Fabrication processes of GaN-based integrated surface-emitting devices using a chemical liftoff techniques
Project/Area Number |
25420341
|
Research Category |
Grant-in-Aid for Scientific Research (C)
|
Allocation Type | Multi-year Fund |
Section | 一般 |
Research Field |
Electron device/Electronic equipment
|
Research Institution | Kogakuin University |
Principal Investigator |
Honda Tohru 工学院大学, 公私立大学の部局等, 教授 (20251671)
|
Co-Investigator(Kenkyū-buntansha) |
YAMAGUCHI Tomohiro 工学院大学, 先進工学部, 准教授 (50454517)
|
Project Period (FY) |
2013-04-01 – 2016-03-31
|
Project Status |
Completed (Fiscal Year 2015)
|
Budget Amount *help |
¥5,070,000 (Direct Cost: ¥3,900,000、Indirect Cost: ¥1,170,000)
Fiscal Year 2015: ¥780,000 (Direct Cost: ¥600,000、Indirect Cost: ¥180,000)
Fiscal Year 2014: ¥1,300,000 (Direct Cost: ¥1,000,000、Indirect Cost: ¥300,000)
Fiscal Year 2013: ¥2,990,000 (Direct Cost: ¥2,300,000、Indirect Cost: ¥690,000)
|
Keywords | 窒化ガリウム / 発光ダイオード / 分子線エピタキシャル成長法 / 結晶成長 / リフトオフ / 透明電極 / 酸化物 / X線回折 / GaN / MBE / x線回折 |
Outline of Final Research Achievements |
The target of this project is for fabricating GaN growth on Al templates, which can be separated from the sapphire substrate using chemical liftoff techniques, and near UV transparent conductive films for GaN-based integrated surface emitting devices. The detailed research topics are the followings; (1) the fabrication of GaN layers grown on Al templates, and (2) the realization of GaN-based integrated surface emitting devices with transparent conductive films fabricated by molecular precursor method. In the topic 1, we grew GaN films on pseudo Al substrates by molecular beam epitaxy (MBE) and investigated the growth mechanisms on the pseudo substrates. The surface cracks can be reduced using a low-temperature buffer deposition. In the topic 2, we fabricated GaInOx thin films by molecular precursor method, which is one of the solution techniques using spin coating. These films were also fabricated on a blue LED structure.
|
Report
(4 results)
Research Products
(177 results)
-
-
-
-
-
-
-
-
-
-
-
-
-
-
-
-
-
-
-
-
-
-
-
-
-
-
-
-
-
-
-
-
-
-
-
-
[Presentation] Mist-CVD Growth of In2O32015
Author(s)
T. Kobayashi, K. Tanuma, T. Yamaguchi, T. Onuma, and T. Honda
Organizer
The 14th International Symposium on Advanced Technology (ISAT-14)
Place of Presentation
Tokyo, Japan
Year and Date
2015-11-01
Related Report
Int'l Joint Research
-
-
-
-
-
-
-
-
-
-
-
-
-
-
-
-
-
[Presentation] Study on spontaneous emission in nitride-based LEDs with Ag-nanocrystallites ZnO films fabricated by molecular precursor method2015
Author(s)
T. Onuma, T. Shibukawa, D. Taka, K. Serizawa, E. Adachi, H. Nagai, T. Yamaguchi, J.-S. Jang, M. Sato, and T. Honda
Organizer
22nd International Society of Pure & Applied Coordination Chemistry Symposium (SPACC 22)
Place of Presentation
Windwook, Namibia
Year and Date
2015-08-14
Related Report
Int'l Joint Research / Invited
-
-
-
-
-
-
-
-
-
-
-
-
-
-
-
-
-
-
-
-
-
-
-
-
-
-
-
-
-
-
[Presentation] 六方晶GaN中に挿入した一分子層InNの構造完全性による影響2014
Author(s)
渡邊 菜月, 多次見 大樹, 尾沼 猛儀, 山口 智広, 本田 徹, 橋本 直樹, 草部 一秀, 王 科, 吉川 明彦
Organizer
第3回応用物理学会結晶工学分科会結晶工学未来塾
Place of Presentation
学習院大学, 豊島区, 東京
Year and Date
2014-11-03
Related Report
-
-
[Presentation] Mist chemical vapor deposition growth of α-(AlGa)2O32014
Author(s)
T. Hatakeyama, K. Tanuma, S. Osawa, Y. Sugiura, T. Onuma, T. Hirasaki, H. Murakami, T. Yamaguchi and T. Honda
Organizer
The joint symposiums of the 1st Innovation Forum of Advanced Engineering and Education (IFAEE)
Place of Presentation
Kogakuin University, Tokyo, Japan
Year and Date
2014-11-01 – 2014-11-02
Related Report
-
-
-
-
-
[Presentation] Mist chemical vapor deposition of Ga-In-O films2014
Author(s)
K. Tanuma, T. Hatakeyama, R. Goto, T. Onuma, T. Yamaguchi and T. Honda
Organizer
The joint symposiums of the 1st Innovation Forum of Advanced Engineering and Education (IFAEE)
Place of Presentation
Kogakuin University, Tokyo, Japan
Year and Date
2014-11-01 – 2014-11-02
Related Report
-
-
-
-
-
[Presentation] Ga2O3基板の光学特性評価2014
Author(s)
尾沼 猛儀, 山口 智広, 伊藤 雄三, 本田 徹, 佐々木 公平, 増井 建和, 東脇 正高
Organizer
ワイドギャップ半導体光・電子デバイス第162委員会第91回研究会「酸化物材料の最近の進展」
Place of Presentation
京都大学東京オフィス, 品川, 東京
Year and Date
2014-09-26
Related Report
Invited
-
-
[Presentation] AlOx/AlNヘテロ構造の発光特性2014
Author(s)
尾沼 猛儀, 杉浦 洋平, 山口 智広, 本田 徹, 東脇 正高
Organizer
第75回応用物理学会秋季学術講演会
Place of Presentation
北海道大学, 札幌, 北海道
Year and Date
2014-09-17 – 2014-09-20
Related Report
-
-
-
-
-
[Presentation] Kelvin force microscopic study on GaN layers grown on (111)Al templates by RF-MBE2014
Author(s)
T. Honda, T. Yamaguchi, Y. Sugiura, D. Isono, Y. Watanabe, S. Osawa, D. Tajimi, T. Iwabuchi, S. Kuboya, T. Tanikawa, R. Katayama and T. Matsuoka
Organizer
18th International Conference on Molecular Beam Epitaxy (ICMBE 2014)
Place of Presentation
High Country conference center Flagstaff, Arizona, USA
Year and Date
2014-09-07 – 2014-09-12
Related Report
-
[Presentation] Growth of pn-GaInN structures by RF-MBE and fabrication of homojunction-type light emitting diodes2014
Author(s)
K. Narutani, T. Yamaguchi, K. Wang, T Araki, Y. Nanishi, L. Sang, M. Sumiya, S. Fujioka, T. Onuma and T. Honda
Organizer
18th International Conference on Molecular Beam Epitaxy (ICMBE 2014)
Place of Presentation
High Country conference center Flagstaff, Arizona, USA
Year and Date
2014-09-07 – 2014-09-12
Related Report
-
-
[Presentation] Optical properties of GaInN p-n homojunction blue-green light-emitting-diodes2014
Author(s)
T. Onuma, K. Narutani, S. Fujioka, T. Yamaguchi, K. Wang, T. Araki, Y. Nanishi, L. Sang, M. Sumiya, T. Honda
Organizer
International Union of Materials Research Societies, International Conference in Asia 2014 (IUMRS-ICA 2014)
Place of Presentation
Fukuoka, Japan
Year and Date
2014-08-25
Related Report
Invited
-
-
-
-
[Presentation] Mist CVDを用いた酸化物薄膜成長2014
Author(s)
畠山 匠, 山口 智広, 本田 徹
Organizer
37th International Symposium on Optical communications
Place of Presentation
Fuji Calm, Fuji-Yoshida, Yamanashi, Japan
Year and Date
2014-08-09 – 2014-08-11
Related Report
-
[Presentation] GaN系MOS-LEDを用いたGa-In-O近紫外透明電極の評価2014
Author(s)
藤岡 秀平, 山口 智広, 本田 徹
Organizer
37th International Symposium on Optical communications
Place of Presentation
Fuji Calm, Fuji-Yoshida, Yamanashi, Japan
Year and Date
2014-08-09 – 2014-08-11
Related Report
-
[Presentation] 疑似Al基板上に成長したGaN薄膜の特性評価2014
Author(s)
渡邉 悠斗, 山口 智広, 本田 徹
Organizer
37th International Symposium on Optical communications
Place of Presentation
Fuji Calm, Fuji-Yoshida, Yamanashi, Japan
Year and Date
2014-08-09 – 2014-08-11
Related Report
-
[Presentation] GaN層のケミカルリフトオフに向けたAlの膜厚検討2014
Author(s)
大澤 真弥, 山口 智広, 本田 徹
Organizer
37th International Symposium on Optical communications
Place of Presentation
Fuji Calm, Fuji-Yoshida, Yamanashi, Japan
Year and Date
2014-08-09 – 2014-08-11
Related Report
-
[Presentation] GaInNからの蛍光発光と結晶性の相関2014
Author(s)
豊満 直樹, 山口 智広, 本田 徹
Organizer
37th International Symposium on Optical communications
Place of Presentation
Fuji Calm, Fuji-Yoshida, Yamanashi, Japan
Year and Date
2014-08-09 – 2014-08-11
Related Report
-
[Presentation] 厚膜GaInN成長とホモ接合型青緑LEDsの製作2014
Author(s)
鳴谷 健人, 山口 智広, 本田 徹
Organizer
37th International Symposium on Optical communications
Place of Presentation
Fuji Calm, Fuji-Yoshida, Yamanashi, Japan
Year and Date
2014-08-09 – 2014-08-11
Related Report
-
-
[Presentation] n-GaN結晶のXPSにおける内部電界強度とピーク非対称性の検討2014
Author(s)
磯野 大樹, 山口 智広, 本田 徹
Organizer
37th International Symposium on Optical communications
Place of Presentation
Fuji Calm, Fuji-Yoshida, Yamanashi, Japan
Year and Date
2014-08-09 – 2014-08-11
Related Report
-
[Presentation] 分子プレカーサー法によるZnO薄膜製作のための熱処理温度の検討2014
Author(s)
後藤 良介, 山口 智広, 本田 徹
Organizer
37th International Symposium on Optical communications
Place of Presentation
Fuji Calm, Fuji-Yoshida, Yamanashi, Japan
Year and Date
2014-08-09 – 2014-08-11
Related Report
-
-
-
[Presentation] RF-MBE法によるGaInN厚膜成長とpnホモ接合型LEDの製作2014
Author(s)
鳴谷 建人, 山口 智広, Ke Wang, 荒木 努, 名西 憓之, Liwen Sang, 角谷 正友, 藤岡 秀平, 尾沼 猛儀, 本田 徹
Organizer
第6回窒化物半導体結晶成長講演会
Place of Presentation
名城大学, 名古屋市, 愛知
Year and Date
2014-07-26
Related Report
-
-
-
-
-
[Presentation] Blue-green light emitting diodes using pn-GaInN homojunction type-structure2014
Author(s)
K. Narutani, T. Yamaguchi, K. Wang, T. Araki, Y. Nanishi, L. Sang, M. Sumiya, S. Fujioka, T. Onuma and T. Honda
Organizer
The 33rd Electronic Materials Symposium
Place of Presentation
Laforet Shuzenji, Shizuoka, Japan
Year and Date
2014-07-09 – 2014-07-11
Related Report
-
-
-
-
-
-
-
-
-
-
-
[Presentation] Optical Properties of Ga-In-O Polycrystalline Films Fabricated by Molecular Precursor Method2014
Author(s)
T. Onuma, T. Yasuno, S. Takano, R. Goto, S. Fujioka, T. Hatakeyama, H. Hara, C. Mochizuki, H. Nagai, T. Yamaguchi, M. Sato, and T. Honda
Organizer
Conference on LED and Its Industrial Application ’14 (LEDIA’14)
Place of Presentation
Pacifico Yokohama, Kanagawa, Japan
Year and Date
2014-04-22 – 2014-04-25
Related Report
-
-
[Presentation] RF-MBE Growth of pn-GaInN Structure and Fabrication of Blue-Green Homojunction-Type Light Emitting Diode2014
Author(s)
K. Narutani, T. Yamaguchi, K. Wang, T. Araki, Y. Nanishi, L. Sang, M. Sumiya, S. Fujioka, T. Onuma, and T. Honda
Organizer
Conference on LED and Its Industrial Application ’14 (LEDIA’14)
Place of Presentation
Pacifico Yokohama, Kanagawa, Japan
Year and Date
2014-04-22 – 2014-04-24
Related Report
-
-
-
-
-
-
-
-
-
-
-
-
-
-
-
-
-
-
[Presentation] Ga2O3 and In2O3 growth by mist CVD2013
Author(s)
K. Tanuma, T. Yamaguchi, T. Hatakeyama, T. Onuma and T. Honda
Organizer
The 12th International Symposium on Advanced Technology
Place of Presentation
Southern Taiwan University of Science and Technology, Tainan, Taiwan
Related Report
-
-
-
-
-
-
-
-
-
-
-
-
-
-
-
-
-
-
-
-
-