| Budget Amount *help |
¥4,030,000 (Direct Cost: ¥3,100,000、Indirect Cost: ¥930,000)
Fiscal Year 2014: ¥1,690,000 (Direct Cost: ¥1,300,000、Indirect Cost: ¥390,000)
Fiscal Year 2013: ¥2,340,000 (Direct Cost: ¥1,800,000、Indirect Cost: ¥540,000)
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| Outline of Final Research Achievements |
In this study, I tried to fabricate a nanostructure of titanium nitride by using electron beam lithography system. And new devices which had plasmon resonance corresponding to visible light were fabricated.
As a result, titanium thin film including nitrogen was formed by a reactive sputtering system. And nanostructure of titanium nitride (diameter 100nm) was formed by lift off method of electron beam lithography. In addition, I measured raman spectra of Rhodamine molecules on titanium nitride film by micro raman spectroscope. In that case, I showed that raman signal was enhanced by roughness of titanium nitride film surface.
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