Development of monitoring system for measuring static electricity distribution by high spatial resolution

• Project/Area Number: 25420427
• Research Category: Grant-in-Aid for Scientific Research (C)
• Allocation Type: Multi-year Fund
• Section: 一般
• Research Field: Measurement engineering
• Research Institution: National Institute of Advanced Industrial Science and Technology
• Principal Investigator: Kikunaga Kazuya 国立研究開発法人産業技術総合研究所, 製造技術研究部門, 主任研究員 (10581283)
• Project Period (FY): 2013-04-01 – 2016-03-31
• Project Status: Completed (Fiscal Year 2015)
• Budget Amount: ¥5,200,000 (Direct Cost: ¥4,000,000、Indirect Cost: ¥1,200,000); Fiscal Year 2015: ¥520,000 (Direct Cost: ¥400,000、Indirect Cost: ¥120,000); Fiscal Year 2014: ¥2,990,000 (Direct Cost: ¥2,300,000、Indirect Cost: ¥690,000); Fiscal Year 2013: ¥1,690,000 (Direct Cost: ¥1,300,000、Indirect Cost: ¥390,000)
• Keywords: 静電気分布 / 高分解能 / 振動 / 計測工学 / 計測システム / 静電気 / 電界 / 可視化 / 計測技術 / 振動誘起 / アレイセンサ

Outline of Final Research Achievements

An electric field is induced by vibrating a static charge. First, it was established a technology to measure static electricity by detecting the electric field. Second, an array sensor by arranging a small electric field sensor was developed for measuring the electric field at many position at the same time. Third, system for measuring the static electricity at each spatial position on the array sensor was constructed. Finally, using this system, static electricity distribution on the surface of acrylic plate was measured. Therefore, Development of a new monitoring system for measuring static electricity distribution in high spatial resolution and short time was succeeded.

Research Products

• [Journal Article] Measurement technique of vibrational distribution using static electricity and capacitance (2015)
  • Author(s): Kazuya Kikunaga, Hiroshi Yamashita, Masahiro Egashira, Kazuhiro Nonaka
  • Journal Title: IEEE International Symposium on Inertial Sensors and Systems Volume: - Pages: 1-4
  • DOI: 10.1109/isiss.2015.7102370
  • Acknowledgement Compliant
• [Presentation] 微小空間における小型静電気センサの計測時間・精度の検討 (2015)
  • Author(s): 菊永 和也、江頭 正浩、山下 博史
  • Organizer: 第76回応用物理学会秋季学術講演会
  • Place of Presentation: 名古屋国際会議場（愛知・名古屋）
  • Year and Date: 2015-09-13
• [Presentation] 高空間分解能な静電気分布計測のためのセンサアレイの開発 (2015)
  • Author(s): 菊永 和也 、山下 博史、江頭 正浩、檜枝 龍美、野中 一洋
  • Organizer: 応用物理学会
  • Place of Presentation: 東海大学（神奈川）
  • Year and Date: 2015-03-12
• [Presentation] 静電気分布計測技術 (2015)
  • Author(s): 菊永 和也
  • Organizer: エレクトロニクス実装学会官能検査自動化研究会
  • Place of Presentation: 回路会館（東京都）
  • Year and Date: 2015-01-28
• [Presentation] 静電気分布計測技術 (2014)
  • Author(s): 菊永 和也
  • Organizer: 産総研計測・診断システム研究協議会インスペクション技術研究会
  • Place of Presentation: 出島交流会館（長崎市）
  • Year and Date: 2014-12-15
• [Presentation] Study on Charge Oscillation-Induced Low-Frequency Electric Field (2014)
  • Author(s): 菊永 和也 、山下 博史、江頭 正浩、野中 一洋
  • Organizer: International Symposium on Electromagnetic Compatibility
  • Place of Presentation: Hitotsubashi Hall（東京都）
  • Year and Date: 2014-05-13
• [Presentation] 誘起電界を用いた静電気の狭領域計測に関する研究
  • Author(s): 菊永和也，山下博史，野中一洋
  • Organizer: 応用物理学会
  • Place of Presentation: 同志社大学（京都府）
• [Presentation] アレイアンテナを用いた静電気分布計測に関する研究
  • Author(s): 菊永和也
  • Organizer: ＲＣＪ信頼性シンポジウム
  • Place of Presentation: 大田区産業プラザ（東京都）
• [Patent(Industrial Property Rights)] 静電気分布計測装置および静電気分布計測方法 (2014)
  • Inventor(s): 菊永 和也
  • Industrial Property Rights Holder: 独立行政法人産業技術総合研究所
  • Industrial Property Rights Type: 特許
  • Filing Date: 2014
  • Overseas
• [Patent(Industrial Property Rights)] 静電気分布計測装置および静電気分布計測方法 (2013)
  • Inventor(s): 菊永 和也
  • Industrial Property Rights Holder: 独立行政法人産業技術総合研究所
  • Industrial Property Rights Type: 特許
  • Industrial Property Number: 2013-151185
  • Filing Date: 2013