Development of crystal orientation analysis using symmetric property of light reflection

• Project/Area Number: 25600085
• Research Category: Grant-in-Aid for Challenging Exploratory Research
• Allocation Type: Multi-year Fund
• Research Field: Crystal engineering
• Research Institution: Tohoku University
• Principal Investigator: KUTSUKAKE Kentaro 東北大学, 金属材料研究所, 助教 (00463795)
• Project Period (FY): 2013-04-01 – 2015-03-31
• Project Status: Completed (Fiscal Year 2014)
• Budget Amount: ¥4,030,000 (Direct Cost: ¥3,100,000、Indirect Cost: ¥930,000); Fiscal Year 2014: ¥780,000 (Direct Cost: ¥600,000、Indirect Cost: ¥180,000); Fiscal Year 2013: ¥3,250,000 (Direct Cost: ¥2,500,000、Indirect Cost: ¥750,000)
• Keywords: 結晶方位解析 / 結晶工学 / 面方位 / 多結晶 / 大面積ウェーハ / 結晶方位 / 大面積ウエハ

Outline of Final Research Achievements

This study aimed to establish theory and system of a unique analysis method of crystal orientation. This method is based on an analysis of symmetry and variation property of light reflection from sample surface, which contains crystal orientation information of the surface. It is possible in principle to measure a crystal orientation image map of a large area in a short time. I designed and introduced an experiment system for this research. As a result of investigations, we obtained knowledge in specifications of the analysis system for the determination of crystal orientations and the potential of this method.