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Femtosecond laser material processing for inducing advanced functionalities on metal surface

Research Project

Project/Area Number 25420728
Research Category

Grant-in-Aid for Scientific Research (C)

Allocation TypeMulti-year Fund
Section一般
Research Field Composite materials/Surface and interface engineering
Research InstitutionKyoto University

Principal Investigator

Hashida Masaki  京都大学, 化学研究所, 准教授 (50291034)

Co-Investigator(Renkei-kenkyūsha) SAKABE SHUJI  京都大学, 化学研究所, 教授 (50153903)
SAKAGAMI HITOSHI  核融合科学研究所, ヘリカル研究部, 教授 (30254452)
TOKITA SHIGEKI  京都大学, 化学研究所, 助教 (20456825)
Project Period (FY) 2013-04-01 – 2016-03-31
Project Status Completed (Fiscal Year 2015)
Budget Amount *help
¥5,070,000 (Direct Cost: ¥3,900,000、Indirect Cost: ¥1,170,000)
Fiscal Year 2015: ¥1,430,000 (Direct Cost: ¥1,100,000、Indirect Cost: ¥330,000)
Fiscal Year 2014: ¥1,690,000 (Direct Cost: ¥1,300,000、Indirect Cost: ¥390,000)
Fiscal Year 2013: ¥1,950,000 (Direct Cost: ¥1,500,000、Indirect Cost: ¥450,000)
Keywordsナノ構造形成 / 非晶質化 / レーザー加工 / 金属 / フェムト秒レーザー加工 / 金属結晶制御 / ナノ構造体 / 結晶性 / フェムト秒レーザー
Outline of Final Research Achievements

For inducing advanced functionalities on metal surface with femtosecond laser material processing, we have done the experiment for producing an amorphous metal on nanostructured surface. Additionally, formation mechanism of the nanostructured metal surface has also been investigated. We found that the size of the nanostructures, its orientation direction, and its amorphous state can be controlled by irradiation of the laser pulses with appropriate choice of laser condition. To discuss formation mechanism, all the ablation thresholds for metals previously published were plotted as a function of work function with our obtained data. We found that the ablation thresholds were good correlation with work function of metals. Experimental data suggested that the femtosecond laser ablation is mainly due to multi-photon absorption and optical field ionization. These findings are useful information to produce advanced functionalities on metal surface with femtosecond laser material processing.

Report

(4 results)
  • 2015 Annual Research Report   Final Research Report ( PDF )
  • 2014 Research-status Report
  • 2013 Research-status Report
  • Research Products

    (46 results)

All 2016 2015 2014 2013 Other

All Journal Article (12 results) (of which Peer Reviewed: 9 results,  Acknowledgement Compliant: 3 results) Presentation (29 results) (of which Int'l Joint Research: 5 results,  Invited: 4 results) Book (1 results) Remarks (4 results)

  • [Journal Article] The formation mechanism of the periodic nanograting structure by the Weibel instability2016

    • Author(s)
      A. M. Gouda, H. Sakagami, T. Ogata, M. Hashida, and S. Sakabe
    • Journal Title

      Appl. Phys. A

      Volume: 122 Issue: 4 Pages: 454-454

    • DOI

      10.1007/s00339-016-9958-1

    • Related Report
      2015 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Orientation of periodic grating structures controlled by double-pulse irradiation2016

    • Author(s)
      M. Hashida, T. Nishii, Y. Miyasaka, H. Sakagami, M. Shimizu, S. Inoue, and S. Sakabe
    • Journal Title

      Appl. Phys. A

      Volume: 122 Issue: 4 Pages: 484-484

    • DOI

      10.1007/s00339-016-0011-1

    • Related Report
      2015 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Derivation of effective penetration depth of femtosecond laser pulses in metal from ablation rate dependence on laser fluence, incidence angle, and polarization2015

    • Author(s)
      Yasuhiro Miyasaka, Masaki Hashida, Takaya Nishii, Shunsuke Inoue and Shuji Sakabe
    • Journal Title

      Applied Physics Letters

      Volume: 106 Issue: 1 Pages: 013101-013101

    • DOI

      10.1063/1.4905353

    • Related Report
      2015 Annual Research Report 2014 Research-status Report
    • Peer Reviewed
  • [Journal Article] Threshold Fluence of Femtosecond Laser Nano-Ablation for Metals2015

    • Author(s)
      橋田昌樹, 宮坂泰弘, 西井崇也, 清水雅弘, 井上峻介, 阪部周二
    • Journal Title

      IEEJ Transactions on Fundamentals and Materials

      Volume: 135 Issue: 10 Pages: 575-580

    • DOI

      10.1541/ieejfms.135.575

    • NAID

      130005101515

    • ISSN
      0385-4205, 1347-5533
    • Related Report
      2015 Annual Research Report
    • Peer Reviewed / Acknowledgement Compliant
  • [Journal Article] レーザー誘起ナノ周期構造形成2015

    • Author(s)
      橋田昌樹、Laura Gemini、宮坂泰弘、坂上仁志、井上峻介、阪部周二
    • Journal Title

      O plus E

      Volume: 37 Pages: 96-99

    • Related Report
      2015 Annual Research Report 2014 Research-status Report
  • [Journal Article] フェムト秒レーザーアブレーションにより固体表面に自己組織的に形成するナノ周期構造2015

    • Author(s)
      橋田昌樹、宮坂泰弘、清水雅弘、坂上仁志、井上峻介、阪部周二
    • Journal Title

      レーザー研究

      Volume: 43 Pages: 745-751

    • NAID

      130007957157

    • Related Report
      2015 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Periodic nanostructures self-formed on silicon and silicon carbide by femtosecond laser irradiation2014

    • Author(s)
      M. Hashida, L. Gemini, T. Nishii, Y. Miyasaka, H. Sakagami, M. Shimizu, S. Inoue, J. Limpouch, T. Mocek, and S. Sakabe
    • Journal Title

      Journal of Laser Micro/Nano engineering

      Volume: 9 Issue: 3 Pages: 234-237

    • DOI

      10.2961/jlmn.2014.03.0010

    • Related Report
      2014 Research-status Report
    • Peer Reviewed / Acknowledgement Compliant
  • [Journal Article] Periodic nanostructures self-formed on silicon and silicon carbide by femtosecond laser irradiation2014

    • Author(s)
      L. Gemini, M. Hashida, M. Shimizu, Y. Miyasaka, S. Inoue, S. Tokita, J. Limpouch, T. Mocek, and S. Sakabe)
    • Journal Title

      Applied Physics A

      Volume: 117 Issue: 1 Pages: 49-54

    • DOI

      10.1007/s00339-014-8502-4

    • Related Report
      2014 Research-status Report
    • Peer Reviewed / Acknowledgement Compliant
  • [Journal Article] Metal-like self-organization of periodic nanostructures on silicon and silicon carbide under femtosecond laser pulses2013

    • Author(s)
      L. Gemini, M. Hashida, M. Shimizu, Y. Miyasaka, S. Inoue, S. Tokita, J. Limpouch, T. Mocek, and S. Sakabe
    • Journal Title

      Journal of Applied Physics

      Volume: 114 Issue: 19 Pages: 194903-194903

    • DOI

      10.1063/1.4832829

    • Related Report
      2013 Research-status Report
    • Peer Reviewed
  • [Journal Article] Unidirectionally oriented nanocracks on metal surfaces irradiated by low-fluence femtosecond laser pulses2013

    • Author(s)
      M. Shimizu, M. Hashida, Y. Miyasaka, S. Tokita and S. Sakabe
    • Journal Title

      Applied Physics Letters

      Volume: 103 Issue: 17 Pages: 174106-174106

    • DOI

      10.1063/1.4827296

    • NAID

      120005353510

    • Related Report
      2013 Research-status Report
    • Peer Reviewed
  • [Journal Article] フェムト秒レーザーにより金属表面に自己形成するナノ周期構造2013

    • Author(s)
      橋田昌樹、宮坂泰弘、清水雅弘、坂上仁志、時田茂樹、阪部周二
    • Journal Title

      電気学会研究会資料  光応用・視覚研究会

      Volume: LAV-13-015 Pages: 1-5

    • NAID

      10031188974

    • Related Report
      2013 Research-status Report
  • [Journal Article] 金属表面のレーザー着色2013

    • Author(s)
      川本真央、橋田昌樹、宮坂泰弘、清水雅弘、畑 昌育、時田茂樹、阪部周二
    • Journal Title

      電気学会研究会資料  光応用・視覚研究会

      Volume: LAV-13-016 Pages: 7-10

    • NAID

      10031188975

    • Related Report
      2013 Research-status Report
  • [Presentation] Nano-Ablation by Femtosecond Laser-Matter Interactions and Related Phenomena2016

    • Author(s)
      M. Hashida, S. Inoue, S. Sakabe
    • Organizer
      Institute for Chemical Research International Symposium 2016
    • Place of Presentation
      Kyoto University
    • Year and Date
      2016-03-07
    • Related Report
      2015 Annual Research Report
    • Int'l Joint Research
  • [Presentation] 複合超短パルスレーザーによる高効率微細加工技術の開発2016

    • Author(s)
      橋田昌樹, 宮坂泰弘, 清水雅弘, Laura Gemini, 坂上仁志,時田茂樹, 井上峻介, 阪部周二
    • Organizer
      大阪大学接合科学研究所研究集会
    • Place of Presentation
      大阪大学
    • Year and Date
      2016-02-26
    • Related Report
      2015 Annual Research Report
    • Invited
  • [Presentation] フェムト秒レーザーによる金属のアブレーション機構2016

    • Author(s)
      橋田昌樹, 宮坂泰弘, 清水雅弘, Laura Gemini, 坂上仁志,時田茂樹, 井上峻介, 阪部周二
    • Organizer
      LASORセミナー
    • Place of Presentation
      東京大学物性研究所
    • Year and Date
      2016-01-11
    • Related Report
      2015 Annual Research Report
    • Invited
  • [Presentation] フェムト秒レーザーダブルパルス照射における Ti表面ナノ周期構造形成2016

    • Author(s)
      小野滉貴、小西一貴、坂田諒一、古川雄規、松岡周作、渡邉浩太、井上峻介、橋田昌樹、阪部周二
    • Organizer
      レーザー学会 第36年次大会
    • Place of Presentation
      名城大学
    • Year and Date
      2016-01-09
    • Related Report
      2015 Annual Research Report
  • [Presentation] フェムト秒レーザーによる金属ナノアブレーションの基礎と応用2015

    • Author(s)
      橋田昌樹, 宮坂泰弘, 清水雅弘, Laura Gemini, 坂上仁志, 時田茂樹, 井上峻介, 阪部周二
    • Organizer
      第54回 光物質制御研究会
    • Place of Presentation
      徳島大学
    • Year and Date
      2015-09-25
    • Related Report
      2015 Annual Research Report
    • Invited
  • [Presentation] フェムト秒レーザーにより自己形成する金属ナノ周期構造:形成閾値フルーエンスの材料種依存性2015

    • Author(s)
      橋田昌樹, 西井崇也 , 宮坂泰弘, 坂上仁志, 井上峻介, 阪部周二
    • Organizer
      日本物理学会2015秋季大会
    • Place of Presentation
      関西大学
    • Year and Date
      2015-09-16
    • Related Report
      2015 Annual Research Report
  • [Presentation] Orientation of periodic grating structures controlled by double pulse irradiations2015

    • Author(s)
      M. Hashida, T. Nishii, Y. Miyasaka, H. Sakagami, S. Inoue, and S. Sakabe
    • Organizer
      Conference on Laser Ablation 2015
    • Place of Presentation
      Cairns, Australia
    • Year and Date
      2015-08-31
    • Related Report
      2015 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Formation Mechanism of Periodic Nano-Grating Structure by Weibel Instability2015

    • Author(s)
      A.M. Gouda, H. Sakagami, T. Ogata, M. Hashida and S. Sakabe
    • Organizer
      Conference on Laser Ablation 2015
    • Place of Presentation
      Cairns, Australia
    • Year and Date
      2015-08-31
    • Related Report
      2015 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Laser fluence dependence of periodic structures on metals produced by femtosecond double pulse laser2015

    • Author(s)
      M. Hashida, L. Gemini, T. Nishii, Y. Miyasaka, H. Sakagami, S. Inoue, J. Limpouch, T. Mocek, and S. Sakabe
    • Organizer
      Conference on Laser and Electro-Optics CLEO 2015
    • Place of Presentation
      Sanjose, USA
    • Year and Date
      2015-05-10
    • Related Report
      2015 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Interspace of periodic grating structure dependence on laser fluence for double pulse irradiation2015

    • Author(s)
      M. Hashida, L. Gemini, T. Nishii, Y. Miyasaka, H. Sakagami, S. Inoue, J. Limpouch, T. Mocek, and S. Sakabe
    • Organizer
      The 4th Advanced Lasers and Photon Sources (ALPS’15)
    • Place of Presentation
      Yokohama, Japan
    • Year and Date
      2015-04-22
    • Related Report
      2015 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Dependence of ablation rate on laser fluence for metals by oblique femtosecond laser irradiaion2014

    • Author(s)
      Y. Miyasaka, M. Hashida, T. Nishii, S. Inoue, and S. Sakabe
    • Organizer
      9th International Conference on Photo-Excited Processes and Applications
    • Place of Presentation
      Matsue, Shimane, Japan
    • Year and Date
      2014-09-29 – 2014-10-03
    • Related Report
      2014 Research-status Report
  • [Presentation] Formation threshold of periodic grating structures on metal self-organized by femtosecond laser pulses2014

    • Author(s)
      M. Hashida, L. Gemini, T. Nishii, Y. Miyasaka, H. Sakagami, S. Inoue, and S. Sakabe
    • Organizer
      9th International Conference on Photo-Excited Processes and Applications
    • Place of Presentation
      Matsue, Shimane, Japan
    • Year and Date
      2014-09-29 – 2014-10-03
    • Related Report
      2014 Research-status Report
  • [Presentation] Laser fluence thresholds of ablation and plasma production by femtosecond laser pulses for metal2014

    • Author(s)
      T. Nishii, M. Hashida, Y. Miyasaka, S. Inoue, and S. Sakabe
    • Organizer
      The 2nd Laser Ignition Conference 2014
    • Place of Presentation
      Yokohama, Kanagawa, Japan
    • Year and Date
      2014-04-21 – 2014-04-25
    • Related Report
      2014 Research-status Report
  • [Presentation] Laser fluence thresholds of ablation and plasma production by femtosecond laser pulses for metal2014

    • Author(s)
      Y. Miyasaka, M. Hashida, T. Nishii, S. Inoue, and S. Sakabe
    • Organizer
      2014 Pacific Rim Laser Damage
    • Place of Presentation
      Yokohama, Kanagawa, Japan
    • Year and Date
      2014-04-21 – 2014-04-25
    • Related Report
      2014 Research-status Report
  • [Presentation] Nano-ablation of metals and self-organization of periodic grating structures by femtosecond laser pulses2014

    • Author(s)
      Masaki Hashida, Takaya Nishii, Yasuhiro Miyasaka, Laura Gemini, Masahiro Shimizu, Hitoshi Sakagami, Shunsuke Inoue, and Shuji Sakabe
    • Organizer
      The International Symposium Organized by Institute for Chemical Research (ICR), Kyoto University
    • Place of Presentation
      Obaku Plaza, Kyoto University, Uji, Japan
    • Related Report
      2013 Research-status Report
    • Invited
  • [Presentation] 金属のフェムト秒レーザーナノアブレーション機構~S偏光照射によるアブレーション率の減少~2014

    • Author(s)
      宮坂泰弘,橋田昌樹,西井崇也,阪部周二
    • Organizer
      日本物理学会 第69回年次大会
    • Place of Presentation
      東海大学湘南キャンパス、平塚市
    • Related Report
      2013 Research-status Report
  • [Presentation] フェムト秒レーザーによって金属表面に形成されるナノ周期構造のパルス幅依存性2014

    • Author(s)
      西井崇也,橋田昌樹,宮坂泰弘,井上峻介,阪部周二
    • Organizer
      日本物理学会 第69回年次大会
    • Place of Presentation
      東海大学湘南キャンパス、平塚市
    • Related Report
      2013 Research-status Report
  • [Presentation] ダブルパルス照射により形成される金属表面ナノ周期構造2014

    • Author(s)
      橋田昌樹, 西井崇也, Laura Gemini, 宮坂泰弘,坂上仁志, 井上峻介, 阪部周二
    • Organizer
      第34回レーザー学会学術講演会
    • Place of Presentation
      北九州国際会議場, 小倉市
    • Related Report
      2013 Research-status Report
  • [Presentation] 金属のフェムト秒レーザーナノアブレーション機構 ~斜入射におけるアブレーション率の偏光依存性~2014

    • Author(s)
      宮坂泰弘, 橋田昌樹,西井崇也,井上峻介, 時田茂樹,  阪部周二
    • Organizer
      第34回レーザー学会学術講演会
    • Place of Presentation
      北九州国際会議場, 小倉市
    • Related Report
      2013 Research-status Report
  • [Presentation] フェムト秒レーザーによる金属への発色機構2014

    • Author(s)
      川本真央,橋田昌樹,宮坂泰弘,清水雅弘,畑昌育,時田茂樹,阪部周二
    • Organizer
      第34回レーザー学会学術講演会
    • Place of Presentation
      北九州国際会議場, 小倉市
    • Related Report
      2013 Research-status Report
  • [Presentation] Formation threshold of self-organized periodic grating structures formed on metal surfaces by femtosecond laser ablation2013

    • Author(s)
      Masaki Hashida, Yasuhiro Miyasaka, Masahiro Shimizu, Tomoya Ogata, Hitoshi Sakagami, Shigeki Tokita, and Shuji Sakabe
    • Organizer
      12th International Conference on Laser Ablation (COLA2013)
    • Place of Presentation
      Ischia, Italy
    • Related Report
      2013 Research-status Report
  • [Presentation] Periodic Grating Structures on Metal Surfaces Self-Formed by Femtosecond Laser Ablation2013

    • Author(s)
      Masaki Hashida, Yasuhiro Miyasaka, Masahiro Shimizu, Tomoya Ogata, Hitoshi Sakagami, Shigeki Tokita, and Shuji Sakabe
    • Organizer
      The 10th Conference on Laser and Electro-Optics Pacific Rim, and The 18th OptoElectronics and Communications Conference
    • Place of Presentation
      Kyoto Japan
    • Related Report
      2013 Research-status Report
  • [Presentation] フェムト秒レーザーにより自己形成するナノ周期構造:金属及び半導体2013

    • Author(s)
      橋田昌樹, Laura Gemini,清水雅弘, 宮坂泰弘,坂上仁志,井上峻介, 時田茂樹, 阪部周二
    • Organizer
      日本物理学会 2013年秋季大会
    • Place of Presentation
      徳島大学常三島キャンパス, 徳島市
    • Related Report
      2013 Research-status Report
  • [Presentation] 非相対論的レーザーによる周期的ナノ構造の形成機構2013

    • Author(s)
      坂上仁志,橋田昌樹,阪部周二
    • Organizer
      日本物理学会 2013年秋季大会
    • Place of Presentation
      徳島大学常三島キャンパス, 徳島市
    • Related Report
      2013 Research-status Report
  • [Presentation] 金属のフェムト秒レーザーナノアブレーション機構 ~アブレーション率のレーザー入射角度依存性~2013

    • Author(s)
      宮坂泰弘, 橋田昌樹,西井崇也,阪部周二
    • Organizer
      日本物理学会 2013年秋季大会
    • Place of Presentation
      徳島大学常三島キャンパス, 徳島市
    • Related Report
      2013 Research-status Report
  • [Presentation] フェムト秒レーザーによる金属表面の発色機能化の機構解明と制御2013

    • Author(s)
      川本真央,橋田昌樹,宮坂泰弘,清水雅弘,井上峻介,畑昌育,時田茂樹,阪部周二
    • Organizer
      日本物理学会 2013年秋季大会
    • Place of Presentation
      徳島大学常三島キャンパス, 徳島市
    • Related Report
      2013 Research-status Report
  • [Presentation] フェムト秒レーザー照射による固体表面周期構造自己形成機2013

    • Author(s)
      橋田昌樹, Laura Gemini, 清水雅弘, 宮坂泰弘,坂上仁志, 井上峻介, 時田茂樹, 阪部周二
    • Organizer
      第74回応用物理学会秋季学術講演会
    • Place of Presentation
      同志社大学京田辺キャンパス, 京田辺市
    • Related Report
      2013 Research-status Report
  • [Presentation] フェムト秒レーザーアブレーション率のレーザー入射角度と偏光依存性2013

    • Author(s)
      宮坂泰弘, 橋田昌樹,西井崇也,井上峻介,時田茂樹,阪部周二
    • Organizer
      第74回応用物理学会秋季学術講演会
    • Place of Presentation
      同志社大学京田辺キャンパス, 京田辺市
    • Related Report
      2013 Research-status Report
  • [Presentation] フェムト秒レーザーによる金属表面着色機構2013

    • Author(s)
      川本真央,橋田昌樹,宮坂泰弘,清水雅弘,井上峻介,畑昌育,時田茂樹,阪部周二
    • Organizer
      第74回応用物理学会秋季学術講演会
    • Place of Presentation
      同志社大学京田辺キャンパス, 京田辺市
    • Related Report
      2013 Research-status Report
  • [Book] Progress on Nonlinear Nano-Optics2015

    • Author(s)
      S. Sakabe, M. Hashida, S. Tokita, Y. Miyasaka, M. Shimizu, S. Inoue
    • Total Pages
      273
    • Publisher
      Springer
    • Related Report
      2014 Research-status Report
  • [Remarks] 京都大学化学研究所研究者情報/橋田昌樹

    • URL

      http://rdb.kuicr.kyoto-u.ac.jp/researchers/view/hashida+masaki

    • Related Report
      2015 Annual Research Report
  • [Remarks] 研究内容(研究室のホームページ)

    • URL

      http://laser.kuicr.kyoto-u.ac.jp/html(Japanese)%20/SakabeLabHPJpn21(Research)(Content).html

    • Related Report
      2013 Research-status Report
  • [Remarks] 研究成果一覧(研究室のホームページ)

    • URL

      http://laser.kuicr.kyoto-u.ac.jp/html(Japanese)%20/SakabeLabHPJpn51(Fruits)(Papers1).html

    • Related Report
      2013 Research-status Report
  • [Remarks] 研究業績一覧(所属研究所のホームページ)

    • URL

      http://rdb.kuicr.kyoto-u.ac.jp/researchers/view/hashida+masaki

    • Related Report
      2013 Research-status Report

URL: 

Published: 2014-07-25   Modified: 2019-07-29  

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