A challenge to seek for the effect of hydrogen causing embrittlement and fatigue fracture in silicon

• Project/Area Number: 25630008
• Research Category: Grant-in-Aid for Challenging Exploratory Research
• Allocation Type: Multi-year Fund
• Research Field: Materials/Mechanics of materials
• Research Institution: Nagoya Institute of Technology
• Principal Investigator: Kamiya Shoji 名古屋工業大学, 工学(系)研究科(研究院), 教授 (00204628)
• Project Period (FY): 2013-04-01 – 2016-03-31
• Project Status: Completed (Fiscal Year 2015)
• Budget Amount: ¥3,900,000 (Direct Cost: ¥3,000,000、Indirect Cost: ¥900,000); Fiscal Year 2014: ¥2,340,000 (Direct Cost: ¥1,800,000、Indirect Cost: ¥540,000); Fiscal Year 2013: ¥1,560,000 (Direct Cost: ¥1,200,000、Indirect Cost: ¥360,000)
• Keywords: 水素 / 結晶すべり促進 / 疲労寿命低下 / ストライエーション / 転位集積 / すべり変形促進 / 圧縮応力による寿命低下 / 剪断応力による寿命低下 / 転位群 / シリコン / 疲労試験 / 分解せん断応力 / 結晶すべり

Outline of Final Research Achievements

Fatigue process in silicon was investigated from the view point of its interaction with hydrogen, which revealed that hydrogen enhances crystal slip deformation leading to accumulation of dislocations under cyclic loading to results in fracture.

Research Products

• [Journal Article] Sehar stress enhanced fatigue damage accumulation in single crystalline silicon under cyclic mechanical loading (2016)
  • Author(s): Shoji Kamiya, Arasu Udhayakumar, Hayato Izumi, Kozo Koiwa
  • Journal Title: Sensors and Actuators A Volume: still unknown
  • Peer Reviewed / Acknowledgement Compliant
• [Journal Article] Hydrogen enhanced mechanical fatigue in single crystal silicon (2015)
  • Author(s): Hayato Izumi, Arasu Udhayakumar, Shoji Kamiya
  • Journal Title: Materials Letters Volume: 142 Pages: 130132-130132
  • Peer Reviewed / Acknowledgement Compliant
• [Journal Article] Effect of hydrogen at room temperature on electronic and mechanical properties of dislocations in silicon (2014)
  • Author(s): Masatoshi Ogawa, Shoji Kamiya, Hayato Izumi, Yutaka Tokuda
  • Journal Title: Materials Letters Volume: 120 Pages: 236238-236238
  • Peer Reviewed
• [Journal Article] Effect of hydrogen on the mechanical properties of silicon crystal surface (2013)
  • Author(s): Hayato Izumi, Ryota Mukaiyama, Nobuyuki Shishido, Shoji Kamiya
  • Journal Title: Proceedings of the ASME 2013 International Technical Conference and Exhibition on Packaging and Integration of Electronic and Photonic Microsystems Pages: 73324-73324
  • Peer Reviewed
• [Presentation] Shear stress with hydrogen, not oxygen, matters to the fatigue lifetime of silicon (2015)
  • Author(s): S. Kamiya, A. Udhayakumar, H. Izumi, K. Koiwa
  • Organizer: 18th International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers 2015)
  • Place of Presentation: Anchorage, Alaska, USA
  • Year and Date: 2015-06-21
  • Int'l Joint Research
• [Presentation] Effect of hydrogen on fatigue lifetime of silicon with the aid of shear and compressive stress (2015)
  • Author(s): Arasu Udhayakumar, Hayato Izumi, Kozo Koiwa, Shoji Kamiya
  • Organizer: 日本機械学会東海支部第64期総会
  • Place of Presentation: 中部大学 愛知
  • Year and Date: 2015-03-13 – 2015-03-14
• [Presentation] Effect of crystal orientation and environment on fatigue lifetime of single crystal silicon (2014)
  • Author(s): Arasu Udhayakumar, Hayato Izumi, Kozo Koiwa, Shoji Kamiya
  • Organizer: 第6回マイクロナノ工学シンポジウム
  • Place of Presentation: くにびきメッセ 松江
  • Year and Date: 2014-10-20 – 2014-10-22
• [Presentation] シリコン単結晶における疲労損傷の集積過程に及ぼす応力比の効果 (2014)
  • Author(s): 喜多俊文，泉隼人，神谷庄司，Vu Le Huy
  • Organizer: 2014年度日本機械学会年次大会
  • Place of Presentation: 東京電機大学 北千住
  • Year and Date: 2014-09-07 – 2014-09-10
• [Presentation] Mechanical fatigue damage accumulation in silicon visualized by electronic defect analysis technique (2014)
  • Author(s): Shoji Kamiya
  • Organizer: IEC standard SC47F/WG1, MEMS Standardization Workshop
  • Place of Presentation: Geneve, Switzerland
  • Year and Date: 2014-06-24 – 2014-06-25
  • Invited
• [Presentation] Fatigue failure and fracture surface analysis of single crystal silicon exposed to oxygen, hydrogen and humidity air environment (2014)
  • Author(s): Arasu Udhayakumar, Shoji Kamiya, Hayato Izumi, Nobuyuki Shishido
  • Organizer: 41th International Conference on Metallurgical Coating and Thin Films
  • Place of Presentation: San Diego, US
  • Year and Date: 2014-04-28 – 2014-05-02
• [Presentation] Effect of hydrogen on the mechanical properties of silicon crystal surface (2013)
  • Author(s): Hayato Izumi, Ryota Mukaiyama, Nobuyuki Shishido, Shoji Kamiya
  • Organizer: ASME 2013 International Technical Conference and Exhibition on Packaging and Integration of Electronic and Photonic Microsystems (InterPACK 2013)
  • Place of Presentation: San Francisco
• [Presentation] Fatigue behavior of silicon wafer under bending load in different environment (2013)
  • Author(s): Arasu Udhayakumar, Hayato Izumi, Shoji Kamiya
  • Organizer: JSME Materials and Mechanics Division 2013
  • Place of Presentation: Gifu University,Japan