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Study on localized surface plasmon resonance on III-nitride semiconduvtors in deep-UV region

Research Project

Project/Area Number 25600090
Research Category

Grant-in-Aid for Challenging Exploratory Research

Allocation TypeMulti-year Fund
Research Field Crystal engineering
Research InstitutionMie University

Principal Investigator

HIRAMATSU Kazumasa  三重大学, 工学(系)研究科(研究院), 教授 (50165205)

Co-Investigator(Kenkyū-buntansha) MIYAKE Hideto  三重大学, 大学院工学研究科, 准教授 (70209881)
MOTOGAITO Atsushi  三重大学, 大学院工学研究科, 准教授 (00303751)
Project Period (FY) 2013-04-01 – 2015-03-31
Project Status Completed (Fiscal Year 2014)
Budget Amount *help
¥4,030,000 (Direct Cost: ¥3,100,000、Indirect Cost: ¥930,000)
Fiscal Year 2014: ¥1,690,000 (Direct Cost: ¥1,300,000、Indirect Cost: ¥390,000)
Fiscal Year 2013: ¥2,340,000 (Direct Cost: ¥1,800,000、Indirect Cost: ¥540,000)
Keywords窒化物半導体 / 深紫外領域 / 表面プラズモン / 表面プラズモンセンサー / 2層型ワイヤーグリッド偏光子 / 窒化アルミニウム / 金属 / 化合物半導体 / 金属薄膜 / ワイヤーグリッド偏光子 / センサー
Outline of Final Research Achievements

In this study, discovering new optical properties in deep-UV region and creating new optical devices are realizing by combination of III-niride semiconductors and surface plasmon resonance. For this purpose, the study of surface plasmon resonance in visible region and fabricating high quality AlN substrate are carried out.
The surface plasmon sensors by using GaP substrate and Au thin film are fabricated and can detect 2, 4-dichlorotoluene (n=1.55). Also the extraordinary transmission due to surface plasmon resonance is discovered in the double-layer wire grid polarlizers.
Furthermore, the high quality AlN layer can be obtained by HVPE method using trench patterned substrate. From these results, the knowledges and techniques on surface plasmon resonance in deep-UV region can be obtained.

Report

(3 results)
  • 2014 Annual Research Report   Final Research Report ( PDF )
  • 2013 Research-status Report
  • Research Products

    (44 results)

All 2015 2014 2013 Other

All Journal Article (6 results) (of which Peer Reviewed: 5 results,  Open Access: 1 results,  Acknowledgement Compliant: 3 results) Presentation (31 results) Remarks (6 results) Patent(Industrial Property Rights) (1 results)

  • [Journal Article] Using surface-plasmon polariton at the GaP-Au interface in order to detect chemical species in high-refractive-index media2015

    • Author(s)
      A. Motogaito, S. Nakamura, J. Miyazaki, H. Miyake and K. Hiramatsu
    • Journal Title

      Optics Communications

      Volume: 341 Pages: 64-68

    • DOI

      10.1016/j.optcom.2014.12.006

    • Related Report
      2014 Annual Research Report
    • Peer Reviewed / Acknowledgement Compliant
  • [Journal Article] High-quality AlN growth on 6H-SiC substrate using three dimensional nucleation by low-pressure hydride vapor phase epitaxy2014

    • Author(s)
      S. Kitagawa, H. Miyake and K. Hiramatsu
    • Journal Title

      Japanese Journal of Applied Physics

      Volume: 53 Issue: 5S1 Pages: 05FL03-05FL03

    • DOI

      10.7567/jjap.53.05fl03

    • NAID

      210000143863

    • Related Report
      2014 Annual Research Report
    • Peer Reviewed / Open Access / Acknowledgement Compliant
  • [Journal Article] MOVPE growth of GaN on Si substrate with 3C-SiC buffer layer2014

    • Author(s)
      M. Katagiri, H. Fang, H. Miyake, K. Hiramatsu, H. Oku, H. Asanuma and K. Kawamura
    • Journal Title

      Japanese Journal of Applied Physics

      Volume: 53 Issue: 5S1 Pages: 05FL09-05FL09

    • DOI

      10.7567/jjap.53.05fl09

    • NAID

      210000143869

    • Related Report
      2014 Annual Research Report
    • Peer Reviewed / Acknowledgement Compliant
  • [Journal Article] AlN Grown on a- and n-Plane Sapphire Substrates:by Low-Pressure Hydride Vapor Phase Epitaxy2013

    • Author(s)
      Naoki Goriki, Hideto Miyake, Kazumasa Hiramatsu, Toru Akiyama, Tomonori Ito, and Osamu Eryu
    • Journal Title

      Japanese Journal of Applied Physics

      Volume: 52 Issue: 8S Pages: 08JB31-08JB31

    • DOI

      10.7567/jjap.52.08jb31

    • Related Report
      2013 Research-status Report
    • Peer Reviewed
  • [Journal Article] The Excitation of the Surface Plasmon Polariton with the GaP-Au Contact and Application to Chemical Sensors2013

    • Author(s)
      S. Nakamura, A. Motogaito, H. Miyake, and K. Hiramatsu
    • Journal Title

      Technical digest on 2013 Conference on Lasers and Electro-Optics Pacific Rim (CLEO-PR)

      Volume: なし

    • Related Report
      2013 Research-status Report
    • Peer Reviewed
  • [Journal Article] Study on the Chemical Sensor Using Excitation of the Surface Plasmon Polariton with the GaP-Au Contact2013

    • Author(s)
      Shohei Nakamura,Atsushi Motogaito, Hideto Miyake and Kazumasa Hiramatsu
    • Journal Title

      Proc. JSAP-OSA Symposia 2013

      Volume: なし

    • Related Report
      2013 Research-status Report
  • [Presentation] Stady on surface thermal stability of free-standing GaN substrates2015

    • Author(s)
      S. Okada, H. Miyake, K. Hiramatsu, R. Miyagawa, O. Eryu and T. Hashizume
    • Organizer
      ISPlasma 2015
    • Place of Presentation
      名古屋大学
    • Year and Date
      2015-03-28
    • Related Report
      2014 Annual Research Report
  • [Presentation] 一次元金属回折格子を用いた伝搬型表面プラズモンセンサーによる高屈折率媒質の検出2015

    • Author(s)
      水戸慎也、元垣内敦司、三宅秀人、平松和政
    • Organizer
      第62回応用物理学会春季学術講演会
    • Place of Presentation
      東海大学湘南キャンパス
    • Year and Date
      2015-03-13
    • Related Report
      2014 Annual Research Report
  • [Presentation] MOVPE法によるAlN成長におけるc面サファイア微傾斜角度の影響2015

    • Author(s)
      鈴木周平、林家弘、三宅秀人、平松和政、福山博之
    • Organizer
      第62回応用物理学会春季学術講演会
    • Place of Presentation
      東海大学湘南キャンパス
    • Year and Date
      2015-03-12
    • Related Report
      2014 Annual Research Report
  • [Presentation] MOVPE法によるAlN成長におけるc面サファイア表面の影響2015

    • Author(s)
      林家弘、鈴木周平、岡田俊祐、三宅秀人、平松和政
    • Organizer
      第62回応用物理学会春季学術講演会
    • Place of Presentation
      東海大学湘南キャンパス
    • Year and Date
      2015-03-12
    • Related Report
      2014 Annual Research Report
  • [Presentation] スパッタ法AlNテンプレート基板を用いたAlNのHVPE成長2015

    • Author(s)
      安井大貴、三宅秀人、平松和政、岩谷素顕、赤﨑勇、天野浩
    • Organizer
      第62回応用物理学会春季学術講演会
    • Place of Presentation
      東海大学湘南キャンパス
    • Year and Date
      2015-03-11
    • Related Report
      2014 Annual Research Report
  • [Presentation] 光学フィルタへの応用に向けた金属2次元回折格子構造の作製と光学特性評価2014

    • Author(s)
      鬼頭壮宜、元垣内敦司、三宅秀人、平松和政
    • Organizer
      電子情報通信学会光エレクトロニクス研究会
    • Place of Presentation
      機械振興会館
    • Year and Date
      2014-12-18
    • Related Report
      2014 Annual Research Report
  • [Presentation] GaN自立基板の表面におけるサーマルクリーニングの効果2014

    • Author(s)
      岡田俊祐、三宅秀人、平松和政、宮川鈴衣奈、江龍修、橋詰保
    • Organizer
      電子情報通信学会レーザー量子エレクトロニクス研究会
    • Place of Presentation
      大阪大学 吹田キャンパス
    • Year and Date
      2014-11-28
    • Related Report
      2014 Annual Research Report
  • [Presentation] Studies on surface plasmon sensor using one-dimensional metal diffraction grating2014

    • Author(s)
      S. Mito, A. Motogaito, H. Miyake and K. Hiramatsu
    • Organizer
      The 4th International Symposium for Sustainability by Engineering at MIU
    • Place of Presentation
      三重大学
    • Year and Date
      2014-11-26
    • Related Report
      2014 Annual Research Report
  • [Presentation] Surface treatment of GaN substrates by thermal cleaning2014

    • Author(s)
      S. Okada, H. Miyake, K. Hiramatsu, R. Miyagawa, O. Eryu and T. Hashizume
    • Organizer
      The 4th International Symposium for Sustainability by Engineering at MIU
    • Place of Presentation
      三重大学
    • Year and Date
      2014-11-26
    • Related Report
      2014 Annual Research Report
  • [Presentation] GaN growth on carbonized-Si substrate by MOVPE2014

    • Author(s)
      K. Izumi, H. Miyake, K. Hiramatsu, H. Oku, H. Asamura and K. Kawamura
    • Organizer
      The 4th International Symposium for Sustainability by Engineering at MIU
    • Place of Presentation
      三重大学
    • Year and Date
      2014-11-26
    • Related Report
      2014 Annual Research Report
  • [Presentation] Influence of thermal annealing in N2-CO ambient on AlN buffer layer2014

    • Author(s)
      S. Suzuki, H. Miyake, K. Hiramatsu, and H. Fukuyama
    • Organizer
      The 4th International Symposium for Sustainability by Engineering at MIU
    • Place of Presentation
      三重大学
    • Year and Date
      2014-11-26
    • Related Report
      2014 Annual Research Report
  • [Presentation] Study of AlN growth conditions for hydride vapor phase epitaxy2014

    • Author(s)
      D. Yasui, H. Miyake, K. Hiramatsu and T. Kawamura
    • Organizer
      The 4th International Symposium for Sustainability By Engieering at MIU (IS2EMU2013)
    • Place of Presentation
      三重大学
    • Year and Date
      2014-11-26
    • Related Report
      2014 Annual Research Report
  • [Presentation] 2層型ワイヤーグリッド偏光子の偏光特性と表面プラズモン共鳴2014

    • Author(s)
      元垣内敦司、森下雄太、三宅秀人、平松和政
    • Organizer
      第75回応用物理学会秋季学術講演会
    • Place of Presentation
      北海道大学
    • Year and Date
      2014-09-18
    • Related Report
      2014 Annual Research Report
  • [Presentation] 光学フィルタへの応用に向けた金属2次元回折格子構造の作製と可視光及び赤外光の透過・反射制御2014

    • Author(s)
      鬼頭壮宜、元垣内敦司、三宅秀人、平松和政
    • Organizer
      第75回応用物理学会秋季学術講演会
    • Place of Presentation
      北海道大学
    • Year and Date
      2014-09-18
    • Related Report
      2014 Annual Research Report
  • [Presentation] サファイア基板のサーマルリング2014

    • Author(s)
      林家弘、鈴木周平、岡田俊祐、三宅秀人、平松和政
    • Organizer
      第75回応用物理学会秋季学術講演会
    • Place of Presentation
      北海道大学
    • Year and Date
      2014-09-18
    • Related Report
      2014 Annual Research Report
  • [Presentation] エピタキシャル成長のためのGaN 自立基板サーマルクリーニング2014

    • Author(s)
      岡田俊祐、三宅秀人、平松和政、宮川鈴衣奈、江龍修、橋詰保
    • Organizer
      第6回窒化物半導体結晶成長講演会
    • Place of Presentation
      名城大学
    • Year and Date
      2014-07-26
    • Related Report
      2014 Annual Research Report
  • [Presentation] サファイア上AlN 緩衝層のN2-CO アニールとMOVPE 法による高温成長2014

    • Author(s)
      鈴木周平、三宅秀人、平松和政、福山博之
    • Organizer
      第6回窒化物半導体結晶成長講演会
    • Place of Presentation
      名城大学
    • Year and Date
      2014-07-26
    • Related Report
      2014 Annual Research Report
  • [Presentation] HVPE法AlN成長条件のシミュレーションによる検討2014

    • Author(s)
      安井大貴、三宅秀人、平松和政、河村貴宏
    • Organizer
      第6回窒化物半導体結晶成長講演会
    • Place of Presentation
      名城大学
    • Year and Date
      2014-07-25
    • Related Report
      2014 Annual Research Report
  • [Presentation] Influence of thermal cleaning on free-standing GaN surface2014

    • Author(s)
      S. Okada, H. Miyake, K. Hiramatsu, R. Miyagawa, O. Eryu and T. Hashizume
    • Organizer
      第33回電子材料シンポジウム
    • Place of Presentation
      ラフォーレ修善寺
    • Year and Date
      2014-07-10
    • Related Report
      2014 Annual Research Report
  • [Presentation] Polarization Property of a Double-layer Wire Grid Polarizer and the Mechanism of Transmission2014

    • Author(s)
      A. Motogaito, Y. Morishita, H. Miyake and K. Hiramatsu
    • Organizer
      17th European Conference on Integrated Optics and 20th Microoptics Conference
    • Place of Presentation
      Nice, France
    • Year and Date
      2014-06-25
    • Related Report
      2014 Annual Research Report
  • [Presentation] Excitation of Surface Plasmon Polariton at the GaP-Au Interface in a High-Refractive-Index Medium2014

    • Author(s)
      A. Motogaito, S. Nakamura, J. Miyazaki, H. Miyake and K. Hiramatsu
    • Organizer
      17th European Conference on Integrated Optics and 20th Microoptics Conference
    • Place of Presentation
      Nice, France
    • Year and Date
      2014-06-25
    • Related Report
      2014 Annual Research Report
  • [Presentation] AlN基板の表面処理とホモエピタキシャル成長2014

    • Author(s)
      渡邉祥順、三宅秀人、平松和政、岩崎洋介
    • Organizer
      電子情報通信学会電子デバイス研究会
    • Place of Presentation
      名古屋大学
    • Year and Date
      2014-05-29
    • Related Report
      2014 Annual Research Report
  • [Presentation] GaN自立基板の表面におけるサーマルクリーニングの効果2014

    • Author(s)
      岡田俊祐、三宅秀人、平松和政、宮川鈴衣奈、江龍修、橋詰保
    • Organizer
      電子情報通信学会電子デバイス研究会
    • Place of Presentation
      名古屋大学
    • Year and Date
      2014-05-28
    • Related Report
      2014 Annual Research Report
  • [Presentation] HVPE Homoepitaxy on Freestanding AlN Substrate with Trench Pattern2014

    • Author(s)
      Y. Watanabe、H. Miyake、K. Hiramatsu, Y. Iwasaki and S. Nagata
    • Organizer
      5th International Symposium on Growth of III-Nitrides
    • Place of Presentation
      Atlanta, USA
    • Year and Date
      2014-05-19
    • Related Report
      2014 Annual Research Report
  • [Presentation] AlNのMOVPE成長におけるSi取り込み量の転位密度依存性2013

    • Author(s)
      西尾剛、三宅秀人、平松和政、徳本有紀、米永一郎
    • Organizer
      第5回窒化物半導体結晶成長講演会
    • Place of Presentation
      大阪大学 銀杏会館
    • Related Report
      2013 Research-status Report
  • [Presentation] The Excitation of the Surface Plasmon Polariton with the GaP-Au Contact and Application to Chemical Sensors

    • Author(s)
      S. Nakamura, A. Motogaito, H. Miyake, and K. Hiramatsu
    • Organizer
      2013 Conference on Lasers and Electro-Optics Pacific Rim (CLEO-PR)
    • Place of Presentation
      国立京都国際会館
    • Related Report
      2013 Research-status Report
  • [Presentation] Effects of threading dislocation on MOVPE growth of Si-doped AlN

    • Author(s)
      G. Nishio, H. Miyake and K. Hiramatsu
    • Organizer
      第32回電子材料シンポジウム
    • Place of Presentation
      ラフォーレ琵琶湖
    • Related Report
      2013 Research-status Report
  • [Presentation] Study on the Chemical Sensor Using Excitation of the Surface Plasmon Polariton with the GaP-Au Contact

    • Author(s)
      Shohei Nakamura, Atsushi Motogaito, Hideto Miyake and Kazumasa Hiramatsu
    • Organizer
      JSAP-OSA Symposia 2013
    • Place of Presentation
      同志社大学 京田辺キャンパス
    • Related Report
      2013 Research-status Report
  • [Presentation] 二層型ワイヤーグリッド偏光子の特性周期及び高さ依存性

    • Author(s)
      森下 雄太、元垣内 敦司、三宅 秀人、平松和政
    • Organizer
      日本光学会年次学術講演会(OPJ2013)
    • Place of Presentation
      奈良県新公会堂
    • Related Report
      2013 Research-status Report
  • [Presentation] Controlling reflectance and transmittance in visible and infrared light region by using periodical metallic nano-structures

    • Author(s)
      Masanori Kito, Atsushi Motogaito, Hideto Miyake and Kazumasa Hiramatsu
    • Organizer
      The 3rd International Symposium for Sustainability By Engieering at MIU (IS2EMU2013)
    • Place of Presentation
      三重大学
    • Related Report
      2013 Research-status Report
  • [Presentation] GaPとAuの接触を用いた伝搬型表面プラズモンセンサーによる高屈折率液体媒質の検出

    • Author(s)
      元垣内敦司、中村将平、宮崎 潤、三宅秀人、平松和政
    • Organizer
      第61回応用物理学会春季学術講演会
    • Place of Presentation
      青山学院大学淵野辺キャンパス
    • Related Report
      2013 Research-status Report
  • [Remarks] 三重大学大学院工学研究科電気電子工学専攻 オプトエレクトロニクス研究室

    • URL

      http://www.opt.elec.mie-u.ac.jp

    • Related Report
      2014 Annual Research Report
  • [Remarks] 三重大学全学シーズ集

    • URL

      http://www.crc.mie-u.ac.jp/seeds/contents/detail.php?mid=20100108-113310&t=r&url=

    • Related Report
      2014 Annual Research Report
  • [Remarks] 三重大学極限ナノエレクトロニクスセンター

    • URL

      http://www.cute.rc.mie-u.ac.jp

    • Related Report
      2014 Annual Research Report
  • [Remarks] 三重大学大学院工学研究科電気電子工学専攻オプトエレクトロニクス研究室

    • URL

      http://www.opt.elec.mie-u.ac.jp/

    • Related Report
      2013 Research-status Report
  • [Remarks] 三重大学極限ナノエレクトロニクスセンター

    • URL

      http://www.cute.rc.mie-u.ac.jp/index.html

    • Related Report
      2013 Research-status Report
  • [Remarks] 三重大学全学シーズ集

    • URL

      http://www.crc.mie-u.ac.jp/seeds/

    • Related Report
      2013 Research-status Report
  • [Patent(Industrial Property Rights)] 光学装置の製造方法及び光学装置2014

    • Inventor(s)
      元垣内敦司、平松和政、森下雄太
    • Industrial Property Rights Holder
      国立大学法人三重大学
    • Industrial Property Rights Type
      特許
    • Industrial Property Number
      2014-024746
    • Filing Date
      2014-02-12
    • Related Report
      2013 Research-status Report

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Published: 2014-07-25   Modified: 2019-07-29  

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