| Budget Amount *help |
¥4,030,000 (Direct Cost: ¥3,100,000、Indirect Cost: ¥930,000)
Fiscal Year 2014: ¥1,560,000 (Direct Cost: ¥1,200,000、Indirect Cost: ¥360,000)
Fiscal Year 2013: ¥2,470,000 (Direct Cost: ¥1,900,000、Indirect Cost: ¥570,000)
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| Outline of Final Research Achievements |
Development of ultraprecise X-ray focusing mirrors is essential for improving micro-X-ray analysis and X-ray microscopy. However, it is quite difficult to fabricate such focusing mirrors, which has relatively large numerical aperture, due to its steeply curved shape. In this research, we developed a computer-controlled ion beam figuring system that can fabricate such focusing mirrors precisely. An elliptical mirror with an figure accuracy of 1 nm was successfully fabricated using the developed system.
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