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High radiation resistant CMOS integrated circuits using Wide-Band Gap SiC Semiconductor

Research Project

Project/Area Number 25420331
Research Category

Grant-in-Aid for Scientific Research (C)

Allocation TypeMulti-year Fund
Section一般
Research Field Electron device/Electronic equipment
Research InstitutionHiroshima University

Principal Investigator

Shin-Ichiro Kuroki  広島大学, ナノデバイス・バイオ融合科学研究所, 准教授 (70400281)

Project Period (FY) 2013-04-01 – 2016-03-31
Project Status Completed (Fiscal Year 2015)
Budget Amount *help
¥5,070,000 (Direct Cost: ¥3,900,000、Indirect Cost: ¥1,170,000)
Fiscal Year 2015: ¥1,690,000 (Direct Cost: ¥1,300,000、Indirect Cost: ¥390,000)
Fiscal Year 2014: ¥1,430,000 (Direct Cost: ¥1,100,000、Indirect Cost: ¥330,000)
Fiscal Year 2013: ¥1,950,000 (Direct Cost: ¥1,500,000、Indirect Cost: ¥450,000)
Keywords極限環境エレクトロニクス / シリコンカーバイド / 集積回路 / MOSFET / 耐放射線 / 耐高温 / 原子力発電所廃炉 / シリコンカーバイド極限環境エレクトロニクス / CMOS集積回路
Outline of Final Research Achievements

Radiation-hardened electronics has been required for the decommissioning of the Fukushima-1 plant accident. . 4H-SiC with wide-bandgap energy is one of the candidate for base semiconductor for the radiation-hardened electronics. In this work, 4H-SiC nMOSFETs with As-doped S/D and NbNi silicide contacts were demonstrated in harsh environments of high gamma-ray radiation up to over 100 Mrad and high-temperature up to 450°C. For an integrated logic circuits, pseudo-CMOS and nMOS inverters were also demonstrated.

Report

(4 results)
  • 2015 Annual Research Report   Final Research Report ( PDF )
  • 2014 Research-status Report
  • 2013 Research-status Report
  • Research Products

    (37 results)

All 2016 2015 2014 2013 Other

All Int'l Joint Research (1 results) Journal Article (4 results) (of which Int'l Joint Research: 2 results,  Peer Reviewed: 4 results,  Acknowledgement Compliant: 3 results) Presentation (25 results) (of which Int'l Joint Research: 6 results,  Invited: 2 results) Remarks (6 results) Patent(Industrial Property Rights) (1 results)

  • [Int'l Joint Research] KTH Royal Institute of Technology(スウェーデン)

    • Related Report
      2015 Annual Research Report
  • [Journal Article] Characterization of 4H-SiC nMOSFETs in Harsh Environments, High-Temperature and High Gamma-Ray Radiation2016

    • Author(s)
      S-I. Kuroki, H. Nagatsuma, M. De Silva, S. Ishikawa, T. Maeda, H. Sezaki, T. Kikkawa, T. Makino, T. Ohshima, M. Ostling, and C.-M. Zetterling
    • Journal Title

      Mat. Sci. Forum

      Volume: 858 Pages: 864-867

    • DOI

      10.4028/www.scientific.net/msf.858.864

    • Related Report
      2015 Annual Research Report
    • Peer Reviewed / Int'l Joint Research / Acknowledgement Compliant
  • [Journal Article] 4H-SiC nMOSFETs with As-doped S/D and NbNi Silicide ohmic contacts2016

    • Author(s)
      H. Nagatsuma, S-I. Kuroki, M. De Silva, S. Ishikawa, T. Maeda, H. Sezaki, T. Kikkawa, M. Ostling, and C.-M. Zetterling
    • Journal Title

      Mat. Sci. Forum

      Volume: 858 Pages: 573-576

    • DOI

      10.4028/www.scientific.net/msf.858.573

    • Related Report
      2015 Annual Research Report
    • Peer Reviewed / Int'l Joint Research / Acknowledgement Compliant
  • [Journal Article] Low resistance ohmic contact formation on 4H-SiC c-face with NbNi silicidation using nano-second laser annealing2016

    • Author(s)
      M. D. Silva, S. Ishikawa, T. Kikkawa, and S.-I. Kuroki
    • Journal Title

      Mat. Sci. Forum

      Volume: 858 Pages: 549-552

    • DOI

      10.4028/www.scientific.net/msf.858.549

    • Related Report
      2015 Annual Research Report
    • Peer Reviewed / Acknowledgement Compliant
  • [Journal Article] Low resistance Ohmic Contact Formation of Ni Silicide on Partially Si Ion Implanted n+ 4H-SiC2014

    • Author(s)
      Milantha De Silva, Tadashi Sato, Shin-Ichiro Kuroki and Takamaro Kikkawa
    • Journal Title

      Material Science Forum

      Volume: 778-780 Pages: 689-692

    • DOI

      10.4028/www.scientific.net/msf.778-780.689

    • Related Report
      2013 Research-status Report
    • Peer Reviewed
  • [Presentation] 4H-SiC MOSFETs and Logic Inverters for Radiation-Hardened Electronics2016

    • Author(s)
      Shin-Ichiro Kuroki
    • Organizer
      International Workshop on Radiation Resistant Sensors and Related Technologies for Nuclear Power Plant Decommissioning 2016 (R2SRT2016, 廃炉に向けた耐放射線センサー及び関連研究に関するワークショップ)
    • Place of Presentation
      福島県・いわき市
    • Year and Date
      2016-04-19
    • Related Report
      2015 Annual Research Report
    • Int'l Joint Research / Invited
  • [Presentation] アルカリ土類金属によるSi及び4H-SiCの増殖酸化2016

    • Author(s)
      村岡 幸輔、瀬崎 洋、石川 誠治、前田 智徳、吉川 公麿、黒木 伸一郎
    • Organizer
      第63回応用物理学会春季学術講演会
    • Place of Presentation
      東京都・東工大 大岡山キャンパス
    • Year and Date
      2016-03-19
    • Related Report
      2015 Annual Research Report
  • [Presentation] レーザアニールによる4H-SiC C面上のTi-Si-Cオーミックコンタクトの形成2016

    • Author(s)
      ミランタ デシルワ、川崎 輝尚、吉川 公麿、黒木 伸一郎
    • Organizer
      第63回応用物理学会春季学術講演会
    • Place of Presentation
      東京都・東工大 大岡山キャンパス
    • Year and Date
      2016-03-19
    • Related Report
      2015 Annual Research Report
  • [Presentation] 4H-SiC nMOSFETによるPseudo-CMOS論理インバータの研究2016

    • Author(s)
      長妻 宏郁、黒木 伸一郎、黒瀬 達也、石川 誠治、前田 知徳、瀬崎 洋、吉川 公麿、牧野 高紘、大島 武、Mikael Ostling、Carl-Mikael Zetterling
    • Organizer
      第63回応用物理学会春季学術講演会
    • Place of Presentation
      東京都・東工大 大岡山キャンパス
    • Year and Date
      2016-03-19
    • Related Report
      2015 Annual Research Report
  • [Presentation] 4H-SiC nMOSFETsによる論理インバータ回路の研究2016

    • Author(s)
      黒瀬 達也、黒木 伸一郎、長妻 宏郁、石川 誠治、前田 知徳、瀬崎 洋、吉川 公麿、牧野 高紘、大島 武、Mikael Ostling、Carl-Mikael Zetterling
    • Organizer
      第63回応用物理学会春季学術講演会
    • Place of Presentation
      東京都・東工大 大岡山キャンパス
    • Year and Date
      2016-03-19
    • Related Report
      2015 Annual Research Report
  • [Presentation] 4H-SiC MOSFETs for power and harsh environment electronics2016

    • Author(s)
      Shin-Ichiro. Kuroki, Hirofumi Nagatsuma, Milantha De Silva, Seiji Ishikawa, Tomonori Maeda, Hiroshi Sezaki, Takamaro Kikkawa, Takahiro Makino, Takashi Ohshima, Mikael Ostling, and Carl-Mikael Zetterling
    • Organizer
      Annual World Congress of Smart Materials 2016-Develop New Path of Smartness
    • Place of Presentation
      Singapore
    • Year and Date
      2016-03-04
    • Related Report
      2015 Annual Research Report
    • Int'l Joint Research / Invited
  • [Presentation] Characterization of 4H-SiC nMOSFETs with As-doped S/D and NbNi Silicide Contacts After High Gamma-Ray Radiation2015

    • Author(s)
      H. Nagatsuma, S-I. Kuroki, M. De Silva, S. Ishikawa, T. Maeda, H. Sezaki, T, Kikkawa, M. Ostling, and C.-M. Zetterling
    • Organizer
      The 11th International Workshop on Radiation Effects on Semiconductor Devices for Space Applications(RASEDA2015、第11回宇宙用半導体素子放射線影響国際ワークショップ)
    • Place of Presentation
      群馬県・桐生市桐生市・市民文化会館
    • Year and Date
      2015-11-13
    • Related Report
      2015 Annual Research Report
    • Int'l Joint Research
  • [Presentation] 炭素侵入型金属とレーザアニールを用いた4H-SiCパワーデバイスのための低抵抗オーミック抵抗の形成2015

    • Author(s)
      Milantha De Silva、石川 誠治、吉川 公麿、黒木 伸一郎
    • Organizer
      先進パワー半導体分科会 第2回講演会
    • Place of Presentation
      大阪市・大阪国際交流センター
    • Year and Date
      2015-11-09
    • Related Report
      2015 Annual Research Report
  • [Presentation] NbNiシリサイドコンタクト4H-SiC nMOSFETsの高ガンマ線照射後及び高温時の動作特性2015

    • Author(s)
      長妻 宏郁、黒木 伸一郎、Milantha De Silva、石川 誠治、前田 知徳、瀬崎 洋、吉川 公麿、牧野 高紘、大島 武、Mikael Ostling、Carl-Mikael Zetterling
    • Organizer
      先進パワー半導体分科会 第2回講演会
    • Place of Presentation
      大阪市・大阪国際交流センター
    • Year and Date
      2015-11-09
    • Related Report
      2015 Annual Research Report
  • [Presentation] 4H-SiC MOSFETsによる極限環境エレクトロニクスへの展開2015

    • Author(s)
      黒木伸一郎、長妻宏郁、Milantha De Silva, 石川誠治、前田知徳、 瀬崎洋、 吉川公麿、 牧野高紘、 大島武、Mikael Ostling、Carl-Mikael Zetterling
    • Organizer
      薄膜材料デバイス研究会 第12回研究集会
    • Place of Presentation
      京都市・龍谷大学響都ホール校友会館
    • Year and Date
      2015-10-30
    • Related Report
      2015 Annual Research Report
  • [Presentation] Characterization of 4H-SiC nMOSFETs in Harsh Environments; High-Temperature and High Gamma-Ray Radiation2015

    • Author(s)
      S-I. Kuroki, H. Nagatsuma, M. De Silva, S. Ishikawa, T. Maeda, H. Sezaki, T. Kikkawa, T. Makino, T. Ohshima, M. Ostling, and C.-M. Zetterling
    • Organizer
      The International Conference on Silicon Carbide and Related Materials 2015(ICSCRM2015, シリコンカーバイト及び関連材料に関する国際会議)
    • Place of Presentation
      Giardini Naxos, Italy
    • Year and Date
      2015-10-04
    • Related Report
      2015 Annual Research Report
    • Int'l Joint Research
  • [Presentation] 4H-SiC nMOSFETs with As-doped S/D and NbNi silicide ohmic contacts2015

    • Author(s)
      H. Nagatsuma, S-I. Kuroki, M. De Silva, S. Ishikawa, T. Maeda, H. Sezaki, T, Kikkawa, M. Ostling, and C.-M. Zetterling
    • Organizer
      The International Conference on Silicon Carbide and Related Materials 2015(ICSCRM2015, シリコンカーバイト及び関連材料に関する国際会議)
    • Place of Presentation
      Giardini Naxos, Italy
    • Year and Date
      2015-10-04
    • Related Report
      2015 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Low resistance ohmic contact formation on 4H-SiC c-face with NbNi silicidation using nano-second laser annealing2015

    • Author(s)
      Milantha De Silva, Seiji Ishikawa, Takamaro Kikkawa, and Shin-Ichiro Kuroki
    • Organizer
      The International Conference on Silicon Carbide and Related Materials 2015(ICSCRM2015, シリコンカーバイト及び関連材料に関する国際会議)
    • Place of Presentation
      Giardini Naxos, Italy
    • Year and Date
      2015-10-04
    • Related Report
      2015 Annual Research Report
    • Int'l Joint Research
  • [Presentation] レーザアニールとカーボン侵入型金属による低抵抗SiCオーミック接触の形成2015

    • Author(s)
      ミランタ デシルワ、石川 誠治、前田 知徳、瀬崎 洋、吉川 公麿、黒木 伸一郎
    • Organizer
      第76回応用物理学会秋季学術講演会
    • Place of Presentation
      名古屋市・名古屋国際会議場
    • Year and Date
      2015-09-13
    • Related Report
      2015 Annual Research Report
  • [Presentation] 4H-SiC MISFETsのためのAl2O3,Al6Si2O13ゲート絶縁膜の研究2015

    • Author(s)
      赤瀬 光、石川 誠治、前田 知徳、瀬崎 洋、Milantha de Silva、長妻 宏都、吉川 公麿、黒木 伸一郎
    • Organizer
      第76回応用物理学会秋季学術講演会
    • Place of Presentation
      名古屋市・名古屋国際会議場
    • Year and Date
      2015-09-13
    • Related Report
      2015 Annual Research Report
  • [Presentation] 極限環境4H-SiC MISFETsのためのAl2O3,Al6Si2O13ゲート絶縁膜の研究2015

    • Author(s)
      赤瀬 光、Milantha de Silva、長妻 宏都、吉川 公麿、黒木 伸一郎
    • Organizer
      2015年度応用物理・物理系学会中国四国支部合同学術講演会
    • Place of Presentation
      徳島市・徳島大 常三島キャンパス
    • Year and Date
      2015-08-01
    • Related Report
      2015 Annual Research Report
  • [Presentation] 4H-SiC nMOSFETs with As-doped S/D and NbNi silicide2015

    • Author(s)
      Hirofumi Nagatsuma, Shin-Ichiro Kuroki, Milantha De Silva, Seiji Ishikawa, Tomonori Maeda, Hiroshi Sezaki, Takamaro Kikkawa, Mikael Ostling and Carl-Mikael Zetterling
    • Organizer
      International Workshop on Nanodevice Technologies 2015
    • Place of Presentation
      東広島市
    • Year and Date
      2015-03-03
    • Related Report
      2014 Research-status Report
  • [Presentation] Low Resistance Ohmic Contact Formation for SiC Schottky Barrier Diode2015

    • Author(s)
      Milantha De Silva, Shin-Ichiro Kuroki, Seiji Ishikawa, Tomonori Maeda, Hiroshi Sezaki, and Takamaro Kikkawa
    • Organizer
      International Workshop on Nanodevice Technologies 2015
    • Place of Presentation
      東広島市
    • Year and Date
      2015-03-03
    • Related Report
      2014 Research-status Report
  • [Presentation] Nb/Niシリサイドによる4H-SiCオーミックコンタクト電極の研究2014

    • Author(s)
      長妻宏郁,黒木伸一郎,MILANTHA DE SILVA,赤瀬光, 古林寛, 石川誠治,前田知徳, 瀬崎洋, 吉川公麿
    • Organizer
      応用物理学会 先端パワー半導体分科会 第一回講演会
    • Place of Presentation
      名古屋市
    • Year and Date
      2014-11-19 – 2014-11-20
    • Related Report
      2014 Research-status Report
  • [Presentation] 4H-SiCドライ熱酸化膜への疎水化処理の効果2014

    • Author(s)
      佐藤 旦,黒木伸一郎,石川誠治, 前田知徳, 瀬崎 洋, 吉川公麿
    • Organizer
      応用物理学会 先端パワー半導体分科会 第一回講演会
    • Place of Presentation
      名古屋市
    • Year and Date
      2014-11-19 – 2014-11-20
    • Related Report
      2014 Research-status Report
  • [Presentation] 部分的アモルファス化によりオーミック抵抗の低減とSBD特性評価2014

    • Author(s)
      Milantha De Silva,黒木伸一郎,石川誠治, 前田知徳, 瀬崎 洋, 吉川公麿
    • Organizer
      応用物理学会 先端パワー半導体分科会 第一回講演会
    • Place of Presentation
      名古屋市
    • Year and Date
      2014-11-19 – 2014-11-20
    • Related Report
      2014 Research-status Report
  • [Presentation] Leakage Current Reduction of 4H-SiC Schottky Barrier Diode by Using Sacrificial Oxidation2014

    • Author(s)
      Shin-Ichiro Kuroki, Seiji Ishikawa, Tomonori Maeda, Hiroshi Sezaki, and Takamaro Kikkawa
    • Organizer
      2014 MRS Spring Meeting
    • Place of Presentation
      San Francisco (USA)
    • Year and Date
      2014-04-21 – 2014-04-25
    • Related Report
      2014 Research-status Report
  • [Presentation] Leakage Current Reduction of 4H-SiC Schottky Barrier Diode by Using Sacrificial Oxidation2014

    • Author(s)
      Shin-Ichiro Kuroki, Seiji Ishikawa, Tomonori Maeda, Hiroshi Sezaki, Takamaro Kikkawa
    • Organizer
      2014 MRS Spring Meeting
    • Place of Presentation
      San Francisco, USA
    • Related Report
      2013 Research-status Report
  • [Presentation] Low Ohmic Contact Formation of Ni Silicide on Partially Si Ion Implanted n+ 4H-SiC2013

    • Author(s)
      Milantha de Silva, Tadashi Sato, Shin-Ichiro Kuroki and Takamaro Kikkawa
    • Organizer
      The International Conference on Silicon Carbide and Related Materials 2013 (ICSCRM2013)
    • Place of Presentation
      宮崎県宮崎市
    • Related Report
      2013 Research-status Report
  • [Presentation] 部分的アモルファス化によるn+ 4H-SiC上のNiシリサイド・オーミック抵抗のTLMパターン依存性2013

    • Author(s)
      Milantha de Silva,黒木 伸一郎, 佐藤 旦, 吉川 公麿
    • Organizer
      第74回応用物理学会秋季学術講演会
    • Place of Presentation
      同志社大学京田辺キャンパス(京都府京田辺市)
    • Related Report
      2013 Research-status Report
  • [Remarks] 広島大学ナノデバイス・バイオ融合科学研究所

    • URL

      http://www.rnbs.hiroshima-u.ac.jp/

    • Related Report
      2014 Research-status Report
  • [Remarks] 広島大学半導体集積科学専攻

    • URL

      http://www.seis.hiroshima-u.ac.jp/

    • Related Report
      2014 Research-status Report
  • [Remarks] 広島大学研究者総覧

    • URL

      http://seeds.hiroshima-u.ac.jp/soran/4596db8/

    • Related Report
      2014 Research-status Report
  • [Remarks] 広島大学ナノデバイス・バイオ融合科学研究所

    • URL

      http://www.rnbs.hiroshima-u.ac.jp/

    • Related Report
      2013 Research-status Report
  • [Remarks] 広島大学大学院先端物質科学研究科半導体集積科学専攻

    • URL

      http://www.seis.hiroshima-u.ac.jp/index.php?id=246

    • Related Report
      2013 Research-status Report
  • [Remarks] 広島大学研究者総覧

    • URL

      http://seeds.hiroshima-u.ac.jp/soran/4596db8/index.html

    • Related Report
      2013 Research-status Report
  • [Patent(Industrial Property Rights)] 炭化珪素半導体装置及びその製造方法2016

    • Inventor(s)
      黒木 伸一郎、ミラン ダ シルワ、石川 誠治
    • Industrial Property Rights Holder
      黒木 伸一郎、ミラン ダ シルワ、石川 誠治
    • Industrial Property Rights Type
      特許
    • Industrial Property Number
      2016-008954
    • Filing Date
      2016-01-20
    • Related Report
      2015 Annual Research Report

URL: 

Published: 2014-07-25   Modified: 2019-07-29  

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