| Budget Amount *help |
¥5,070,000 (Direct Cost: ¥3,900,000、Indirect Cost: ¥1,170,000)
Fiscal Year 2015: ¥1,690,000 (Direct Cost: ¥1,300,000、Indirect Cost: ¥390,000)
Fiscal Year 2014: ¥1,690,000 (Direct Cost: ¥1,300,000、Indirect Cost: ¥390,000)
Fiscal Year 2013: ¥1,690,000 (Direct Cost: ¥1,300,000、Indirect Cost: ¥390,000)
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| Outline of Final Research Achievements |
In order to develop the technique for understanding the entire view of the chemical vapor deposition process including the transport phenomena and the chemical reaction, the piezoelectric crystal microbalance (langasite crystal microbalance, LCM) was used. By means of measuring the wide conditions of gas density and gas viscosity in the temperature range from room temperature to high temperatures, the function for describing the LCM frequency during such the process was obtained and verified. Next, the frequency change caused due to the introduction of precursors was measured and analyzed. The lowest temperature for initiating the surface chemical reaction was identified and verified by the macroscopic film deposition. Finally, by this measurement, the transient processes till achieving the thermal steady state was classified. The temperature change due to the reaction heat and that due to the heat capacity had different time constant.
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