| Project/Area Number |
25630034
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| Research Category |
Grant-in-Aid for Challenging Exploratory Research
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| Allocation Type | Multi-year Fund |
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| Research Field |
Design engineering/Machine functional elements/Tribology
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| Research Institution | Tokyo University of Agriculture and Technology |
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Principal Investigator |
ANDO YASUHISA 東京農工大学, 工学(系)研究科(研究院), 教授 (00344169)
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| Project Period (FY) |
2013-04-01 – 2016-03-31
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| Project Status |
Completed (Fiscal Year 2015)
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| Budget Amount *help |
¥3,510,000 (Direct Cost: ¥2,700,000、Indirect Cost: ¥810,000)
Fiscal Year 2015: ¥1,040,000 (Direct Cost: ¥800,000、Indirect Cost: ¥240,000)
Fiscal Year 2014: ¥1,170,000 (Direct Cost: ¥900,000、Indirect Cost: ¥270,000)
Fiscal Year 2013: ¥1,300,000 (Direct Cost: ¥1,000,000、Indirect Cost: ¥300,000)
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| Keywords | 凝着力 / 摩擦力 / MEMS / 静電アクチュエータ / 単結晶シリコン / 接触面積 / 凝縮水 / 温度ドリフト / 摩擦係数 / フォースカーブ / 実効荷重 / 走査速度 / 電流測定 / 動圧効果 / トライボロジー / AFM |
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| Outline of Final Research Achievements |
Tribology characteristics were examined for a minimum contact area using the on-chip AFM in which the cantilever was mounted directly onto the substrate on which the 3-DOF microstage. An FEM analysis showed that the on-chip AFM achieved small thermal drifts. The fabricated on-chip AFM represented stage displacements of 1.1 μm and 1.5 μm in the vertical and lateral directions, respectively. For tribological evaluation, a negative load of －22.5 nN was applied between the Si probe and the Si translation stage surface, and raster scanning was performed at various scanning speeds between 0.1 μm/s and 100 μm/s, for measurement of friction force distribution. Friction force microscopy images were thus successfully obtained, and the average friction force for the entire scanning area represented a positive slope against scanning speed. The relations between friction force and load were examined and the minimum contact area was 4.5 square nanometers, which corresponded to 15 atoms.
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