Selective separation and recovery process of tetramethylammonium hydroxide from waste water of photoresist process

Research Project

Project/Area Number	25420811
Research Category	Grant-in-Aid for Scientific Research (C)
Allocation Type	Multi-year Fund
Section	一般
Research Field	Properties in chemical engineering process/Transfer operation/Unit operation
Research Institution	The University of Kitakyushu
Principal Investigator	Nishihama Syouhei 北九州市立大学, 国際環境工学部, 准教授 (00347668)
Co-Investigator(Kenkyū-buntansha)	YOSHIZUKA Kazuharu 北九州市立大学, 国際環境工学部, 教授 (70191567)
Project Period (FY)	2013-04-01 – 2016-03-31
Project Status	Completed (Fiscal Year 2015)
Budget Amount *help	¥5,070,000 (Direct Cost: ¥3,900,000、Indirect Cost: ¥1,170,000) Fiscal Year 2015: ¥1,690,000 (Direct Cost: ¥1,300,000、Indirect Cost: ¥390,000) Fiscal Year 2014: ¥2,080,000 (Direct Cost: ¥1,600,000、Indirect Cost: ¥480,000) Fiscal Year 2013: ¥1,300,000 (Direct Cost: ¥1,000,000、Indirect Cost: ¥300,000)
Keywords	イオン交換
Outline of Final Research Achievements	Fluidized bed column adsorption system was investigated to develop separation process of tetramethylammonium hydroxide (TMAH). Effective adsorption of TMAH was achieved with activated carbon by closed circuit type of the fluidized bed column adsorption system. In addition, the adsorption rate of TMAH with activated carbon in the fluidized bed column adsorption system was successfully expressed by pseudo second order rate model, and the rate constant was consistent to that in the batchwise system.

Report

(4 results)