Characterization of InGaN films by synchrotron radiation microdiffraction with using parabolic refractive X-ray lenses made of quartz glass
| Project/Area Number |
25600151
|
|---|
| Research Category |
Grant-in-Aid for Challenging Exploratory Research
|
| Allocation Type | Multi-year Fund |
|---|
| Research Field |
Quantum beam science
|
|---|
| Research Institution | Japan Synchrotron Radiation Research Institute |
|---|
Principal Investigator |
KIMURA SHIGERU 公益財団法人高輝度光科学研究センター, 利用研究促進部門, 副主席研究員 (50360821)
|
|---|
| Co-Investigator(Kenkyū-buntansha) |
IMAI Yasuhiko 公益財団法人高輝度光科学研究センター, 利用研究促進部門, 研究員 (30416375)
|
|---|
| Research Collaborator |
YOKOGAWA Toshiya
|
|---|
| Project Period (FY) |
2013-04-01 – 2015-03-31
|
| Project Status |
Completed (Fiscal Year 2014)
|
| Budget Amount *help |
¥4,030,000 (Direct Cost: ¥3,100,000、Indirect Cost: ¥930,000)
Fiscal Year 2014: ¥1,170,000 (Direct Cost: ¥900,000、Indirect Cost: ¥270,000)
Fiscal Year 2013: ¥2,860,000 (Direct Cost: ¥2,200,000、Indirect Cost: ¥660,000)
|
|---|
| Keywords | 放射光 / 集光素子 / 屈折レンズ / 石英 / GaInN / X線回折 / 蛍光Ｘ線分析 / マイクロビーム / マイクロ回折 |
|---|
| Outline of Final Research Achievements |
We have fabricated planar parabolic refractive X-ray lenses made of quartz glass for high energy X-ray focusing by optical lithography and dry etching techniques. We succeeded a 100-μm-deep etching, realizing that high efficient microfocusing for high energy X-rays.
Using the lenses for 30 keV, we characterized thermal stability of InGaN multi quantum well strictures.
|
Report
(3 results)
Research Products
(3 results)
