Structural analysis of DLC film by means of synchrotron light

Research Project

Project/Area Number	25420783
Research Category	Grant-in-Aid for Scientific Research (C)
Allocation Type	Multi-year Fund
Section	一般
Research Field	Material processing/Microstructural control engineering
Research Institution	Toyota Central R&D Lab., Inc.
Principal Investigator	ISEKI TAKASHI 株式会社豊田中央研究所, 材料・プロセス1部表面改質研究室, 主任研究員 (60394897)
Co-Investigator(Renkei-kenkyūsha)	YAMAGUCHI SATOSHI 株式会社豊田中央研究所, 分析部量子ビーム解析研究室, 研究員 (10394892) NOZAKI HIROSHI 株式会社豊田中央研究所, 分析部量子ビーム解析研究室, 主任研究員 (90394890) TAKAHASHI NAOKO 株式会社豊田中央研究所, 分析部組織解析研究室, 技師 (90394981) OZAWA YASUHIRO 株式会社豊田中央研究所, 材料・プロセス1部表面改質研究室, 技師補 (60557940)
Project Period (FY)	2013-04-01 – 2016-03-31
Project Status	Completed (Fiscal Year 2015)
Budget Amount *help	¥5,070,000 (Direct Cost: ¥3,900,000、Indirect Cost: ¥1,170,000) Fiscal Year 2015: ¥1,300,000 (Direct Cost: ¥1,000,000、Indirect Cost: ¥300,000) Fiscal Year 2014: ¥2,080,000 (Direct Cost: ¥1,600,000、Indirect Cost: ¥480,000) Fiscal Year 2013: ¥1,690,000 (Direct Cost: ¥1,300,000、Indirect Cost: ¥390,000)
Keywords	DLC / 動径分布関数 / 構造解析 / X線散乱 / 中性子散乱 / ラマン散乱 / ナノインデンテーション / 中性子 / 放射光 / 微小角入射X線散乱
Outline of Final Research Achievements	Structural analysis of diamond-like carbon (DLC) prepared by plasma-enhanced chemical vapor deposition was carried out by means of grazing incidence synchrotron X-ray scattering (GIXS). The obtained radial distribution functions analyzed by the X-ray scattering spectra suggested that an increase of the electric power input enhanced long-range ordering due to sp2 carbon in the film. These results showed good correlations with those of Raman spectra and hardness measurements of the films. In addition, the existence of C-D covalent bonds in a graphite network was confirmed by the RDFs calculated with neutron scattering measurements of deuterized DLC powder.