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Proximity and Tactile Measurement Using a Multifunctional MEMS Sensor

Research Project

Project/Area Number 25540069
Research Category

Grant-in-Aid for Challenging Exploratory Research

Allocation TypeMulti-year Fund
Research Field Perceptual information processing
Research InstitutionNiigata University

Principal Investigator

SOHGAWA Masayuki  新潟大学, 自然科学系, 助教 (70403128)

Co-Investigator(Renkei-kenkyūsha) NOMA Haruo  立命館大学, 情報理工学部, 教授 (00374108)
OKUYAMA Masanori  大阪大学, 大学院基礎工学研究科, 名誉教授 (60029569)
Project Period (FY) 2013-04-01 – 2015-03-31
Project Status Completed (Fiscal Year 2014)
Budget Amount *help
¥3,250,000 (Direct Cost: ¥2,500,000、Indirect Cost: ¥750,000)
Fiscal Year 2014: ¥1,950,000 (Direct Cost: ¥1,500,000、Indirect Cost: ¥450,000)
Fiscal Year 2013: ¥1,300,000 (Direct Cost: ¥1,000,000、Indirect Cost: ¥300,000)
Keywords触覚センサ / 近接センサ / マルチモーダルセンサ / MEMS / 複合センシング / マルチモーダル計測 / インピーダンス
Outline of Final Research Achievements

A miniature sensor to detect both proximity and touch force has been investigated.Touch force can be detected as deflection of micro structures in silicone rubber. On the other hand, proximity can be detected as conductivity change in semiconductor by reflected light from the object. Moreover, in the case of transparent object or extremely short distance, proximity can be detected as change of electric field distribution around the sensor instead of an optical method.

Report

(3 results)
  • 2014 Annual Research Report   Final Research Report ( PDF )
  • 2013 Research-status Report
  • Research Products

    (21 results)

All 2015 2014 2013

All Journal Article (6 results) (of which Peer Reviewed: 6 results,  Acknowledgement Compliant: 1 results) Presentation (14 results) (of which Invited: 1 results) Patent(Industrial Property Rights) (1 results)

  • [Journal Article] BiFeO3圧電体薄膜を用いたマイクロカンチレバー触覚センサの検討2015

    • Author(s)
      三原雅人, 野沢瑛斗, 安部隆, 奥山雅則, 野間春生, 東輝明, 寒川雅之
    • Journal Title

      電気学会論文誌E(センサ・マイクロマシン部門誌)

      Volume: 135

    • NAID

      130005067826

    • Related Report
      2014 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Proximity and Tactile Sensing Using a Single MEMS Sensor with Photo- and Strain Sensitivities2014

    • Author(s)
      横山輔久登, 金島岳, 奥山雅則, 安部隆, 野間春生, 東輝明, 寒川雅之
    • Journal Title

      IEEJ Transactions on Sensors and Micromachines

      Volume: 134 Issue: 7 Pages: 229-234

    • DOI

      10.1541/ieejsmas.134.229

    • NAID

      130004849031

    • ISSN
      1341-8939, 1347-5525
    • Related Report
      2014 Annual Research Report
    • Peer Reviewed / Acknowledgement Compliant
  • [Journal Article] 光・歪複合検知MEMSセンサによる近接覚・触覚計測2014

    • Author(s)
      横山 輔久登, 金島 岳, 奥山 雅則, 安部 隆, 野間 春生, 東 輝明, 寒川 雅之
    • Journal Title

      電気学会論文誌E(センサ・マイクロマシン部門誌)

      Volume: 134

    • NAID

      130004849031

    • Related Report
      2013 Research-status Report
    • Peer Reviewed
  • [Journal Article] Active Touch Sensing by Multi-axial Force Measurement Using High-Resolution Tactile Sensor with Microcantilevers2014

    • Author(s)
      Hokuto Yokoyama, Takeshi Kanashima, Masanori Okuyama, Takashi Abe, Haruo Noma, Teruaki Azuma, Masayuki Sohgawa
    • Journal Title

      IEEJ Transactions on Sensors and Micromachines

      Volume: 134 Issue: 3 Pages: 58-63

    • DOI

      10.1541/ieejsmas.134.58

    • NAID

      130003391587

    • ISSN
      1341-8939, 1347-5525
    • Related Report
      2013 Research-status Report
    • Peer Reviewed
  • [Journal Article] Fabrication and Noise Reduction of the Miniature Tactile Sensor Using Through-Silicon-Via Connection with Signal Amplifier2013

    • Author(s)
      Hokuto Yokoyama, Masayuki Sohgawa, Takeshi Kanashima, Teruaki Azuma, Masanori Okuyama, Haruo Noma
    • Journal Title

      Japanese Journal of Applied Physics

      Volume: 52 Issue: 6S Pages: 06GL08-06GL08

    • DOI

      10.7567/jjap.52.06gl08

    • NAID

      210000142410

    • Related Report
      2013 Research-status Report
    • Peer Reviewed
  • [Journal Article] Review of Texture Measurement of Object Surface by Tactile Sensor with Inclined Micro-cantilevers2013

    • Author(s)
      寒川 雅之, 渡部 公介, 金島 岳, 奥山 雅則, 野間 春生, 東 輝明
    • Journal Title

      IEEJ Transactions on Sensors and Micromachines

      Volume: 133 Issue: 5 Pages: 147-154

    • DOI

      10.1541/ieejsmas.133.147

    • NAID

      10031167010

    • ISSN
      1341-8939, 1347-5525
    • Related Report
      2013 Research-status Report
    • Peer Reviewed
  • [Presentation] MEMS多軸触覚センサを用いた定量的質感計測のための基礎検討2015

    • Author(s)
      髙橋賢太, 安部隆, 奥山雅則, 野間春生, 寒川雅之
    • Organizer
      ロボティクス・メカトロニクス講演会2015
    • Place of Presentation
      京都市勧業館「みやこめっせ」
    • Year and Date
      2015-05-17 – 2015-05-19
    • Related Report
      2014 Annual Research Report
  • [Presentation] 積層マイクロカンチレバー構造の作製とそれを用いた小型センサデバイス2015

    • Author(s)
      寒川雅之, 安部隆
    • Organizer
      交通・電気鉄道/フィジカルセンサ合同研究会
    • Place of Presentation
      豊橋技術科学大学
    • Year and Date
      2015-03-18
    • Related Report
      2014 Annual Research Report
  • [Presentation] 褥瘡管理用装置のためのマイクロメカニカルセンサ2015

    • Author(s)
      寒川雅之, 安部隆, 奥山雅則, 野間春生, 縄田厚
    • Organizer
      日本機械学会北陸信越部 第52期 総会・講演会
    • Place of Presentation
      新潟工科大学
    • Year and Date
      2015-03-07
    • Related Report
      2014 Annual Research Report
  • [Presentation] Texture measurement and identification of object surface by MEMS tactile sensor2014

    • Author(s)
      Masayuki Sohgawa, Kosuke Watanabe, Takeshi Kanashima, Masanori Okuyama, Takashi Abe, Haruo Noma, Teruaki Azuma
    • Organizer
      IEEE Sensors 2014
    • Place of Presentation
      Valencia, Spain
    • Year and Date
      2014-11-03 – 2014-11-05
    • Related Report
      2014 Annual Research Report
  • [Presentation] Multimodal Measurement of Proximity and Touch Force by Light-and Strain-Sensitive Multifunctional MEMS Sensor2014

    • Author(s)
      Masayuki Sohgawa, Akito Nozawa, Hokuto Yokoyama, Takeshi Kanashima, Masanori Okuyama, Takashi Abe, Haruo Noma, Teruaki Azuma
    • Organizer
      IEEE Sensors 2014
    • Place of Presentation
      Valencia, Spain
    • Year and Date
      2014-11-03
    • Related Report
      2014 Annual Research Report
  • [Presentation] 近接覚・触覚マルチモーダルセンサの近接検知原理の解析2014

    • Author(s)
      野沢瑛斗, 安部隆, 奥山雅則, 野間春生, 東輝明, 寒川雅之
    • Organizer
      第31回「センサ・マイクロマシンと応用システム」シンポジウム
    • Place of Presentation
      くにびきメッセ(島根県立産業交流会館)
    • Year and Date
      2014-10-20 – 2014-10-22
    • Related Report
      2014 Annual Research Report
  • [Presentation] Multifunctional tactile sensors using MEMS cantilevers2014

    • Author(s)
      Masayuki Sohgawa
    • Organizer
      The 6th IEEE International Nanoelectronics Conference (IEEE INEC 2014)
    • Place of Presentation
      Sapporo, Hokkaido, Japan
    • Year and Date
      2014-07-28 – 2014-07-31
    • Related Report
      2014 Annual Research Report
    • Invited
  • [Presentation] BiFeO3圧電体薄膜を用いたマイクロカンチレバー触覚センサの検討2014

    • Author(s)
      三原雅人, 安部隆, 奥山雅則, 野間春生, 東輝明, 寒川雅之
    • Organizer
      平成26年度電気学会センサ・マイクロマシン部門総合研究会
    • Place of Presentation
      東京大学
    • Year and Date
      2014-05-27 – 2014-05-28
    • Related Report
      2014 Annual Research Report 2013 Research-status Report
  • [Presentation] 光・ひずみ複合MEMSセンサを用いた近接覚・触覚マルチモーダル計測2014

    • Author(s)
      野沢瑛斗, 横山輔久登, 金島岳, 奥山雅則, 安部隆, 野間春生, 東輝明, 寒川雅之
    • Organizer
      ロボティクス・メカトロニクス講演会2014
    • Place of Presentation
      富山市総合体育館
    • Year and Date
      2014-05-25 – 2014-05-29
    • Related Report
      2014 Annual Research Report 2013 Research-status Report
  • [Presentation] MEMS触覚センサによる物体表面質感の計測法2014

    • Author(s)
      渡部 公介, 金島 岳, 奥山 雅則, 野間 春生, 東 輝明, 安部 隆, 寒川 雅之
    • Organizer
      平成26年電気学会全国大会
    • Place of Presentation
      愛媛大学
    • Related Report
      2013 Research-status Report
  • [Presentation] 単一MEMSセンサ素子による近接覚・触覚計測手法の検討2013

    • Author(s)
      横山 輔久登, 金島 岳, 奥山 雅則, 安部 隆, 野間 春生, 東 輝明, 寒川 雅之
    • Organizer
      第30回「センサ・マイクロマシンと応用システム」シンポジウム
    • Place of Presentation
      仙台国際センター
    • Related Report
      2013 Research-status Report
  • [Presentation] High Resolution Measurement of Multi-axial Force in Real Time Using Miniature Tactile Sensor with Microcantilevers Embedded in PDMS2013

    • Author(s)
      Hokuto Yokoyama, Masayuki Sohgawa, Takeshi Kanashima, Masanori Okuyama, Takashi Abe, Haruo Noma, Teruaki Azuma
    • Organizer
      IEEE Sensors 2013
    • Place of Presentation
      Baltimore, MD USA
    • Related Report
      2013 Research-status Report
  • [Presentation] Multi-axial Tactile Sensor with Micro-cantilever Embedded in Hemispherical Elastomer for Surface Texture Measureme nt2013

    • Author(s)
      Kosuke Watanabe, Masayuki Sohgawa, Takeshi Kanashima, Masanori Okuyama, Haruo Noma, Teruaki Azuma
    • Organizer
      The 17th International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers 2013 & Eurosenso rs XXVII)
    • Place of Presentation
      Barcelona, Spain
    • Related Report
      2013 Research-status Report
  • [Presentation] Identification of Various Kinds of Papers Using Multi-axial Tactile Sensor with Micro-cantilevers2013

    • Author(s)
      Kosuke Watanabe, Masayuki Sohgawa, Takeshi Kanashima, Masanori Okuyama, Haruo Noma
    • Organizer
      The IEEE World Haptics Conference 2013
    • Place of Presentation
      Daejeon, Korea
    • Related Report
      2013 Research-status Report
  • [Patent(Industrial Property Rights)] MEMSセンサ2013

    • Inventor(s)
      寒川 雅之, 奥山 雅則, 野間 春生
    • Industrial Property Rights Holder
      新潟大学、立命館大学
    • Industrial Property Rights Type
      特許
    • Industrial Property Number
      2013-223626
    • Filing Date
      2013-10-28
    • Related Report
      2013 Research-status Report

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Published: 2014-07-25   Modified: 2019-07-29  

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