which is covered by graphene, maskless laser patterning is successfully demonstrated.

Report

(4 results)
  • 2015 Annual Research Report   Final Research Report ( PDF )
  • 2014 Research-status Report
  • 2013 Research-status Report
  • Research Products

    (16 results)

All 2016 2015 2014 2013

All Journal Article (5 results) (of which Peer Reviewed: 5 results) Presentation (11 results) (of which Int'l Joint Research: 1 results,  Invited: 1 results)

  • [Journal Article] X-ray source using carbon-nanotube field emitter with side-gate electrode2015

    • Author(s)
      Shuhei Okawaki, Satoshi Abo, Fujio Wakaya, Masayuki Abe, Mikio Takai
    • Journal Title

      Japanese Journal of Applied Physics

      Volume: 54 Issue: 6S1 Pages: 06FF10-06FF10

    • DOI

      10.7567/jjap.54.06ff10

    • NAID

      210000145234

    • Related Report
      2015 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Effect of electron focusing in x-ray source using LiTaO_3 crystals excited by neodymium-doped yttrium lithium fluoride laser light2014

    • Author(s)
      Kosuke Nakahama, Michiaki Takahashi, Satoshi Abo, Fujio Wakaya, and Mikio Takai
    • Journal Title

      Journal of Vacuum Science & Technology B

      Volume: Vol. 32 Issue: 2

    • DOI

      10.1116/1.4864307

    • Related Report
      2014 Research-status Report
    • Peer Reviewed
  • [Journal Article] Maskless laser processing of graphene2014

    • Author(s)
      Fujio Wakaya, Tadashi Kurihara, Nariaki Yurugi, Satoshi Abo, Masayuki Abe, Mikio Takai
    • Journal Title

      Microelectronic Engineering

      Volume: 141 Pages: 203-206

    • DOI

      10.1016/j.mee.2015.03.049

    • Related Report
      2014 Research-status Report
    • Peer Reviewed
  • [Journal Article] Ultra-violet laser processing of graphene on SiO2/Si2013

    • Author(s)
      Fujio Wakaya, Tadashi Kurihara, Satoshi Abo, Mikio Takai
    • Journal Title

      Microelectronic Engineering

      Volume: 110 Pages: 358-360

    • DOI

      10.1016/j.mee.2013.02.062

    • Related Report
      2013 Research-status Report
    • Peer Reviewed
  • [Journal Article] Photoassisted electron emission from metal-oxide-semiconductor cathodes based on nanocrystalline silicon2013

    • Author(s)
      H. Shimawaki, Y. Neo, H. Mimura, F. Wakaya, M. Takai
    • Journal Title

      J. App. Phys.

      Volume: 113 Issue: 15

    • DOI

      10.1063/1.4801887

    • Related Report
      2013 Research-status Report
    • Peer Reviewed
  • [Presentation] パルスレーザー堆積/非接触原子間力顕微鏡複合装置の開発とアナターゼ型 TiO2(001)表面の高分解能測定2016

    • Author(s)
      勝部大樹,山下隼人,阿保智,若家冨士男,阿部 真之
    • Organizer
      第63回応用物理学会春季学術講演会
    • Place of Presentation
      東工大大岡山キャンパス(東京都・目黒区)
    • Year and Date
      2016-03-19
    • Related Report
      2015 Annual Research Report
  • [Presentation] X-ray Charge Neutralizer Using Carbon-Nanotube Field Emitter2015

    • Author(s)
      Fujio Wakaya
    • Organizer
      The 7th Japan-Korea Vacuum Nanoelectronics Sympojium
    • Place of Presentation
      Korea University (Korea)
    • Year and Date
      2015-10-23
    • Related Report
      2015 Annual Research Report
    • Int'l Joint Research / Invited
  • [Presentation] SiO2/Si基板上のグラフェンの紫外レーザによる加工のメカニズム2015

    • Author(s)
      萬木 成彰,若家 冨士男,阿保 智,山下 隼人, 阿部 真之, 高井 幹夫
    • Organizer
      SiO2/Si基板上のグラフェンの紫外レーザによる加工のメカニズム
    • Place of Presentation
      名古屋国際会議場(愛知県・名古屋市)
    • Year and Date
      2015-09-13
    • Related Report
      2015 Annual Research Report
  • [Presentation] Maskless laser processing of graphene2014

    • Author(s)
      Fujio Wakaya, Tadashi Kurihara, Nariaki Yurugki, Satoshi Abo, Masayuki Abe, and Mikio Takai
    • Organizer
      40th International Conference on Micro and Nano Engineering (MNE2014)
    • Place of Presentation
      Lausanne, Switzerland
    • Year and Date
      2014-09-22 – 2014-09-26
    • Related Report
      2014 Research-status Report
  • [Presentation] マスクレス加工のためのグラフェンへの紫外レーザ照射(Ⅲ)2014

    • Author(s)
      萬木成彰,若家冨士男,阿保智,阿部真之,高井幹夫
    • Organizer
      第75回応用物理学会秋季学術講演会
    • Place of Presentation
      札幌
    • Year and Date
      2014-09-17 – 2014-09-20
    • Related Report
      2014 Research-status Report
  • [Presentation] 赤外レーザ励起タンタル酸リチウムX線源の特性評価2014

    • Author(s)
      上里鷹寛,阿保智,若家冨士男,阿部真之,高井幹夫
    • Organizer
      第75回応用物理学会秋季学術講演会
    • Place of Presentation
      札幌
    • Year and Date
      2014-09-17 – 2014-09-20
    • Related Report
      2014 Research-status Report
  • [Presentation] Electron emission from pyroelectric crystal excited using high power infra-red laser light and its x-ray source application2014

    • Author(s)
      Satoshi Abo, Takahiro Uezato, Fujio Wakaya, Mikio Takai
    • Organizer
      27th Inyternational Vacuum Nanoelectronics Conference (IVNC2014)
    • Place of Presentation
      Engelberg, Switzerland
    • Year and Date
      2014-07-06 – 2014-07-10
    • Related Report
      2014 Research-status Report
  • [Presentation] Graphene layer number selective process by ultra violet laser irradiation2013

    • Author(s)
      Tadashi Kurihara, Fujio Wakaya, Satoshi Abo, Mikio Takai
    • Organizer
      39th International Conference on Micro and Nano Engineering (MNE2013)
    • Place of Presentation
      London, UK
    • Related Report
      2013 Research-status Report
  • [Presentation] Observation of Graphehe Using Magnetic Force Microscopy2013

    • Author(s)
      K. Maruishi, F. Wakaya, S. Abo, M. Takai
    • Organizer
      26th International Microprocesses and Nanotechnology Conference (MNC2013)
    • Place of Presentation
      Sapporo, Japan
    • Related Report
      2013 Research-status Report
  • [Presentation] 紫外レーザー照射によるグラフェンの層数選択プロセス2013

    • Author(s)
      栗原正志,若家冨士男,阿保智,高井幹夫
    • Organizer
      第74回応用物理学会学術講演会
    • Place of Presentation
      同志社大学 京田辺キャンパス
    • Related Report
      2013 Research-status Report
  • [Presentation] 磁気力顕微鏡によるグラフェンの観察II2013

    • Author(s)
      丸石宏達, 若家冨士男,阿保智,高井幹夫
    • Organizer
      第74回応用物理学会学術講演会
    • Place of Presentation
      同志社大学 京田辺キャンパス
    • Related Report
      2013 Research-status Report

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Published: 2014-07-25   Modified: 2019-07-29  

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