| Project/Area Number |
25420783
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| Research Category |
Grant-in-Aid for Scientific Research (C)
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| Allocation Type | Multi-year Fund |
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| Section | 一般 |
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| Research Field |
Material processing/Microstructural control engineering
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| Research Institution | Toyota Central R&D Lab., Inc. |
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Principal Investigator |
ISEKI TAKASHI 株式会社豊田中央研究所, 材料・プロセス1部 表面改質研究室, 主任研究員 (60394897)
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| Co-Investigator(Renkei-kenkyūsha) |
YAMAGUCHI SATOSHI 株式会社豊田中央研究所, 分析部 量子ビーム解析研究室, 研究員 (10394892)
NOZAKI HIROSHI 株式会社豊田中央研究所, 分析部 量子ビーム解析研究室, 主任研究員 (90394890)
TAKAHASHI NAOKO 株式会社豊田中央研究所, 分析部 組織解析研究室, 技師 (90394981)
OZAWA YASUHIRO 株式会社豊田中央研究所, 材料・プロセス1部 表面改質研究室, 技師補 (60557940)
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| Project Period (FY) |
2013-04-01 – 2016-03-31
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| Project Status |
Completed (Fiscal Year 2015)
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| Budget Amount *help |
¥5,070,000 (Direct Cost: ¥3,900,000、Indirect Cost: ¥1,170,000)
Fiscal Year 2015: ¥1,300,000 (Direct Cost: ¥1,000,000、Indirect Cost: ¥300,000)
Fiscal Year 2014: ¥2,080,000 (Direct Cost: ¥1,600,000、Indirect Cost: ¥480,000)
Fiscal Year 2013: ¥1,690,000 (Direct Cost: ¥1,300,000、Indirect Cost: ¥390,000)
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| Keywords | DLC / 動径分布関数 / 構造解析 / X線散乱 / 中性子散乱 / ラマン散乱 / ナノインデンテーション / 中性子 / 放射光 / 微小角入射X線散乱 |
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| Outline of Final Research Achievements |
Structural analysis of diamond-like carbon (DLC) prepared by plasma-enhanced chemical vapor deposition was carried out by means of grazing incidence synchrotron X-ray scattering (GIXS). The obtained radial distribution functions analyzed by the X-ray scattering spectra suggested that an increase of the electric power input enhanced long-range ordering due to sp2 carbon in the film. These results showed good correlations with those of Raman spectra and hardness measurements of the films. In addition, the existence of C-D covalent bonds in a graphite network was confirmed by the RDFs calculated with neutron scattering measurements of deuterized DLC powder.
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