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Properties and functionalization of nonstoichiometric silicon-titanium nitrides due to laser-beam assisted ion implantation

Research Project

Project/Area Number 25420687
Research Category

Grant-in-Aid for Scientific Research (C)

Allocation TypeMulti-year Fund
Section一般
Research Field Physical properties of metals/Metal-base materials
Research InstitutionTohoku University

Principal Investigator

KASUKABE YOSHITAKA  東北大学, 高度教養教育・学生支援機構, 教授 (30194749)

Co-Investigator(Kenkyū-buntansha) SUTO SYOUZO  東北大学, 理学研究科, 教授 (40171277)
Project Period (FY) 2013-04-01 – 2016-03-31
Project Status Completed (Fiscal Year 2015)
Budget Amount *help
¥5,200,000 (Direct Cost: ¥4,000,000、Indirect Cost: ¥1,200,000)
Fiscal Year 2015: ¥650,000 (Direct Cost: ¥500,000、Indirect Cost: ¥150,000)
Fiscal Year 2014: ¥650,000 (Direct Cost: ¥500,000、Indirect Cost: ¥150,000)
Fiscal Year 2013: ¥3,900,000 (Direct Cost: ¥3,000,000、Indirect Cost: ¥900,000)
Keywords不定比化合物 / 窒化物 / 機能性材料 / イオン注入 / その場観察 / 透過電子顕微鏡 / 電子エネルギー損失分光 / 分子軌道計算 / 不定比物性
Outline of Final Research Achievements

In-situ TEM and EELS observations have elucidated that the release of H atoms in TiHx proceeds preferentially in the early N-implantation stage, and that in the subsequent N-implantation stage the number of N atoms bonding to Ti atoms increases gradually with increasing N-concentration. It is concluded that the shift of the atoms on the closed-packed plane induced by the change of bonding interaction of Ti sublattices with ligand N atoms plays an important role in the epitaxial transformation between fcc- and hcp-Ti sublattices due to the occupation by implanted N atoms, and that the invasion of an implanted N atom to the N-unoccupied octahedral site in the neighboring unit cell next to the N-occupied one in hcp-Ti occurs preferentially above the N/Ti=0.25, and induces the growth of nucleus of the hcp-fcc transformation.

Report

(4 results)
  • 2015 Annual Research Report   Final Research Report ( PDF )
  • 2014 Research-status Report
  • 2013 Research-status Report
  • Research Products

    (6 results)

All 2016 2015 2014 2013

All Journal Article (6 results) (of which Peer Reviewed: 6 results)

  • [Journal Article] Characterization of (111)-oriented Ti1-xAlxN Thin Films on Monocrystalline AlN2016

    • Author(s)
      Y. Kasukabe, H. Shimoda, S. Yamamoto and M. Yoshikawa
    • Journal Title

      JAEA-Review

      Volume: 2015-022 Pages: 123-123

    • Related Report
      2015 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Evolution of Transformation Processes due to the Correlation of Implanted N-ions with Ti Thin Films2015

    • Author(s)
      Y. Kasukabe, H. Shimoda, S. Yamamoto and M. Yoshikawa
    • Journal Title

      JAEA-Review

      Volume: 2014-050 Pages: 141-141

    • Related Report
      2014 Research-status Report
    • Peer Reviewed
  • [Journal Article] Atomistic Transformation Processes Induced by the Interaction of Implanted N-Ions with Ti Thin Films2014

    • Author(s)
      Y. Kasukabe, H. Shimoda, S. Yamamoto and M. Yoshikawa
    • Journal Title

      JAEA-Review

      Volume: 2013-059 Pages: 137-137

    • Related Report
      2014 Research-status Report
    • Peer Reviewed
  • [Journal Article] Characterization of Epitaxial Transformation Phenomena Induced by the Interaction of Implanted N-Ions with Ti Thin Films2013

    • Author(s)
      Yoshitaka Kasukabe, Hiroyuki Shimoda, Yu Chen, Shunya Yamamoto, Masahito Yoshikawa and Yutaka Fujino
    • Journal Title

      Nuclear Instruments and Methods in Physics Research Section B

      Volume: 315 Pages: 131-135

    • Related Report
      2013 Research-status Report
    • Peer Reviewed
  • [Journal Article] Epitaxial Transformation of hcp-fcc Ti sublattices during Nitriding Processes of Evaporated-Ti Thin Films due to Nitrogen-Implantation2013

    • Author(s)
      Yu Chen, Xiaoyi Feng, Yoshitaka Kasukabe, Shunya Yamamoto, Masato Yoshikawa and Yutaka Fujino
    • Journal Title

      Journal of Alloys and Compounds

      Volume: 577S

    • Related Report
      2013 Research-status Report
    • Peer Reviewed
  • [Journal Article] Epitaxial Transformation of Evaporated-Ti Thin Films during Nitriding Processes2013

    • Author(s)
      Y. Kasukabe, Y. Chen, S. Yamamoto and M. Yoshikawa
    • Journal Title

      JAEA-Review

      Volume: 2012-046 Pages: 130-130

    • Related Report
      2013 Research-status Report
    • Peer Reviewed

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Published: 2014-07-25   Modified: 2019-07-29  

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