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Correlation between deep-level defects and turn-on switching characteristics in AlGaN/GaN hetero-structures

Research Project

Project/Area Number 25420300
Research Category

Grant-in-Aid for Scientific Research (C)

Allocation TypeMulti-year Fund
Section一般
Research Field Electronic materials/Electric materials
Research InstitutionChubu University

Principal Investigator

NAKANO Yoshitaka  中部大学, 工学部, 教授 (60394722)

Co-Investigator(Renkei-kenkyūsha) IROKAWA Yoshihiro  物質・材料研究機構, ワイドギャップ機能材料グループ, 研究員 (90394832)
SUMIYA Masatomo  物質・材料研究機構, ワイドギャップ機能材料グループ, 研究員 (20293607)
Research Collaborator KAWAI Hiroji  
Project Period (FY) 2013-04-01 – 2016-03-31
Project Status Completed (Fiscal Year 2015)
Budget Amount *help
¥5,200,000 (Direct Cost: ¥4,000,000、Indirect Cost: ¥1,200,000)
Fiscal Year 2015: ¥1,300,000 (Direct Cost: ¥1,000,000、Indirect Cost: ¥300,000)
Fiscal Year 2014: ¥1,430,000 (Direct Cost: ¥1,100,000、Indirect Cost: ¥330,000)
Fiscal Year 2013: ¥2,470,000 (Direct Cost: ¥1,900,000、Indirect Cost: ¥570,000)
KeywordsAlGaN/GaNヘテロ構造 / GaNバッファ層 / 炭素 / 欠陥準位 / デバイス・スイッチング特性 / MOCVD結晶成長 / 電流コラプス / デバイス・スイッチング特性 / スイッチング特性 / 有機金属気相成長 / ショットキーダイオード
Outline of Final Research Achievements

AlGaN/GaN hetero-structures are one of promising materials for the next generation of RF high power devices.At present,however,these GaN-based devices encounter undesirable current collapse issues,where actual device performances at high frequencies can be limited by the presence of deep-level defects in the AlGaN/GaN hetero-structures.In this study,we have systematically investigated a correlation between deep-level defects and carrier-trapping phenomena in AlGaN/GaN hetero-structures from a viewpoint of Carbon incorporation for MOCVD growth.As the result,we have revealed what kinds of Carbon-related deep-level defects are strongly responsible for the swithching characteristics in the bulk region of the AlGaN/GaN hetero-structures.

Report

(4 results)
  • 2015 Annual Research Report   Final Research Report ( PDF )
  • 2014 Research-status Report
  • 2013 Research-status Report
  • Research Products

    (27 results)

All 2016 2015 2014 2013 Other

All Journal Article (7 results) (of which Peer Reviewed: 7 results) Presentation (17 results) (of which Int'l Joint Research: 3 results,  Invited: 1 results) Remarks (3 results)

  • [Journal Article] Deep-level defects and turn-on capacitance recovery characteristics in AlGaN/GaN heterostructures2015

    • Author(s)
      Yoshitaka Nakanoa, Yoshihiro Irokawa and Masatomo Sumiya
    • Journal Title

      Philosophical Magazine Letters

      Volume: 95 Issue: 6 Pages: 333-339

    • DOI

      10.1080/09500839.2015.1062154

    • Related Report
      2015 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Electrical Investigation of Deep-Level Defects Introduced in AlGaN/GaN Heterostructures by CF4 Plasma Treatments2015

    • Author(s)
      R. Kawakamia, Y. Nakano, M. Niibe, T. Shirahama, T. Mukai
    • Journal Title

      ECS Solid State Letters

      Volume: 4 Issue: 4 Pages: 36-38

    • DOI

      10.1149/2.0011505ssl

    • Related Report
      2015 Annual Research Report 2014 Research-status Report
    • Peer Reviewed
  • [Journal Article] Ar+-irradiation-induced damage in hydride vapor-phase epitaxy GaN films2015

    • Author(s)
      Y. Nakano, D. Ogawa, K. Nakamura, R. Kawakami, M. Niibe
    • Journal Title

      J. Vac. Sci. Technol. A

      Volume: 33 Issue: 4 Pages: 0314031-5

    • DOI

      10.1116/1.4922593

    • Related Report
      2015 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Comparison between AlGaN Surfaces Etched by Carbon Tetrafluoride and Argon Plasmas: Effect of the Fluorine Impurities Incorporated in the Surface2015

    • Author(s)
      R. Kawakami, M. Niibe, Y. Nakano, T. Shirahama, S. Hirai, T. Mukai
    • Journal Title

      Vacuum

      Volume: 119 Pages: 264-269

    • DOI

      10.1016/j.vacuum.2015.06.002

    • Related Report
      2015 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Optical and electrical investigation of Ar+-irradiated GaN2014

    • Author(s)
      Miao-Gen Chen, Keiji Nakamura, Yan-Qing Qiu, Daisuke Ogawa, Retsuo Kawakami, Masahito Niibe, Yoshitaka Nakano
    • Journal Title

      Applied Physics Express

      Volume: 7 Issue: 11 Pages: 111003-111003

    • DOI

      10.7567/apex.7.111003

    • NAID

      210000137269

    • Related Report
      2014 Research-status Report
    • Peer Reviewed
  • [Journal Article] Carbon-Related Deep-Level Defects and Turn-On Recovery Characteristics in AlGaN/GaN Hetero-Structures2014

    • Author(s)
      Yoshitaka Nakano, Yoshihiro Irokawa, Masatomo Sumiya, Yasunobu Sumida, Shuichi Yagi, Hiroji Kawai
    • Journal Title

      Materials Research Society Symposium Proceedings

      Volume: 1635 Pages: 1-6

    • DOI

      10.1557/opl.2014.102

    • Related Report
      2013 Research-status Report
    • Peer Reviewed
  • [Journal Article] Steady-state photo-capacitance spectroscopy investigation of Carbon-related deep-level defects in AlGaN/GaN hetero-structures grown by MOCVD2013

    • Author(s)
      Yoshitaka Nakano
    • Journal Title

      Trends in Applied Spectroscopy

      Volume: 9 Pages: 59-65

    • Related Report
      2013 Research-status Report
    • Peer Reviewed
  • [Presentation] CF4プラズマ処理したn-GaN 膜の電気的評価2016

    • Author(s)
      中野由崇, 坂井佑輔, 新部正人, 川上烈生
    • Organizer
      第63回応用物理学会春季学術講演会
    • Place of Presentation
      東京
    • Year and Date
      2016-03-19
    • Related Report
      2015 Annual Research Report
  • [Presentation] CF4とArプラズマで処理したAlGaN膜の表面分析2016

    • Author(s)
      平井翔大, 新部正人, 川上烈生, 竹平徳崇, 中野由崇, 向井孝志
    • Organizer
      第29回日本放射光学会年会 放射光科学合同シンポジウム (JSR2016)
    • Place of Presentation
      柏
    • Year and Date
      2016-01-09
    • Related Report
      2015 Annual Research Report
  • [Presentation] CF4とArプラズマで処理したAlGaN/GaNの電気特性2015

    • Author(s)
      川上烈生, 新部正人, 中野由崇, 東知里, 向井孝志
    • Organizer
      平成27年度電気関係学会 四国支部連合大会
    • Place of Presentation
      高知
    • Year and Date
      2015-09-26
    • Related Report
      2015 Annual Research Report
  • [Presentation] Carbon-Related Deep-Level Defects and Carrier Trapping Characteristics in AlGaN/GaN Hetero-Structures2015

    • Author(s)
      Y. Nakano, Y. Irokawa, M. Sumiya, S. Yagi, H. Kawai
    • Organizer
      11th International Conference on Nitride Semiconductors (ICNS-11)
    • Place of Presentation
      Beijing
    • Year and Date
      2015-08-30
    • Related Report
      2015 Annual Research Report
    • Int'l Joint Research
  • [Presentation] A Relation between Pinch-Off Voltages and Deep-Level Defects in AlGaN/GaN Hetero-Structures Treated by CF4 Plasma2015

    • Author(s)
      Y. Nakano, R. Kawakami, M. Niibe, T. Shirahama, T. Mukae
    • Organizer
      11th International Conference on Nitride Semiconductors (ICNS-11)
    • Place of Presentation
      Beijing
    • Year and Date
      2015-08-30
    • Related Report
      2015 Annual Research Report
  • [Presentation] Ar+-Irradiation Induced Damage in Metal-Organic Vapor Phase Epitaxy GaN2015

    • Author(s)
      Y. Nakano, D. Ogawa, K. Nakamura, R. Kawakami, M. Niibe
    • Organizer
      The 5th International Symposium on Organic and Inorganic Electronic Materials and Related Nanotechnologies (EM-NANO 2015)
    • Place of Presentation
      Niigata
    • Year and Date
      2015-06-16
    • Related Report
      2015 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Ar+-Irradiation Induced Damage in Hydride Vapor-Phase Epitaxy GaN2015

    • Author(s)
      Y. Nakano, D. Ogawa, K. Nakamura, R. Kawakami, M. Niibe
    • Organizer
      The 5th International Symposium on Organic and Inorganic Electronic Materials and Related Nanotechnologies (EM-NANO 2015)
    • Place of Presentation
      Niigata
    • Year and Date
      2015-06-16
    • Related Report
      2015 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Carbon-Related Deep-Level Defects and Carrier-Trapping Characteristics in AlGaN/GaN Hetero-Structures2015

    • Author(s)
      Yoshitaka Nakano, Yoshihiro Irokawa, Masatomo Sumiya, Shuichi Yagi, Hiroji Kawai
    • Organizer
      7th International Symposium on Advanced Plasma Science and Its Applications for Nitrides and Nanomaterials/8th International Conference on Plasma-Nano Technology & Science (ISPlasma2015/IC-PLANTS2015)
    • Place of Presentation
      名古屋大学 (愛知県・名古屋市)
    • Year and Date
      2015-03-26 – 2015-03-31
    • Related Report
      2014 Research-status Report
  • [Presentation] Generation Behavior of Deep-Level Defects in Ar+-Irradiated GaN2015

    • Author(s)
      Yoshitaka Nakano, Miao-Gen Chen, Daisuke Ogawa, Keiji Nakamura, Retsuo Kawakami, Masahito Niibe
    • Organizer
      7th International Symposium on Advanced Plasma Science and Its Applications for Nitrides and Nanomaterials/8th International Conference on Plasma-Nano Technology & Science (ISPlasma2015/IC-PLANTS2015)
    • Place of Presentation
      名古屋大学 (愛知県・名古屋市)
    • Year and Date
      2015-03-26 – 2015-03-31
    • Related Report
      2014 Research-status Report
  • [Presentation] Ar+イオン照射したMOCVD-GaN:Si膜の電気的評価2015

    • Author(s)
      中野由崇, 高木健司, 小川大輔, 中村圭二, 新部正人, 川上烈生
    • Organizer
      第62回応用物理学会春季学術講演会
    • Place of Presentation
      東海大学 (神奈川県・平塚市)
    • Year and Date
      2015-03-11 – 2015-03-14
    • Related Report
      2014 Research-status Report
  • [Presentation] CF4プラズマ処理したAlGaN/GaNヘテロ構造の電気的評価2015

    • Author(s)
      中野由崇, 川上烈生, 新部正人, 高木健司, 白濱達夫, 向井孝志
    • Organizer
      第62回応用物理学会春季学術講演会
    • Place of Presentation
      東海大学 (神奈川県・平塚市)
    • Year and Date
      2015-03-11 – 2015-03-14
    • Related Report
      2014 Research-status Report
  • [Presentation] C-t法によるAlGaN/GaNヘテロ構造のターンオン回復特性評価2014

    • Author(s)
      中野由崇, 色川芳宏, 角谷正友, 八木修一, 河合 弘治
    • Organizer
      第75回応用物理学会秋季学術講演会
    • Place of Presentation
      北海道大学 (北海道・札幌市)
    • Year and Date
      2014-09-17 – 2014-09-20
    • Related Report
      2014 Research-status Report
  • [Presentation] Ar+イオン照射したHVPE-GaN膜の電気的評価2014

    • Author(s)
      中野由崇, 中村圭二, 新部 正人, 川上烈生
    • Organizer
      第75回応用物理学会秋季学術講演会
    • Place of Presentation
      北海道大学 (北海道・札幌)
    • Year and Date
      2014-09-17 – 2014-09-20
    • Related Report
      2014 Research-status Report
  • [Presentation] AlGaN/GaNヘテロ構造における炭素関連の欠陥準位評価2014

    • Author(s)
      中野由崇
    • Organizer
      日本物理学会 第24回格子欠陥フォーラム「パワーデバイス開発のための格子欠陥評価・制御」
    • Place of Presentation
      かんぽの宿 恵那 (岐阜県・恵那市)
    • Year and Date
      2014-09-11 – 2014-09-12
    • Related Report
      2014 Research-status Report
    • Invited
  • [Presentation] AlGaN/GaNヘテロ構造の炭素関連欠陥準位とターンオン電流回復特性2014

    • Author(s)
      中野由崇,色川芳宏,角谷正友, 住田行常, 八木修一, 河合弘治
    • Organizer
      第61回応用物理学会春季学術講演会
    • Place of Presentation
      青山学院大学相模原キャンパス
    • Related Report
      2013 Research-status Report
  • [Presentation] Carbon-Related Deep-Level Defects and Turn-On Recovery Characteristics in AlGaN/GaN Hetero-Structures2013

    • Author(s)
      Yoshitaka Nakano, Yoshihiro Irokawa, Yasunobu Sumida, Shuichi Yagi, Hiroji Kawai
    • Organizer
      International Symposium on Compound Semiconductors 2013
    • Place of Presentation
      Kobe Convention Center
    • Related Report
      2013 Research-status Report
  • [Presentation] Deep-Level Defects and Turn-On Recovery Characteristics in AlGaN/GaN Hetero-Structures Containing Various Carbon Concentrations2013

    • Author(s)
      Yoshitaka Nakano, Yoshihiro Irokawa, Masatomo Sumiya, Yasunobu Sumida, Shuichi Yagi, Hiroji Kawai
    • Organizer
      2013 Materials Research Society Fall Meeting
    • Place of Presentation
      Hynes Convention Center (Boston)
    • Related Report
      2013 Research-status Report
  • [Remarks] 中部大学 教員情報 中野由崇

    • URL

      http://www.chubu.ac.jp/about/faculty/profile/18fda985f369f45f4e48e0e57ab46fa441142616.html

    • Related Report
      2015 Annual Research Report
  • [Remarks] 中部大学教員情報 中野由崇

    • URL

      http://www.chubu.ac.jp/about/faculty/profile/18fda985f369f45f4e48e0e57ab46fa441142616.html

    • Related Report
      2014 Research-status Report
  • [Remarks] 教員情報

    • URL

      http://www.chubu.ac.jp/about/faculty/profile/18fda985f369f45f4e48e0e57ab46fa441142616.html

    • Related Report
      2013 Research-status Report

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Published: 2014-07-25   Modified: 2019-07-29  

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