A study on non-power MEMS wake up module

Research Project

Project/Area Number	25420324
Research Category	Grant-in-Aid for Scientific Research (C)
Allocation Type	Multi-year Fund
Section	一般
Research Field	Electron device/Electronic equipment
Research Institution	The University of Electro-Communications
Principal Investigator	ISHIBASHI Koichiro 電気通信大学, 情報理工学(系)研究科, 教授 (50614038)
Project Period (FY)	2013-04-01 – 2016-03-31
Project Status	Completed (Fiscal Year 2015)
Budget Amount *help	¥5,200,000 (Direct Cost: ¥4,000,000、Indirect Cost: ¥1,200,000) Fiscal Year 2015: ¥910,000 (Direct Cost: ¥700,000、Indirect Cost: ¥210,000) Fiscal Year 2014: ¥1,690,000 (Direct Cost: ¥1,300,000、Indirect Cost: ¥390,000) Fiscal Year 2013: ¥2,600,000 (Direct Cost: ¥2,000,000、Indirect Cost: ¥600,000)
Keywords	電子デバイス / 電子機器 / ＭＥＭＳ / ウエイクアップモジュール / MEMS
Outline of Final Research Achievements	We have investigated non power wake up module which utilizes a high Q MEMS resonator. Design, fabrication, measurement, and simulation methods of electric static MEMS resonator have been investigated. It is shown that electric static MEMS resonator cannot store energy to achieve a wake up module. Piezo type MEMS resonator is found to be a resonator which can store enough energy to achieve a wake up module, if the resonator has enough volume.

Report

(4 results)