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Characterization of InGaN films by synchrotron radiation microdiffraction with using parabolic refractive X-ray lenses made of quartz glass

Research Project

Project/Area Number 25600151
Research Category

Grant-in-Aid for Challenging Exploratory Research

Allocation TypeMulti-year Fund
Research Field Quantum beam science
Research InstitutionJapan Synchrotron Radiation Research Institute

Principal Investigator

KIMURA SHIGERU  公益財団法人高輝度光科学研究センター, 利用研究促進部門, 副主席研究員 (50360821)

Co-Investigator(Kenkyū-buntansha) IMAI Yasuhiko  公益財団法人高輝度光科学研究センター, 利用研究促進部門, 研究員 (30416375)
Research Collaborator YOKOGAWA Toshiya  
Project Period (FY) 2013-04-01 – 2015-03-31
Project Status Completed (Fiscal Year 2014)
Budget Amount *help
¥4,030,000 (Direct Cost: ¥3,100,000、Indirect Cost: ¥930,000)
Fiscal Year 2014: ¥1,170,000 (Direct Cost: ¥900,000、Indirect Cost: ¥270,000)
Fiscal Year 2013: ¥2,860,000 (Direct Cost: ¥2,200,000、Indirect Cost: ¥660,000)
Keywords放射光 / 集光素子 / 屈折レンズ / 石英 / GaInN / X線回折 / 蛍光X線分析 / マイクロビーム / マイクロ回折
Outline of Final Research Achievements

We have fabricated planar parabolic refractive X-ray lenses made of quartz glass for high energy X-ray focusing by optical lithography and dry etching techniques. We succeeded a 100-μm-deep etching, realizing that high efficient microfocusing for high energy X-rays.
Using the lenses for 30 keV, we characterized thermal stability of InGaN multi quantum well strictures.

Report

(3 results)
  • 2014 Annual Research Report   Final Research Report ( PDF )
  • 2013 Research-status Report
  • Research Products

    (3 results)

All 2015 2014

All Journal Article (1 results) (of which Peer Reviewed: 1 results,  Open Access: 1 results) Presentation (2 results)

  • [Journal Article] BL13XU(表面界面構造解析)の現状 (2014)2014

    • Author(s)
      田尻 寛男,今井 康彦
    • Journal Title

      SPring-8/SACLA利用研究成果集

      Volume: 3 Pages: 145-153

    • NAID

      130007969144

    • Related Report
      2014 Annual Research Report
    • Peer Reviewed / Open Access
  • [Presentation] X線マイクロビームによるGaN基板上InGaN系デバイスの評価2015

    • Author(s)
      横川 俊哉,栫 拓也,今井 康彦,木村 滋
    • Organizer
      2015年 第62回応用物理学会春季学術講演会
    • Place of Presentation
      東海大学(神奈川県平塚市)
    • Year and Date
      2015-03-13
    • Related Report
      2014 Annual Research Report
  • [Presentation] 高エネルギーX線集光用石英ガラス製屈折レンズの開発2015

    • Author(s)
      木村滋,今井康彦
    • Organizer
      2015年 第62回応用物理学会春季学術講演会
    • Place of Presentation
      東海大学(神奈川県平塚市)
    • Year and Date
      2015-03-11
    • Related Report
      2014 Annual Research Report

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Published: 2014-07-25   Modified: 2019-07-29  

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