Project/Area Number |
25630084
|
Research Category |
Grant-in-Aid for Challenging Exploratory Research
|
Allocation Type | Multi-year Fund |
Research Field |
Intelligent mechanics/Mechanical systems
|
Research Institution | Tohoku University |
Principal Investigator |
HAGA Yoichi 東北大学, 医工学研究科, 教授 (00282096)
|
Co-Investigator(Kenkyū-buntansha) |
MATSUNAGA Tadao 東北大学, マイクロシステム融合研究開発センター, 助教 (00396540)
石井 賢治 東北大学, その他の研究科, その他 (70422079)
|
Project Period (FY) |
2013-04-01 – 2015-03-31
|
Project Status |
Completed (Fiscal Year 2014)
|
Budget Amount *help |
¥4,030,000 (Direct Cost: ¥3,100,000、Indirect Cost: ¥930,000)
Fiscal Year 2014: ¥2,210,000 (Direct Cost: ¥1,700,000、Indirect Cost: ¥510,000)
Fiscal Year 2013: ¥1,820,000 (Direct Cost: ¥1,400,000、Indirect Cost: ¥420,000)
|
Keywords | チューブ形状 / 非平面プロセス / フレキシブル基板 / MEMS(微小電気機械システム)技術 / フレキシブル基盤 |
Outline of Final Research Achievements |
Non-planar micromachining utilizing photofabrication techniques was developed for realizing electrical and fluidic functionalization of tube for use in the human body. Protrusion metal structures were fabricated on concave surfaces of a ceramic substrate by making protrusion on the concave surfaces and subsequent electroplating of metal layers. Fluidic channels have been also fabricated on the concave surfaces. Electrodes and non-conductive layers were fabricated on a polymer tube with a diameter of 0.4 mm and perforated windows were made using laser ablation for connecting inside of the tube and outside of the tube. Polymer multilayer tubes with pleural electrodes located inside the wall were fabricated using vapor deposited polymer as wall material for realizing thin-walled soft structure.
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