Development of novel fabrication process for ultraprecise X-ray mirrors
Project/Area Number |
25600140
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Research Category |
Grant-in-Aid for Challenging Exploratory Research
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Allocation Type | Multi-year Fund |
Research Field |
Quantum beam science
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Research Institution | Osaka University |
Principal Investigator |
MATSUYAMA Satoshi 大阪大学, 工学(系)研究科(研究院), 助教 (10423196)
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Project Period (FY) |
2013-04-01 – 2015-03-31
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Project Status |
Completed (Fiscal Year 2014)
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Budget Amount *help |
¥4,030,000 (Direct Cost: ¥3,100,000、Indirect Cost: ¥930,000)
Fiscal Year 2014: ¥1,560,000 (Direct Cost: ¥1,200,000、Indirect Cost: ¥360,000)
Fiscal Year 2013: ¥2,470,000 (Direct Cost: ¥1,900,000、Indirect Cost: ¥570,000)
|
Keywords | X線集光ミラー / 放射光 / イオンビーム加工 |
Outline of Final Research Achievements |
Development of ultraprecise X-ray focusing mirrors is essential for improving micro-X-ray analysis and X-ray microscopy. However, it is quite difficult to fabricate such focusing mirrors, which has relatively large numerical aperture, due to its steeply curved shape. In this research, we developed a computer-controlled ion beam figuring system that can fabricate such focusing mirrors precisely. An elliptical mirror with an figure accuracy of 1 nm was successfully fabricated using the developed system.
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Report
(3 results)
Research Products
(30 results)
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[Presentation] Damage characteristics of platinum/carbon multilayers under focused x-ray free-electron laser irradiation2013
Author(s)
J. Kim, T. Koyama, H. Yumoto, A. Nagahira, S. Matsuyama, Y. Sano, M. Yabashi, H. Ohashi, T. Ishikawa, K. Yamauchi
Organizer
SPIE Optics+Photonics
Place of Presentation
San Diego, USA
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